Flexible material magnetron sputtering vacuum coating machine

Abstract

The magnetron sputtering vacuum coating machine comprises a machine body, a liquid supply assembly and a flexible base material film, a magnetic field cavity is formed in the machine body, and one side of the magnetic field cavity is of an opening structure; the flexible base material film is supported through the roller body on the base material supporting roller assembly, the flexible base material film on the roller body is continuously cooled in a cold liquid mode, in this way, on the premise that enough sputtering time is guaranteed, heat of the flexible base material film is discharged through cold liquid circulation, the phenomenon that the temperature of the flexible base material film is high is avoided, and the sputtering efficiency is improved. The temperature of the flexible substrate film is reduced on the premise of ensuring sufficient sputtering time, and the phenomenon of deformation caused by heating is avoided; the flexible base material film is supported in a roller body mode, meanwhile, the tension of the flexible base material film is detected in real time through the tension detection mechanism, the tension of the flexible base material film is adjusted in cooperation with the tension adjusting assembly, the tension is made to be appropriate, the phenomenon that the flexible base material film is wrinkled or damaged due to too large stress is avoided, and the film coating quality is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of magnetic sputtering coating equipment, in particular to a flexible material magnetron sputtering vacuum coating machine. Background Art

[0002] Magnetron sputtering coating, referred to as PVD coating, is an important method of vacuum coating. It uses high-energy particles (usually positive ions accelerated by an electric field, such as argon ions) to bombard the solid surface, so that the atoms or molecules on the solid surface exchange kinetic energy with the incident high-energy particles and then splash out from the solid surface. These sputtered atoms (or atomic groups) have a certain amount of energy and can be re-deposited and condensed on the surface of the solid substrate to form a thin film, that is, sputtering coating. For example, the Chinese invention application with publication number CN114635110A discloses a magnetron sputtering vacuum coating machine, including a box-type coating machine chamber, a base fixedly connected to the bottom of the coating machine, and a coating machine chamber door connected by a hinge. A door closer is fixedly connected to the right side of the machine, and the door closer presses the chamber door. The magnetron sputtering vacuum coating machine also includes: a target material sputtering mechanism includes a plurality of magnetron targets, and the magnetron targets include a target material and a rotating cathode installed on the coating machine. The magnetron targets are arranged in a plurality of groups, and two groups of magnetron targets are arranged in the center of the coating machine chamber, and two groups of magnetron targets are symmetrically arranged on the sides of the inner side of the coating machine chamber. At present, in the field of magnetron sputtering coating, there are many operational requirements for coating flexible substrates, and the flexible substrates are mainly flexible thin film substrates. The current magnetron sputtering coating equipment has the following defects when targeting such flexible thin film substrates:

[0003] During magnetron sputtering coating operations, heat is generated when the target material is bombarded. In order to ensure the quality of the coating, the substrate needs to be sputtered for a long time, which will cause the substrate to be subjected to high heat. The flexible film substrate is very easy to deform when heated, which not only affects the quality of the coating but also damages the substrate. Flexible film substrates are difficult to fix and are prone to wrinkles. If a large pulling force is applied to avoid wrinkles, it is easy to deform and affect the uniformity of the coating.

[0004] To this end, we propose a flexible material magnetron sputtering vacuum coating machine to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide a flexible material magnetron sputtering vacuum coating machine to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a flexible material magnetron sputtering vacuum coating machine, comprising a machine body, a liquid supply assembly, and a flexible substrate film, wherein a magnetic field cavity is provided inside the machine body, and one side of the magnetic field cavity is an open structure, and a sealing door plate is rotatably provided on the machine body at one side of the opening of the magnetic field cavity, two retractable roller assemblies are rotatably provided at the lower part of the magnetic field cavity, and two substrate support roller assemblies are rotatably provided at the upper part of the magnetic field cavity, and a target material assembly is provided at a position above each substrate support roller assembly in the magnetic field cavity, and an anode mechanism is fixedly connected to the magnetic field cavity at a position above the target material assembly, and a driving mechanism is provided on the machine body away from the opening of the magnetic field cavity;

