Wax-free pad pasting device

Abstract

The invention provides a wax-free pad pasting device, which is used for installing a wax-free pad body and a ceramic disc, and comprises a base, a plurality of installing grooves are formed along the axis array of the base, adjusting plates are slidably clamped in the installing grooves, one end, close to the edge of the base, of each adjusting plate is provided with a limiting block, and the wax-free pad body is installed on the base; the multiple limiting blocks abut against the wax-free pad body. The fixing frame is correspondingly provided with two limiting frames, the base is provided with two limiting rods corresponding to the two limiting frames, and the two limiting frames are arranged on the two limiting rods in a sliding mode respectively; the fixing unit comprises a plurality of mounting frames arranged on the fixing frame in a sliding mode, fixing blocks arranged on the mounting frames and adjusting pieces arranged on the fixing frame, and the adjusting pieces are connected with the mounting frames and used for making the fixing blocks close to one another and abut against the ceramic plates. The device ensures that the axis of the wax-free pad body can be accurately aligned with the axis of the ceramic disc, errors caused by manual operation are reduced, the pasting precision is improved, and the pasting failure rate caused by position deviation is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of single-side polishing, and in particular to a wax-free pad sticking device. Background Art

[0002] The wax-free pad absorbs the workpiece through the polished microporous material of the inner layer. It is designed with several symmetrically arranged grooved circular holes of the same depth and size. Silicon crystal sheets, sapphire crystal sheets, and their epitaxial wafers and other products can be pasted into the circular holes with water or grinding fluid to fix them in place during the processing. After the processing is completed, it is convenient to remove the sheet without leaving any residual wax or glue.

[0003] When performing wax-free polishing on semiconductor wafer materials, it is usually necessary to stick the wax-free pad on a ceramic disc and support the wafer for processing. In the process of sticking the wax-free pad, it is generally done manually. After tearing off a small part of the release paper on the back of the wax-free pad, a roller is used to flatten the torn adhesive surface, and then the release paper is gradually torn off and rolled with a roller until the entire wax-free pad is attached to the ceramic disc. Finally, the attached ceramic disc is pressed by a press. However, manual operation has large errors, and the axis of the wax-free pad cannot be well aligned with the axis of the ceramic disc. Once a sticking error occurs, the wax-free pad must be replaced, and there is a risk of wasting materials. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a wax-free pad pasting device, which solves the problem in the prior art that manual pasting of wax-free pads results in large errors and the axis of the wax-free pad cannot be well aligned with the axis of the ceramic disk. Once a pasting error occurs, the wax-free pad must be replaced, which poses a risk of wasting materials.

[0005] According to an embodiment of the present invention, a wax-free pad pasting device is used to install a wax-free pad body and a ceramic plate, comprising:

[0006] The base has a plurality of mounting grooves arranged along its axis array, and an adjustment plate is slidably connected in each of the plurality of mounting grooves. A limit block is arranged at one end of the adjustment plate close to the edge of the base, and the wax-free pad body is installed on the base, and the plurality of limit blocks are in contact with the wax-free pad body;

[0007] The fixed frame is provided with two limit frames correspondingly, the base is provided with two limit rods corresponding to the two limit frames, and the two limit frames are slidably arranged on the two limit rods respectively; and

[0008] The fixing unit comprises a plurality of mounting frames slidably arranged on the fixing frame, a fixing block arranged on the mounting frame and an adjusting member arranged on the fixing frame. The adjusting member is connected with the plurality of mounting frames and is used to make the plurality of fixing blocks approach each other and abut against the side of the ceramic plate.

[0009] Preferably, the adjusting member comprises a column arranged on the fixing frame, a mounting seat slidably arranged on the column, and a plurality of adjusting rods rotatably arranged on the mounting seat and corresponding to the plurality of mounting frames. The mounting frame is provided with a rotating seat, and the adjusting rods are rotatably arranged in the corresponding rotating seats.

