Workpiece conveying system of coating equipment and vacuum coating equipment applying workpiece conveying system

Abstract

The invention provides a coating equipment workpiece conveying system and vacuum coating equipment applying the coating equipment workpiece conveying system, and the coating equipment workpiece conveying system comprises a conveying device which is used for driving a bracket to move close to or away from a coating station; the bottom of the workpiece frame is rotatably mounted on the bracket, and a plurality of workpiece hanging structures are arranged on the peripheral side of the workpiece frame at intervals; the alignment structure is arranged at the top or the bottom of the workpiece frame; the lifting device is arranged above or below the film coating station and is used for driving the butt-joint piece to do lifting motion, so that the butt-joint piece is in butt joint with or separated from the alignment structure; and the rotating device is used for driving the butt-joint piece to rotate so as to drive the workpiece frame to rotate relative to the bracket when the butt-joint piece is in butt joint with the alignment structure. The bracket and the workpiece frame are always connected into a whole in the whole conveying and coating process without lifting the workpiece frame, so that the workpiece frame and the bracket are always kept in accurate positioning; the bottom of the workpiece frame is connected with the bracket through the bearing, so that the workpiece frame and the bracket are driven by the butt joint piece to synchronously and stably rotate around a fixed axis, and the coating uniformity is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, and in particular to a coating equipment workpiece transmission system and vacuum coating equipment using the same. Background Art

[0002] When the existing vacuum optical coating equipment performs coating operation on the target workpiece, it is necessary to first use the lifting mechanism to lift the workpiece rack from the transmission mechanism at the bottom of the workpiece rack, and then drive the workpiece rack to rotate by the lifting mechanism, so that each target workpiece on the periphery of the workpiece rack passes through the evaporation source in turn and is coated one by one. After the coating of all target workpieces is completed, the lifting mechanism drives the workpiece rack to descend back to the transmission mechanism, and finally the equipment is output to perform the next process.

[0003] When the workpiece rack is lifted by the lifting mechanism, the bottom of the workpiece rack is separated from the support surface of the bracket supported on the roller of the transmission mechanism, and the bracket stays on the roller. If the lifting mechanism lifts or lowers the workpiece rack and the bracket stays waiting for the coating operation, the bracket is displaced relative to the transmission mechanism or the workpiece rack is relative to the bracket, which may cause the workpiece rack to be unable to be accurately positioned with the bracket after it is lowered, resulting in failure of the workpiece rack to return to its original position, thereby affecting production efficiency.

[0004] Furthermore, the workpiece holder of the conventional vacuum optical coating equipment is separated from the bottom bracket in the vacuum chamber through the lifting and rotating mechanism, and performs rising, rotating and descending movements. The workpiece is prone to shaking when it is lifted and rotated, thus affecting the coating process. In addition, the lifting and rotating mechanism is connected with the workpiece holder, and the concentricity of the processing and installation of the lifting and rotating mechanism and the workpiece holder is relatively high. If the lifting and rotating mechanism is not installed concentrically with the workpiece holder, the suspended target workpiece may be damaged when the rotating mechanism drives the workpiece holder to rotate. Summary of the invention

[0005] The present invention proposes a coating equipment workpiece transmission system and a vacuum coating equipment using the same, so as to solve the technical problem that in the process of the workpiece rack of the existing vacuum optical coating equipment being lifted up from the bracket to perform the coating operation, the workpiece rack may fail to return due to the displacement of the workpiece rack or the bracket.

[0006] To solve the above problems, the technical solution adopted by the present invention is:

[0007] The present invention provides a coating equipment workpiece transmission system, comprising a transmission device for driving a bracket to move close to or away from a coating station, and further comprising:

[0008] A workpiece rack, the bottom of which is rotatably mounted on the bracket, and a plurality of workpiece suspension structures for suspending target workpieces are arranged at intervals around the workpiece rack; a positioning structure is arranged at the top or bottom of the workpiece rack;

[0009] A lifting device is arranged above or below the coating station and is used to drive the butt joint member to move upward and downward so that the butt joint member can be butted against or separated from the alignment structure;

[0010] The rotating device is used to drive the docking piece to rotate when the docking piece is docked with the alignment structure, thereby driving the workpiece frame to rotate relative to the bracket.

[0011] Preferably, the lifting device comprises:

[0012] The rack is located above or below the coating station;

[0013] A first lifting drive mechanism is provided on the frame and is used to drive the lifting assembly to move upward and downward;

[0014] A first rotating shaft, one end of which is rotatably mounted on the lifting assembly, the other end of which extends out of the frame toward the alignment structure, and the docking member is mounted on the other end of the first rotating shaft;

[0015] The rotating device is used for driving the first rotating shaft to rotate.

[0016] Preferably, the first lifting drive mechanism comprises:

[0017] The lifting module is arranged on the frame and is used to drive the lifting moving part to move up and down, and the lifting assembly is installed on the lifting moving part;

[0018] The guide structure is arranged on the frame and is used to guide the lifting movement of the lifting component.

