Surface repairing method for gas distribution disc

Abstract

The invention relates to a surface repairing method of a gas distribution plate, which comprises the following steps: sequentially carrying out ultrasonic degreasing, first mechanical polishing, second mechanical polishing, pickling treatment and ultrasonic cleaning on the used gas distribution plate to obtain the repaired gas distribution plate. By means of the two-step mechanical polishing step, the problems of an oxide layer, scratches, chromatic aberration and the like appearing on the surface of the gas distribution disc after use can be effectively solved, dirt on the surface of a product is remarkably removed through acid pickling and ultrasonic cleaning, the overall cleaning time is short, and the appearance and the aperture of the repaired gas distribution disc both meet the standard requirements.

Description

Technical Field

[0001] The invention relates to the technical field of chemical vapor deposition equipment, and in particular to a surface repair method for a gas distribution plate. Background Art

[0002] A gas distribution plate is a device used to distribute and manage gas flow, and is widely used in industries, laboratory equipment, and semiconductor manufacturing. In the chemical vapor deposition (CVD) process, the gas distribution plate is a key component of the chip manufacturing process. The CVD process is used to deposit thin films on the surface of the substrate, and solid films are generated through gas reactions. The gas distribution plate can evenly distribute gas, optimize gas flow, adjust gas ratios, and improve process control.

[0003] During the use of the gas distribution plate in the CVD process, problems such as oxide layer, scratches, color difference, etc. will appear on the surface, which will affect the subsequent CVD process. When the gas distribution plate can no longer be used, it needs to be frequently replaced with a new plate, which will cause unnecessary waste.

[0004] CN 115863130A discloses a titanium gas distribution plate and its processing technology. The process comprises the following steps: (1) heat treating titanium metal, and then mechanically processing to obtain a gas distribution plate blank; (2) electrolytically polishing and cleaning the gas distribution plate blank obtained in step (1) to obtain the gas distribution plate. The invention makes up for the problems of low life and difficulty in recycling of aluminum products by adjusting the main material of the product.

[0005] CN 116837307A discloses a 6061 aluminum alloy for a gas distribution plate and a preparation method thereof, the preparation method comprising the following steps: (1) subjecting the 6061 aluminum alloy blank to homogenization annealing, primary heat treatment and forging in sequence to obtain an aluminum alloy round ingot; (2) subjecting the aluminum alloy round ingot to secondary heat treatment, hot rolling, solution treatment, static pressure treatment and aging treatment in sequence to obtain a blank; (3) subjecting the blank to mechanical processing, physical polishing and chemical polishing in sequence to obtain the 6061 aluminum alloy for a gas distribution plate. The 6061 aluminum alloy for a gas distribution plate provided by the invention has no burrs or dirt on the surface, and its appearance, overall texture and color are uniform and consistent without color difference.

[0006] After use, the gas distribution plate material disclosed in the above invention will still have problems such as oxide layer, scratches, color difference, etc. on the surface and cannot be used continuously; a re-cleaning step is usually used to remove surface defects, but after re-cleaning, the product surface will still have slight scratches and the product size does not meet the requirements.

[0007] Therefore, in view of the shortcomings of the prior art, it is necessary to provide a method for repairing the surface of a gas distribution plate to have no appearance defects and to have dimensions within the qualified range. Summary of the invention

[0008] The purpose of the present invention is to provide a surface repair method for a gas distribution plate, which solves the problems of oxide layer, scratches, color difference and the like on the surface of the gas distribution plate after use, avoids waste of products, and at the same time the size meets the standard requirements.

[0009] To achieve the purpose of this invention, the technical solution adopted by the present invention is as follows:

[0010] The present invention provides a surface repair method for a gas distribution plate, the surface repair method comprising the following steps:

[0011] The used gas distribution plate is subjected to ultrasonic degreasing, first mechanical polishing, second mechanical polishing, pickling treatment and ultrasonic cleaning in sequence to obtain a repaired gas distribution plate.

[0012] The surface repair method of the gas distribution plate provided by the present invention can effectively remove the oxide layer, scratches, color difference and other problems that appear on the surface of the gas distribution plate after use through two steps of mechanical polishing, thereby avoiding waste of products and improving the service life and production efficiency of the products; through acid pickling and ultrasonic cleaning, the dirt on the surface of the product is significantly removed, so that the appearance and aperture of the repaired gas distribution plate meet the standard requirements.

