Gradient coating method, device and equipment for Monte mirror and medium

Abstract

The invention discloses a gradient coating method, a gradient coating device, gradient coating equipment and a gradient coating medium for a Monte mirror, and relates to the technical field of linear magnetron sputtering coating. According to the gradient coating method, the gradient coating device, the gradient coating equipment and the medium for the Monte mirror, programs of a motion control part, a circuit control part, a data acquisition part, an equipment cathode target power supply part and an equipment cavity air pressure control part are respectively programmed through a Labview program; the programmed programs are combined and embedded into a control end of coating equipment, and meanwhile, a segmented coating form is adopted; in the process, motion control, circuit control, data acquisition, cathode target power supply dynamic control and cavity air pressure dynamic control are integrated, and meanwhile, coating is carried out in a gradient segmented coating mode in the coating process, so that after each layer of film is refined and segmented, coating is controlled by utilizing a programmed corresponding program according to arranged steps. Any curved surface type gradient film plating which cannot be realized in a conventional mode can be completed, and the film plating precision is integrally improved.

Description

Technical Field

[0001] The invention relates to the technical field of linear magnetron sputtering coating, and in particular to a gradient coating method, device, equipment and medium for a Montel mirror. Background Art

[0002] In the field of X-rays, there are many types of optical elements that can focus incident light, including capillaries, curved mirrors, zone plates, etc.; among them, capillaries are limited by manufacturing and are very small in size; zone plates are transmission structures, their own volume is also very small, and the manufacturing is complicated, and they can only transmit; currently the most commonly used are curved mirrors, including KB mirrors, Montel mirrors, spherical mirrors, cylindrical mirrors, toroidal mirrors, etc.; because the outer dimensions can be made larger (100mm or even longer) as needed, curved mirrors have higher light collection efficiency when focusing X-rays, and the focusing size can also reach the order of micrometers, so they are widely used in fields such as X-ray diffractometers and synchrotron radiation, especially Montel mirrors, which can focus in both the meridian and sagittal directions, and are therefore widely used; the base surface of the lens itself is a parabola, and a special X-ray reflective film needs to be coated on it, and this reflective film must be coated with different thicknesses at different positions according to the curved surface shape, so the gradient film to be coated is very difficult, especially in the field of linear magnetron sputtering coating.

[0003] At present, there are different solutions for coating gradient films according to different coating methods; for example, the coating methods of gradient films using evaporation and those using electrochemical coating are different; and the most commonly used magnetron sputtering coating method for X-ray films usually uses a mask and coating time to change the film deposition thickness, but this type of method has poor connection between the various steps in the coating, making it difficult to match the various steps well in the specific coating process, resulting in uneven thickness of each layer of the film at different positions during gradient coating, making it difficult to achieve gradient film coating on any curved surface. Summary of the invention

[0004] The embodiments of the present invention provide a gradient coating method, device, equipment and medium for a Montel mirror, which can solve the problem in the prior art that the various steps in the coating are poorly connected, making it difficult to match the various steps well in the specific coating process, resulting in uneven thickness of each layer of film at different positions during gradient coating, making it difficult to achieve gradient film coating on any curved surface.

[0005] An embodiment of the present invention provides a gradient coating method for a Montel mirror, comprising the following steps: Build a control program for the coating equipment and embed the control program into the coating equipment; the control program includes: motion control, circuit control, data acquisition, equipment cathode target power supply and equipment cavity air pressure control; According to the requirements of Montel mirror coating gradient multilayer film, the coating process requirements of each layer of Montel mirror are listed in the table; After the Montel mirror coating begins, the process parameters in the table are identified through the data acquisition part in the control program, and the substrate vehicle carrying the Montel mirror is controlled to move in the cavity of the coating equipment through the motion control part; in the cavity of the coating equipment, each layer of the Montel mirror to be coated on the curved substrate is divided into n sections as required according to the process parameter requirements in the table, and the sputtering power, cavity gas pressure and scanning rate of each section on each layer of the film are set through the circuit control, equipment cathode target power supply and equipment cavity gas pressure control part in the control program, and periodic reciprocating target coating is performed on each section of each layer of the film; After the cycle of reciprocating coating is completed, the air pressure in the coating equipment cavity is restored to end the gradient coating of the Montel mirror.