[0010] Preferably, the column is provided with a threaded section, the threaded section is threadedly connected with a threaded knob, and the threaded knob is rotatably arranged on the mounting seat.

[0011] Preferably, the top end of the column is bent outward to form a bent portion, and a handle is fixedly provided at the end of the bent portion.

[0012] Preferably, the base is rotatably provided with a bottom plate, a driving pin is provided at the bottom of each adjustment plate, the bottom plate is provided with a driving groove corresponding to each adjustment plate, and the driving pin is slidably engaged in the corresponding driving groove.

[0013] Preferably, the driving pin is provided with a rotating shaft, and the driving pin is rotatably arranged at the bottom of the adjusting plate via the rotating shaft.

[0014] Preferably, a nut is threadedly connected to the end of the limiting rod, and the limiting rod is also sleeved with a spring, and the limiting frame is located between the nut and the spring.

[0015] Preferably, the fixing block is provided with an arc-shaped groove, the arc-shaped groove is buckled with the side surface of the ceramic disk, and the arc-shaped groove is provided with a plurality of anti-slip points abutting against the ceramic disk.

[0016] Preferably, a scale bar is provided on the top of the base, and the scale bar is arranged along the length direction of the installation groove.

[0017] Preferably, the height of the limiting block is less than the thickness of the wax-free pad body, and the height of the fixing block is less than the thickness of the ceramic disk.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] In the present scheme, with the cooperation of several mounting grooves and adjustment plates installed in the mounting grooves, the wax-free pad body is laid on the base, and each adjustment plate is adjusted so that the wax-free pad body is coaxial with the base, and the wax-free pad body is limited by the limit block of the adjustment plate to ensure the stability of the wax-free pad body on the base and prevent it from shifting easily; at the same time, with the cooperation of the fixing frame and the fixing unit, by pressing the ceramic disk on the bottom of the fixing frame and adjusting the adjustment piece, the adjustment piece drives each fixing block to synchronously approach the ceramic disk located at the bottom of the fixing frame, and synchronously presses the ceramic disk so that the axis of the ceramic disk corresponds to the base and the fixing frame, and finally the fixing frame is pressed down so that the fixing frame drives the surface of the ceramic disk to synchronously contact the wax-free pad body, so that the adhesive surface of the wax-free pad body is synchronously pasted to the ceramic disk, which can ensure that the axis of the wax-free pad body can be accurately aligned with the axis of the ceramic disk, reduce the error caused by manual operation, improve the accuracy of the pasting process, reduce the pasting failure rate caused by position deviation, and thus reduce material waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the pasting device in an embodiment of the present invention.

[0021] Figure 2 It is a schematic diagram of the bottom view structure of the base in an embodiment of the present invention.

[0022] Figure 3 2 is a bottom view of the structure of the fixing frame in an embodiment of the present invention.

[0023] Figure 4 The figure is a schematic diagram of the connection structure of the mounting frame, the adjustment rod and the mounting seat according to an embodiment of the present invention.

[0024] Figure 5 It is a schematic diagram of the structure in which the wax-free pad body is installed on the base in an embodiment of the present invention.

[0025] Figure 6 Schematic diagram of the structure in which the ceramic disc is installed on the fixing frame in an embodiment of the present invention.

[0026] In the above drawings: 1. base; 101. limit rod; 102. mounting groove; 103. scale bar; 104. nut; 2. adjustment plate; 201. limit block; 202. drive pin; 3. bottom plate; 301. drive groove; 4. fixing frame; 401. limit frame; 5. mounting frame; 501. fixing block; 502. arc groove; 6. adjustment rod; 601. rotating seat; 7. mounting seat; 701. threaded knob; 702. bending part; 8. column; 801. threaded section; 9. handle; 10. spring; 11. wax-free pad body; 12. ceramic plate. DETAILED DESCRIPTION

