PECVD cavity capable of adjusting special gas shunting

Abstract

The invention relates to the field of photovoltaic equipment, and discloses a PECVD (Plasma Enhanced Chemical Vapor Deposition) cavity capable of adjusting special gas shunting, which comprises an upper die cavity and a lower die cavity which are connected with each other. An electrode column, an integrated shunt, an adjusting assembly and a gas distribution plate are sequentially arranged in the upper die cavity from top to bottom. The electrode column is arranged at the upper end of the upper die cavity, a gas channel is formed in the electrode column, the gas distribution plate is located below the gas channel, and a gas uniformizing cavity is formed by the gas distribution plate and the inner wall of the upper die cavity. The integrated flow divider is arranged between the gas distribution plate and the gas channel in the mode that the height of the integrated flow divider can be adjusted up and down through the adjusting assembly, and the integrated flow divider is located under the gas channel. According to the invention, the height-adjustable integrated flow divider is arranged between the gas channel and the gas distribution plate, so that the gas flow in the working area of the cavity is more uniform, the flow dividing direction of the special gas can be adjusted by adjusting the height of the flow divider under the condition that the structure of the gas distribution plate is not disassembled, and the flow divider has the effects of convenience, adjustability and controllability.

Description

Technical Field

[0001] The invention relates to the field of photovoltaic equipment, in particular to a PECVD chamber capable of adjusting special gas diversion. Background Art

[0002] The existing plate-type PECVD equipment chambers mostly adopt the form of upper and lower mold cavities. The upper mold cavity is arranged with electrodes, air inlet pipes and air distribution plates. The special gas directly enters the closed space above the air distribution plate through the gas channel on the electrode column, and then enters the working area of ​​the upper and lower mold cavities through the air distribution plate for plasma chemical deposition coating process. When the special gas flows in through the gas channel, the gas solubility at the outlet of the gas channel is high and low around. In addition, there is a vacuum device in the lower cavity for real-time flow extraction during the coating process, which will cause uneven airflow in the working area of ​​the chamber, affecting the uniformity of the coating. At the same time, the special gas directly bombards the air distribution plate at a high frequency under strong pressure, and there is a risk of burning through the air distribution plate. The air distribution plate is expensive, which invisibly increases the production cost. Summary of the invention

[0003] The purpose of the present invention is to solve the shortcomings of the prior art and provide a PECVD chamber with adjustable special gas diversion. It adopts an integrated diverter with adjustable height. The special gas diversion above the gas distribution plate can be adjusted according to different coating processes and product surface coating uniformity without removing the gas distribution plate structure, which has the function of convenient adjustment and controllability.

[0004] To achieve the above object, the present invention adopts the following technical solutions:

[0005] The present invention discloses a PECVD cavity with adjustable special gas diversion, which includes an upper mold cavity and a lower mold cavity connected to each other; the upper mold cavity is provided with an electrode column, an integrated diverter, an adjustment component, and a gas distribution plate from top to bottom. The electrode column is arranged on the upper end of the upper mold cavity, and a gas channel is arranged on the electrode column. The gas distribution plate is located below the gas channel, and the gas distribution plate and the inner wall of the upper mold cavity form a uniform gas cavity. The integrated diverter can be adjusted up and down in height by the adjustment component and is arranged between the gas distribution plate and the gas channel, and the integrated diverter is located directly below the gas channel. The special gas enters the uniform gas cavity through the gas channel, is diverted by the integrated diverter, and then reaches the gas distribution plate, and the special gas is pumped into the lower mold cavity through the gas distribution plate.

[0006] Furthermore, the integrated diverter includes a diverter part, a connecting rib and a fixed part; the diverter part is located at the center of the diverter, and the diverter part is connected to the fixed part through the connecting ribs, and a plurality of through exhaust grooves are formed between the adjacent connecting ribs and the edges of the fixed part and the diverter part. The diverter part is in the shape of a pointed cone with the vertex pointing upward, and the vertex and the upper surface of the connecting part are located on the same plane. The special gas is blown toward the diverter part through the gas channel. Since the diverter part is in the shape of a pointed cone with the vertex pointing upward, the gas is dispersed along the cone surface and flows to the exhaust grooves around it, thereby increasing the coverage area of ​​the gas flow and preventing the special gas from concentratedly impacting the gas distribution plate.