[0006] Preferably, the step of constructing a control program for the coating equipment and embedding the control program into the coating equipment comprises: The Labview program is used to compile the control programs for motion control, circuit control, data acquisition, cathode target power supply of the equipment and air pressure control of the equipment cavity, and the compiled control programs are combined and embedded into the control end of the coating equipment; The control end of the coating equipment is connected to the motion control card, data acquisition card and relay control card of the coating equipment through a network cable and a 485 bus.

[0007] Preferably, the coating process requirements of each layer of the Montel mirror are listed in a table, including: According to the requirements of Montel mirror coating of gradient multilayer films, different columns in the table are set as serial number, target number, target setting time, target sweeping rate, number of repetitions, working gas, gas pressure, cathode power supply, power supply power and n-segment segmentation rate.

[0008] Preferably, the setting of the gas pressure in the cavity of the coating equipment further includes: The data acquisition part in the control program identifies the process parameters in the table, determines the serial number of the target, and moves the substrate vehicle on which the sample curved surface substrate is mounted to the middle position between the two targets; The substrate vehicle is stopped at the middle position, the gas mass flow meter of the working gas is turned on, and the working gas valve is opened to inflate the cavity of the coating equipment to the working pressure, and the gas intake of the gas flow meter is dynamically adjusted after comparing the value read by the vacuum gauge; After the gas pressure stabilizes, the cathode target is started, and after waiting for 0.5 seconds to 1 second of stabilization time, the multilayer film deposition begins.

[0009] Preferably, the filling of the working gas and the adjustment of the air pressure in the cavity are dynamically adjusted according to the actual vacuum degree of the cavity; When the air pressure measured by the vacuum gauge is too low, the ventilation volume of the gas mass flow meter is increased to ensure the stability of the air pressure in the entire cavity; at the same time, during the coating process, the pressure of the working gas is continuously changed to perform variable pressure coating.

[0010] Preferably, when performing periodic reciprocating target glancing coating on each section of each layer of film, the method of dynamically adjusting the thickness of each layer of film includes: Through the motion control, circuit control, data acquisition, equipment cathode target power supply and equipment cavity air pressure control parts contained in the control program, different film coating methods are implemented. The coating methods include: Segmented scanning adjustment; sputtering power adjustment; gas pressure adjustment in the chamber; combination of segmented scanning adjustment and sputtering power adjustment; combination of segmented scanning adjustment and gas pressure adjustment in the chamber; combination of segmented scanning adjustment, sputtering power adjustment and gas pressure adjustment in the chamber.

[0011] The embodiment of the present invention further provides a gradient coating device for a Montel mirror, comprising: A program setting module is used to build a control program for the coating equipment and embed the control program into the coating equipment; the control program includes: motion control, circuit control, data acquisition, equipment cathode target power supply and equipment cavity air pressure control; The data acquisition module is used to list the coating process requirements of each layer of the Montel mirror in a table according to the requirements of Montel mirror coating gradient multilayer films; The coating module is used to identify the process parameters in the table through the data acquisition part in the control program after the Montel mirror coating starts, and control the substrate vehicle carrying the Montel mirror to move in the cavity of the coating equipment through the motion control part; in the cavity of the coating equipment, each layer of the Montel mirror to be coated on the curved substrate is divided into n sections as required according to the process parameter requirements in the table, and the sputtering power, cavity pressure and scanning rate of each section on each layer of the film are set through the circuit control, the cathode target power supply of the equipment and the cavity gas pressure control part of the equipment in the control program, and the periodic reciprocating target coating is performed on each section of each layer of the film; The adjustment module is used to restore the air pressure in the cavity of the coating equipment after completing the cycle of round-trip coating, thereby ending the gradient coating of the Montel mirror.