[0013] Preferably, the ultrasonic degreasing time is 1-5 min, for example, 1 min, 2 min, 3 min, 4 min or 5 min, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0014] The "ultrasonic degreasing" means that the used gas distribution plate is placed in a degreasing tank and ultrasonically degreased with a degreasing agent to remove dirt and grease on the surface of the gas distribution plate. The present invention does not specifically limit the type of the degreasing agent.

[0015] Preferably, a first water washing step is further included after the ultrasonic degreasing and before the first mechanical polishing.

[0016] Preferably, the endpoint of the first water washing is to make the surface of the gas distribution disk free of bubbles.

[0017] Preferably, the first water washing is performed using pure water.

[0018] Preferably, the first mechanical polishing is performed using sandpaper on a pneumatic grinder.

[0019] Preferably, the mesh number of the sandpaper is 400-1000 mesh, for example, it can be 400 mesh, 800 mesh or 1000 mesh, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0020] Preferably, the end point of the first mechanical polishing is to make the surface of the gas distribution plate free of color difference.

[0021] Preferably, the second mechanical polishing is performed using a scouring pad on a pneumatic grinder.

[0022] Preferably, the endpoint of the second mechanical polishing is to make the surface roughness of the gas distribution plate reach 0.4-0.5μm, for example, it can be 0.4μm, 0.45μm, 0.45μm, 0.48μm or 0.5μm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0023] Preferably, the acid solution used in the pickling treatment includes a nitric acid solution.

[0024] Preferably, the concentration of nitric acid in the nitric acid solution is 28-35wt%, for example, it can be 28wt%, 30wt%, 32wt%, 33wt% or 35wt%, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0025] Preferably, the pickling treatment time is 4-6 minutes, for example, 4 minutes, 4.5 minutes, 5 minutes, 5.5 minutes or 6 minutes, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0026] Preferably, a second water washing step is further included after the acid washing treatment and before the ultrasonic cleaning.

[0027] Preferably, the second water washing is performed with pure water for 5-10 min, for example, 5 min, 6 min, 8 min, 9 min or 10 min, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0028] Preferably, the ultrasonic cleaning time is 10-15 min, for example, 10 min, 12 min, 13 min, 14 min or 15 min, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0029] Preferably, the ultrasonic cleaning is performed using pure water.

[0030] As a preferred technical solution of the surface repair method described in the present invention, the surface repair method comprises the following steps:

[0031] The used gas distribution plate is ultrasonically degreased for 1-5 minutes, washed with pure water for the first time until there is no foam on the surface of the gas distribution plate, and then polished with 400-1000 mesh sandpaper on a pneumatic grinder until there is no color difference on the surface of the gas distribution plate, and polished with a scouring pad on the pneumatic grinder until the surface roughness of the gas distribution plate reaches 0.4-0.5μm; then pickled with a nitric acid solution with a nitric acid concentration of 28-35wt% for 4-6 minutes, washed with pure water for a second time for 5-10 minutes, and ultrasonically cleaned with pure water for 10-15 minutes to obtain a repaired gas distribution plate.

[0032] Compared with the prior art, the present invention has the following beneficial effects:

[0033] The surface repair method of the gas distribution plate provided by the present invention can effectively remove the oxide layer, scratches, color difference and other problems that appear on the surface of the gas distribution plate after use through two steps of mechanical polishing, thereby avoiding waste of products and improving the service life and production efficiency of the products; through acid pickling and ultrasonic cleaning, the dirt on the surface of the product is significantly removed, and the overall cleaning time is short. The surface of the repaired gas distribution plate has no oxide layer, scratches, color difference and dirt, and the product appearance and aperture meet the standard requirements. DETAILED DESCRIPTION

[0034] The technical solution of the present invention is further described below by specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0035] Example 1

[0036] This embodiment provides a surface repair method for a gas distribution plate, the surface repair method comprising the following steps:

[0037] The used gas distribution plate is ultrasonically degreased for 3 minutes, washed with pure water for the first time until there is no foam on the surface of the gas distribution plate, and then polished with 1000-mesh sandpaper on a pneumatic grinder until there is no color difference on the surface of the gas distribution plate, and polished with a scouring pad on the pneumatic grinder until the surface roughness of the gas distribution plate reaches 0.4 μm; then pickled with a nitric acid solution with a nitric acid concentration of 30wt% for 5 minutes, washed with pure water for a second time for 8 minutes, and ultrasonically cleaned with pure water for 13 minutes to obtain a repaired gas distribution plate.

