Optical processing equipment and working method thereof

Abstract

The invention provides optical processing equipment and work thereof, and the optical processing equipment comprises a processing assembly which is used for projecting illumination light to a sample and processing the sample according to the illumination light, the illumination light forms an illumination light spot on the surface of the sample, and the sample is processed through the illumination light; the calibration sheet is subjected to thinning treatment and is used for calibrating the illumination light spot; and the calibration assembly is used for receiving scattered light formed by scattering illumination light through the calibration sheet and detecting the illumination light spots according to the scattered light. The optical processing apparatus can improve processing speed and processing precision.

Description

Technical Field

[0001] The present invention relates to a processing device and a processing method, and in particular to a device and a method for processing a semiconductor device. Background Art

[0002] In the field of semiconductor manufacturing technology, semiconductor equipment is needed to process wafers, such as using lithography equipment to perform photolithography on wafers, and using optical inspection equipment to inspect wafers. Especially in the field of semiconductor inspection, optical inspection is widely used in the field of semiconductor inspection due to its advantages such as non-contact and non-destructive.

[0003] The spot quality of the optical processing equipment determines the accuracy of the semiconductor processing equipment, thus affecting the quality and yield of semiconductor devices. Therefore, before the optical processing equipment is used to process the wafer, it is necessary to calibrate the spot quality of the optical processing equipment to improve the accuracy of the optical processing equipment.

[0004] How to quickly calibrate the light spot quality and improve the speed and accuracy of light spot calibration is an urgent problem to be solved. Summary of the invention

[0005] To solve the above problems, the present invention provides an optical processing device that can improve the processing speed.

[0006] The technical solution of the present invention provides an optical processing device, characterized in that it includes: a processing component, used to project illumination light to a sample and process the sample according to the illumination light, the illumination light forms an illumination spot on the surface of the sample, and the sample is processed by the illumination light; a calibration plate that has been thinned and used to calibrate the illumination spot; a calibration component, used to receive scattered light formed by the illumination light scattered by the calibration plate, and detect the illumination spot based on the scattered light.

[0007] Optionally, the material of the calibration plate is semiconductor; and the calibration plate includes at least a portion of a wafer.

[0008] Optionally, it further includes: a carrier, the carrier including a carrying area and a calibration area, the carrying area is used to carry the sample, and the calibration area is used to set the calibration sheet.

[0009] Optionally, a driving module is used to drive the stage to move so that the calibration component can detect the calibration piece.

[0010] Optionally, the calibration component is specifically used to obtain a spot image of the illumination spot, and determine first physical information of the illumination spot according to the spot image; the first physical information includes: one or more combinations of position, shape, size and uniformity.

[0011] Optionally, the illumination light is returned through the sample to form signal light, and the signal light includes: detection light and the scattered light; the processing component includes: a light source for projecting illumination light to the sample; and a detection detector for detecting the sample according to the detection light.

[0012] Optionally, the illumination light includes a first illumination light, and a signal light returned by the first illumination light through the sample is a first signal light; the detection light formed by the first illumination light is a first detection light, and the scattered light formed by the first illumination light is a first scattered light;

[0013] The detection device also includes: a first beam splitter, used to separate the first signal light to form the first detection light and the first scattered light; the detection detector includes a first detection detector, and the first detection detector is used to receive the first detection light and detect the sample according to the first detection light.

[0014] Optionally, the first detection light is formed by the first illumination light after being reflected by the sample; the first beam splitter includes: a light-transmitting area and a reflection area, the light-transmitting area is used to allow one of the first detection light and the first scattered light to pass through, and the reflection area is used to reflect the other of the first detection light and the first scattered light.

[0015] Optionally, the central axis of the first illumination light is perpendicular to the sample surface;

[0016] The processing component further includes a second beam splitter, configured to reflect the first illumination light to the sample surface and transmit the first signal light; or transmit the first illumination light to the sample surface and reflect the first signal light.