[0019] Preferably, the guide structure comprises a plurality of guide posts vertically mounted on the frame;

[0020] The lifting assembly includes:

[0021] A first lifting frame is connected to the lifting moving member and is movably mounted on the guide column;

[0022] A first bearing is mounted on the first lifting frame, and one end of the first rotating shaft is rotatably mounted on the first bearing;

[0023] A sealing hose, which is sleeved on the outside of the first rotating shaft, and one end of the sealing hose is mounted on the first bearing;

[0024] The mounting frame is mounted on the other end of the sealing hose, and the first rotating shaft passes through the mounting frame.

[0025] Preferably, the rotating device comprises:

[0026] The second rotating shaft is disposed on the mounting frame;

[0027] A driving gear is arranged on the second rotating shaft, and a driven gear meshing with the driving gear is arranged on the first rotating shaft;

[0028] The rotation driving mechanism is arranged on the frame and is used for driving the second rotation axis to rotate.

[0029] Furthermore, the coating equipment workpiece transmission system also includes:

[0030] The limiting device is used to limit the bracket to the coating station when the bracket arrives at the coating station.

[0031] Preferably, the transmission device comprises:

[0032] The first roller mechanism comprises: a first roller mounting frame; a plurality of first rollers sequentially and spaced apart from each other along a first direction and a first transmission assembly connected between adjacent first rollers;

[0033] The second roller mechanism comprises: a second roller mounting frame arranged parallel to and spaced from the first roller mounting frame, the coating station being located between the second roller mounting frame and the first roller mounting frame; a plurality of second rollers sequentially spaced from each other along the first direction on the second roller mounting frame; a second transmission assembly connected between adjacent second rollers; at least one second roller being connected to the corresponding first roller via a connecting shaft;

[0034] The roller driving mechanism is used to drive any first roller to rotate, so as to drive the first transmission assembly and the second transmission assembly to drive each first roller and the second roller to rotate synchronously, thereby driving the bracket supported on the first rollers and the second rollers to move closer to or away from the coating station.

[0035] Preferably, the limiting device comprises:

[0036] The second lifting drive mechanism is provided between the first roller mechanism and the second roller mechanism and is located at one end of the coating station in the first direction, and is used to drive the second lifting frame to lift and lower; the first limiting mechanism is provided on the second lifting frame and is used to limit one end of the bracket in the first direction when the bracket arrives at the coating station;

[0037] The third lifting drive mechanism is arranged between the first roller mechanism and the second roller mechanism and is located at the other end of the coating station in the first direction, and is used to drive the lifting movement of the third lifting frame; the second limiting mechanism is arranged on the third lifting frame, and is used to limit the other end of the bracket in the first direction when the bracket arrives at the coating station.

[0038] Preferably, the workpiece rack is cylindrical, and a plurality of workpiece suspension structures are evenly spaced and distributed on the outer circumference of the workpiece rack along the circumference of the workpiece rack.

[0039] Preferably, the lifting device is arranged above the coating station;

[0040] The butt joint piece is a butt joint cover, the outer peripheral side of the butt joint cover is a conical surface, the alignment structure is an alignment flange arranged on the top of the workpiece frame, and the alignment flange is provided with a tapered groove matching the shape of the butt joint cover;

[0041] The bracket is provided with a second bearing, and the bottom of the workpiece frame is provided with a mounting shaft matching the second bearing;

[0042] When the butt joint piece is connected with the alignment structure through the cooperation of its conical surface and the conical groove, the rotating device can drive the workpiece frame to rotate relative to the bracket through the cooperation of the mounting shaft and the second bearing.

[0043] The present invention also provides a vacuum coating equipment, including a vacuum coating chamber and a coating device arranged in the vacuum coating chamber, and also includes the above-mentioned coating equipment workpiece transmission system, the coating equipment workpiece transmission system is arranged in the vacuum coating chamber, and the coating device is arranged on one side of the coating station.

[0044] Preferably, the vacuum coating equipment is a vacuum optical coating equipment, the target workpiece is an optical substrate, and the coating device includes an evaporation source for performing an optical coating operation on the surface of the optical substrate.

[0045] Compared with the prior art, the present invention has the following beneficial effects:

[0046] The coating equipment workpiece transmission system provided by the present invention integrates a lifting device and a rotating device at the top or bottom of the vacuum coating chamber, and drives the rotatable docking piece to lift and lower so that it can be concentrically docked or disengaged with the alignment structure at the top or bottom of the workpiece rack, and the bottom of the workpiece rack can be rotatably installed on a bracket transferred by the transmission device. When the docking piece is docked with the alignment structure, the rotating device drives the docking piece to rotate to drive the workpiece rack to rotate relative to the bracket, and then the evaporation source on one side of the transmission device performs the coating operation on each target workpiece suspended on the side of the workpiece rack in turn. During the entire transmission and coating process, the bracket and the workpiece rack are always connected as one, and there is no need to lift the workpiece rack, thereby ensuring that the workpiece rack and the bracket always maintain precise positioning; the bottom of the workpiece rack is connected to the bracket by a bearing, so that the workpiece rack and the bracket can be synchronously and smoothly rotated on a fixed axis driven by the docking piece, thereby improving the uniformity of the coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In order to more clearly illustrate the technical solution proposed by the present invention, the present invention is described in detail in combination with the embodiments and drawings. It should be understood that the embodiments and drawings described in the following specific implementation methods and the drawings in the specification are only some embodiments of the present invention, and for those of ordinary skill in the art, these drawings can be changed under the conception of the present invention.