[0038] The surface of the repaired gas distribution disk obtained in this embodiment has no oxide layer, scratches, color difference and dirt, and the aperture range is required to be 0.4-0.5mm. The aperture of the used gas distribution disk is 0.42mm, and the aperture of the repaired gas distribution disk is 0.47mm, which meets the standard requirements.

[0039] Example 2

[0040] This embodiment provides a surface repair method for a gas distribution plate, the surface repair method comprising the following steps:

[0041] The used gas distribution plate is ultrasonically degreased for 1 minute, washed with pure water for the first time until there is no foam on the surface of the gas distribution plate, and then polished with 800-mesh sandpaper on a pneumatic grinder until there is no color difference on the surface of the gas distribution plate, and polished with a scouring pad on the pneumatic grinder until the surface roughness of the gas distribution plate reaches 0.45 μm; then pickled with a nitric acid solution with a nitric acid concentration of 28wt% for 4 minutes, washed with pure water for a second time for 5 minutes, and ultrasonically cleaned with pure water for 10 minutes to obtain a repaired gas distribution plate.

[0042] The surface of the repaired gas distribution disk obtained in this embodiment has no oxide layer, scratches, color difference and dirt, and the aperture range is required to be 0.4-0.5mm. The aperture of the used gas distribution disk is 0.43mm, and the aperture of the repaired gas distribution disk is 0.46mm, which meets the standard requirements.

[0043] Example 3

[0044] This embodiment provides a surface repair method for a gas distribution plate, the surface repair method comprising the following steps:

[0045] The used gas distribution plate is ultrasonically degreased for 5 minutes, washed with pure water for the first time until there is no foam on the surface of the gas distribution plate, and then polished with 400-mesh sandpaper on a pneumatic grinder until there is no color difference on the surface of the gas distribution plate, and polished with a scouring pad on the pneumatic grinder until the surface roughness of the gas distribution plate reaches 0.5 μm; then pickled with a nitric acid solution with a nitric acid concentration of 35wt% for 6 minutes, washed with pure water for a second time for 10 minutes, and ultrasonically cleaned with pure water for 15 minutes to obtain a repaired gas distribution plate.

[0046] The surface of the repaired gas distribution disk obtained in this embodiment has no oxide layer, scratches, color difference and dirt, and the aperture range is required to be 0.4-0.5mm. The aperture of the used gas distribution disk is 0.41mm, and the aperture of the repaired gas distribution disk is 0.45mm, which meets the standard requirements.

[0047] Example 4

[0048] This embodiment provides a surface repair method for a gas distribution plate, which differs from Embodiment 1 in that there is no first water washing step, and the rest is the same as Embodiment 1.

[0049] The surface of the repaired gas distribution disk obtained in this embodiment has no oxide layer and scratches, but since the first water washing is not performed, there will be residual degreased impurities; the aperture of the repaired gas distribution disk meets the standard requirements.

[0050] Example 5

[0051] This embodiment provides a surface repair method for a gas distribution plate. The difference from Embodiment 1 is that the end point of the second mechanical polishing is to make the surface roughness of the gas distribution plate reach 0.7 μm. The rest is the same as Embodiment 1.

[0052] The surface of the repaired gas distribution disk obtained in this embodiment has no oxide layer, color difference and dirt, but the surface roughness of the gas distribution disk is too large, which will affect the quality of the product appearance; the aperture of the repaired gas distribution disk meets the standard requirements.

[0053] Example 6

[0054] This embodiment provides a surface repair method for a gas distribution plate, which differs from Embodiment 1 in that there is no second water washing step, and the rest is the same as Embodiment 1.

[0055] The surface of the repaired gas distribution disk obtained in this embodiment has no oxide layer and scratches, but since the second water washing is not performed, there will be acid residue, which affects the appearance quality of the product; the aperture of the repaired gas distribution disk meets the standard requirements.

[0056] Comparative Example 1

[0057] This comparative example provides a surface repair method for a gas distribution plate, which differs from Example 1 in that there is no ultrasonic degreasing step, and the rest is the same as Example 1.

[0058] The surface of the repaired gas distribution disk obtained in this comparative example will have color difference and dirt, which will affect the appearance quality of the product; the aperture of the repaired gas distribution disk meets the standard requirements.