[0012] An embodiment of the present invention further provides an electronic device, including a memory and a processor; The memory is used to store computer programs; The processor is used to implement the steps of the gradient coating method of a Montel mirror as described above when executing the computer program stored in the memory.

[0013] An embodiment of the present invention further provides a computer-readable storage medium for storing a computer program, wherein when the computer program is executed by a processor, the steps of the gradient coating method of a Montel mirror as described above are implemented.

[0014] The embodiment of the present invention provides a Montel mirror gradient coating method, device, equipment and medium. Compared with the prior art, the beneficial effects thereof are as follows: The present invention compiles the programs of motion control, circuit control, data acquisition, cathode target power supply of the equipment and gas pressure control of the equipment cavity through Labview program, and combines the compiled programs and embeds them into the control end of the coating equipment; at the same time, the coating process requirements of each layer of the Montel mirror are listed in a table, and when the Montel mirror is coated, each layer of the Montel mirror to be coated on the curved surface substrate is divided into n sections as required in the cavity of the coating equipment according to the parameter requirements in the table, and the circuit control in the control program, the cathode target power supply of the equipment and the gas pressure control of the equipment cavity are controlled. part, setting the sputtering power, cavity gas pressure and scanning rate of each section on each layer of film, and performing periodic reciprocating target glancing coating on each section of each layer of film; this process integrates motion control, circuit control, data acquisition, cathode target power supply dynamic control and cavity gas pressure dynamic control, and at the same time, the coating is carried out in the form of gradient segmented coating during the coating process, so that each layer of film is refined and segmented and the coating is controlled according to the arranged steps using the compiled corresponding program, which solves the problem that conventional fixed target or glancing target methods are difficult to achieve gradient film coating on arbitrary curved surfaces, and improves the overall coating accuracy.

[0015] Furthermore, in the coating process of the present invention, digital communication control is adopted between each step, which greatly improves the control accuracy compared with the traditional analog quantity. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the overall process of a gradient coating method for a Montel mirror provided in an embodiment of the present invention; Figure 2 A schematic diagram of the internal control of a coating machine for a gradient coating method of a Montel mirror provided by an embodiment of the present invention; Figure 3 A schematic diagram of a coating machine display interface for a gradient coating method for a Montel mirror provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0018] See also Figure 1 The embodiment of the present invention provides a gradient coating method for a Montel mirror, comprising the following steps: Step 1: Use the visual programming language Labview to write the control software for easy modification and expansion.

[0019] Step 2: First, initialize and connect the motion control card, data acquisition card and relay control card through the network cable and 485 bus.

[0020] Step 3: Read the process flow by reading a spreadsheet file (txt or excel). The first column is the serial number, the second column is the target number, the third column is the target time, the fourth column is the target sweep rate, the fifth column is the number of repetitions, the sixth column is the working gas, the seventh column is the gas pressure, the eighth column is the cathode power supply, the ninth column is the power supply power, and the tenth column and subsequent n columns are the segmentation rate. The value of n can be arbitrarily expanded according to actual needs.

[0021] Step 4: Determine the target serial number according to the table data read, and move the trolley with the sample substrate installed to the middle position between the two targets.

[0022] Step 5: Pause the moving car in the middle position, turn on the cathode power supply and input the corresponding power, turn on the gas mass flowmeter of the working gas, and open the working gas valve, inflate the cavity to the working pressure, and dynamically adjust the air intake of the gas flowmeter after comparing it with the value read by the high vacuum gauge.

