Deviation correction sensor control system and control method

Abstract

The invention provides a correction sensor control system and a correction sensor control method. The correction sensor control system comprises a transmitting module, a receiving module and a transfer module, the transmitting module is used for transmitting an optical pulse signal; the receiving module is provided with a receiving unit for receiving an optical pulse signal, a first main control unit for converting the optical pulse signal into data information, and a first communication unit for transmitting the data information to the transfer module; the transfer module is provided with a laser driving unit used for driving the transmitting module to transmit optical pulse signals, a second communication unit connected with the first communication unit and used for receiving data information, and a third communication unit connected with an external controller and used for transmitting the data information received by the second communication unit to the external controller. The deviation correction sensor provided by the invention is small in size and suitable for a narrow test environment, the receiving unit and the first main control unit are not interrupted by an external controller, and high-speed operation and quick response can be realized.

Description

Technical Field

[0001] The present application belongs to the field of sensor detection technology, and specifically relates to a deviation correction sensor control system and control method. Background Art

[0002] At present, sensors with different technical directions such as mechanics, vision, and laser have been formed. As a subset of laser sensors, the correction sensor plays an important role in many fields such as industrial automation, robotics, automobile manufacturing and navigation, aerospace, rail transportation, building monitoring, and new energy manufacturing. In particular, it plays a key role in the measurement and control of the edge position of the electrode in the lithium battery and photovoltaic manufacturing industries. The correction sensor can use laser detection and control the uniformity of the electrode edge in lithium battery manufacturing, detect whether the electrode and diaphragm are damaged, and thus ensure the yield and performance of battery production.

[0003] The correction sensor in the prior art generally sets the transmitting part and the receiving part in the corresponding transmitting shell and the receiving shell, which makes the overall size of the correction sensor large and cannot be used in application environments with narrow space. In addition, the receiving part needs to communicate directly with the external controller while processing and analyzing the optical pulse signal, which makes the information processing action of the receiving part easily interrupted by the external communication information, and the high-speed operation and rapid response of the correction sensor cannot be guaranteed. Summary of the invention

[0004] The present application provides a correction sensor control system and control method to solve the problems in the prior art that the correction sensor has a large overall size and the receiving part cannot run at high speed and respond quickly.

[0005] In order to solve the above technical problems, the present application provides a correction sensor control system, including a transmitting module, a receiving module and a transfer module;

[0006] The transmitting module is used to transmit an optical pulse signal;

[0007] The receiving module is provided with a receiving unit for receiving the optical pulse signal, a first main control unit for converting the optical pulse signal into data information, and a first communication unit for transmitting the data information to the transfer module;

[0008] The transfer module is provided with a laser driving unit for driving the transmitting module to emit an optical pulse signal, a second communication unit connected to the first communication unit for receiving the data information, and a third communication unit connected to the external controller for transmitting the data information received by the second communication unit to the external controller.

[0009] As a further improvement of the present application, the third communication unit is also used to receive a control signal sent by the external controller, and transmit the control signal to the first communication unit through the second communication unit, so as to enable a two-way communication connection between the receiving module and the external controller.

[0010] As a further improvement of the present application, the transmitting module includes a transmitting unit for transmitting the optical pulse signal, and the transmitting unit is provided with a first laser diode, and the optical pulse signal emitted by the first laser diode is collimated into a rectangular light spot or a long strip light spot.

[0011] As a further improvement of the present application, the receiving unit includes a CMOS linear image sensor for receiving the optical pulse signal;

[0012] The area of ​​the CMOS linear image sensor that has not received the light pulse signal outputs a first level, and the area that has received the light pulse signal outputs a second level, so that the first main control unit determines the data information of the target detection object through the area that outputs the first level.

[0013] As a further improvement of the present application, the receiving module further includes a first power supply unit, a first indicator light unit, and a first burning unit;

[0014] The first power supply unit is used to supply power to the receiving module;

[0015] The first indicator light unit is used to indicate whether the receiving unit is installed aligned with the transmitting module;

[0016] The first burning unit is used for burning an external program for use by the receiving module.

[0017] As a further improvement of the present application, the laser driving unit includes an operational amplifier connected to a power supply voltage, a first transistor arranged at an output end of the operational amplifier, and a second laser diode arranged at a collector of the first transistor;

[0018] An adjustable load resistor is arranged between the emitter of the first transistor and the PD receiving end of the second laser diode, a first drive signal is output between the in-phase input end of the operational amplifier and the adjustable load resistor, a second drive signal is output between the base of the first transistor and the power supply voltage, the PD receiving end of the first laser diode is used to receive the first drive signal, and the LD transmitting end of the first laser diode is used to receive the second drive signal, so as to drive the transmitting unit to transmit the required optical pulse signal through the first drive signal and the second drive signal, and the emission intensity of the optical pulse signal is adjusted by adjusting the resistance value of the adjustable load resistor.

[0019] As a further improvement of the present application, the transfer module also includes a second main control unit, which is used to control the transfer module to communicate with the receiving module through the second communication unit, and to control the transfer module to communicate with the external controller through the third communication unit.

[0020] As a further improvement of the present application, the transfer module further includes a second power supply unit and a second burning unit;

[0021] The second power supply unit is used to supply power to the transfer module;

[0022] The second burning unit is used for burning external programs for use by the transfer module.

[0023] As a further improvement of the present application, the communication method between the first communication unit and the second communication unit, the second communication unit and the third communication unit, and the third communication unit and the external controller is RS485 communication or RS232 communication.