[0017] Optionally, the processing component further includes a detection tube lens, which is used to converge the first detection light to the first detection detector, and the first detection detector is used to detect the sample according to the first detection light.

[0018] Optionally, the device further comprises: a first objective lens, used to collect the signal light from the sample;

[0019] The calibration component also includes: a calibration tube lens and a calibration detector. The calibration tube lens and the first objective lens image the illumination spot onto the calibration detector. The calibration detector is used to obtain an image of the illumination spot based on the scattered light collected by the calibration tube lens.

[0020] Optionally, the first illumination light is a wide spectrum; the first detection detector is used to detect the light intensity of different wavelengths in the first detection light, and obtain second physical information of the sample according to the light intensity of each wavelength, and the second physical information includes: one or more combinations of material, refractive index, thickness, and width.

[0021] Optionally, the illumination light includes a second illumination light, and the scattered light formed by the second illumination light returning through the sample surface is the second scattered light, and the incident direction of the second illumination light is not parallel to the emission direction of the second scattered light; the detection light formed by the second illumination light returning through the sample surface is the second detection light, and the incident direction of the second illumination light is not parallel to the emission direction of the second detection light; and the emission directions of the second scattered light and the second detection light are not parallel.

[0022] Optionally, the incident angle of the second illumination light is an obtuse angle or an acute angle; the second detection light is formed by reflection of the second illumination light;

[0023] The calibration component is specifically used to obtain a spot image of an illumination spot of the second illumination light according to the second scattered light.

[0024] Optionally, the processing component includes: an incident light path, the incident light path includes: a second light source, used to generate an initial light beam; a polarizer, used to polarize the initial light beam to form polarized light; a second objective lens, used to converge the polarized light onto the sample surface to form the second illumination light;

[0025] an outgoing light path, the outgoing light path comprising: a collecting objective lens for collecting the second detection light; an analyzer for converting the second detection light into polarized light; the detection detector, the detection detector comprising a second detection detector for detecting the second detection light passing through the analyzer, and detecting second physical information of a target to be detected on the sample surface according to the second detection light, the physical information comprising: one or more combinations of material, refractive index, thickness, and width;

[0026] A rotatable compensator is located in one or both of the incident light path and the outgoing light path, and is used to adjust the polarization state of the light beam.

[0027] The technical solution of the present application also provides a working method based on the above-mentioned optical processing equipment, including: projecting illumination light to the calibration component through the processing component, and the illumination light is scattered by the calibration plate to form scattered light; detecting the illumination spot according to the scattered light by the calibration component to obtain a calibration result; adjusting the processing component according to the calibration result so that the illumination spot meets the preset requirements; after the adjustment, the processing component processes the sample through the calibrated illumination spot.

[0028] The optical processing device provided by the technical solution of the present invention can improve the calibration accuracy by making the surface of the calibration sheet rough after thinning, which has a strong light beam scattering effect. The scattered light has a high sensitivity to the target to be measured, which can improve the measurement accuracy of the illumination spot, so that the calibration progress can be improved by calibrating the illumination spot through scattered light.

[0029] Furthermore, by placing the calibration sheet in the calibration area of ​​the carrier, it is not necessary to reload the standard sheet each time, which can improve the calibration speed and the sample processing speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments, and the advantages and implementation methods of the present invention will become more obvious. The contents shown in the accompanying drawings are only used to explain the present invention and do not constitute any limitation to the present invention. The accompanying drawings are only schematic and not strictly drawn to scale. In the accompanying drawings:

[0031] Figure 1 to Figure 2 is a schematic structural diagram of a first embodiment of an optical processing device provided by the present invention;

[0032] Figure 3 is a structural schematic diagram of a second embodiment of an optical processing device provided by the present invention;

[0033] Figures 4 to 5 It is an image of the illumination spot acquired by the optical processing device provided by the present invention. DETAILED DESCRIPTION

[0034] In the semiconductor manufacturing process, existing optical processing equipment requires a specific calibration plate to calibrate the light spot. Before the optical processing equipment processes the wafer, the calibration plate must be loaded to calibrate the light spot, and then the wafer can be processed after loading, which makes the wafer processing process cumbersome. In addition, the signal of the existing optical processing equipment is weak, making it difficult to calibrate the light spot with high precision.