[0007] The substrate support roller assembly comprises a roller body, the roller body has a diameter of 90-130 cm, a long axis is fixedly connected to the center of one end of the roller body, a short axis is fixedly connected to the center of the other end of the roller body, a cold liquid coil is fixedly connected to the inside of the roller body, a liquid inlet pipe is fixedly embedded in the inside of the long axis, an end of the liquid inlet pipe is fixedly connected to and connected to one end of the cold liquid coil, a liquid discharge pipe is fixedly embedded in the inside of the short axis, an end of the liquid discharge pipe is fixedly connected to and connected to the other end of the cold liquid coil, an end of the long axis is fixedly connected to a liquid inlet joint, the liquid inlet joint is connected to the liquid inlet pipe, an end of the short axis is fixedly connected to a liquid discharge joint, the liquid discharge pipe is connected to the liquid discharge joint, an end of the liquid inlet joint is rotatably connected to a first high-speed joint, and an end of the liquid discharge joint is rotatably connected to a second high-speed joint;

[0008] The magnetic field cavity is located near one of the retractable roller assemblies and is rotatably connected to the first guide roller, the magnetic field cavity is located near the other retractable roller assembly and is rotatably connected to the third guide roller and the fourth guide roller, the magnetic field cavity is located between the two substrate support roller assemblies and is rotatably connected to the second guide roller, the magnetic field cavity is located on both sides below one of the substrate support roller assemblies and is rotatably connected to the first squeezing roller and the second squeezing roller, the magnetic field cavity is located on both sides below the other substrate support roller assembly and is rotatably connected to the third squeezing roller and the fourth squeezing roller, a tension adjustment assembly and a tension detection mechanism are arranged in the magnetic field cavity between the two substrate support roller assemblies, one end of the flexible substrate film is fixedly arranged on one of the retractable roller assemblies, and the other end of the flexible substrate film is fixedly arranged on the other retractable roller assembly, and the flexible substrate film is wound around the first guide roller, the first squeezing roller, the second squeezing roller, the second guide roller, the third squeezing roller, the fourth squeezing roller, the third guide roller, the fourth guide roller, the two substrate support roller assemblies, the tension adjustment assembly and the tension detection mechanism.

[0009] Preferably, the tension adjustment assembly includes a panel, which is fixedly embedded in the side wall of the magnetic field cavity, and the side wall of the panel is provided with a side slide groove, and the panel is provided with two plate-like slide grooves at the top and bottom surfaces of the side slide groove, and the two plate-like slide grooves are slidably connected to the top and bottom ends of the sealing slide plate, and the side slide groove is vertically slidably connected to the side slider, and the side slider is fixedly connected to the middle side wall of the sealing slide, and the middle side wall of the sealing slide is horizontally fixedly connected to the core shaft away from the side slider, and the core shaft is rotatably sleeved with a roller, and the roller rollingly contacts the flexible substrate film, and the side slide groove is vertically rotatably connected to the lead screw, and the side slider is fixedly connected with a threaded sleeve, and the lead screw is threadedly connected to the threaded sleeve, and the top surface of the panel is fixedly sleeved with a fourth servo reduction motor, and the shaft end of the fourth servo reduction motor is fixedly connected to the top of the lead screw.

[0010] Preferably, the driving mechanism includes a driving warehouse fixedly connected to the side wall of the machine body, the driving warehouse has two driving columns horizontally rotatably connected at positions corresponding to the two retracting roller assemblies, the long axis rotatably sleeved on the side wall of the magnetic field cavity, the long axis on each of the substrate supporting roller assemblies passes through the side wall of the magnetic field cavity and is located in the driving warehouse and is fixedly sleeved with a first driven pulley, one of the driving columns is fixedly sleeved with a first driving pulley, the first driving pulley and the two first driven pulleys are sleeved with a third synchronous belt, the driving warehouse is rotatably connected to two first idler pulleys at positions on both sides of the top surface of the first driving pulley, the driving warehouse is rotatably connected to two second idler pulleys at positions near each first driven pulley, and the first idler pulley and the second idler pulley both roll in contact with the outer wall of the third synchronous belt.