[0048] Figure 1 A three-dimensional schematic diagram of the assembly structure of an embodiment of a workpiece transmission structure of a coating device provided by the present invention;

[0049] Figure 2 A schematic front view of the assembly structure of an embodiment of a workpiece transmission structure of a coating device provided by the present invention;

[0050] Figure 3 A three-dimensional schematic diagram of the assembly structure of the transmission device and the limit device of the workpiece transmission structure of the coating equipment provided by the present invention;

[0051] Figure 4 A three-dimensional schematic diagram of the assembly structure of the bracket of the workpiece transmission structure of the coating equipment provided by the present invention;

[0052] Figure 5 for Figure 2 A schematic diagram of the assembly structure of the workpiece rack and the bracket in FIG.

[0053] Figure 6 A three-dimensional schematic diagram of the assembly structure of the lifting device and the rotating device provided by the present invention;

[0054] Figure 7 A schematic front view of the assembly structure of the lifting device and the rotating device provided by the present invention;

[0055] Figure 8 for Figure 3 A three-dimensional schematic diagram of the assembly structure of the third lifting drive mechanism, the third lifting frame and the second limiting mechanism;

[0056] Fig. 9 A three-dimensional schematic diagram of the structure of the bracket provided by the present invention with an additional bearing assembly;

[0057] Fig.10 A schematic top view of the structure of the bracket provided by the present invention with an additional bearing assembly;

[0058] Fig.11 A schematic front view of the assembly structure of another embodiment of the present invention in which the lifting device of the workpiece transmission structure of the coating equipment is arranged below the coating station.

[0059] Among them, the main marks of the drawings in the figure are as follows:

[0060] 1. Transmission device; 11. First roller mechanism; 111. First roller mounting frame; 112. First roller; 113. First transmission assembly; 12. Second roller mechanism; 121. Second roller mounting frame; 122. Second roller; 123. Second transmission assembly; 13. Connecting shaft; 131. Shaft support assembly; 14. Roller drive mechanism; 2. Bracket; 21. Second bearing; 22. Rolling bearing; 3. Workpiece rack; 31. Workpiece suspension structure; 32. Alignment structure; 321. Taper groove; 33. Mounting shaft; 4. Lifting device; 41. Frame; 42. First lifting drive mechanism; 421. Lifting module; 422. Lifting moving part; 423. Guide structure; 4231. Guide column; 43. Lifting assembly; 43 1. First lifting frame; 432. First bearing; 433. Sealing hose; 434. Mounting frame; 44. First rotating shaft; 441. Driven gear; 45. Docking piece; 451. Conical surface; 46. Magnetic fluid; 5. Rotating device; 51. Second rotating shaft; 511. Driving gear; 52. Rotating drive mechanism; 6. Limiting device; 61. Second lifting drive mechanism; 62. Second lifting frame; 63. First limiting mechanism; 631. First supporting assembly; 632. First clamping member; 633. First position sensor; 64. Third lifting drive mechanism; 65. Third lifting frame; 66. Second limiting mechanism; 661. Second supporting assembly; 662. Second clamping member; 663. Second position sensor; 7. Target workpiece.

[0061] Among them, the other marks in the figure are as follows:

[0062] X, first direction; Y, second direction; Z, third direction; A, coating station. DETAILED DESCRIPTION

[0063] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the following is a summary of the technical problems, technical solutions and beneficial effects to be solved by the present invention. Figure 1-11 The present invention is further described in detail with reference to the accompanying drawings and embodiments.

[0064] Please also read Figure 1-11 The coating equipment workpiece transmission system provided by the present invention includes a transmission device 1 for driving a bracket 2 to move toward or away from a coating station A, and also includes:

[0065] A workpiece rack 3, the bottom of which is rotatably mounted on the bracket 2, and a plurality of workpiece suspension structures 31 for suspending target workpieces 7 are arranged at intervals around the workpiece rack 3; an alignment structure 32 is arranged at the top or bottom of the workpiece rack 3; a lifting device 4 is arranged above or below the coating station A, and is matched with the position of the alignment structure 32 when the bracket 2 arrives at the coating station A, and is used to drive the docking member 45 to move up and down close to or away from the alignment structure 32, so that the docking member 45 and the alignment structure 32 can be coaxially docked or disengaged; a rotating device 5 is used to drive the docking member 45 to rotate when the docking member 45 is docked with the alignment structure 32, thereby driving the workpiece rack 3 and the docking member 45 to rotate synchronously and stably coaxially relative to the bracket 2 through the rotation of the docking member 45, so that each target workpiece 7 suspended on the side of the workpiece rack 3 can rotate in turn and pass between the transmission device 1 and the coating device on the side of the coating station A, so that the coating device can perform corresponding coating operations on each target workpiece 7 that rotates smoothly and passes in turn.