[0024] As a further improvement of the present application, the present application also provides a correction sensor control method, which is applied to any of the correction sensor control systems described above, and the control method comprises the following steps:

[0025] driving the transmitting unit to transmit an optical pulse signal and collimating the optical pulse signal;

[0026] receiving the optical pulse signal, and determining data information of the target detection object according to the size of the area where the output is the first level;

[0027] The data information of the target detection object is transmitted to the second communication unit in the transfer module through the first communication unit, and then the data information received by the second communication unit is transmitted to the external controller through the third communication unit provided in the transfer module.

[0028] Compared with the prior art, the correction sensor control system and control method provided by the present application convert the received optical pulse signal into data information through the first main control unit, and transmit the data information to the second communication unit by the first communication unit, and then transmit the data information to the third communication unit and the external controller through the second communication unit. The control signal emitted by the external controller can also be received by the third communication unit, and the control signal is transmitted to the first communication unit through the second communication unit to realize a two-way communication connection between the receiving module and the external controller. The data processing pressure of the first main control unit is reduced by the setting of the transfer module, ensuring that the receiving module can run at high speed and achieve more accurate and faster response. The present application sets the transmitting module in the transmitting box, sets the receiving module in the receiving box, and also sets the transfer module and the laser driving unit that drives the transmitting unit to emit the optical pulse signal in the outlet box. The transmitting box, the receiving box and the outlet box are connected by wiring terminals, which can significantly reduce the volume of the correction sensor, so that the correction sensor is suitable for a narrower installation environment and meets more accurate detection requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0030] Figure 1 A schematic diagram of the structure of a correction sensor control system provided in an embodiment of the present application;

[0031] Figure 2 A schematic diagram of the data information transmission process in the correction sensor control system provided in the embodiment of the present application;

[0032] Figure 3 A schematic diagram of the structure of a receiving module in a correction sensor control system provided in an embodiment of the present application;

[0033] Figure 4 A schematic diagram of the structure of a transfer module in a deviation correction sensor control system provided in an embodiment of the present application;

[0034] Figure 5 A schematic diagram of the structure of a collimated light spot in a deflection correction sensor control system provided in an embodiment of the present application;

[0035] Figure 6 A circuit schematic diagram of a transmitting unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0036] Figure 7A circuit schematic diagram of a first power supply unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0037] Figure 8 A circuit schematic diagram of a first indicator light unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0038] Fig. 9 A circuit schematic diagram of a first communication unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0039] Fig.10 A circuit schematic diagram of a receiving unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0040] Fig.11 A circuit schematic diagram of the first main control unit in the correction sensor control system provided in an embodiment of the present application;

[0041] Fig.12 A circuit schematic diagram of the first burning unit in the correction sensor control system provided in an embodiment of the present application;

[0042] Fig.13 A circuit schematic diagram of a first shielding unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0043] Fig.14 A circuit schematic diagram of a second power supply unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0044] Fig.15 A circuit schematic diagram of a laser driving unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0045] Fig.16 A circuit schematic diagram of a second shielding unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0046] Fig.17 A circuit schematic diagram of a second main control unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0047] Fig.18 A circuit schematic diagram of a second burning unit in a correction sensor control system provided in an embodiment of the present application;

[0048] Fig.19 A circuit schematic diagram of a second indicator light unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0049] Fig. 20 A circuit schematic diagram of a second communication unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0050] Fig.21 A circuit schematic diagram of a third communication unit in a deviation correction sensor control system provided in an embodiment of the present application;

[0051] Fig. 22 Experimental test of the correction sensor control system provided in the embodiment of the present application Figure 1 ;

[0052] Fig.23 Experimental test of the correction sensor control system provided in the embodiment of the present application Figure 2 ;

[0053] Fig.24 A schematic diagram of the structure of the correction sensor provided in the embodiment of the present application;

[0054] Fig.25 A schematic diagram of the structure of a transmitting box and a receiving box in a deviation correction sensor provided in an embodiment of the present application;

[0055] Fig.26 A schematic diagram of the structure of the outlet box in the deviation correction sensor provided in the embodiment of the present application;

[0056] Fig. 27 A flowchart of a correction sensor control method provided in an embodiment of the present application;

[0057] Description of reference numerals:

[0058] 10-transmitter box; 20-receiver box; 30-outlet box; 40-wiring terminal. DETAILED DESCRIPTION

[0059] In order to make the purpose, technical solution and advantages of the embodiment of the present application more clear, the embodiment of the present application is further described in detail below in conjunction with the drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the embodiment of the present application and are not used to limit the embodiment of the present application.

[0060] In the description of the embodiments of the present application, the meaning of "multiple" is at least two, for example, two, three, etc., unless otherwise clearly and specifically limited. In the embodiments of the present application, all directional indications (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication also changes accordingly. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0061] In order to make the description of the disclosed content more detailed and complete, the following is an illustrative description of the implementation methods and specific embodiments of the embodiments of the present application; however, this is not the only form of implementing or using the specific embodiments of the embodiments of the present application. The implementation methods cover the features of multiple specific embodiments and the method steps and sequences used to construct and operate these specific embodiments. However, other specific embodiments can also be used to achieve the same or equal functions and step sequences.

[0062] Please refer to Figure 1-Figure 27 The embodiment of the present application provides a correction sensor control system and control method to solve the problems in the prior art that the correction sensor has a large overall size and the receiving part cannot run at high speed and respond quickly. Please refer to Figure 1 , is a structural diagram of the correction sensor control system provided in an embodiment of the present application. The correction sensor control system provided in an embodiment of the present application includes a transmitting module, a receiving module and a transfer module.