[0027] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0028] like Figure 1 , Figure 3 , Figure 5 and Figure 6 As shown, the embodiment of the present invention provides a wax-free pad pasting device for installing a wax-free pad body 11 and a ceramic plate 12, comprising:

[0029] The base 1 is provided with a plurality of mounting grooves 102 along its axis array, and the plurality of mounting grooves 102 are all slidably clamped with adjustment plates 2, and one end of the adjustment plate 2 close to the edge of the base 1 is provided with a limit block 201, and the wax-free pad body 11 is installed on the base 1, and the plurality of limit blocks 201 are all in contact with the wax-free pad body 11;

[0030] The fixing frame 4 is provided with two limiting frames 401 correspondingly, the base 1 is provided with two limiting rods 101 corresponding to the two limiting frames 401, and the two limiting frames 401 are slidably arranged on the two limiting rods 101 respectively; and

[0031] The fixing unit includes a plurality of mounting frames 5 slidably arranged on the fixing frame 4, a fixing block 501 arranged on the mounting frame 5 and an adjusting member arranged on the fixing frame 4. The adjusting member is connected to the plurality of mounting frames 5 and is used to make the plurality of fixing blocks 501 approach each other and abut against the side of the ceramic disk 12.

[0032] In the embodiment of the present invention, the line connecting the two limiting rods 101 passes through the axis of the base 1, and the fixing frame 4 is slidably sleeved between the two limiting rods 101, so that the fixing frame 4 can only slide along the axis of the limiting rods 101 due to the limitation of the two limiting rods 101, ensuring that the axis of the fixing frame 4 is always colinear with the axis of the base 1. The base 1 is mainly used to install the wax-free pad body 11. When installing the wax-free pad body 11, the adhesive release paper on the back of the wax-free pad body 11 is completely torn off, so that the adhesive surface of the wax-free pad body 11 faces upward, and each adjustment plate 2 is adjusted respectively so that the wax-free pad body 11 is coaxial with the base 1, that is, the adjustment of each adjustment plate 2 is stopped, and the wax-free pad body 11 is limited by the limiting block 201 of the adjustment plate 2, ensuring the stability of the wax-free pad body 11 on the base 1 and preventing displacement.

[0033] Secondly, after the wax-free pad body 11 is installed, the ceramic plate 12 is pressed against the bottom of the fixing frame 4, and the ceramic plate 12 is continuously pressed by the palm of the hand, so that the ceramic plate 12 is stably located at the bottom of the fixing frame 4, and the fixing frame 4 is ensured to be completely in contact with the ceramic plate 12, and the adjusting member is adjusted simultaneously, so that the adjusting member drives each mounting frame 5 to move closer to each other, so that each fixing block 501 is synchronously close to the ceramic plate 12 located at the bottom of the fixing frame 4, and the ceramic plate 12 is pressed synchronously, and the ceramic plate 12 is quickly assembled on the fixing frame 4. The limiting rod 101 is limited, so that the installed ceramic disc 12 is aligned with the axis of the wax-free pad body 11 of the base 1. At this time, the fixing frame 4 is directly lowered, so that the fixing frame 4 drives the installed ceramic disc 12 to move downward and close to the wax-free pad body 11, so that the adhesive surface of the wax-free pad body 11 is synchronously adhered to the ceramic disc 12, which can ensure that the axis of the wax-free pad body 11 can be accurately aligned with the axis of the ceramic disc 12, reducing the error caused by manual operation, improving the accuracy of the pasting process, and reducing the pasting failure rate caused by position deviation, thereby reducing material waste.

[0034] Based on the above scheme, Figure 4 As shown, the adjusting member includes a column 8 arranged on the fixed frame 4, a mounting seat 7 slidably arranged on the column 8, and a plurality of adjusting rods 6 rotatably arranged on the mounting seat 7 and corresponding to a plurality of mounting frames 5. The mounting frame 5 is provided with a rotating seat 601, and the adjusting rod 6 is rotatably arranged in the corresponding rotating seat 601.