[0066] Please also read Figure 1-2 6-7, in this embodiment, the lifting device 4 includes:

[0067] The frame 41 is arranged above or below the coating station A and is arranged to match the position of the alignment structure 32 when the bracket 2 arrives at the coating station A; the first lifting drive mechanism 42 is arranged on the frame 41 and is used to drive the lifting assembly 43 to move upward or downward above or below the coating station A; the first rotating shaft 44, one end of which is rotatably mounted on the lifting assembly 43, and the other end of the first rotating shaft 44 extends out of the frame 41 toward the alignment structure 32, and the above-mentioned docking member 45 is installed at the other end of the first rotating shaft 44. The rotating device 5 is used to drive the first rotating shaft 44 to rotate, thereby driving the docking member 45 to rotate synchronously.

[0068] Please also read Figure 1-2 6-7, in the preferred implementation manner of this embodiment, the first lifting drive mechanism 42 includes:

[0069] The lifting module 421 is arranged on the frame 41 and is used to drive the lifting member 422 to move up and down. The lifting component 43 is installed on the lifting member 422. The guide structure 423 is arranged on the frame 41 and is used to guide the lifting component 43 to move up and down.

[0070] Please also read Figure 1-2 , 6-7, in a more preferred implementation manner of this embodiment, the lifting module 421 is a lifting cylinder module, which is used to drive the lifting movement of the cylinder telescopic rod serving as the lifting moving part 422, and the lifting component 43 is installed on the cylinder telescopic rod of the lifting cylinder module.

[0071] In other implementations, the lifting module 421 may also be a linear lifting module such as a motor-driven lead screw nut, a synchronous pulley, a gear rack, etc.

[0072] Please also read Figure 1-2 6-7, in a more preferred implementation of the present embodiment, the guide structure 423 includes a plurality of guide posts 4231 vertically mounted on the frame 41. The lifting assembly 43 includes: a first lifting frame 431, connected to the lifting moving part 422, and movably mounted on each guide post 4231 through a lifting sleeve arranged on its circumference; a first bearing 432, mounted on the first lifting frame 431, and one end of the first rotating shaft 44 is rotatably mounted on the first bearing 432; a sealing hose 433, which is preferably a bellows, or a retractable elastic tube; the sealing hose 433 is sleeved on the outside of the first rotating shaft 44, and one end of the sealing hose 433 is mounted on the first bearing 432, so that the bellows plays a sealing role; a mounting frame 434, mounted on the other end of the sealing hose 433, and the above-mentioned first rotating shaft 44 is passed through the mounting frame 434.

[0073] Please also read Figure 1-2 , 6-7, in this embodiment, the rotating device 5 includes:

[0074] The second rotating shaft 51 is passed through the mounting frame 434; the driving gear 511 is arranged on the second rotating shaft 51, and the first rotating shaft 44 is provided with a driven gear 441 meshing with the driving gear 511; the rotation driving mechanism 52 is arranged on the frame 41, and is used to drive the second rotating shaft 51 to rotate.

[0075] Please also read Figure 1-2 6-7, in the preferred implementation manner of this embodiment, the rotation drive mechanism 52 adopts a motor drive mechanism, and the second rotation shaft 51 is connected to the output shaft of the motor drive mechanism through a coupling.

[0076] In other implementations of this embodiment, the rotary drive mechanism 52 may also be a rotary cylinder or a motor driven pulley drive mechanism.

[0077] Please also read Figure 1-2 6-7, in the preferred implementation manner of this embodiment, a magnetic fluid 46 is arranged at the place where the first rotating shaft 44 passes through the frame 41 to achieve sealing.

[0078] In a more preferred implementation of this embodiment, the driving gear 511 and the driven gear 441 are connected via at least one transition gear (not shown in the figure), and the driving gear 511, the driven gear 441 and the transition gear form a gear set.

[0079] Please also read Figure 1-38. In this embodiment, the coating equipment workpiece transmission system further includes:

[0080] The limiting device 6 is used to limit the bracket 2 to the coating station A when the bracket 2 arrives at the coating station A.

[0081] Please also read Figure 1-3 In this embodiment, the transmission device 1 includes:

[0082] The first roller mechanism 11 comprises: a first roller mounting frame 111; a plurality of first rollers 112, which are sequentially installed on the first roller mounting frame 111 at intervals along the first direction X; a first transmission assembly 113, which is connected between adjacent first rollers 112; the second roller mechanism 12 comprises: a second roller mounting frame 121 which is arranged parallel to and spaced from the first roller mounting frame 111, and the coating station A is located between the second roller mounting frame 121 and the first roller mounting frame 111; a plurality of second rollers 122, which are sequentially installed on the second roller mounting frame 111 at intervals along the first direction X; On the roller mounting frame 121; the second transmission assembly 123 is connected between adjacent second rollers 122; at least one second roller 122 is connected to the corresponding first roller 112 through the connecting shaft 13; the roller driving mechanism 14 is used to drive any first roller 112 to rotate, so as to drive the first transmission assembly 113 and the second transmission assembly 123 to drive each first roller 112 and the second roller 122 to rotate synchronously, thereby driving the bracket 2 supported on the plurality of first rollers 112 and the second roller 122 to move closer to or away from the coating station A.