[0063] In an embodiment of the present application, the required optical pulse signal is transmitted by a transmitting module, and a receiving unit, a first main control unit and a first communication unit are provided in the receiving module. The optical pulse signal transmitted by the transmitting module is received by the receiving unit, and the first main control unit converts the received optical pulse signal into corresponding data information, and then the first communication unit transmits the data information to the relay module.

[0064] Furthermore, the present application provides a laser driving unit in the transfer module for driving the transmitting module to emit an optical pulse signal, a second communication unit connected to the first communication unit for receiving data information corresponding to the optical pulse signal, and a third communication unit bidirectionally connected to the external controller for transmitting the data information received by the second communication unit to the external controller.

[0065] It can be understood that the present application provides a first communication unit in the receiving module, and provides a second communication unit and a third communication unit in the transfer module, and realizes a two-way communication connection between the receiving module and the transfer module through the first communication unit and the second communication unit; similarly, a two-way communication connection is provided between the third communication unit and the second communication unit, and a two-way communication connection with the external controller is realized through the third communication unit.

[0066] If so, please refer to Figure 2, which is a schematic diagram of the transmission process of data information in the correction sensor control system provided in the embodiment of the present application, can not only convert the received optical pulse signal into data information through the first main control unit, and transmit the data information to the second communication unit by the first communication unit, and then transmit the data information to the third communication unit and the external controller through the second communication unit, but also can receive the control signal emitted by the external controller through the third communication unit, and transmit the control signal to the first communication unit through the second communication unit, so as to realize a two-way communication connection between the receiving module and the external controller, and reduce the data processing pressure of the first main control unit through the setting of the transfer module, so as to ensure that the receiving module can run at a high speed and realize a more accurate and rapid response.

[0067] Exemplarily, the control signal can be a receiving instruction issued by an external controller to the receiving module to control the receiving module to start receiving optical pulse signals, or it can be a communication request issued by the external controller to the receiving module before formal detection. The communication request passes through the third communication unit and the second communication unit of the transfer module in sequence and then enters the first communication unit, and then enters the first main control unit through the first communication unit, so that the receiving module responds to the communication request, thereby realizing a two-way communication connection between the receiving module and the external controller.

[0068] As an optional embodiment, the transmitting module provided in the present application includes a transmitting unit for transmitting an optical pulse signal. The transmitting unit is provided with a first laser diode for transmitting the required optical pulse signal. Figure 5 , which is a structural schematic diagram of the collimated light spot in the correction sensor control system provided in an embodiment of the present application. It is preferred to collimate the light pulse signal emitted by the first laser diode into a rectangular light spot or a long strip light spot. In principle, it is sufficient to ensure that the brightness of the rectangular light spot or the long strip light spot is uniform, so as to avoid affecting the product performance of the correction sensor due to the uniformity of the light spot.

[0069] In an alternative embodiment, please refer to Figure 6 , which is a circuit schematic diagram of the transmitting unit in the correction sensor control system provided in an embodiment of the present application. It can be observed that a first laser diode LD1 is provided in the transmitting unit, and a corresponding LD transmitting end and PD receiving end are provided in the first laser diode LD1. The present application also provides a TVS tube D1 and a TVS tube D2 in the transmitting unit for protecting the first laser diode LD1. The TVS tube D1 is provided on both sides of the LD transmitting end, and the TVS tube D2 is provided between the LD transmitting end and the PD receiving end.

[0070] Specifically, the present application connects the cathode of the first laser diode LD1 and the cathode of the TVS tube D1 to the interface J1, connects the cathode of the TVS tube D2 to the PD receiving end to the interface J2, and connects the anode of the TVS tube D2 to the LD transmitting end to the interface J3. The TVS tube D1 and the TVS tube D2 play the role of electrostatic protection, thereby protecting the first laser diode LD1.

[0071] As an optional implementation, the receiving unit provided in the present application includes a CMOS linear image sensor for receiving the optical pulse signal. The CMOS linear image sensor is formed by an array of small PD receiving ends. When there is no target detection object between the transmitting unit and the receiving unit, the light spot of uniform brightness emitted by the transmitting unit will hit the CMOS linear image sensor directly, and the PD receiving end set in the CMOS linear image sensor will continue to receive the optical pulse signal.

[0072] When a target detection object is set between the transmitting unit and the receiving unit, the target detection object will block a part of the light pulse signal, so that some PD receiving ends in the CMOS linear image sensor cannot receive the light pulse signal. At this time, the PD receiving end area that does not receive the light pulse signal in the CMOS linear image sensor will output a first level, and the area that receives the light pulse signal will output a second level. The first main control unit can determine the size of the target detection object by the area corresponding to the PD receiving end that outputs the first level. That is to say, the size of the target detection object is the data information corresponding to the received light pulse signal.

[0073] Exemplarily, in the CMOS linear image sensor, the area that does not receive the light pulse signal can be set to output a low level, and the area that receives the light pulse signal can output a high level. At this time, the size information of the target detection object, that is, the required data information, can be determined through the area of ​​the PD receiving end corresponding to the low level. Of course, the area that does not receive the light pulse signal can also be set to output a high level, and the area that receives the light pulse signal can output a low level. At this time, the data information of the target detection object can be determined through the area of ​​the PD receiving end corresponding to the high level.

[0074] The above methods of setting the first level and the second level to a high level or a low level are both feasible, as long as it is ensured that the area receiving the optical pulse signal outputs the first level, and the area receiving the optical pulse signal outputs the second level different from the first level. In this way, the data information of the target detection object can be determined by the area of ​​the PD receiving end corresponding to the two different levels, and the present application does not impose further restrictions on this.