[0035] Specifically, when using the adjusting piece to synchronously adjust each mounting frame 5 to install the ceramic disk 12, each mounting frame 5 is expanded first, and the mounting seat 7 is pressed down to make the mounting seat 7 slide down on the column 8. Since both ends of the adjusting rod 6 are limited, one end can only move along the axis of the column 8, and the other end can only move along the length direction of the mounting frame 5. In the process of the mounting seat 7 sliding down, the end of the adjusting rod 6 follows the mounting seat 7 to slide down, so that the other end of the adjusting rod 6 squeezes the mounting frame 5, so that each mounting frame 5 drives the connected fixing blocks 501 to expand outward, so that the diameter formed by each fixing block 501 is larger than the diameter of the ceramic disk 12, thereby facilitating the ceramic disk 12 to be buckled on the bottom of the fixing frame 4. Finally, according to the above operation, the mounting seat 7 is moved upward, so that the mounting seat 7 drives the end of the adjusting rod 6 to move upward along the axis of the column 8, so that each mounting frame 5 is pulled by the adjusting rod 6 set thereon, so that the fixing block 501 abuts against the side of the ceramic disk 12, thereby fixing the ceramic disk 12.

[0036] Secondly, the column 8 is provided with a threaded section 801 , and a threaded knob 701 is threadedly connected to the threaded section 801 , and the threaded knob 701 is rotatably disposed on the mounting seat 7 .

[0037] In order to reduce manual operation and make it unnecessary for humans to continuously apply upward pulling force to the mounting base 7, when adjusting the position of the mounting base 7 on the column 8, the threaded knob 701 is rotated to move the threaded knob 701 on the threaded section 801. Since the threaded knob 701 is rotatably arranged on the mounting base 7, the threaded knob 701 can synchronously drive the mounting base 7 to move on the column 8 while rotating and moving. After stopping the movement, it can achieve self-locking under the action of the thread, thereby realizing the limitation of the position of each fixing block 501, which saves manpower and ensures the stability of each fixing block 501 fixing the ceramic disk 12. At the same time, since the sizes of the ceramic disk 12 and the wax-free pad body 11 have corresponding different specifications, the threaded knob 701 can be adjusted to adjust the position of each fixing block 501 to adapt to the installation of ceramic disks 12 of different diameters.

[0038] Furthermore, the top end of the column 8 is bent outward to form a bending portion 702, and a handle 9 is fixed to the end of the bending portion 702; the setting of the handle 9 allows the operator to apply force more easily, so that the operator can provide a better gripping point when lifting or pressing down the fixing frame 4, thereby reducing hand fatigue.

[0039] Specifically, Figure 2 As shown, the base 1 is rotatably provided with a bottom plate 3, and a driving pin 202 is provided at the bottom of each adjustment plate 2. The bottom plate 3 is provided with a driving groove 301 corresponding to each adjustment plate 2, and the driving pin 202 is slidably engaged in the corresponding driving groove 301.

[0040] In order to improve the installation accuracy of the wax-free pad body 11, when adjusting the position of each adjustment plate 2, a bottom plate 3 is rotatably set inside the base 1, and a driving groove 301 corresponding to each adjustment plate 2 is opened on the bottom plate 3. The driving groove 301 is arc-shaped as a whole, and one end of the driving groove 301 is the proximal end, and the other end of the driving groove 301 is the distal end. The adjustment plate 2 is connected to the corresponding driving groove 301 through a driving pin 202. When the driving pin 202 is located at the proximal end of the driving groove 301, the adjustment plate 2 is located at the proximal end position of the driving groove 301 and at the center position of the base 1, that is, it is in the minimum adjustable position. When the driving pin 202 is located at the distal end of the driving groove 301, the adjustment plate 2 is located at the distal end position of the driving groove 301 and at the outermost side of the base 1, that is, It is in the maximum adjustable position. When the base plate 3 rotates on the base 1, the driving pin 202 moves in the driving groove 301. When the driving pin 202 moves from the proximal end to the distal end, the various adjustment plates 2 move away from each other. When the driving pin 202 moves from the distal end to the proximal end, the base plate 3 synchronously drives the various driving pins 202 to approach each other and squeeze the side of the wax-free pad body 11 until each adjustment plate 2 abuts against the side of the wax-free pad body 11, thereby realizing the centering adjustment of the wax-free pad body 11, making the centering installation of the wax-free pad body 11 more convenient, time-saving, and more accurate; at the same time, the driving pin 202 slides in the driving groove 301, driving the adjustment plate 2 to move along a predetermined trajectory, which can adapt to wax-free pad bodies 11 of different sizes, so that they correspond to the ceramic disk 12 equipped with them.