[0007] Furthermore, the taper angle θ of the diversion portion is between 110 degrees and 150 degrees.

[0008] Furthermore, a bottom diameter D of the diverter portion is between 30 mm and 55 mm.

[0009] Furthermore, a distance L between the vertex of the diverter portion and the outlet of the gas channel is not less than 2 mm.

[0010] Furthermore, an anti-corrosion protective layer is provided on the surface of the diversion portion.

[0011] Furthermore, threaded holes are arranged around the fixing part of the flow divider; the adjusting assembly is a plurality of adjusting bolts; the threaded ends of the plurality of adjusting bolts are upward and threadedly connected with the threaded holes on the fixing part, and the other ends are freely rotatably arranged on the gas distribution plate. By rotating the adjusting bolts, the distance between the vertex of the flow divider and the gas channel can be adjusted.

[0012] Furthermore, the adjusting bolt is connected to the air distribution plate via a bearing, the inner ring of the bearing is fixedly connected to the adjusting bolt, and the outer ring is fixedly connected to the air distribution plate.

[0013] Furthermore, a countersunk hole is provided at the bottom of the air distribution plate connected to the adjusting bolt, so that the bottom surface of the air distribution plate is in a flat state.

[0014] Furthermore, an insulator is provided on the inner wall of the upper end of the upper mold cavity.

[0015] The benefits of the present invention are:

[0016] 1. The present invention sets an integrated flow divider below the gas channel. When the special gas is injected from the gas channel, it is first diverted by the integrated flow divider, and then dispersed into multiple airflows and enters the gas distribution plate, so that the airflow in the working area of ​​the chamber is more uniform. At the same time, the setting of the integrated flow divider can prevent the gas distribution plate from being directly bombarded by the high frequency and high pressure of the special gas, and can avoid the hidden danger of the gas distribution plate being burned through by the impact. It only needs to replace the integrated flow divider regularly, which greatly increases the service life of the gas distribution plate.

[0017] 2. The integrated diverter with adjustable height can be used to adjust the special gas diversion above the gas distribution plate according to different coating processes and the uniformity of product surface coating, without the need to dismantle the gas distribution plate structure, which is convenient, adjustable and controllable. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 Schematic diagram of the cavity structure of this embodiment.

[0020] Figure 2 It is a structural schematic diagram of an integrated diverter.

[0021] Figure 3 yes Figure 2 Schematic diagram of the cross-sectional structure at AA in the middle.

[0022] Main component symbols:

[0023] 100, upper mold cavity, 200, lower mold cavity;

[0024] 1. electrode column, 11. gas channel;

[0025] 2. Insulator;

[0026] 3. air distribution plate, 31. countersunk hole;

[0027] 4. Gas homogenizing cavity;

[0028] 5. integrated flow divider, 51. flow divider portion, 52. connecting ribs, 53. fixing portion, 54. exhaust groove;

[0029] 6. Adjust the components. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings of the specification. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] In the present invention, unless otherwise specified, directional words such as "upper, lower, left, right" are generally understood in conjunction with the directions shown in the drawings and actual applications.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0033] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0034] The endpoints and any values ​​of the ranges disclosed herein are not limited to the precise ranges or values, and these ranges or values ​​should be understood to include values ​​close to these ranges or values. For numerical ranges, the endpoint values ​​of each range, the endpoint values ​​of each range and the individual point values, and the individual point values ​​can be combined with each other to obtain one or more new numerical ranges, which should be considered as specifically disclosed in this article. Among them, the terms "optional" and "optional" all mean that they may be included or not included (or may be present or not).

[0035] like Figure 1 As shown, the present invention discloses a PECVD chamber with adjustable special gas diversion, which includes an upper mold cavity 100 and a lower mold cavity 200 connected to each other. The upper mold cavity 100 is provided with an electrode column 1, an insulator 2, an integrated diverter 5, an adjustment component 6, and a gas distribution plate 3 from top to bottom.