[0083] Please also read Figure 1-3 In a preferred implementation manner of the present embodiment, a plurality of first rotating shafts are installed on a first roller mounting frame 111 in sequence and at intervals along a first direction X, each first roller 112 is installed on a corresponding first rotating shaft, a pair of first sprockets are arranged at intervals at the end of the same end of each first rotating shaft, and the corresponding first sprockets between adjacent first rotating shafts are staggeredly connected in sequence along the first direction X through a first transmission chain, so that each first sprocket and the first sprocket constitute the above-mentioned first transmission assembly 113.

[0084] A plurality of second rotating shafts are installed on the second roller mounting frame 121 at intervals in sequence along the first direction X, and the number and position of the second rotating shafts are coaxially matched with each first rotating shaft, each second roller 122 is installed on the corresponding second rotating shaft, and a pair of first sprockets are arranged at intervals at the end of the same end of each second rotating shaft, and the corresponding second sprockets between adjacent second rotating shafts are staggeredly connected in sequence along the first direction X through a second transmission chain, so that each second sprocket and the second sprocket constitute the above-mentioned second transmission assembly 123.

[0085] In other implementations of this embodiment, the first transmission assembly 113 and the second transmission assembly 123 may also use a synchronous belt pulley assembly to replace the transmission assembly of the sprocket and transmission chain assembly.

[0086] Please also read Figure 1-3 In a preferred implementation of this embodiment, the transmission device 1 further includes:

[0087] The shaft support assembly 131 is disposed between the first roller mechanism 11 and the second roller mechanism 12 , and is used to support the connecting shaft 13 .

[0088] Please also read Figure 1-3 In a more preferred implementation manner of the present embodiment, the shaft support assembly 131 includes a pair of support bearings, which are spaced apart between the first roller mechanism 11 and the second roller mechanism 12 along a second direction Y perpendicular to the first direction X, and the connecting shaft 13 is passed through the bearing holes of the pair of support bearings along the second direction Y, so that the connecting shaft 13 can drive each of the first rollers 112, the first transmission assembly 113, the second rollers 122, and the second transmission assembly 123 to rotate synchronously relative to the pair of support bearings.

[0089] Please also read Figure 1-3 8. In this embodiment, the limiting device 6 includes:

[0090] The second lifting drive mechanism 61 is arranged between the first roller mechanism 11 and the second roller mechanism 12 and is located at one end of the coating station A in the first direction X, and is used to drive the second lifting frame 62 to move up and down; the first limiting mechanism 63 is arranged on the second lifting frame 62, and is used to limit one end of the bracket 2 in the first direction X when the bracket 2 arrives at the coating station A; the third lifting drive mechanism 64 is arranged between the first roller mechanism 11 and the second roller mechanism 12 and is located at the other end of the coating station A in the first direction X, and is used to drive the third lifting frame 65 to move up and down; the second limiting mechanism 66 is arranged on the third lifting frame 65, and is used to limit the other end of the bracket 2 in the first direction X when the bracket 2 arrives at the coating station A.

[0091] Please also read Figure 1-3 8. In a preferred implementation manner of this embodiment, the second lifting frame 62 is a second lifting plate, extending along the second direction Y. The third lifting frame 65 is a third lifting plate, extending along the second direction Y.

[0092] The first limiting mechanism 63 includes: at least two first supporting components 631 , which are spaced apart at two ends of the second lifting plate (second lifting frame 62 ) in the second direction Y and are respectively used to support a pair of first clamping members 632 .

[0093] The second limiting mechanism 66 includes: at least two second supporting components 661, which are spaced apart at the two ends of the third lifting plate (third lifting frame 65) in the second direction Y, and respectively correspond to supporting a pair of second clamping members 662 to cooperate with a pair of first clamping members 632 to clamp the bracket 2 at both ends in the first direction X, so as to limit the bracket 2 to the coating station A, and avoid the lifting device 4 driving the docking member 45 to move up and down to dock the docking member 45 with the alignment structure 32. During the process, the bracket 2 and the workpiece rack 3 are prevented from shifting relative to the transmission device 1, resulting in the workpiece rack 3 being unable to be accurately positioned with the bracket 2 after it is lowered, causing the workpiece rack 3 to fail to return to its original position, thereby affecting the production efficiency.

[0094] In a preferred implementation of this embodiment, the limiting device 6 further includes:

[0095] The third limiting mechanism (not shown in the figure) is provided on the second lifting plate (second lifting frame 62) or the third lifting plate (third lifting frame 65), and is used to drive the third clamping member to move closer to or away from the bracket 2 to cooperate with the first limiting mechanism 63 and the second limiting mechanism 66 to limit the bracket 2. The third limiting mechanism can drive the third clamping member to move through a linear drive module such as a screw nut, a synchronous pulley, a gear rack, etc. driven by a cylinder or a motor.