[0041] At the same time, the driving pin 202 is provided with a rotating shaft, and the driving pin 202 is rotatably arranged at the bottom of the adjusting plate 2 through the rotating shaft; the driving pin 202 is connected through the rotating shaft and can slide smoothly in the driving groove 301, thereby reducing friction and extending the service life of the driving pin 202 and the driving groove 301.

[0042] like Figure 1 As shown, the end of the limiting rod 101 is threadedly connected with a nut 104 , and the limiting rod 101 is also sleeved with a spring 10 , and the limiting frame 401 is located between the nut 104 and the spring 10 .

[0043] Under the support of the spring 10, the initial state of the fixing frame 4 is a vacant state, that is, the fixing frame 4 is separated from the top surface of the base 1, which is convenient for the installation of the wax-free pad body 11 and the ceramic plate 12. At the same time, after the ceramic plate 12 is installed, the fixing frame 4 can be pressed down by holding the handle 9, so that the fixing frame 4 moves on the limiting rod 101 and squeezes the spring 10, so that the spring 10 deforms and applies force to the fixing frame 4. After the ceramic plate 12 on the fixing frame 4 is pasted on the wax-free pad body 11, the fixing frame 4 is directly released, so that the fixing frame 4 drives the ceramic plate 12 pasted with the wax-free pad body 11 to be vacated under the reset of the spring 10, and finally the threaded knob 701 is operated to release the limit on the ceramic plate 12, and the ceramic plate 12 can be removed.

[0044] Specifically, Figure 3 As shown, the fixing block 501 is provided with an arc groove 502, which is engaged with the side of the ceramic plate 12, and the arc groove 502 is provided with a plurality of anti-slip points abutting against the ceramic plate 12; the setting of the arc groove 502 enables the fixing block 501 to fit tightly against the side of the ceramic plate 12, ensuring that the ceramic plate 12 will not be displaced during the pasting process, and the shape of the arc groove 502 matches the side profile of the ceramic plate 12, which can ensure that the position of the ceramic plate 12 in the fixing block 501 is more precise, reduce alignment errors, and increase the friction between the fixing block 501 and the ceramic plate 12 under the action of the anti-slip points, prevent the ceramic plate 12 from sliding during the pasting process, and ensure the stability of the pasting.

[0045] Specifically, Figure 1 As shown, the top of the base 1 is provided with a scale bar 103, which is arranged along the length direction of the installation groove 102; the scale bar 103 provides an accurate measurement reference, and when installing the wax-free pad body 11 of a specified size, the bottom plate 3 can be adjusted first until the adjustment plate 2 moves to the corresponding scale bar 103 position, and finally the wax-free pad body 11 can be installed between each adjustment plate 2. The size of the corresponding scale bar 103 can also be observed after the wax-free pad body 11 is installed to reduce errors.