[0035] The technical solution of the present invention provides an optical processing device, comprising: a processing component, used to project illumination light to a sample and process the sample according to the illumination light, the illumination light forms an illumination spot on the sample surface, and the sample is processed by the illumination light; a calibration sheet that has been subjected to a thinning process, used to calibrate the illumination spot; a calibration component, used to receive scattered light formed by the illumination light scattered by the calibration sheet, and detect the illumination spot according to the scattered light. The illumination spot is calibrated by the scattered light generated by the thinning process calibration sheet, which can improve the calibration accuracy.

[0036] The detection method of the present invention is described in detail below.

[0037] Figure 1 to Figure 2 It is a schematic structural diagram of the first embodiment of the optical processing device of the present invention.

[0038] The following combination Figure 1 to Figure 2 The structure of the first embodiment of the overlay mark of the present application is described in detail.

[0039] Figure 1 is a light path diagram of a first embodiment of an optical processing device of the present invention; Figure 2 It is a schematic structural diagram of the stage 200 of the optical processing device of the present invention.

[0040] Please refer to Figure 1 The optical processing device includes: a processing component, which is used to project illumination light to the sample and process the sample according to the illumination light, wherein the illumination light forms an illumination spot on the surface of the sample, and the sample is processed by the illumination light; a calibration plate 201 that has been thinned and is used to calibrate the illumination spot; a calibration component, which is used to receive scattered light formed by the illumination light scattered by the calibration plate 201, and detect the illumination spot according to the scattered light.

[0041] In this embodiment, the sample is a wafer. This application does not limit the sample. In other embodiments, the sample can be an LED panel, a glass housing or a chip.

[0042] In this embodiment, the calibration sheet 201 is made of a semiconductor; the calibration sheet 201 includes a portion of a wafer. Specifically, the semiconductor is polycrystalline silicon, single crystal silicon, silicon carbide or silicon germanium. The calibration sheet 201 is a portion of material cut from a wafer that has been thinned.

[0043] The rough surface of the thinned calibration sheet 201 has a strong light beam scattering effect, which can improve the calibration accuracy. The scattered light has a high sensitivity to the target to be measured, which can improve the measurement accuracy of the illumination spot, so calibrating the illumination spot with scattered light can improve the calibration progress.

[0044] In this embodiment, the processing component is an optical detection component, which is used to detect the sample. The detection includes checking the defects of the sample or measuring the target to be detected on the surface of the sample. Specifically, the target to be detected includes one or more combinations of thin films and silicon through vias.

[0045] The illumination light is returned by the sample to form signal light, and the signal light includes: detection light and the scattered light; the processing component includes: a light source for projecting illumination light to the sample; and a detection detector for detecting the sample according to the detection light.

[0046] In other embodiments, the signal light may not include the detection light. For example, the processing component is a photolithography component.

[0047] In this embodiment, the illumination light includes first illumination light, and the signal light returned by the first illumination light through the sample is the first signal light; the detection light formed by the first illumination light is the first detection light, and the scattered light formed by the first illumination light is the first scattered light.

[0048] Specifically, the light source includes: a first light source 111, wherein the first light source 111 is used to generate the first illumination light, and the first illumination light forms an illumination spot on the surface of the sample.

[0049] The incident angle of the central axis of the first illumination light on the sample surface is zero. The central axis of the first illumination light is perpendicular to the sample surface and is incident on the sample.

[0050] The detection device further includes: a first objective lens 101, and the first objective lens 101 is used to collect the first signal light. Specifically, the central axis of the first signal light collected by the first objective lens 101 is perpendicular to the sample surface.