[0075] In an alternative embodiment, please refer to Fig.10 , which is a circuit schematic diagram of the receiving unit in the correction sensor control system provided in an embodiment of the present application. In the figure, U1 is a CMOS linear image sensor. The present application uses the CMOS linear image sensor U1 to receive the light pulse signal emitted by the first laser diode PD1 in the transmitting unit.

[0076] Furthermore, matching resistors R15, R16, R17 and R18, as well as magnetic beads FB3 are provided, and the power supply VDD is isolated by the magnetic beads FB3; at the same time, the present application also provides capacitors C43 and C44 between the magnetic beads FB3 and the power supply VDD, and the other ends of the capacitors C43 and C44 are grounded to achieve effective isolation of the power supply VDD.

[0077] In the embodiments of the present application, the communication method between the first communication unit and the second communication unit, the second communication unit and the third communication unit, and the third communication unit and the external controller is RS485 communication or RS232 communication. Since the RS485 communication method can demonstrate stronger anti-interference ability in an industrial environment, the present application is preferably set to the RS485 communication method, and the RS485 communication method will be used as an example for explanation in the following. For the specific implementation method of RS232 communication, please refer to the relevant description of RS485 communication, and the present application will not elaborate on this separately.

[0078] In an alternative embodiment, please refer to Fig. 9 , which is a circuit schematic diagram of the first communication unit in the correction sensor control system provided in an embodiment of the present application. It can be observed that the first communication unit includes a serial port to RS485 communication chip U3. The serial port to RS485 communication chip U3 outputs two signals, namely RS485_B_I and RS485_A_I. The present application arranges a bidirectional breakdown diode D5 between the two signals to enhance the surge resistance of the serial port to RS485 communication chip U3, and also arranges self-recovery fuses F1 and F2 to prevent the communication interface of the serial port to RS485 communication chip U3 from short-circuiting, thereby burning the equipment, thereby improving the reliability of the equipment.

[0079] As an optional implementation, please refer to Figure 3 , is a structural schematic diagram of a receiving module in a correction sensor control system provided in an embodiment of the present application. The receiving module provided in the present application also includes a first power supply unit, a first indicator light unit, a first burning unit and a first shielding unit.

[0080] In an embodiment of the present application, the above-mentioned first power supply unit is used to supply power to the receiving module, the first indicator light unit is used to indicate whether the receiving unit is installed in alignment with the transmitting module, the first burning unit is used to burn an external program for use by the receiving module, and the first shielding unit is used to connect the receiving module to the metal casing and shield the electromagnetic interference caused by the outside.

[0081] In an alternative embodiment, please refer to Fig.11 , which is a circuit schematic diagram of the first main control unit in the correction sensor control system provided in an embodiment of the present application. It can be observed that the first main control unit includes an MCU chip U9, which controls the CMOS linear image sensor U1 to communicate with the transfer module via RS485. In addition, a crystal oscillator XL1 is provided in the first main control unit of the present application. The crystal oscillator XL1, capacitor C20 and capacitor C21 together constitute a crystal oscillation circuit.

[0082] Furthermore, the present application also provides a reset circuit of the MCU chip U9 in the first main control unit, and the reset circuit includes a resistor R12 and a capacitor C23 connected in sequence, one end of the capacitor C23 is grounded, and the other end of the capacitor C23 is connected to the resistor R12 and then connected to the reset pin nRST of the MCU chip U9, and the present application provides corresponding filter capacitors on the power supply pins VDDA, VDD_2 and VDD_3 of the MCU chip U9.

[0083] Specifically, a filter capacitor C28 and a filter capacitor C62 are provided at the power supply pin VDDA of the MCU chip U9, and the other ends of the filter capacitor C28 and the filter capacitor C62 are connected together and then grounded. A filter capacitor C63 and a filter capacitor C36 are provided at the power supply pin VDD_2 of the MCU chip U9, and the other ends of the filter capacitor C63 and the filter capacitor C36 are connected together and then grounded. A filter capacitor C61 and a filter capacitor C32 are provided at the power supply pin VDD_3 of the MCU chip U9, and the other ends of the filter capacitor C61 and the filter capacitor C32 are also connected together and then grounded. For the specific connection method between other components in the first main control unit, please refer to the attached Fig. 9 The circuit schematic diagram shown is not described in detail in this application.

[0084] In the embodiments of this application, please refer to Figure 7 , which is a circuit schematic diagram of the first power supply unit in the correction sensor control system provided in an embodiment of the present application. It can be observed that the first power supply unit provided in the present application is used to convert the power supply voltage V5P2 into V3P3 required by the receiving module. For example, in a specific embodiment provided in the present application, the +5V power supply voltage needs to be converted into the 3.3V voltage required by the receiving module.

[0085] The above-mentioned first power supply unit specifically includes a power chip U2, the IN pin of the power chip U2 is connected to the J1 interface through the resistor R1, the EN pin of the power chip U2 is connected to the capacitor C5 and then connected to the J2 interface, and the present application also arranges a capacitor C4 between the IN pin and the resistor R1, and the capacitor C4 is connected to the capacitor C5 and then grounded, and the present application also arranges a bidirectional breakdown diode D9 between the J2 interface and the resistor R1.

[0086] Furthermore, the GND pin of the power chip U2 is grounded, and the BYP pin of the power chip U2 is connected to the capacitor C60 and then grounded. It can be observed that the OUT pin of the power chip U2 is respectively connected to the magnetic bead FB1 and the magnetic bead FB2. Here, the setting of the magnetic bead FB1 and the magnetic bead FB2 is used to ensure that the analog power supply V3P3A and the digital power supply V3P3D do not interfere with each other, and the present application also sets a capacitor C12 between the magnetic bead FB2 and the OUT pin, and the other end of the capacitor C12 is grounded.

