Cutting wire cleaning device and multi-wire cutting equipment

Abstract

The invention relates to a cutting line cleaning device and multi-wire cutting equipment, and the cutting line cleaning device is used for cleaning a cutting line after cutting a crystal bar, and comprises a spraying structure which comprises at least one nozzle and is used for spraying ultrapure water towards the cutting line; and / or the air knife structure comprises at least one air outlet and is used for spraying clean gas towards the cutting line. According to the cutting line cleaning device provided by the embodiment of the invention, the cutting line subjected to cutting action is cleaned, the cutting line carrying mortar is prevented from entering the guide wheel cavity, the mortar is prevented from polluting the environment of the guide wheel cavity and equipment in the guide wheel cavity, and the service life of the equipment is prolonged.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor product manufacturing, and in particular to a cutting line cleaning device and a multi-wire cutting equipment. Background Art

[0002] When the wire cutting equipment cuts the crystal rod, the cutting wire needs to carry mortar (SiC + coolant) for cutting. During the cutting process, a large amount of mortar is needed to rub against the crystal rod so that the crystal rod can be cut into silicon wafers. After the cutting wire completes the cutting action of cutting the crystal rod, the wire reel will recycle the cutting wire. The recycled cutting wire carries the mortar used for cutting the crystal rod. This mortar is composed of cutting fluid and silicon carbide particles and has extremely strong cutting ability. Therefore, when the cutting wire passes through the pulley, it will cause greater damage to the pulley, resulting in a shorter pulley life.

[0003] At the same time, the mortar carried into the guide wheel chamber causes the working environment of the guide wheel chamber to deteriorate, causing the pulley and the pulley mechanism to get stuck. In severe cases, the cutting line may be disconnected, resulting in great product quality loss, production capacity loss and economic loss. Summary of the invention

[0004] In order to solve the above technical problems, the present invention provides a cutting wire cleaning device and a multi-wire cutting equipment to solve the problem that the cutting wire carrying mortar enters the guide wheel chamber and causes damage to the equipment in the guide wheel chamber.

[0005] In order to achieve the above-mentioned purpose, the technical solution adopted in the embodiment of the present invention is: a cutting wire cleaning device, which is used to clean the cutting wire after cutting the crystal rod, comprising:

[0006] a spray structure, comprising at least one nozzle, for spraying ultrapure water toward the cutting line; and / or,

[0007] The air knife structure includes at least one air outlet for spraying clean air toward the cutting line.

[0008] Optionally, the cutting line cleaning device comprises a housing, and an accommodating cavity provided in the housing and formed to accommodate the spray structure and the air knife structure;

[0009] Along the axial direction of the cutting line, a cutting line inlet and a cutting line outlet communicating with the accommodating cavity are arranged on opposite sides of the housing, and a drainage port is arranged at the bottom of the accommodating cavity.

[0010] Optionally, the spray structure includes two nozzles, and the two nozzles are respectively located on opposite sides of a line connecting the cutting line inlet to the cutting line outlet.

[0011] Optionally, the two nozzles are respectively located obliquely above a line connecting the cutting line inlet to the cutting line outlet.

[0012] Optionally, the air outlet is provided on at least one side of the nozzle in a direction from the cutting line inlet to the cutting line outlet.

[0013] Optionally, the air outlet is arranged at the inlet of the cutting line, and the air outlet is arranged at the air outlet of the cutting line.

[0014] Optionally, the air outlet is semi-annular in shape and is disposed on one side of the cutting line inlet or the cutting line outlet close to the top of the accommodating cavity. The air outlet direction of the air outlet is toward the inside of the accommodating cavity and is inclined downward.

[0015] Optionally, the difference between the diameter of the cutting line inlet and the diameter of the cutting line is smaller than a preset value, and the difference between the diameter of the cutting line outlet and the diameter of the cutting line is smaller than a preset value.

[0016] Optionally, the side wall of the accommodating cavity includes a first sub-side wall located below the line between the cutting line inlet and the cutting line outlet, and along the circumferential direction of the accommodating cavity, at least a portion of the first sub-side wall is inclined inward at one end close to the bottom of the accommodating cavity to form a slope.

[0017] An embodiment of the present invention also provides a multi-wire cutting device, comprising a cutting chamber, a guide wheel chamber, and the above-mentioned cutting wire cleaning device located between the cutting chamber and the guide wheel chamber, wherein a cutting guide wheel is arranged in the cutting chamber, and a pay-off shaft and a take-up shaft are arranged in the guide wheel chamber, and one end of the cutting wire wound on the pay-off shaft passes through the cutting wire cleaning device and enters into the cutting chamber, bypasses the cutting guide wheel, and is wound onto the take-up shaft.