[0036] The electrode column 1 is arranged on the upper end of the upper mold cavity 100, and a gas channel 11 is arranged on the electrode column 1. The insulator 2 is arranged on the inner wall of the upper end of the upper mold cavity 100. The gas distribution plate 3 is located below the gas channel 11, and the gas distribution plate 3 and the inner wall of the upper mold cavity 100 form a uniform gas cavity 4. The integrated diverter 5 can be adjusted up and down by the adjustment component 6 and is arranged between the gas distribution plate 3 and the gas channel 11, and the integrated diverter 5 is located directly below the gas channel 11. The special gas enters the uniform gas cavity through the gas channel 11, first passes through the integrated diverter 5 for diversion, and then reaches the gas distribution plate 3, and the special gas is pumped into the lower mold cavity 200 through the gas distribution plate 3. When the special gas is injected from the gas channel 11, it first passes through the integrated diverter 5 for diversion, and then the special gas is dispersed into multiple airflows and enters the gas distribution plate 3, so that the airflow in the working area of ​​the chamber is more uniform. At the same time, the integrated flow divider 5 is provided to prevent the gas distribution plate 3 from being directly bombarded by the high frequency and high pressure of the special gas, resulting in the hidden danger of impact burning. It is only necessary to regularly replace the integrated flow divider 5, which greatly increases the service life of the gas distribution plate 3.

[0037] Specifically, Figure 2 , Figure 3 As shown, the integrated diverter 5 includes a diverter portion 51, a connecting rib 52 and a fixing portion 53. The diverter portion 51 is located at the center of the diverter 5, and the diverter portion 51 is connected to the fixing portion 53 through the connecting rib 52, and the upper surface of the connecting rib 52 is arranged in an arc shape. A plurality of through exhaust grooves 54 are formed between the adjacent connecting ribs 52 and the edges of the fixing portion 53 and the diverter portion 51. The diverter portion 51 is in the shape of a pointed cone with its vertex upward, and the vertex and the upper surface of the connecting portion are located on the same plane. The special gas is blown toward the diverter portion 51 through the gas channel 11. Since the diverter portion 51 is in the shape of a pointed cone with its vertex upward, the gas is dispersed along the cone surface and flows to the exhaust grooves 54 around it, thereby increasing the coverage area of ​​the gas flow and making the gas distribution more uniform, while also preventing the special gas from concentratedly impacting the gas distribution plate 3.

[0038] The taper angle θ of the diverter 51 will affect the speed of the gas flowing downward, and the bottom diameter D of the diverter 51 will affect the distance of gas diffusion. In order to achieve a better diversion effect, through the uniform gas distribution design and the derivation of the pipeline variable aperture formula, based on the theory of fluid mechanics, ANSYS CFX was used to perform numerical simulation analysis on the gas distribution structure, and the flow change law of the gas outlet holes of the variable diameter and equal diameter gas distribution pipelines and the velocity distribution law of the substrate surface under different inter-electrode spacing in the reaction chamber were obtained. Combined with the chamber structure, the preferred size of the diverter 51 is determined as follows: the taper angle of the diverter 51 is between 110 degrees and 150 degrees, the bottom diameter D of the diverter 51 is between 30 mm and 55 mm, and the distance L between the vertex of the diverter 51 and the outlet of the gas channel 11 is not less than 2 mm.

[0039] Since the special smell is corrosive chemical gas, in order to improve the service life of the integrated diverter 5, an anti-corrosion protective layer is provided on the surface of the diverter 51. At the same time, in order to better install and meet the standard strength, the integrated diverter 5 is made of light alloy.

[0040] Specifically, threaded holes are arranged around the fixing portion 53 of the flow divider 5. The adjustment assembly 6 is a plurality of adjustment bolts; the threaded ends of the plurality of adjustment bolts face upward and are threadedly connected to the threaded holes on the fixing portion 53, and the other ends are freely rotatably arranged on the gas distribution plate 3. The distance between the flow divider 5 and the gas channel 11 can directly affect the uniform gas effect of the flow divider 5. By using an integrated flow divider 5 with adjustable height, the special gas diversion above the gas distribution plate 3 can be adjusted according to different coating processes and the uniformity of the coating on the product surface, and the structure of the gas distribution plate 3 does not need to be removed, which has the function of being convenient, adjustable and controllable.