[0046] like Figure 5 and Figure 6 As shown, the height of the limit block 201 is less than the thickness of the wax-free pad body 11, and the height of the fixing block 501 is less than the thickness of the ceramic disk 12. In this way, the adhesive surface of the wax-free pad body 11 can highlight the end of the limit block 201, and the end surface of the ceramic disk 12 can highlight the end of the fixing block 501, so that the ceramic disk 12 and the wax-free pad body 11 can be better connected to ensure the accuracy of the adhesion.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention can be modified or replaced by equivalents without departing from the purpose and scope of the technical solution of the present invention, which should be included in the scope of the claims of the present invention.

Claims

1. A wax-free pad pasting device for installing a wax-free pad body (11) and a ceramic plate (12), characterized in that: include: The base (1) is provided with a plurality of mounting grooves (102) arranged in an array along its axis, and an adjustment plate (2) is slidably engaged in each of the plurality of mounting grooves (102); a limit block (201) is provided at one end of the adjustment plate (2) close to the edge of the base (1); the wax-free pad body (11) is installed on the base (1), and the plurality of limit blocks (201) are in contact with the wax-free pad body (11); The fixing frame (4) is provided with two corresponding limiting frames (401), the base (1) is provided with two limiting rods (101) corresponding to the two limiting frames (401), and the two limiting frames (401) are respectively slidably arranged on the two limiting rods (101); and The fixing unit comprises a plurality of mounting frames (5) slidably arranged on the fixing frame (4), a fixing block (501) arranged on the fixing frame (5), and an adjusting member arranged on the fixing frame (4); the adjusting member is connected to the plurality of mounting frames (5) and is used to make the plurality of fixing blocks (501) move closer to each other and abut against the side of the ceramic plate (12).

2. A wax-free pad sticking device according to claim 1, characterized in that: The adjusting member comprises a column (8) arranged on the fixing frame (4), a mounting seat (7) slidably arranged on the column (8), and a plurality of adjusting rods (6) rotatably arranged on the mounting seat (7) and corresponding to a plurality of the mounting frames (5); the mounting frame (5) is provided with a rotating seat (601), and the adjusting rod (6) is rotatably arranged in the corresponding rotating seat (601).

3. A wax-free pad sticking device according to claim 2, characterized in that: The column (8) is provided with a threaded section (801), the threaded section (801) is threadedly connected with a threaded knob (701), and the threaded knob (701) is rotatably arranged on the mounting seat (7).

4. A wax-free pad sticking device according to claim 2, characterized in that: The top end of the upright post (8) is bent outward to form a bent portion (702), and a handle (9) is fixedly provided at the end of the bent portion (702).

5. The wax-free pad sticking device according to claim 1, characterized in that: The base (1) is rotatably provided with a bottom plate (3), the bottom of each adjustment plate (2) is provided with a driving pin (202), the bottom plate (3) is provided with a driving groove (301) corresponding to each adjustment plate (2), and the driving pin (202) is slidably engaged in the corresponding driving groove (301).

6. A wax-free pad sticking device according to claim 5, characterized in that: The driving pin (202) is provided with a rotating shaft, and the driving pin (202) is rotatably arranged at the bottom of the adjusting plate (2) via the rotating shaft.

7. The wax-free pad sticking device according to claim 1, characterized in that: The end of the limiting rod (101) is threadedly connected with a nut (104), and the limiting rod (101) is also sleeved with a spring (10), and the limiting frame (401) is located between the nut (104) and the spring (10).

8. The wax-free pad sticking device according to claim 1, characterized in that: The fixing block (501) is provided with an arc-shaped groove (502), the arc-shaped groove (502) is buckled on the side of the ceramic plate (12), and the arc-shaped groove (502) is provided with a plurality of anti-slip points abutting against the ceramic plate (12).

9. The wax-free pad sticking device according to claim 1, characterized in that: A scale bar (103) is provided at the top of the base (1), and the scale bar (103) is arranged along the length direction of the installation groove (102).

10. The wax-free pad sticking device according to claim 1, characterized in that: The height of the limiting block (201) is smaller than the thickness of the wax-free pad body (11), and the height of the fixing block (501) is smaller than the thickness of the ceramic plate (12).

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