[0051] Specifically, the optical axis of the first objective lens 101 is perpendicular to the sample surface.

[0052] In this embodiment, the first objective lens 101 is further used to collect the first illumination light and converge the first illumination light onto the sample surface.

[0053] Specifically, the processing component further includes a second beam splitter 102, which is used to reflect the first illumination light to the sample surface and transmit the first signal light; or transmit the first illumination light to the sample surface and reflect the first signal light. In this embodiment, the second beam splitter 102 is used to reflect the first illumination light to the sample surface and transmit the first signal light.

[0054] In this embodiment, the detection device also includes: a first beam splitter 103, which is used to separate the first signal light to form the first detection light and the first scattered light; the detection detector includes a first detection detector 112, and the first detection detector 112 is used to receive the first detection light and detect the sample according to the first detection light.

[0055] In this embodiment, the first detection light is formed by the first illumination light after being reflected by the sample; specifically, the central axis of the illumination light is incident perpendicular to the sample surface, and the central axis of the first detection light is perpendicular to the sample surface. In other embodiments, the first detection light can be formed by scattering of the first illumination light; accordingly, the central axis of the illumination light is incident perpendicular to the sample surface, and the central axis of the first detection light has a non-zero angle with the normal line of the sample surface; or, the central axis of the illumination light has a non-zero angle with the normal line of the sample surface, and the central axis of the first detection light is perpendicular to the sample surface.

[0056] In this embodiment, the first beam splitter 103 includes: a light-transmitting area and a reflection area, the light-transmitting area is used to allow one of the first detection light and the first scattered light to pass through, and the reflection area is used to reflect the other of the first detection light and the first scattered light.

[0057] In this embodiment, the first signal light transmitted through the second beam splitter 102 reaches the first beam splitter 103 , and the first beam splitter splits the first signal light to form the first scattered light and the first detection light.

[0058] Specifically, the reflective area surrounds the light-transmitting area, and the center of the light-transmitting area is located on the normal line of the sample surface.

[0059] In this embodiment, the first light-transmitting area is a through hole; and the reflective area is a reflective surface.

[0060] The calibration component is specifically used to obtain a spot image of the illumination spot, and determine first physical information of the illumination spot according to the spot image; the physical information includes: one or more combinations of position, shape, size and uniformity.

[0061] In this embodiment, the calibration component includes a calibration detector 121 , and the calibration detector 121 is used to obtain an image of the illumination spot according to the first scattered light collected by the first objective lens 101 .

[0062] Specifically, in this embodiment, the first objective lens 101 is used to image the illumination spot of the first illumination light to the calibration detector 121 through the first scattered light. In other embodiments, the calibration component further includes a calibration tube lens, and the calibration tube lens and the first objective lens 101 image the illumination spot to the calibration detector 121; the calibration detector 121 is used to obtain a spot image of the illumination spot according to the first scattered light collected by the calibration tube lens.

[0063] In this embodiment, the calibration component further includes a reflector 104, and the reflector 104 is used to change the propagation direction of the first scattered light so that the first scattered light enters the calibration detector 121. The reflector 104 can change the propagation direction of the first scattered light, so that the calibration detector 121 can be installed according to the structure of the device to save space.

[0064] In this embodiment, the first objective lens 101 is used to converge the first detection light onto the first detection detector 112 .

[0065] The detection detector includes a first detection detector 112, and the first detection detector 112 is used to detect the first detection light and obtain second physical information of the sample according to the first detection light.

[0066] In other embodiments of the present application, the first objective lens 101 is used to collimate the first signal light, and the processing component also includes a detection tube lens, which is used to converge the first detection light to the first detection detector 112, and the first detection detector 112 is used to detect the sample according to the first detection light.

[0067] In this embodiment, the first illumination light is a wide spectrum, and the first detection detector 112 is used to detect the light intensity of different wavelengths in the first detection light, and obtain the second physical information of the sample according to the light intensity of each wavelength, and the second physical information includes: one or more combinations of material, refractive index, thickness, and width. Specifically, the first detection detector 112 is a spectrometer.