[0096] In other implementations of this embodiment, the first support assembly 631 and the second support assembly 661 can also be directly driven by the second lifting drive mechanism 61 and the third lifting drive mechanism 64 to achieve lifting movement, without being respectively arranged on the second lifting plate (second lifting frame 62) and the third lifting plate (third lifting frame 65).

[0097] Please also read Figure 1-3 8. In a more preferred implementation of the present embodiment, the bracket 2 is generally rectangular (i.e., the bracket 2 is generally in the shape of a cuboid), and the end surfaces of the bracket 2 at two opposite ends in the first direction X are inverted conical surfaces 451 that are symmetrical to each other. The first clamping member 632 and the second clamping member 662 are respectively inclined clamping plates whose postures match the end surfaces of the bracket 2 at two opposite ends in the first direction X.

[0098] In other implementations of this embodiment, the bracket 2 can also be constructed by square tubes, profiles or other forms.

[0099] Please also read Figure 1-3 8. In the present embodiment, the first limiting mechanism 63 further includes: a first position sensor 633, which is disposed on the first supporting assembly 631 and is used to sense whether the first clamping member 632 clamps the bracket 2 in place.

[0100] The second limiting mechanism 66 further includes: a second position sensor 663 , which is disposed on the second supporting assembly 661 and is used to sense whether the second clamping member 662 clamps the bracket 2 in place.

[0101] Please also read Figure 1-3 8. In a more preferred implementation manner of the present embodiment, the first support assembly 631 includes: at least one first support seat, which is arranged on the second lifting plate (second lifting frame 62), or is directly driven by the second lifting drive mechanism 61 to independently realize the lifting movement; a first support cantilever, which is arranged on the first support seat, and the first clamping member 632 and the first position sensor 633 are installed on the first support cantilever.

[0102] The second support assembly 661 includes: at least one second support seat, which is arranged on the third lifting plate (third lifting frame 65), or is directly driven by the third lifting drive mechanism 64 to independently realize the lifting movement; a second support cantilever, which is arranged on the second support seat, and the second clamping member 662 and the second position sensor 663 are installed on the first support cantilever.

[0103] Please also read Figure 1-3 5. In the present embodiment, the workpiece rack 3 is cylindrical, and a plurality of workpiece suspension structures 31 are evenly spaced and distributed on the outer circumference of the workpiece rack 3 along the circumference of the workpiece rack 3 .

[0104] Please also read Figure 1-3 5. In the preferred implementation of this embodiment, the workpiece suspension structure 31 is a plurality of suspension members spaced apart on the outer circumference of the workpiece rack 3, and the target workpiece 7 is provided with suspension holes matching the suspension members. The target workpiece 7 is suspended on the outer circumference of the workpiece rack 3 through the suspension holes corresponding to the suspension members.

[0105] Please also read Figure 1-2 6-7, in the preferred implementation of this embodiment, the lifting device 4 is arranged above the coating station A. The docking member 45 is a docking cover, and the outer peripheral side of the docking cover is a conical surface 451. The alignment structure 32 is an alignment flange arranged on the top of the workpiece rack 3, and the alignment flange is provided with a tapered groove 321 matching the shape of the docking cover. The bracket 2 is provided with a second bearing 21, and the bottom of the workpiece rack 3 is provided with a mounting shaft 33 matching the second bearing 21.

[0106] When the docking member 45 is connected to the alignment structure 32 through the tapered surface 451 thereof cooperating with the tapered groove 321 , the rotating device 5 can drive the workpiece holder 3 to rotate relative to the bracket 2 through the mounting shaft 33 cooperating with the second bearing 21 .

[0107] Please also read Figure 1-2 4-5. In a more preferred implementation manner of this embodiment, the second bearing 21 is a ball bearing.

[0108] See also Fig.11 In another embodiment of the present invention, the lifting device 4 is arranged below the coating station A. The docking member 45 is a docking cover ( Fig.11 The outer peripheral side of the butt-jointed gland is a conical surface 451, and the alignment structure 32 ( Fig.11 The counter flange (not shown) is arranged at the bottom of the workpiece frame 3, and the counter flange is provided with a taper groove 321 matching the shape of the mating gland. The bracket 2 is provided with a second bearing 21 ( Fig.11 The bottom of the workpiece frame 3 is provided with a mounting shaft 33 ( Fig.11 ), and the bracket 2 is provided with a clearance structure for the docking cover (docking member 45) to pass upward to engage with the tapered groove 321 of the alignment flange (alignment structure 32) at the bottom of the workpiece rack 3.

[0109] When the docking member 45 is connected to the alignment structure 32 through the tapered surface 451 thereof cooperating with the tapered groove 321 , the rotating device 5 can drive the workpiece holder 3 to rotate relative to the bracket 2 through the mounting shaft 33 cooperating with the second bearing 21 .