[0087] It can be understood that the above-mentioned resistor R1 is a current limiting resistor, the bidirectional breakdown diode D9 is used to prevent the introduction of static electricity during the plugging and unplugging of interface J1 and interface J2 from causing damage to the power chip U2, and capacitors C4 and C5 are filter capacitors to prevent the external input power ripple from being too large and affecting the stability of the receiving module.

[0088] The power chip U2 is an LDO step-down chip, which can linearly step down the input voltage V5P2 to V3P3 required by the receiving module. Capacitor C12 is a filter capacitor, which is used to ensure the stability of the power supply after voltage reduction. Magnetic beads FB1 and FB2 are used to isolate the analog power supply V3P3A and the digital power supply V3P3D to ensure that the analog power supply V3P3A and the digital power supply V3P3D do not interfere with each other.

[0089] In an alternative embodiment, please refer to Figure 8 , which is a circuit schematic diagram of the first indicator light unit in the correction sensor control system provided in an embodiment of the present application. The above-mentioned first indicator light unit is used to indicate whether the transmitting unit and the receiving unit are installed in alignment. The first indicator light unit includes a first light-emitting diode LED1 and a second light-emitting diode LED2.

[0090] In the present application, the first light-emitting diode LED1 is connected to the resistor R14 and then connected to the MCU chip U9. Similarly, the second light-emitting diode LED2 is connected to the resistor R13 and then connected to the MCU chip U9. The first light-emitting diode LED1 and the second light-emitting diode LED2 can be set to output the same color, or the first light-emitting diode LED1 and the second light-emitting diode LED2 can be set to output different colors.

[0091] Exemplarily, when the first light-emitting diode LED1 and the second light-emitting diode LED2 are set to output the same color, if the transmitting unit and the receiving unit are installed in alignment, the first light-emitting diode LED1 and the second light-emitting diode LED2 will be lit at the same time; when there is a position deviation between the transmitting unit and the receiving unit, only the first light-emitting diode LED1 or only the second light-emitting diode LED2 will be lit; when the positions of the transmitting unit and the receiving unit do not match at all, neither the first light-emitting diode LED1 nor the second light-emitting diode LED2 will be lit; here, resistors R14 and R13 are set to act as current limiting resistors; and the brightness of the first light-emitting diode LED1 and the second light-emitting diode LED2 can be adjusted by adjusting the resistance values ​​of resistors R14 and R13.

[0092] As an optional implementation, please refer to Fig.12 , which is a circuit schematic diagram of the first burning unit in the correction sensor control system provided in an embodiment of the present application. The present application performs an external burning program through the first burning unit for use by the receiving module. Of course, other settings of the burning circuit that can realize the external burning program are also feasible, and the present application does not impose further restrictions on this.

[0093] For further information, please refer to Fig.13 , which is a circuit schematic diagram of the first shielding unit in the correction sensor control system provided in an embodiment of the present application. The present application is also provided with a first shielding unit, which includes a capacitor C33 and a resistor R64. The capacitor C33 and the resistor R64 form an RC filter, thereby playing a good role in releasing external electromagnetic interference such as static electricity. In the actual application of the correction sensor, the receiving module provided by the present application needs to be integrated on a circuit board and fixed in a metal shell, so as to shield the electromagnetic interference brought by the outside through the metal shell.

[0094] As a further improvement of the present application, the laser driving unit provided in the present application includes an operational amplifier connected to a power supply voltage, a first transistor arranged at an output end of the operational amplifier, and a second laser diode arranged at a collector of the first transistor.

[0095] An adjustable load resistor is arranged between the emitter of the first transistor and the PD receiving end of the second laser diode, a first drive signal is output between the in-phase input end of the operational amplifier and the adjustable load resistor, a second drive signal is output between the base of the first transistor and the power supply voltage, the PD receiving end of the first laser diode is used to receive the first drive signal, and the LD transmitting end of the first laser diode is used to receive the second drive signal, so as to drive the transmitting unit to transmit the required optical pulse signal through the first drive signal and the second drive signal, and the emission intensity of the optical pulse signal is adjusted by adjusting the resistance value of the adjustable load resistor.

[0096] For details, please refer to Fig.15 , which is a circuit schematic diagram of a laser driving unit in a correction sensor control system provided in an embodiment of the present application. The laser driving unit provided in the present application includes an operational amplifier U9B connected to a power supply voltage V3P30, a first transistor Q15 arranged at the output end of the operational amplifier U9B, and a second laser diode LD2 arranged at the collector of the first transistor Q15.

[0097] It can be observed that the non-inverting input terminal of the operational amplifier U9B is connected to the power supply voltage V3P30 through resistors R104 and R112, and a resistor R105 is also connected between the resistor R104 and the non-inverting input terminal of the operational amplifier U9B. A capacitor C77 is connected in parallel at both ends of the resistor R105, and the capacitor C77 and the resistor R105 are connected in common and then grounded.

[0098] Furthermore, a capacitor C77 is connected between the inverting input terminal of the operational amplifier U9B and the output terminal of the operational amplifier U9B, the output terminal of the operational amplifier U9B is also connected to the base of the first transistor Q15 through the resistor R106, the emitter of the first transistor Q15 is connected to the resistor R107, the collector of the first transistor Q15 is connected to the LD emission terminal of the second laser diode LD2, and a capacitor C79 is arranged in parallel on both sides of the LD emission terminal of the second laser diode LD2.