[0068] In this embodiment, the first illumination light is polarized light; the processing component further includes: a polarizer 105, and the polarizer 105 is used to convert the first illumination light into polarized light and allow the first signal light of a specific polarization state to pass.

[0069] Please refer to Figure 2 The detection device also includes: a carrier 200, including a carrying area A and a calibration area B, the carrying area A is used to carry samples, and the calibration area B is used to set the calibration sheet 201.

[0070] Specifically, in this embodiment, the carrying area A has a vacuum adsorption groove for adsorbing salt samples. The calibration sheet 201 is located outside the carrying area A. The number of the calibration sheets 201 is multiple, specifically 3. In other embodiments of the present application, the number of the calibration sheets 201 can be one. In other embodiments, the carrying area can also fix the sample by static electricity or a clamp.

[0071] The calibration area B includes a groove 202, and the groove 202 is used to accommodate the calibration sheet 201. The bottom of the groove 202 has a pinhole 202a, and the pinhole 202a passes through the carrier 200; the device also includes a pin, and the pin passes through the vibration hole to push against the calibration sheet 201, so that the calibration sheet 201 can be replaced. In other embodiments, the calibration sheet 201 can be fixed to the carrier 200 by gluing.

[0072] By placing the calibration sheet 201 in the calibration area B of the stage 200, it is not necessary to reload the standard sheet every time, which can improve the calibration speed and the sample processing speed.

[0073] The device further includes: a driving module, configured to drive the stage 200 to move so that the calibration component is aligned with the calibration sheet 201 .

[0074] Specifically, when the sample is processed by the optical processing equipment, the driving module drives the stage 200 to move so that the first objective lens 101 is aligned with the calibration plate 201, and the calibration component detects the illumination spot to calibrate the illumination spot; and the illumination spot is corrected by adjusting the processing component and / or the first objective lens 101 so that the illumination spot meets the preset requirements; after the illumination spot is corrected, the driving module drives the stage 200 to move so that the first objective lens 101 is aligned with the sample, so that the processing component processes the sample.

[0075] Figure 3 FIG. 1 is a schematic diagram of the structure of the second embodiment of the optical processing device of the present invention.

[0076] The difference between this embodiment and the previous embodiment is that, in addition to the structure of the first embodiment, the processing component in this embodiment further includes a tilting processing component. Figure 3 In the embodiment shown, the polarizer 105 and the reflector 104 are omitted.

[0077] The tilt processing component is specifically as follows:

[0078] In this embodiment, the illumination light also includes a second illumination light, and the scattered light formed by the second illumination light returning through the sample surface is the second scattered light, and the incident direction of the second illumination light is not parallel to the emission direction of the first scattered light; the detection light formed by the second illumination light returning through the sample surface is the second detection light, and the incident direction of the second illumination light is not parallel to the emission direction of the second detection light; and the emission directions of the second scattered light and the second detection light are not parallel.

[0079] The incident angle of the second illumination light is an obtuse angle or an acute angle; the second detection light is formed by reflection of the second illumination light; and the calibration component is specifically used to obtain an image of the illumination spot according to the second scattered light.

[0080] The tilt processing component includes: an incident light path, which includes: a second light source 211, used to generate an initial light beam; a polarizer 212, used to polarize the initial light beam to form polarized light; a second objective lens (not shown in the figure), used to converge the polarized light to the sample surface to form the second illumination light.

[0081] An outgoing light path, the outgoing light path includes: a collecting objective lens (not shown in the figure), used to collect the second detection light; an analyzer 222, used to convert the second detection light into polarized light; the detection detector, the detection detector also includes a second detection detector 223, used to detect the second detection light passing through the analyzer 222, and detect the second physical information of the target to be measured on the sample surface according to the second detection light, the second physical information includes: one or more combinations of material, refractive index, thickness, and width.