[0110] Please also read Figure 9-10 In a more preferred implementation of the present embodiment, the bracket 2 is provided with a bearing assembly consisting of a plurality of rolling bearings 22 around the second bearing 21, and the plurality of rolling bearings 22 are evenly spaced and radially distributed around the second bearing 21 in a circular ring shape. While the workpiece rack 3 is matched with the second bearing 21 through the mounting shaft 33, the bottom surface of the workpiece rack 3 is matched with the plurality of rolling bearings 22 to improve the bearing capacity of the bracket 2 on the workpiece rack 3 and the stability of the workpiece rack 3 when rotating relative to the bracket 2.

[0111] The present invention also provides a vacuum coating equipment, including a vacuum coating chamber (not shown in the figure) and a coating device (not shown in the figure) arranged in the vacuum coating chamber, and also including the above-mentioned coating equipment workpiece transmission system, the coating equipment workpiece transmission system is arranged in the vacuum coating chamber, and the coating device is arranged on one side of the coating station A (that is, the coating device is arranged at one end of the coating station A in the second direction Y).

[0112] In this embodiment, the vacuum coating equipment is a vacuum optical coating equipment, the target workpiece 7 is an optical substrate, and the coating device includes an evaporation source for performing an optical coating operation on the surface of the optical substrate.

[0113] Please also read Figure 1-3 The working process of the coating equipment workpiece transmission system provided by the present invention is as follows:

[0114] S1: The transmission device 1 drives the bracket 2 to drive the workpiece rack 3 to move from the loading station along the first direction X to the coating station A;

[0115] S2: the bracket 2 arrives at the loading station, and the limiting device 6 drives the first limiting mechanism 63 and the second limiting mechanism 66 to lift up at both ends (front end and rear end) of the bracket 2 in the first direction X, so as to limit the bracket 2 to the coating station A;

[0116] S3: the lifting device 4 drives the docking member 45 to descend or ascend from above or below the coating station A close to the alignment structure 32 at the top or bottom of the workpiece rack 3, so that the docking member 45 docks with the alignment structure 32;

[0117] S4: The rotating device 5 drives the docking member 45 to rotate, thereby driving the workpiece rack 3 to rotate synchronously relative to the bracket 2, so that each target workpiece 7 suspended on the side of the workpiece rack 3 rotates in turn and passes between the transmission device 1 and the coating device on the side of the coating station A, so that the evaporation source of the coating device performs corresponding optical coating operations on each target workpiece 7 in turn;

[0118] S5: After the coating of all target workpieces 7 is completed, the lifting device 4 drives the docking member 45 to move upward or downward away from the alignment structure 32, so that the docking member 45 is separated from the alignment structure 32;

[0119] S6: The limiting device 6 drives the first limiting mechanism 63 and the second limiting mechanism 66 to respectively descend at both ends (front end and rear end) of the bracket 2 in the first direction X, so as to release the limiting of the bracket 2 at the coating station A;

[0120] S7: The transmission device 1 drives the bracket 2 to drive the workpiece rack 3 to move from the coating station A along the first direction X toward the unloading station, and finally removes the workpiece rack 3 and the target workpieces 7 suspended thereon that have completed coating from the bracket 2 to execute the next process.

[0121] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art should understand that any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A coating equipment workpiece transmission system, comprising a transmission device (1) for driving a bracket (2) to move toward or away from a coating station (A), characterized in that: Also includes: A workpiece rack (3), the bottom of which is rotatably mounted on the bracket (2), a plurality of workpiece suspension structures (31) for suspending a target workpiece (7) are arranged at intervals around the workpiece rack (3); a positioning structure (32) is arranged at the top or bottom of the workpiece rack (3); A lifting device (4), arranged above or below the coating station (A), is used to drive the docking member (45) to move upward and downward so that the docking member (45) can dock with or disengage from the alignment structure (32); The rotating device (5) is used to drive the docking member (45) to rotate when the docking member (45) is docked with the alignment structure (32), thereby driving the workpiece frame (3) to rotate relative to the bracket (2).

2. The coating equipment workpiece transmission system as claimed in claim 1, characterized in that: The lifting device (4) comprises: A frame (41) is arranged above or below the coating station (A); A first lifting drive mechanism (42) is disposed on the frame (41) and is used to drive the lifting assembly (43) to move upward and downward; a first rotating shaft (44), one end of which is rotatably mounted on the lifting assembly (43), the other end of which extends out of the frame (41) toward the alignment structure (32), and the docking member (45) is mounted on the other end of the first rotating shaft (44); The rotating device (5) is used to drive the first rotating shaft (44) to rotate.

3. The coating equipment workpiece transmission system according to claim 2, characterized in that: The first lifting drive mechanism (42) comprises: A lifting module (421) is arranged on the frame (41) and is used to drive the lifting member (422) to move upward and downward, and the lifting assembly (43) is installed on the lifting member (422); The guide structure (423) is arranged on the frame (41) and is used to guide the lifting and lowering movement of the lifting component (43).