[0011] Preferably, the first high-speed joint is fixedly sleeved on the side wall of the driving warehouse, and the driving warehouse is located between the two driving columns and is horizontally rotatably connected to the two rotating shafts. A second driving pulley is fixedly sleeved on each of the rotating shafts, and a second driven pulley is fixedly sleeved on each of the driving columns. A fourth synchronous belt is sleeved on the second driving pulley and the second driven pulley. The third servo reduction motor is fixedly connected to the inner side wall of the driving warehouse, and the rotating shaft end of the third servo reduction motor is fixedly connected to one of the ends of the rotating shafts. A gear is fixedly sleeved on each of the rotating shafts, and the gears on the two rotating shafts are meshed and connected with each other.

[0012] Preferably, the retracting roller assembly includes a sleeve shaft and a winding roller, the sleeve shaft is rotatably connected to the side wall of the magnetic field cavity, the end of the driving column passes through the side wall of the machine body and is fixedly connected to the end of the sleeve shaft, a column cavity is opened at the center of one end of the winding roller, the column cavity is sleeved with the sleeve shaft, the side wall of the sleeve shaft is fixedly connected to a positioning plate, a plate cavity is opened on the side wall of the column cavity, the positioning plate is plugged into the plate cavity, a plurality of first threaded through holes are opened at the center of the end of the winding roller, a plurality of first threaded holes are opened at the end of the sleeve shaft corresponding to the positions of the plurality of first threaded through holes, and the first threaded holes and the first threaded through holes are threadedly connected to the first bolts.

[0013] Preferably, two side frames are fixedly connected at the same height position of the two substrate support roller assemblies on both sides of the machine body, the short shaft and the drainage joint are rotatably sleeved inside the side frames, the second high-speed joint is fixedly inserted on the side frames, the liquid supply assembly includes a cold liquid bin, the top surface of the cold liquid bin is fixedly connected to and connected with a liquid inlet pump and a liquid drainage pump, the liquid inlet pump is fixedly connected to and connected with a liquid inlet main pipe, the end of the liquid inlet main pipe is fixedly connected to and connected with a liquid inlet sub-pipe, both ends of the liquid inlet sub-pipe are fixedly connected to and connected with the first high-speed joints on the two substrate support roller assemblies, the drainage pump is fixedly connected to and connected with the drainage main pipe, the drainage main pipe is fixedly connected to and connected with the drainage sub-pipe, both ends of the drainage sub-pipe are fixedly inserted inside the two side frames, and the ends of the drainage sub-pipe are fixedly connected to and connected with the second high-speed joint.

[0014] Preferably, the target material assembly includes an arc-shaped shell, which is fixedly embedded on the side wall of the magnetic field cavity, and a plurality of cylindrical targets are evenly rotated on the surface of the arc-shaped shell, and a plurality of plug-in plates are evenly rotated and connected on the side wall of the arc-shaped shell. A plug-in cavity is provided on the cylindrical target near one end of the arc-shaped shell, and the plug-in plate is plugged into the plug-in cavity. Two second threaded through holes are provided on the end of the cylindrical target, and two second threaded holes are provided on the end of the plug-in plate, and second bolts are threadedly connected to the second threaded holes and the second threaded through holes.

[0015] Preferably, the interior of the arc-shaped shell is horizontally rotatably connected to multiple drive shafts corresponding to multiple cylindrical target positions, the ends of the drive shafts pass through the side walls of the arc-shaped shell and are fixedly connected to the rotating shaft of the plug plate, two first synchronous pulleys are fixedly sleeved on each of the drive shafts, and the first synchronous belts are sleeved on the first synchronous pulleys on the two adjacent drive shafts, a second servo reduction motor is fixedly connected to the interior of one end of the arc-shaped shell, a second synchronous pulley is fixedly connected to the rotating shaft end of the second servo reduction motor, and the second synchronous belt is sleeved on the first synchronous pulley and the second synchronous pulley on the drive shaft close to the second servo reduction motor.