[0059] Comparative Example 2

[0060] This comparative example provides a surface repair method for a gas distribution plate, which is different from Example 1 in that there is no second mechanical polishing step, and the rest is the same as Example 1.

[0061] Since the second mechanical polishing is not performed in this comparative example, the surface of the repaired gas distribution disk will have color difference and scratches, which will affect the appearance quality of the product; the aperture of the repaired gas distribution disk is larger than the aperture range requirement and does not meet the standard requirements.

[0062] Comparative Example 3

[0063] This comparative example provides a surface repair method for a gas distribution plate, which differs from Example 1 in that the ultrasonic cleaning is adjusted to conventional pure water flushing, and the rest is the same as Example 1.

[0064] In this comparative example, since the ultrasonic cleaning is adjusted to conventional pure water washing, acid will remain on the surface of the repaired gas distribution disk, thereby affecting the appearance quality of the product; the aperture of the repaired gas distribution disk meets the standard requirements.

[0065] In summary, the surface repair method of the gas distribution plate provided by the present invention can effectively remove the oxide layer, scratches, color difference and other problems that appear on the surface of the gas distribution plate after use through two steps of mechanical polishing, thereby avoiding waste of products and improving the service life and production efficiency of the products; through acid pickling and ultrasonic cleaning, the dirt on the surface of the product is significantly removed, and the overall cleaning time is short. The surface of the repaired gas distribution plate is free of oxide layer, scratches, color difference and dirt, and the product appearance and aperture meet the standard requirements.

[0066] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention are within the protection scope and disclosure scope of the present invention.

Claims

1. A surface repair method for a gas distribution plate, characterized in that: The surface repair method comprises the following steps: The used gas distribution plate is subjected to ultrasonic degreasing, first mechanical polishing, second mechanical polishing, pickling treatment and ultrasonic cleaning in sequence to obtain a repaired gas distribution plate.

2. The surface repair method according to claim 1, characterized in that: The ultrasonic degreasing time is 1-5min.

3. The surface repair method according to claim 1 or 2, characterized in that: After the ultrasonic degreasing and before the first mechanical polishing, a first water washing step is also included; Preferably, the endpoint of the first water washing is to make the surface of the gas distribution plate free of foam; Preferably, the first water washing is performed using pure water.

4. The surface repair method according to any one of claims 1 to 3, characterized in that: The first mechanical polishing is performed by using sandpaper on a pneumatic grinder.

5. The surface repair method according to claim 4, characterized in that: The mesh number of the sandpaper is 400-1000 mesh; Preferably, the end point of the first mechanical polishing is to make the surface of the gas distribution plate free of color difference.

6. The surface repair method according to any one of claims 1 to 5, characterized in that: The second mechanical polishing is polishing with a scouring pad on a pneumatic grinder; Preferably, the end point of the second mechanical polishing is to make the surface roughness of the gas distribution plate reach 0.4-0.5 μm.

7. The surface repair method according to any one of claims 1 to 6, characterized in that: The acid solution used in the pickling treatment includes a nitric acid solution; Preferably, the concentration of nitric acid in the nitric acid solution is 28-35wt%; Preferably, the pickling treatment time is 4-6 minutes.

8. The surface repair method according to any one of claims 1 to 7, characterized in that: After the pickling treatment and before the ultrasonic cleaning, a second water washing step is also included; Preferably, the second water washing is washing with pure water for 5-10 min.

9. The surface repair method according to any one of claims 1 to 8, characterized in that: The ultrasonic cleaning time is 10-15min; Preferably, the ultrasonic cleaning is performed using pure water.

10. The surface repair method according to any one of claims 1 to 9, characterized in that: The surface repair method comprises the following steps: The used gas distribution plate is ultrasonically degreased for 1-5 minutes, washed with pure water for the first time until there is no foam on the surface of the gas distribution plate, and then polished with 400-1000 mesh sandpaper on a pneumatic grinder until there is no color difference on the surface of the gas distribution plate, and polished with a scouring pad on the pneumatic grinder until the surface roughness of the gas distribution plate reaches 0.4-0.5μm; then pickled with a nitric acid solution with a nitric acid concentration of 28-35wt% for 4-6 minutes, washed with pure water for a second time for 5-10 minutes, and ultrasonically cleaned with pure water for 10-15 minutes to obtain a repaired gas distribution plate.