[0041] The adjusting bolt can be connected to the air distribution plate 3 through a bearing, the inner ring of the bearing is fixedly connected to the adjusting bolt, and the outer ring is fixedly connected to the air distribution plate 3. Thus, the adjusting bolt can be freely rotatably arranged on the air distribution plate 3.

[0042] In order to keep the bottom surface of the air distribution plate 3 in a flat state, a countersunk hole 31 is provided at the bottom where the air distribution plate 3 is connected to the adjusting bolt.

[0043] In summary, the present invention can not only make the airflow in the working area of ​​the chamber more uniform, but also adjust the diversion direction of the special gas by adjusting the height of the diverter without dismantling the air distribution plate structure, which has the function of being convenient, adjustable and controllable.

[0044] The preferred embodiments of the present invention are described in detail above, but the present invention is not limited thereto. Within the technical concept of the present invention, the technical solution of the present invention can be subjected to a variety of simple modifications, including the combination of various technical features in any other suitable manner, and these simple modifications and combinations should also be regarded as the contents disclosed by the present invention and belong to the protection scope of the present invention.

Claims

1. A PECVD chamber with adjustable special gas diversion, characterized in that: It comprises an upper mold cavity and a lower mold cavity which are connected to each other; an electrode column, an integrated flow diverter, an adjusting component and an air distribution plate are arranged in sequence from top to bottom in the upper mold cavity; the electrode column is arranged on the upper end of the upper mold cavity, a gas channel is arranged on the electrode column, the air distribution plate is located below the gas channel, and the air distribution plate and the inner wall of the upper mold cavity form a uniform air cavity; the integrated flow diverter can be adjusted up and down in height by the adjusting component and is arranged between the air distribution plate and the gas channel, and the integrated flow diverter is located directly below the gas channel.

2. The PECVD chamber with adjustable special gas flow diversion according to claim 1, characterized in that: The integrated diverter includes a diverter portion, connecting ribs and a fixed portion; the diverter portion is located at the center of the diverter, and is connected to the fixed portion through connecting ribs, and a plurality of through exhaust grooves are formed between adjacent connecting ribs and the edges of the fixed portion and the diverter portion; the diverter portion is in the shape of a pointed cone with the vertex facing upward, and the vertex and the upper surface of the connecting portion are located on the same plane.

3. The PECVD chamber with adjustable special gas flow diversion according to claim 1, characterized in that: The taper angle θ of the splitter portion is between 110 degrees and 150 degrees.

4. The PECVD chamber with adjustable special gas flow diversion according to claim 1, characterized in that: The bottom diameter D of the diversion portion is between 30 mm and 55 mm.

5. The PECVD chamber with adjustable special gas flow diversion according to claim 1, characterized in that: The distance L between the vertex of the diverter and the outlet of the gas channel is not less than 2 mm.

6. The PECVD chamber with adjustable special gas flow diversion according to claim 1, characterized in that: An anti-corrosion protective layer is arranged on the surface of the diverter.

7. The PECVD chamber with adjustable special gas flow diversion according to claim 1, characterized in that: The fixing part of the diverter is provided with threaded holes around it; the adjustment assembly is a plurality of adjusting bolts; the threaded ends of the plurality of adjusting bolts face upward and are threadedly connected with the threaded holes on the fixing part, and the other ends are freely rotatably arranged on the air distribution plate.

8. The PECVD chamber with adjustable special gas flow diversion according to claim 1, characterized in that: The adjusting bolt is connected to the air distribution plate through a bearing, the inner ring of the bearing is fixedly connected to the adjusting bolt, and the outer ring is fixedly connected to the air distribution plate.

9. The PECVD chamber with adjustable special gas flow diversion according to claim 1, characterized in that: The bottom of the air distribution plate connected to the adjusting bolt is provided with a countersunk hole.

10. The PECVD chamber with adjustable special gas flow diversion according to claim 1, characterized in that: An insulator is arranged on the inner wall of the upper end of the upper mold cavity.

Images