[0018] The beneficial effect of the present invention is: through the cutting wire cleaning device provided in the embodiment of the present invention, the cutting wire that has performed the cutting action is cleaned, and the cutting wire carrying mortar is prevented from entering the guide wheel chamber, thereby avoiding the mortar from polluting the environment of the guide wheel chamber and the equipment inside it, thereby improving the service life of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram showing a cutting line cleaning device in an embodiment of the present invention;

[0020] Figure 2 A schematic diagram showing a state where the spray structure in an embodiment of the present invention is performing spraying;

[0021] Figure 3 A schematic diagram showing a state where the wind knife structure in the embodiment of the present invention is blowing air;

[0022] Figure 4 A schematic diagram showing a multi-wire cutting device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0024] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0025] The features such as "parallel", "perpendicular", and "same" used in the embodiments of the present disclosure include the features such as "parallel", "perpendicular", and "same" in a strict sense, as well as the cases where "approximately parallel", "approximately perpendicular", "approximately the same", etc. include certain tolerances, taking into account the tolerances associated with the measurement of specific quantities (e.g., the limitations of the measurement system), and are expressed as being within an acceptable range of deviations for a specific value determined by a person of ordinary skill in the art. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the value.

[0026] In addition, in this document, unless otherwise defined, the terms "substantially", "substantially", "approximately" and "about" are used to describe and explain small changes. When used with an event or situation, these terms can cover situations where the event or situation occurs exactly, and can also cover situations where the event or situation occurs approximately. For example, when used with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being arranged along the same plane in the micrometer range, for example, arranged along the same plane within 40μm, 30μm, 20μm, 10μm or 1μm.

[0027] During the multi-wire cutting process, the processing table slowly descends, the single crystal silicon rod contacts the wire for cutting, and the wire reciprocates at a very high speed to cut the silicon rod. At present, the multi-wire cutting machine generally uses a single pay-off shaft. At the beginning, 400-1000 kilometers of steel wire will be wound on the pay-off shaft, and there is no steel wire on the take-up shaft. The specific reciprocating cutting process is that the pay-off shaft starts to pay-off, the take-up shaft takes up the wire, the speed of the wire gradually increases and reaches the set cutting speed after advancing a distance, and then starts to decelerate to 0; then the take-up shaft starts to pay-off, the pay-off shaft starts to take up the wire, the speed of the wire gradually increases and reaches the set cutting speed after advancing a distance, and then decelerates to 0; repeat the above two processes until the crystal rod cutting is completed, wherein the advance distance of the pay-off shaft is greater than the advance distance of the take-up shaft, so the steel wire on the pay-off shaft gradually decreases, and the steel wire on the take-up shaft gradually increases until the steel wire on the pay-off shaft is used up.

[0028] The pay-off shaft and the take-up shaft are located in the guide wheel chamber. The cutting wire cuts the crystal rod in the cutting chamber. After cutting the crystal rod, the cutting wire carries the mortar into the guide wheel chamber and is wound onto the take-up shaft. The guide wheel chamber is also provided with guide wheels, tensioning wheels and other structures. The mortar is composed of cutting fluid and silicon carbide particles and has extremely strong cutting ability. The mortar enters the guide wheel chamber, causing the working environment of the guide wheel chamber to deteriorate, causing damage to the guide wheel and other structures in the guide wheel chamber. In severe cases, the cutting wire may be disconnected, resulting in great product quality loss, production capacity loss and economic loss.

[0029] refer to Figure 1-Figure 4 In view of the above problems, the present embodiment provides a cutting wire cleaning device 30 for cleaning the cutting wire 200 after cutting the crystal rod 300, comprising:

[0030] a spray structure, comprising at least one nozzle 1, for spraying ultrapure water toward the cutting line 200; and / or,

[0031] The air knife structure includes at least one air outlet 2 for spraying clean air toward the cutting line 200 .

[0032] After the cutting wire 200 cuts the crystal rod 300, before entering the guide wheel chamber 10 to be recovered by the wire take-up shaft 102, it is cleaned by the cutting wire cleaning device 30 provided in this embodiment, which effectively prevents the cutting wire 200 from carrying mortar into the guide wheel chamber 10 after cutting the crystal rod 300, thereby avoiding contamination of the guide wheel chamber 10 and improving the life of the guide wheel and other structures in the guide wheel chamber 10.

[0033] In an exemplary embodiment, the cutting wire cleaning device 30 may only include the spray structure, and clean the cutting wire 200 by spraying ultrapure water toward the cutting wire 200 .