[0023] Step 6: After the air pressure stabilizes, start the cathode target and wait for 0.5 seconds to 1 second to stabilize before starting to move. Use the data in the table to determine which target position to reach first, and then perform target sweeping movement. For the target sweeping process, the program performs variable speed target sweeping according to the number of segments n in the table. Each segment has its own independent scanning rate. At the same time, during the round trip, if the rate in a certain direction is from high to low, then the rate in the return direction is from low to high, ensuring that the scanning rate used at each specific position on the actual substrate is the same.

[0024] Step 7: After scanning the first target, start moving toward the second target and also collect the data in the table for segmented plating.

[0025] Step 8: After all cycles are completed, the plating is terminated, the cathode target power supply is turned off, and then the gas flow meter and gas valve are turned off.

[0026] Step 9: Move the trolley back to the vicinity of the original position or the cavity door to facilitate the subsequent removal of the finished product.

[0027] Specifically, the present invention adopts Labview programming, which is easy to modify and expand, and is also convenient for non-programmers to operate; the present invention combines motion control, circuit control and data acquisition to form a dynamic feedback system; the present invention adopts a table reading method to avoid process errors caused by improper settings of the operator; the present invention associates the filling of the working gas and the adjustment of the cavity air pressure with the actual vacuum degree of the cavity, which can be adjusted dynamically. If the measured air pressure is low, the ventilation volume of the gas flowmeter is increased to ensure that the air pressure in the entire cavity remains stable, or variable pressure coating can be performed as needed (in order to change the thickness of the film layer, the working gas pressure is continuously changed during the coating process); the present invention also adopts a dynamic method for the cathode target power supply, and through digital communication with the cathode target power supply, real-time precision can be achieved. The sputtering power of each film layer is accurately controlled, and the power value is directly input into the cathode power controller through the data in the table, so the film coating thickness can be better dynamically changed; the present invention adopts a segmented scanning method, and for the curved substrate, in the process of coating the gradient film, the positions of different thicknesses are divided into the required n segments, and the scanning rate of each segment is first calculated, and then the target coating is performed at different rates. The number of segments can be arbitrarily decomposed within a length, and each segment adopts a round-trip cycle form, and the scanning rate of the going and coming stage is the same as the corresponding position; at the same time, the present invention can adopt a variety of methods to adjust the thickness of the film, including: segmented scanning adjustment, sputtering power adjustment, gas pressure adjustment, segmented + power adjustment, segmented + gas pressure adjustment, segmented + gas pressure + power adjustment; when the coating machine is specifically operated, the control inside the coating machine is as follows Figure 2 As shown, the display interface of the coating machine during specific operation is as follows Figure 3 shown.

[0028] The method proposed in the present invention can be applied to large-scale magnetron sputtering coating equipment or other magnetron sputtering coating equipment; it integrates the functions of motion control, electronic control and data acquisition, and can realize one-key start of the coating process, and no adjustment is required during the coating process; the control accuracy is improved, and all communications use digital communication, which has higher accuracy and faster response than conventional analog control; it is easy and simple to use, and after setting the program table, the program automatically completes the coating of the gradient film, and there is no need to manually change the relevant parameters and experimental conditions; it is suitable for large-scale industrial production, convenient for transplantation and improvement, and has strong adaptability.

[0029] Specific experiments: Before the program starts running, prepare the running table as shown in Table 1. Each column represents a different parameter, and each row represents all the parameters of the current execution. In the table, column A represents the execution number, starting from 1 to N; column B is the corresponding cathode power supply number, which can be defined by yourself; column C is the scanning rate during normal operation; column D is the target time during target scanning; column E is whether to repeat, and column F is the number of repetitions; starting from column G is the segmented scanning rate distribution. The program has set the automatic extraction and recognition function. The number of segments is determined by the number of data set in the table. For example, in the first row, if the substrate scanning distance is 300mm, then 300mm will be divided into 6 segments, and the sputtering coating will be scanned from left to right. The scanning rate of the first segment is 1666 times / minute. , the second section 1555 times / minute, the third section 1444 times / minute, the fourth section 1333 times / minute, the fifth section 1222 times / minute, the sixth section 1111 times / minute, and then turn around and re-segment scan, the first section 1111 times / minute, the second section 1222 times / minute, the third section 1333 times / minute, the fourth section 1444 times / minute, the fifth section 1555 times / minute, the sixth section 1666 times / minute, that is, the scanning procedure is completed at the same rate in each section; if a fixed rate is required for a longer distance, more and finer segments can be made during segmentation, such as expanding to 10 segments, and then the rate of the first 3 segments can be set to 1666 times / minute, and the segment distance can be adjusted by this setting method.