4. The coating equipment workpiece transmission system according to claim 3, characterized in that: The guide structure (423) comprises a plurality of guide posts (4231) vertically mounted on the frame (41); The lifting assembly (43) comprises: A first lifting frame (431), connected to the lifting moving member (422) and movably mounted on the guide column (4231); A first bearing (432) is mounted on the first lifting frame (431), and one end of the first rotating shaft (44) is rotatably mounted on the first bearing (432); A sealing hose (433), the sealing hose (433) is sleeved on the outside of the first rotating shaft (44), and one end of the sealing hose (433) is mounted on the first bearing (432); The mounting frame (434) is mounted on the other end of the sealing hose (433), and the first rotating shaft (44) is passed through the mounting frame (434).

5. The coating equipment workpiece transmission system according to claim 4, characterized in that: The rotating device (5) comprises: A second rotating shaft (51) is disposed on the mounting frame (434); A driving gear (511) is disposed on the second rotating shaft (51); and a driven gear (441) meshing with the driving gear (511) is disposed on the first rotating shaft (44); The rotation driving mechanism (52) is arranged on the frame (41) and is used for driving the second rotation shaft (51) to rotate.

6. The coating equipment workpiece transmission system according to any one of claims 1 to 5, characterized in that: Also includes: A limiting device (6) is used to limit the bracket (2) to the coating station (A) when the bracket (2) arrives at the coating station (A).

7. The coating equipment workpiece transmission system according to claim 6, characterized in that: The transmission device (1) comprises: The first roller mechanism (11) comprises: a first roller mounting frame (111); a plurality of first rollers (112) mounted on the first roller mounting frame (111) in sequence and at intervals along a first direction (X); and a first transmission assembly (113) connected between adjacent first rollers (112); The second roller mechanism (12) comprises: a second roller mounting frame (121) and a first roller mounting frame (111) arranged in parallel and at intervals, the coating station (A) being located between the second roller mounting frame (121) and the first roller mounting frame (111); a plurality of second rollers (122) being installed on the second roller mounting frame (121) in sequence and at intervals along the first direction (X); a second transmission assembly (123) being connected between adjacent second rollers (122); and at least one second roller (122) being connected to a corresponding first roller (112) via a connecting shaft (13); The roller driving mechanism (14) is used to drive any first roller (112) to rotate, so as to drive the first transmission assembly (113) and the second transmission assembly (123) to drive each first roller (112) and the second roller (122) to rotate synchronously, thereby driving the bracket (2) supported on the plurality of first rollers (112) and the second rollers (122) to move closer to or away from the coating station (A).

8. The coating equipment workpiece transmission system according to claim 7, characterized in that: The limiting device (6) comprises: a second lifting drive mechanism (61), arranged between the first roller mechanism (11) and the second roller mechanism (12), and located at one end of the coating station (A) in the first direction (X), and used for driving the second lifting frame (62) to move upward and downward; a first limiting mechanism (63), arranged on the second lifting frame (62), and used for limiting one end of the bracket (2) in the first direction (X) when the bracket (2) arrives at the coating station (A); The third lifting drive mechanism (64) is arranged between the first roller mechanism (11) and the second roller mechanism (12) and is located at the other end of the coating station (A) in the first direction (X), and is used to drive the third lifting frame (65) to move upward and downward; the second limiting mechanism (66) is arranged on the third lifting frame (65), and is used to limit the other end of the bracket (2) in the first direction (X) when the bracket (2) arrives at the coating station (A).

9. The coating equipment workpiece transmission system according to any one of claims 1 to 5, characterized in that: The workpiece rack (3) is cylindrical, and a plurality of workpiece suspension structures (31) are evenly spaced and distributed on the outer circumference of the workpiece rack (3) along the circumference of the workpiece rack (3).

10. The coating equipment workpiece transmission system according to claim 9, characterized in that: The lifting device (4) is arranged above the coating station (A); The docking piece (45) is a docking cover, the outer peripheral side of the docking cover is a conical surface (451), the alignment structure (32) is an alignment flange arranged on the top of the workpiece frame (3), and the alignment flange is provided with a tapered groove (321) matching the shape of the docking cover; The bracket (2) is provided with a second bearing (21), and the bottom of the workpiece frame (3) is provided with a mounting shaft (33) matching the second bearing (21); When the docking member (45) is connected to the alignment structure (32) through its conical surface (451) cooperating with the conical groove (321), the rotating device (5) can drive the workpiece frame (3) to rotate relative to the bracket (2) through the mounting shaft (33) cooperating with the second bearing (21).

11. A vacuum coating equipment, comprising a vacuum coating chamber and a coating device arranged in the vacuum coating chamber, characterized in that: It also includes a coating equipment workpiece transmission system as described in any one of claims 1 to 10, wherein the coating equipment workpiece transmission system is arranged in the vacuum coating chamber, and the coating device is arranged on one side of the coating station (A).

12. The vacuum coating equipment according to claim 11, characterized in that: The vacuum coating equipment is a vacuum optical coating equipment, the target workpiece (7) is an optical substrate, and the coating device comprises an evaporation source for performing an optical coating operation on the surface of the optical substrate.

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