[0082] A rotatable compensator is located in one or both of the incident light path and the outgoing light path, and is used to adjust the polarization state of the light beam. Specifically, in this embodiment, the tilt processing component includes a first rotation compensator 213 and a second rotation compensator 221 respectively located in the incident light path and the outgoing light path.

[0083] Figure 4 and Figure 5 The image of the illumination spot is obtained by detecting the illumination spot through the optical processing device of the present application. It can be seen that the optical processing device of the present application can clearly image the illumination spot to obtain the first physical information of the illumination spot according to the image of the illumination spot. Specifically, in this implementation, the position information of the illumination spot can be obtained through the image of the illumination spot to detect whether the illumination spot is offset.

[0084] In this embodiment, the light source includes a first light source 111 and a second light source 211, and the illumination light includes a first illumination light and a second illumination light. In this embodiment, the calibration component and the calibration sheet 201 can be used to detect the first illumination light spot and the second illumination light spot respectively to ensure the quality of the illumination light spot.

[0085] It should be noted that, in other embodiments of the present application, the optical processing device may not include the processing components and the second beam splitter 102 described in the first embodiment; the processing components of the optical processing device may only include the tilt processing components in this embodiment.

[0086] The present invention also provides a working method of an optical processing device, characterized by comprising:

[0087] The processing component projects illumination light onto the calibration component, and the illumination light is scattered by the calibration piece 201 to form scattered light; the calibration component detects the illumination spot according to the scattered light to obtain a calibration result; the processing component is adjusted according to the calibration result so that the illumination spot meets the preset requirements; after the adjustment, the processing component processes the sample through the calibrated illumination spot.

[0088] The optical processing device of this embodiment is the same as the optical processing device of the first embodiment and the second embodiment, and will not be described in detail here.

[0089] Specifically, when the sample is processed by the optical processing equipment, the driving module drives the stage 200 to move so that the first objective lens 101 is aligned with the calibration plate 201, and the calibration component detects the illumination spot to calibrate the illumination spot; and the illumination spot is corrected by adjusting the processing component so that the illumination spot meets the preset requirements; after the illumination spot is corrected, the driving module drives the stage 200 to move so that the first objective lens 101 is aligned with the sample, so that the processing component processes the sample.

[0090] Specifically, taking the first physical information as position as an example, the calibration result includes whether the first physical information of the illumination spot deviates from the preset position. If the position of the illumination spot deviates from the preset position, the illumination spot can be positioned at the preset position by adjusting the processing component.

[0091] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. An optical processing device, characterized in that: include: A processing component, used for projecting illumination light to the sample and processing the sample according to the illumination light, wherein the illumination light forms an illumination spot on the surface of the sample, and the sample is processed by the illumination light; A calibration sheet that has been thinned and is used to calibrate the illumination spot; The calibration component is used to receive scattered light formed by the illumination light being scattered by the calibration sheet, and detect the illumination light spot according to the scattered light.

2. The optical processing device according to claim 1, characterized in that The material of the calibration plate is semiconductor; the calibration plate includes at least a portion of a wafer.

3. The optical processing device according to claim 1, characterized in that Also includes: The carrier comprises a carrying area and a calibration area, the carrying area is used for carrying samples, and the calibration area is used for setting the calibration sheet.

4. The optical processing device according to claim 3, characterized in that A driving module is used to drive the stage to move so that the calibration component can detect the calibration sheet.

5. The optical processing device according to claim 1, characterized in that The calibration component is specifically used to obtain a spot image of the illumination spot, and determine first physical information of the illumination spot according to the spot image; The first physical information includes: one or more combinations of position, shape, size and uniformity.

6. The optical processing device according to claim 1, characterized in that The illumination light is returned by the sample to form signal light, and the signal light includes: detection light and the scattered light; the processing component includes: a light source for projecting illumination light to the sample; and a detection detector for detecting the sample according to the detection light.