[0016] Preferably, an argon tank is provided at the outer side of the body, the argon tank is fixedly connected to and connected to an air pump, the air pump is fixedly connected to and connected to one end of an air supply pipe, the other end of the air supply pipe is fixedly connected to the top surface of the body, the air supply pipe is connected to the magnetic field cavity, a vacuum pump is fixedly connected to the side wall of the body, the vacuum pump is connected to the magnetic field cavity, the tension detection mechanism includes a tension detector fixedly connected to the side wall of the magnetic field cavity, the side wall of the tension detector is fixedly connected to a roller seat, the side wall of the roller seat is rotatably connected to a detection roller, and the detection roller rollingly contacts the flexible substrate film.

[0017] Preferably, the top surface of the body is fixedly connected to the vertical plate, the middle part of the vertical plate is fixedly sleeved with a pneumatic push rod, the output end of the pneumatic push rod is fixedly connected to a hinge seat, the hinge seat is rotatably connected to a hinge block, the bottom surface of the hinge block end is fixedly connected to the top surface of the sealed door panel, two guide holes are horizontally opened on both sides of the vertical plate, a guide rod is horizontally slidably sleeved on each of the guide holes, the end of the guide rod is fixedly connected to the side wall of the hinge seat, the end of the hinge seat is fixedly connected to the first servo reduction motor, the shaft end of the first servo reduction motor is fixedly connected to the hinge block shaft, two sealing ports are opened on both sides of the sealed door panel, and the sealing ports are plugged into the side frames.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] The present invention supports the flexible substrate film by means of a roller body on a substrate supporting roller assembly, and continuously cools the flexible substrate film on the roller body by means of cold liquid, so that under the premise of ensuring sufficient sputtering time, the heat of the flexible substrate film is discharged through the circulation of cold liquid, thereby avoiding the phenomenon of high temperature of the flexible substrate film, and lowering the temperature of the flexible substrate film under the premise of ensuring sufficient sputtering time, thereby avoiding the phenomenon of deformation caused by heat; the present invention supports the flexible substrate film by means of a roller body, and at the same time uses a tension detection mechanism to detect the tension of the flexible substrate film in real time, and cooperates with a tension adjustment component to adjust the tension of the flexible substrate film so that the tension is appropriate, thereby avoiding the phenomenon of wrinkles on the flexible substrate film or damage to the flexible substrate film due to excessive force, thereby ensuring the quality of the coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the main structure in the first and second embodiments of the present invention;

[0021] Figure 2 It is a schematic diagram of the structure of the machine body in the first and second embodiments of the present invention;

[0022] Figure 3 It is a schematic cross-sectional structure diagram of the substrate support roller assembly in the first and second embodiments of the present invention;

[0023] Figure 4 It is a schematic cross-sectional view of the structure of the retractable roller assembly in the second embodiment of the present invention;

[0024] Figure 5 This is a schematic diagram of the back structure of the main body in the second embodiment of the present invention;

[0025] Figure 6 It is a schematic cross-sectional structure diagram of the driving mechanism in the second embodiment of the present invention;

[0026] Figure 7 It is a schematic cross-sectional view of the tension adjustment assembly in the second embodiment of the present invention;

[0027] Figure 8It is a schematic diagram of the cross-section structure of the target assembly in the second embodiment of the present invention;

[0028] Fig. 9 It is a structural schematic diagram of a tension detection mechanism in a second embodiment of the present invention;

[0029] Fig.10 It is a schematic diagram of the structure of the sealed door panel in the second embodiment of the present invention.