[0099] Furthermore, the present application provides an adjustable load resistor RT3 between the emitter of the first transistor Q15 and the PD receiving end of the second laser diode LD2 . The adjustable load resistor RT3 is connected to the resistor R108 and then connected to the resistor R107 and then grounded.

[0100] It can be observed that a first drive signal PD+ is output between the non-inverting input terminal of the operational amplifier U9B and the adjustable load resistor RT3, a second drive signal LD- is output between the base of the first transistor Q15 and the power supply voltage V3P30, and a third drive signal PD+LD- is output between the power supply voltage V3P30 and the second laser diode LD2. The first drive signal PD+ is connected to the J9 port, the second drive signal LD- is connected to the J10 port, and the third drive signal PD+LD- is connected to the J8 port. At this time, corresponding to the transmitting unit, the first drive signal PD+ is connected to the PD receiving end of the first laser diode LD1, and the second drive signal LD- is connected to the LD transmitting end of the first laser diode LD1. The first laser diode LD1 in the transmitting unit is driven by the first drive signal PD+ and the second drive signal LD- to transmit the required optical pulse signal. Of course, the emission intensity of the optical pulse signal emitted by the first laser diode LD1 can also be adjusted by adjusting the resistance value of the adjustable load resistor RT3.

[0101] In the embodiment of the present application, the voltage at the non-inverting input terminal of the operational amplifier U9B is

[0102] V3P3D*R105 / (R112+R104+R105)=1.65V, which is about half of the power supply voltage V3P30. Capacitor C78 is set to prevent the operational amplifier U9B from oscillating, and capacitor C79 is set to prevent the impact of surge current on the second laser diode LD2. If it is driven by high-speed pulses, capacitor C79 can be removed as needed.

[0103] In an alternative embodiment, please refer to Fig. 20 , is a circuit schematic diagram of the second communication unit in the correction sensor control system provided in the embodiment of the present application, the second communication unit includes a serial port to RS485 communication chip U11, the serial port to RS485 communication chip U11 receives two signals, namely

[0104] Receiver_RS485_B_I and Receiver_RS485_A_I, thereby receiving the data information sent by the first communication unit. The present application sets a bidirectional breakdown diode D16 between the two signals to enhance the surge resistance of the serial port to RS485 communication chip U11, and also sets self-recovery fuses F3 and F4 to prevent the communication interface of the serial port to RS485 communication chip U11 from short circuiting, thereby burning the device, thereby improving the reliability of the device.

[0105] For further information, please refer to Fig.21 , which is a circuit schematic diagram of the third communication unit in the correction sensor control system provided in an embodiment of the present application. The third communication unit includes a serial port to RS485 communication chip U13. The serial port to RS485 communication chip U11 outputs two signals, namely RS485_B_I and RS485_A_I, so as to transmit data information to an external controller. The present application sets a bidirectional breakdown diode D17 between the two signals to enhance the surge resistance of the serial port to RS485 communication chip U13, and also sets self-recovery fuses F5 and F6 to prevent the communication interface of the serial port to RS485 communication chip U13 from short-circuiting, thereby burning the equipment, thereby improving the reliability of the equipment.

[0106] The present application sets up a second communication unit and a third communication unit to send the data information transmitted by the receiving module to an external controller via RS485 communication, thereby reducing the amount of data processed by the first main control unit and improving the information processing speed of the entire control system.

[0107] As an optional implementation, please refer to Figure 4, is a structural diagram of the transfer module in the correction sensor control system provided in an embodiment of the present application. The transfer module provided in the present application also includes a second main control unit, which is used to control the transfer module to communicate with the receiving module through the second communication unit, and to control the transfer module to communicate with the external controller through the third communication unit.

[0108] For details, please refer to Fig.17 , which is a circuit schematic diagram of the second main control unit in the correction sensor control system provided in an embodiment of the present application. It can be observed that the second main control unit provided in the present application includes an MCU chip U4, which controls the transfer module to communicate with the receiving unit through the second communication unit through the MCU chip U4, and controls the transfer module to communicate with the external controller through the third communication unit.

[0109] In the present application, a crystal oscillator XL2 is arranged in the second communication unit, which together with capacitor C31 and capacitor C32 constitutes a crystal oscillation circuit. A reset circuit and a filter capacitor of the MCU chip U4 are also arranged in the first main control unit. For the specific connection relationship between the reset circuit and the filter capacitor and the MCU chip U4, please refer to the description in the above-mentioned first communication unit. The present application will not go into details here.

[0110] As an optional implementation, please continue to refer to Figure 4 The transfer module provided in the present application also includes a second power supply unit, a second burning unit, a second indicator light unit and a second burning unit.

[0111] Please refer to Fig.19 , which is a circuit schematic diagram of the second indicator light unit in the correction sensor control system provided in an embodiment of the present application. The above-mentioned second indicator light unit is also used to indicate whether the transmitting unit and the receiving unit are installed in alignment. The second indicator light unit specifically includes a third light-emitting diode LED3 and a fourth light-emitting diode LED4. In the present application, the third light-emitting diode LED3 is connected to the resistor R23 and then connected to the MCU chip U4. Similarly, the fourth light-emitting diode LED4 is connected to the resistor R24 ​​and then connected to the MCU chip U4. Here, the third light-emitting diode LED3 and the fourth light-emitting diode LED4 can be set to output the same color, or the third light-emitting diode LED3 and the fourth light-emitting diode LED4 can be set to output different colors.