7. The optical processing device according to claim 6, characterized in that The illumination light includes a first illumination light, and a signal light returned by the first illumination light through the sample is the first signal light; The detection light formed by the first illumination light is the first detection light, and the scattered light formed by the first illumination light is the first scattered light; The detection device further includes: a first beam splitter, configured to separate the first signal light into the first detection light and the first scattered light; The detection detector includes a first detection detector, and the first detection detector is used to receive the first detection light and detect the sample according to the first detection light.

8. The optical processing device according to claim 7, characterized in that The first detection light is formed by the first illumination light reflected by the sample; the first beam splitter includes: a light-transmitting area and a reflection area, the light-transmitting area is used to allow one of the first detection light and the first scattered light to pass through, and the reflection area is used to reflect the other of the first detection light and the first scattered light.

9. The optical processing device according to claim 7, characterized in that The central axis of the first illumination light is perpendicular to the sample surface; The processing assembly further includes a second beam splitter for reflecting the first illumination light to the sample surface and transmitting the first signal light; Alternatively, the first illumination light is transmitted to the sample surface and the first signal light is reflected.

10. The optical processing device according to claim 7, characterized in that The processing component also includes a detection tube lens, which is used to converge the first detection light to the first detection detector, and the first detection detector is used to detect the sample according to the first detection light.

11. The optical processing device according to claim 6, characterized in that The device further comprises: a first objective lens, for collecting the signal light from the sample; The calibration component also includes: a calibration tube lens and a calibration detector. The calibration tube lens and the first objective lens image the illumination spot onto the calibration detector. The calibration detector is used to obtain an image of the illumination spot based on the scattered light collected by the calibration tube lens.

12. The optical processing device according to claim 7, characterized in that The first illumination light is a wide spectrum; the first detection detector is used to detect the light intensity of different wavelengths in the first detection light, and obtain second physical information of the sample according to the light intensity of each wavelength, and the second physical information includes: one or more combinations of material, refractive index, thickness, and width.

13. The optical processing device according to any one of claims 1 to 12, characterized in that: The illumination light includes a second illumination light, and the scattered light formed by the second illumination light returning through the sample surface is the second scattered light, and the incident direction of the second illumination light is not parallel to the emission direction of the second scattered light; the detection light formed by the second illumination light returning through the sample surface is the second detection light, and the incident direction of the second illumination light is not parallel to the emission direction of the second detection light; and the emission directions of the second scattered light and the second detection light are not parallel.

14. The optical processing device according to claim 13, characterized in that The incident angle of the second illumination light is an obtuse angle or an acute angle; the second detection light is formed by reflection of the second illumination light; The calibration component is specifically used to obtain a spot image of an illumination spot of the second illumination light according to the second scattered light.

15. The optical processing device according to claim 14, characterized in that The processing component comprises: an incident light path, wherein the incident light path comprises: a second light source for generating an initial light beam; a polarizer for polarizing the initial light beam to form polarized light; a second objective lens for converging the polarized light onto the sample surface to form the second illumination light; an outgoing light path, the outgoing light path comprising: a collecting objective lens for collecting the second detection light; an analyzer for converting the second detection light into polarized light; the detection detector, the detection detector comprising a second detection detector for detecting the second detection light passing through the analyzer, and detecting second physical information of a target to be detected on the sample surface according to the second detection light, the physical information comprising: one or more combinations of material, refractive index, thickness, and width; A rotatable compensator is located in one or both of the incident light path and the outgoing light path, and is used to adjust the polarization state of the light beam.

16. A working method of an optical processing device according to any one of claims 1 to 15, characterized in that: include: Projecting illumination light to the calibration component through the processing component, the illumination light is scattered by the calibration sheet to form scattered light; Detecting the illumination spot according to the scattered light by the calibration component to obtain a calibration result; Adjusting the processing component according to the calibration result so that the illumination spot meets the preset requirements; After the adjustment process, the processing component is made to process the sample through the calibrated illumination spot.

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