[0034] In an exemplary embodiment, the cutting line cleaning device 30 may also only include the air knife structure, and clean the cutting line 200 by blowing air (blowing high-pressure clean gas) toward the cutting line 200 .

[0035] In an exemplary embodiment, the cutting line cleaning device 30 may also include the spray structure and the air knife structure at the same time, and the cooperation of the two improves the cleaning effect of the cutting line 200. In some embodiments, the spray structure and the air knife structure are sequentially arranged in the traveling direction of the cutting line 200, and after the cutting line 200 is cleaned by the spray structure, the cutting line 200 is cleaned by the air knife structure, and while playing a cleaning role, it can also play a drying role, so as to prevent the cutting line 200 from carrying ultrapure water into the guide wheel chamber 10.

[0036] It should be noted that the gas blown by the blowing structure is an inert high-pressure clean gas to avoid damaging the cutting line 200 .

[0037] refer to Figure 1 In an exemplary embodiment, the cutting line cleaning device 30 includes a housing 100, and a receiving cavity provided in the housing 100 and formed to receive the spray structure and the air knife structure;

[0038] Along the axial direction of the cutting line 200 (reference Figure 1 A cutting line inlet 1003 and a cutting line outlet 1004 communicating with the accommodating cavity are disposed on opposite sides of the housing 100, and a drain port 1002 is disposed at the bottom of the accommodating cavity.

[0039] The spray structure and the air knife structure are integrated into one body and housed together in the outer shell 100. On the basis of effectively cleaning the cutting line 200 after cutting the crystal rod 300, the spray range of the spray structure and the blowing range of the air knife structure are limited to the accommodation cavity formed by the outer shell 100, so as to prevent the ultrapure water sprayed by the spray structure from polluting the environment and prevent the high-pressure clean gas blown by the air knife structure from damaging other structures.

[0040] It should be noted that the number of the nozzles 1 included in the spray structure can be set according to actual needs, and can be one or more. The setting position of the nozzle 1 can be set according to actual needs, and can be set on the same side of the cutting line 200 in the radial direction, or on the different sides of the cutting line 200 in the radial direction.

[0041] refer to Figure 2 In an exemplary embodiment, the spray structure includes two nozzles 1, and the two nozzles 1 are respectively located on opposite sides of a line from the cutting line inlet to the cutting line outlet. That is, the two nozzles 1 are arranged on opposite sides of the cutting line 200 in the radial direction, so that the cleaning area of ​​the cutting line 200 can be increased and the cleaning effect can be improved.

[0042] It should be noted that the orthographic projection of one of the two nozzles 1 on the cutting line 200 and the orthographic projection of the other of the two nozzles 1 on the cutting line 200 may not overlap, may partially overlap, or may completely overlap. That is, in the axial direction of the cutting line 200, the two nozzles 1 may be staggered or directly opposite.

[0043] In an exemplary embodiment, the two nozzles 1 are respectively located obliquely above a line connecting the cutting line 200 entrance 1003 to the cutting line exit 1004 .

[0044] The nozzle 1 sprays ultrapure water at an angle downward to clean the cutting line 200, effectively ensuring that when the cutting line 200 moves to the positions corresponding to the two nozzles 1, the outer peripheral surface of the corresponding area of ​​the cutting line 200 is completely within the spraying range of the two nozzles 1, thereby effectively cleaning the cutting line 200.

[0045] Exemplarily, the spray angle of the nozzle 1 can be set according to actual needs, for example, it can be 40 degrees to 90 degrees, but it is not limited thereto.

[0046] In an exemplary embodiment, the direction from the cutting line inlet to the cutting line outlet (reference Figure 1At least one group of the nozzles 1 is arranged in the X direction of the cutting line 200, that is, at least one group of the nozzles 1 is arranged in the axial direction of the cutting line 200, and each group of the nozzles 1 includes two nozzles 1 symmetrically arranged in a direction perpendicular to the line connecting the cutting line inlet and the cutting line outlet, that is, each group of the nozzles 1 includes two nozzles 1 symmetrically arranged on opposite sides of the cutting line 200 in the radial direction of the cutting line 200.

[0047] It should be noted that, when a plurality of groups of nozzles 1 are provided in the direction from the cutting line inlet to the cutting line outlet, the plurality of groups of nozzles 1 are provided at intervals.

[0048] refer to Figure 1 and Figure 3 In an exemplary embodiment, the direction from the cutting line inlet to the cutting line outlet (reference Figure 1 and Figure 3 In the X direction in the figure, the air outlet 2 is arranged on at least one side of the nozzle 1.