[0112] Regarding the description of how the third light-emitting diode LED3 and the fourth light-emitting diode LED4 indicate whether the transmitting unit and the receiving unit are installed in alignment, please refer to the relevant description in the above-mentioned first transmitting unit, and the present application will not go into details here; of course, it is also possible to set only the first indicator light unit, only the second indicator light unit, and if the cost permits, the first indicator light unit and the second indicator light unit may also be set at the same time. The above settings are all feasible, and the present application does not impose any further restrictions on this.

[0113] Please refer to Fig.14 , which is a circuit schematic diagram of the second power supply unit in the correction sensor control system provided in an embodiment of the present application. The above-mentioned second power supply unit is used to supply power to the transfer module. It can be observed that the second power supply unit provided in the present application includes two parts, namely a DC-DC part and an LDO part, wherein the power supply VIN in the DC-DC comes from the power supply of the external controller, and the voltage range of the power supply VIN can be 12~24V. The varistor RV1 can prevent the surge voltage of the power supply VIN from being too large and damaging the power chip U6. The setting of the current limiting resistor R1 and the Schottky diode can prevent the power supply VIN from positive If the negative connection is damaged, the FB pin of the power chip U6 is the feedback pin. The output voltage of the DC-DC circuit part can be changed by adjusting the resistance values ​​of the resistors R3 and R4. For example, in a specific embodiment provided in the present application, the power supply VIN needs to be stepped down to 5.2V, and the LDO part is provided with an LDO step-down chip U5, which can linearly step down the power supply V5P2 provided by the DC-DC part to V3P3A and V3P3D. For the specific details of the LDO part in the second power supply unit, please refer to the relevant description in the first power supply unit, and this application will not go into details about this.

[0114] As an optional implementation, please refer to Fig.18 , which is a circuit schematic diagram of the second burning unit in the correction sensor control system provided in an embodiment of the present application. It can be observed that the transfer module is also provided with a second burning unit, through which an external burning program is performed for use by the transfer module. Of course, other settings of the burning circuit that can realize the external burning program are also feasible, and the present application does not impose further restrictions on this.

[0115] For further information, please refer to Fig.16 , which is a circuit schematic diagram of the second shielding unit in the correction sensor control system provided in an embodiment of the present application. For the specific implementation principle of the second shielding unit, please refer to the relevant description in the first shielding unit, and the present application will not go into details about this.

[0116] In the embodiments of this application, please refer to Fig. 22 , which is an experimental test of the correction sensor control system provided in the embodiment of the present application Figure 1In this test environment, the size of a single pixel of the CMOS linear image sensor in the receiving unit, that is, the size of a single PD receiving end, is 7×125um. When the transmitting unit and the receiving unit are aligned and the distance between them is 40cm, the following can be obtained: Fig.24 In the test result diagram, the threshold is selected by subtracting the dark light value / 2 from the saturation value, that is, 98+(3127-898) / 2=2012. Therefore, the first point on both sides that is greater than 2012 is taken as the threshold, that is, 2167 (corresponding Y is 2103)-190 (corresponding Y is 2018)=1,977 (pixels). The size corresponding to the pixel is 1977×7um=13.839mm, so the detection object size range of the correction sensor at this distance is 13.839mm.

[0117] In the above Fig. 22 Based on the test environment, please refer to Fig.23 , which is an experimental test of the correction sensor control system provided in the embodiment of the present application Figure 2 In this application, a target detection object of about 0.5mm is set between the transmitting unit and the receiving unit for further testing. It can be observed that the X-axis data of the pixel positions corresponding to the dark patterns are 1246, 1324, 1214, and 1358 respectively. At this time, the calculated pixel of the target detection object is 1324-1246=78 pixels, and the size corresponding to the pixel is 78X 7um=0.546mm, which is close to the preset 0.5mm, proving that the correction sensor provided by this application can achieve high-precision detection.

[0118] It can be understood that the dark lines indicate the positions where the light pulse signal is not irradiated, and the bright lines indicate the positions where the light pulse signal is irradiated. The bright and dark lines can indicate the strength of the light pulse signal received by the CMOS linear image sensor.

[0119] Based on the above-mentioned correction sensor control system, please refer to Fig.24 , is a structural schematic diagram of the correction sensor provided in an embodiment of the present application. The present application also provides a correction sensor, which includes a transmitting box 10 and a receiving box 20 arranged relatively to each other, and an outlet box 30 connected to the above-mentioned transmitting box 10 and the receiving box 20 through corresponding wiring terminals 40, and the end of the outlet box 30 away from the above-mentioned transmitting box 10 and the receiving box 20 is also connected to an external controller through the wiring terminal 40.

[0120] In the embodiments of this application, please refer to Fig.25, which is a structural diagram of the transmitting box and the receiving box in the correction sensor provided in an embodiment of the present application. In the present application, the transmitting module is arranged in the transmitting box 10, and the receiving module is arranged in the receiving box 20. The transmitting box 10 and the receiving box 20 are arranged opposite to each other, so as to ensure that the receiving unit can be arranged opposite to the transmitting unit, and the optical pulse signal emitted by the transmitting unit is received by the receiving unit.

[0121] Please refer to Fig.26 , which is a structural schematic diagram of the outlet box in the correction sensor provided in the embodiment of the present application. The present application sets the transfer module in the outlet box 30, which reduces the size of the transmitting box 10 and the receiving box 20, making the correction sensor as a whole more narrow and long, suitable for some edge positions, such as measuring the edge position of the pole piece, pole piece damage detection, wafer positioning and other scenarios, to meet the needs of narrow installation environments.

[0122] For other details about how each unit in the correction sensor implements the above technical solution, please refer to the description of the correction sensor control system provided in the above application embodiment, which will not be repeated here.