[0030] Table 1 Operating process parameters The embodiment of the present invention further provides a gradient coating device for a Montel mirror, comprising: The program setting module is used to build the control program of the coating equipment and embed the control program into the coating equipment; the control program includes: motion control, circuit control, data acquisition, equipment cathode target power supply and equipment cavity air pressure control.

[0031] The data acquisition module is used to list the coating process requirements of each layer of the Montel mirror in a table according to the requirements of the Montel mirror coating gradient multilayer film.

[0032] The coating module is used to identify the process parameters in the table through the data acquisition part in the control program after the Montel mirror coating starts, and control the substrate vehicle carrying the Montel mirror to move in the cavity of the coating equipment through the motion control part; in the cavity of the coating equipment, each layer of the Montel mirror to be coated on the curved substrate is divided into n sections as required according to the process parameter requirements in the table, and the sputtering power, cavity pressure and scanning rate of each section on each layer of the film are set through the circuit control, the cathode target power supply of the equipment and the cavity gas pressure control part of the equipment in the control program, and the target coating is performed periodically back and forth on each section of each layer of the film.

[0033] The adjustment module is used to restore the air pressure in the cavity of the coating equipment after the cycle of round-trip coating is completed, thereby ending the gradient coating of the Montel mirror.

[0034] An embodiment of the present invention further provides an electronic device, including a memory and a processor.

[0035] The memory is used to store computer programs.

[0036] When the processor is used to execute the computer program stored in the memory, the steps of the above-mentioned gradient coating method for a Montel mirror are implemented.

[0037] An embodiment of the present invention further provides a computer-readable storage medium for storing a computer program, and when the computer program is executed by a processor, the steps of the gradient coating method of a Montel mirror as described above are implemented.

[0038] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A gradient coating method for a Montel mirror, characterized in that: The following steps are involved: Build a control program for the coating equipment and embed the control program into the coating equipment; the control program includes: motion control, circuit control, data acquisition, equipment cathode target power supply and equipment cavity air pressure control; According to the requirements of Montel mirror coating gradient multilayer film, the coating process requirements of each layer of Montel mirror are listed in the table; After the Montel mirror coating begins, the process parameters in the table are identified through the data acquisition part in the control program, and the substrate vehicle carrying the Montel mirror is controlled to move in the cavity of the coating equipment through the motion control part; in the cavity of the coating equipment, each layer of the Montel mirror to be coated on the curved substrate is divided into n sections as required according to the process parameter requirements in the table, and the sputtering power, cavity gas pressure and scanning rate of each section on each layer of the film are set through the circuit control, equipment cathode target power supply and equipment cavity gas pressure control part in the control program, and periodic reciprocating target coating is performed on each section of each layer of the film; After the cycle of reciprocating coating is completed, the air pressure in the coating equipment cavity is restored to end the gradient coating of the Montel mirror.

2. The gradient coating method of a Montel mirror according to claim 1, characterized in that: The control program of the coating equipment is constructed and embedded into the coating equipment, including: Use Labview program to compile control programs for motion control, circuit control, data acquisition, cathode target power supply and cavity air pressure control of the equipment, and then combine and embed the compiled control programs into the control end of the coating equipment; The control end of the coating equipment is connected to the motion control card, data acquisition card and relay control card of the coating equipment through a network cable and a 485 bus.