[0049] In an exemplary embodiment, the nozzle 1 is fixedly disposed on the top of the housing 100 , but the present invention is not limited thereto.

[0050] In an exemplary embodiment, the air outlet 2 is provided at the inlet of the cutting line 200 , and the air outlet 2 is provided at the air outlet 2 of the cutting line 200 .

[0051] The blowing direction of the air outlet 2 is toward the inside of the housing 100 and toward the cutting line 200 to clean the cutting line 200, and the air outlet 2 located at the cutting line outlet can not only clean the cutting line 200, but also dry it.

[0052] In an exemplary embodiment, the air outlet 2 is in a semi-circular shape, or an arc shape, etc. The air outlet 2 is arranged on the side of the cutting line inlet 1003 or the cutting line outlet 1004 close to the top of the accommodating cavity, and the air outlet direction of the air outlet 2 is toward the inside of the accommodating cavity and is inclined downward.

[0053] In an exemplary embodiment, the air outlet 2 may be in a ring shape and is disposed around the cutting line inlet 1003 and the cutting line outlet 1004 .

[0054] In an exemplary embodiment, the difference between the diameter of the cutting wire inlet 1003 and the diameter of the cutting wire 200 is smaller than a preset value, and the difference between the diameter of the cutting wire outlet 1004 and the diameter of the cutting wire 200 is smaller than a preset value.

[0055] The setting of the preset value enables the cutting line 200 to just pass through the hole from the cutting line inlet and to just pass through the cutting line outlet, so that part of the mortar can also be blocked from entering the guide wheel chamber 10 at the cutting line inlet 1003 and the cutting line outlet 1004.

[0056] The preset value can be set according to actual needs. For example, the preset value can be greater than or equal to zero and less than or equal to 1 mm, but is not limited thereto.

[0057] In an exemplary embodiment, the side wall of the accommodating cavity includes a first sub-side wall located below the line connecting the cutting line inlet 1003 and the cutting line outlet 1004, and in the depth direction of the accommodating cavity (i.e., in the direction from the top of the accommodating cavity to the bottom of the accommodating cavity, refer to Figure 1 In the Y direction), at least a portion of the first sub-side wall is a slope 1001, and at least a portion of the first sub-side wall is inclined at one end away from the top of the accommodating cavity toward the center of the accommodating cavity to form the slope 1001.

[0058] Illustratively, along the circumferential direction of the accommodating cavity, at least a portion of the first sub-side wall at one end close to the bottom of the accommodating cavity is inclined inward to form an inclined surface 1001 .

[0059] Taking the line connecting the cutting line inlet 1003 and the cutting line outlet 1004 as the dividing line, the accommodating chamber can be divided into an upper half close to the top of the accommodating chamber and a lower half close to the bottom of the accommodating chamber. The first sub-side wall is located in the lower half. Along the circumferential direction of the accommodating chamber, at least part of the first sub-side wall at one end close to the bottom of the accommodating chamber is inclined inward to form an inclined surface 1001. The inclined surface 1001 plays a guiding role, which is beneficial for the waste liquid to be discharged from the drain port 1002 at the bottom of the accommodating chamber.

[0060] Exemplarily, the lower half is funnel-shaped to ensure that waste liquid is discharged from the drain port 1002 at the bottom of the containing chamber.

[0061] In an exemplary embodiment, the cutting line cleaning device 30 also includes a recovery structure, and a pipe is connected to the drain port 1002, which connects the drain port 1002 with the recovery structure. The waste liquid discharged from the drain port 1002 is recovered by the recovery structure through the pipe to avoid causing environmental pollution.

[0062] In an exemplary embodiment, the cutting line cleaning device 30 further includes a support frame for supporting and fixing the housing 100 , so as to fix the housing 100 between the guide wheel chamber 10 and the cutting chamber 20 .

[0063] In an exemplary embodiment, the cutting wire cleaning device 30 is arranged between the guide wheel chamber 10 and the cutting chamber 20 to clean the cutting wire 200 after cutting the crystal rod 300 to prevent the cutting wire 200 carrying mortar from entering the guide wheel chamber 10. The cleaning operation of the cutting wire cleaning device 30 is performed during the cutting process and does not affect the normal cutting action of the cutting wire 200. The transmission speed of the cutting wire 200 does not need to be changed. That is, the cutting wire cleaning device 30 cleans the cutting wire 200 after cutting the crystal rod 300 and does not affect the cutting efficiency of the cutting wire 200.

[0064] It should be noted that the cutting line cleaning device 30 is arranged between the guide wheel chamber 10 and the cutting chamber 20. Figure 4 The outer shell 100 of the cutting wire cleaning device 30 may have a gap between the guide wheel chamber 10 and the cutting chamber 20, and the outer shell 100 of the cutting wire cleaning device 30 may also be in contact with the corresponding side walls between the guide wheel chamber 10 and the cutting chamber 20.