[0123] Based on the above-mentioned correction sensor control system, please refer to Fig. 27 , is a flow chart of a correction sensor control method provided in an embodiment of the present application. The present application also provides a correction sensor control method, which includes the following steps:

[0124] Step S1: driving the transmitting unit to transmit an optical pulse signal, and collimating the optical pulse signal;

[0125] In the embodiment of the present application, the laser driving unit provided in the outlet box 30 drives the transmitting unit to transmit the optical pulse signal, and before the formal test, the optical pulse signal needs to be collimated so that the light spot is evenly distributed.

[0126] Step S2: receiving the optical pulse signal, and determining data information of the target detection object according to the size of the area outputted at the first level;

[0127] In the embodiment of the present application, the receiving unit is arranged opposite to the transmitting unit, and the receiving unit receives the corresponding optical pulse signal. The first main control unit determines the data information of the target detection object according to the size of the area output as the first level in the receiving unit.

[0128] Step S3: Transmitting the data information of the target detection object to the second communication unit in the transfer module through the first communication unit, and then transmitting the data information received by the second communication unit to the external controller through the third communication unit provided in the transfer module.

[0129] As an optional implementation, after the first main control unit determines the data information of the target detection object, the data information is transmitted to the second communication unit in the transfer module through the first communication unit, and then the data information is transmitted to the four-three communication unit through the main control unit in the transfer module, and finally the data information is transmitted to the external controller by the third communication unit.

[0130] For other details about how to implement the above technical solution in each step of the correction sensor control method, please refer to the description of the correction sensor control system provided in the above application embodiment, which will not be repeated here.

[0131] It can be understood that the technical features of the above embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0132] The above embodiments are merely exemplary embodiments used to illustrate the principles of the embodiments of the present application, but the embodiments of the present application are not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the embodiments of the present application, and these modifications and improvements are also considered as the protection scope of the embodiments of the present application.

Claims

1. A correction sensor control system, characterized in that: Including transmitting module, receiving module and transfer module; The transmitting module is used to transmit an optical pulse signal; The receiving module is provided with a receiving unit for receiving the optical pulse signal, a first main control unit for converting the optical pulse signal into data information, and a first communication unit for transmitting the data information to the transfer module; The transfer module is provided with a laser driving unit for driving the transmitting module to emit an optical pulse signal, a second communication unit connected to the first communication unit for receiving the data information, and a third communication unit connected to the external controller for transmitting the data information received by the second communication unit to the external controller.

2. The correction sensor control system according to claim 1, characterized in that: The third communication unit is further used to receive a control signal sent by the external controller, and transmit the control signal to the first communication unit through the second communication unit, so as to establish a two-way communication connection between the receiving module and the external controller.

3. The correction sensor control system according to claim 1, characterized in that: The transmitting module comprises a transmitting unit for transmitting the optical pulse signal, wherein the transmitting unit is provided with a first laser diode, and the optical pulse signal emitted by the first laser diode is collimated into a rectangular light spot or a long strip light spot.

4. The correction sensor control system according to claim 1, characterized in that: The receiving unit includes a CMOS linear image sensor for receiving the optical pulse signal; The area of ​​the CMOS linear image sensor that has not received the light pulse signal outputs a first level, and the area that has received the light pulse signal outputs a second level, so that the first main control unit determines the data information of the target detection object through the area that outputs the first level.

5. The correction sensor control system according to claim 1, characterized in that: The receiving module also includes a first power supply unit, a first indicator light unit, and a first burning unit; The first power supply unit is used to supply power to the receiving module; The first indicator light unit is used to indicate whether the receiving unit is installed aligned with the transmitting module; The first burning unit is used for burning an external program for use by the receiving module.

6. The correction sensor control system according to claim 3, characterized in that: The laser driving unit comprises an operational amplifier connected to a power supply voltage, a first transistor arranged at an output end of the operational amplifier, and a second laser diode arranged at a collector of the first transistor; An adjustable load resistor is arranged between the emitter of the first transistor and the PD receiving end of the second laser diode, a first drive signal is output between the in-phase input end of the operational amplifier and the adjustable load resistor, a second drive signal is output between the base of the first transistor and the power supply voltage, the PD receiving end of the first laser diode is used to receive the first drive signal, and the LD transmitting end of the first laser diode is used to receive the second drive signal, so as to drive the transmitting unit to transmit the required optical pulse signal through the first drive signal and the second drive signal, and the emission intensity of the optical pulse signal is adjusted by adjusting the resistance value of the adjustable load resistor.

7. The correction sensor control system according to claim 1, characterized in that: The transfer module also includes a second main control unit, which is used to control the transfer module to communicate with the receiving module through the second communication unit, and to control the transfer module to communicate with the external controller through the third communication unit.

8. The correction sensor control system according to claim 7, characterized in that: The transfer module also includes a second power supply unit and a second burning unit; The second power supply unit is used to supply power to the transfer module; The second burning unit is used for burning external programs for use by the transfer module.

9. The correction sensor control system according to claim 1, characterized in that: The communication mode between the first communication unit and the second communication unit, the second communication unit and the third communication unit, and the third communication unit and the external controller is RS485 communication or RS232 communication.

10. A correction sensor control method, applied to the correction sensor control system according to any one of claims 1 to 9, characterized in that: The control method comprises the following steps: driving the transmitting unit to transmit an optical pulse signal and collimating the optical pulse signal; receiving the optical pulse signal, and determining data information of the target detection object according to the size of the area where the output is the first level; The data information of the target detection object is transmitted to the second communication unit in the transfer module through the first communication unit, and then the data information received by the second communication unit is transmitted to the external controller through the third communication unit provided in the transfer module.

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