3. The gradient coating method of a Montel mirror according to claim 1, characterized in that: The coating process requirements for each layer of the Montel mirror are listed in a table, including: According to the requirements of Montel mirror coating of gradient multilayer films, different columns in the table are set as serial number, target number, target setting time, target sweeping rate, number of repetitions, working gas, gas pressure, cathode power supply, power supply power and n-segment segmentation rate.

4. The gradient coating method of a Montel mirror according to claim 3, characterized in that: The setting of the gas pressure of the cavity of the coating equipment also includes: The data acquisition part in the control program identifies the process parameters in the table, determines the serial number of the target, and moves the substrate vehicle on which the sample curved surface substrate is mounted to the middle position between the two targets; The substrate vehicle is stopped at the middle position, the gas mass flow meter of the working gas is turned on, and the working gas valve is opened to inflate the cavity of the coating equipment to the working pressure, and the gas intake of the gas flow meter is dynamically adjusted after comparing the value read by the vacuum gauge; After the gas pressure stabilizes, the cathode target is started, and after waiting for 0.5 seconds to 1 second of stabilization time, the multilayer film deposition begins.

5. The gradient coating method of a Montel mirror according to claim 4, characterized in that: The filling of the working gas and the adjustment of the air pressure in the cavity are dynamically adjusted according to the actual vacuum degree of the cavity; When the air pressure measured by the vacuum gauge is too low, the ventilation volume of the gas mass flow meter is increased to ensure the stability of the air pressure in the entire cavity; at the same time, during the coating process, the pressure of the working gas is continuously changed to perform variable pressure coating.

6. The gradient coating method for a Montel mirror according to claim 1, characterized in that: When performing periodic reciprocating target coating on each section of each layer of film, the method of dynamically adjusting the thickness of each layer of film includes: Through the motion control, circuit control, data acquisition, equipment cathode target power supply and equipment cavity air pressure control parts contained in the control program, different film coating methods are implemented. The coating methods include: Segmented scanning adjustment; sputtering power adjustment; gas pressure adjustment in the chamber; combination of segmented scanning adjustment and sputtering power adjustment; combination of segmented scanning adjustment and gas pressure adjustment in the chamber; combination of segmented scanning adjustment, sputtering power adjustment and gas pressure adjustment in the chamber.

7. A gradient coating device for a Montel mirror, characterized in that: include: A program setting module is used to build a control program for the coating equipment and embed the control program into the coating equipment; The control program includes: motion control, circuit control, data acquisition, equipment cathode target power supply and equipment cavity air pressure control; The data acquisition module is used to list the coating process requirements of each layer of the Montel mirror in a table according to the requirements of Montel mirror coating gradient multilayer films; The coating module is used to identify the process parameters in the table through the data acquisition part in the control program after the Montel mirror coating starts, and control the substrate vehicle carrying the Montel mirror to move in the cavity of the coating equipment through the motion control part; in the cavity of the coating equipment, each layer of the Montel mirror to be coated on the curved substrate is divided into n sections as required according to the process parameter requirements in the table, and the sputtering power, cavity pressure and scanning rate of each section on each layer of the film are set through the circuit control, the cathode target power supply of the equipment and the cavity gas pressure control part of the equipment in the control program, and the periodic reciprocating target coating is performed on each section of each layer of the film; The adjustment module is used to restore the air pressure in the cavity of the coating equipment after the cycle of round-trip coating is completed, thereby ending the gradient coating of the Montel mirror.

8. An electronic device, characterized in that: include: Memory and processor; The memory is used to store computer programs; The processor is used to implement the steps of a gradient coating method for a Montel mirror as described in any one of claims 1 to 6 when executing the computer program stored in the memory.

9. A computer-readable storage medium, characterized in that: Used to store a computer program, which, when executed by a processor, implements the steps of a gradient coating method for a Montel mirror as described in any one of claims 1 to 6.

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