[0065] refer to Figure 4 An embodiment of the present invention further provides a multi-wire cutting device, including a cutting chamber 20, a guide wheel chamber 10, and the above-mentioned cutting wire cleaning device 30 located between the cutting chamber 20 and the guide wheel chamber 10, wherein a cutting guide wheel 201 is arranged in the cutting chamber 20, and a pay-off shaft 101 and a take-up shaft 102 are arranged in the guide wheel chamber 10, and one end of the cutting wire 200 wound on the pay-off shaft 101 passes through the cutting wire cleaning device 30 and enters into the cutting chamber 20, bypasses the cutting guide wheel 201, and is then wound onto the take-up shaft 102.

[0066] Exemplarily, a plurality of guide wheels 103 are further provided in the guide wheel chamber 10 for adjusting the transmission direction of the cutting line 200 .

[0067] Exemplarily, a plurality of guide wheels 103 are disposed in the cutting chamber 20 to adjust the transmission direction of the cutting line 200 .

[0068] Exemplarily, a tensioning wheel (not shown) is further disposed in the guide wheel chamber 10 to keep the cutting line 200 in a tensioned state.

[0069] Exemplarily, a mortar nozzle 202 for providing mortar to the cutting line 200 and a mortar storage structure 203 connected to the mortar nozzle 202 are provided in the cutting chamber 20 to provide mortar to the mortar nozzle 202 .

[0070] Exemplarily, a fixing member for fixing the crystal rod 300 is further provided in the cutting chamber 20 .

[0071] There are a few points to note:

[0072] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

[0073] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.

[0074] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0075] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A cutting line cleaning device, characterized in that: Used to clean the cutting wire after cutting the crystal rod, including: a spray structure, comprising at least one nozzle, for spraying ultrapure water toward the cutting line; and / or, The air knife structure includes at least one air outlet for spraying clean air toward the cutting line.

2. The cutting wire cleaning device according to claim 1, characterized in that: It comprises a shell, and a receiving cavity arranged in the shell and used for receiving the spray structure and the wind knife structure; Along the axial direction of the cutting line, a cutting line inlet and a cutting line outlet communicating with the accommodating cavity are arranged on opposite sides of the housing, and a drainage port is arranged at the bottom of the accommodating cavity.

3. The cutting wire cleaning device according to claim 2, characterized in that: The spray structure includes two nozzles, and the two nozzles are respectively located on opposite sides of a line from the cutting line inlet to the cutting line outlet.

4. The cutting wire cleaning device according to claim 3, characterized in that: The two nozzles are respectively located obliquely above a line connecting the cutting line inlet to the cutting line outlet.

5. The cutting wire cleaning device according to claim 2, characterized in that: The air outlet is arranged on at least one side of the nozzle in a direction from the cutting line inlet to the cutting line outlet.

6. The cutting wire cleaning device according to claim 5, characterized in that: The air outlet is arranged at the inlet of the cutting line, and the air outlet is arranged at the air outlet of the cutting line.

7. The cutting wire cleaning device according to claim 5, characterized in that: The air outlet is semi-circular in shape and is disposed on one side of the cutting line inlet or the cutting line outlet close to the top of the accommodating cavity. The air outlet is directed toward the interior of the accommodating cavity and is inclined downward.

8. The cutting wire cleaning device according to claim 2, characterized in that: The difference between the diameter of the cutting wire inlet and the diameter of the cutting wire is smaller than a preset value, and the difference between the diameter of the cutting wire outlet and the diameter of the cutting wire is smaller than a preset value.

9. The cutting wire cleaning device according to claim 2, characterized in that: The side wall of the accommodating cavity includes a first sub-side wall located below the line between the cutting line inlet and the cutting line outlet. Along the circumferential direction of the accommodating cavity, at least part of the first sub-side wall is inclined inward at one end close to the bottom of the accommodating cavity to form an inclined surface.

10. A multi-wire cutting device, characterized in that: It comprises a cutting chamber, a guide wheel chamber, and a cutting wire cleaning device as described in any one of claims 1 to 9 located between the cutting chamber and the guide wheel chamber, wherein a cutting guide wheel is arranged in the cutting chamber, a pay-off shaft and a take-up shaft are arranged in the guide wheel chamber, and one end of the cutting wire wound on the pay-off shaft passes through the cutting wire cleaning device, enters the cutting chamber, bypasses the cutting guide wheel, and is then wound onto the take-up shaft.

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