[0030] In the figure: 1, machine body; 2, retractable roller assembly; 3, substrate support roller assembly; 4, target assembly; 5, driving mechanism; 6, liquid supply assembly; 7, tension adjustment assembly; 8, tension detection mechanism; 9, flexible substrate film; 11, magnetic field cavity; 12, first guide roller; 13, second guide roller; 14, third guide roller; 15, fourth guide roller; 16, first squeeze roller; 17, second squeeze roller; 18, third squeeze roller; 19, fourth squeeze roller; 110, anode mechanism; 111, side frame; 112, argon gas tank; 113, air pump; 114, air supply pipe; 115, vacuum pump; 11 6. Sealed door panel; 117. Vertical panel; 118. Pneumatic push rod; 119. Hinge seat; 120. Hinge block; 121. First servo reduction motor; 122. Guide rod; 123. Guide hole; 124. Sealing port; 21. Sleeve shaft; 22. Roller; 23. Positioning plate; 24. Column cavity; 25. Plate cavity; 26. First threaded hole; 27. First threaded through hole; 28. First bolt; 31. Roller body; 32. Long axis; 33. Short axis; 34. Cold liquid coil; 35. Liquid inlet pipe; 36. Liquid discharge pipe; 37. Liquid inlet joint; 38. Liquid discharge joint; 39. First high-speed joint; 3 10. second high-speed joint; 41. arc-shaped shell; 42. cylindrical target; 43. drive shaft; 44. plug plate; 45. plug cavity; 46. first synchronous pulley; 47. first synchronous belt; 48. second servo reduction motor; 49. second synchronous pulley; 410. second synchronous belt; 411. second threaded hole; 412. second threaded through hole; 413. second bolt; 51. drive chamber; 52. drive column; 53. transfer shaft; 54. first driving pulley; 55. first driven pulley; 56. third synchronous belt; 57. first idler pulley; 58. second idler pulley; 59. second Driving pulley; 510, second driven pulley; 511, fourth synchronous belt; 512, gear; 513, third servo reduction motor; 61, cold liquid tank; 62, liquid inlet pump; 63, liquid inlet main pipe; 64, liquid inlet sub-pipe; 65, liquid discharge pump; 66, liquid discharge main pipe; 67, liquid discharge sub-pipe; 71, panel; 72, side slide groove; 73, plate slide groove; 74, sealing slide plate; 75, mandrel; 76, roller; 77, side slide block; 78, screw rod; 79, threaded sleeve; 710, fourth servo reduction motor; 81, tension detector; 82, roller seat; 83, detection roller. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Embodiment 1:

[0033] See also Figure 1-3 The present invention provides a technical solution: a flexible material magnetron sputtering vacuum coating machine, comprising a machine body 1, a liquid supply assembly 6, and a flexible substrate film 9. A magnetic field cavity 11 is provided inside the machine body 1, and one side of the magnetic field cavity 11 is an open structure. The machine body 1 is located at the side of the opening of the magnetic field cavity 11 and is rotatably provided with a sealing door plate 116. Two retractable roller assemblies 2 are rotatably provided at the lower part of the magnetic field cavity 11, and two substrate support roller assemblies 3 are rotatably provided at the upper part of the magnetic field cavity 11. A target material assembly 4 is provided at a position above each substrate support roller assembly 3 in the magnetic field cavity 11, and an anode mechanism 110 is fixedly connected to the magnetic field cavity 11 at a position above the target material assembly 4. A driving mechanism 5 is provided at the side of the machine body 1 away from the opening of the magnetic field cavity 11.

[0034] The substrate supporting roller assembly 3 includes a roller body 31, the roller body 31 has a diameter of 60-130 cm, a long axis 32 is fixedly connected to the center of one end of the roller body 31, a short axis 33 is fixedly connected to the center of the other end of the roller body 31, a cold liquid coil 34 is fixedly connected to the roller body 31, a liquid inlet pipe 35 is fixedly embedded in the long axis 32, an end of the liquid inlet pipe 35 is fixedly connected to and connected to one end of the cold liquid coil 34, a liquid discharge pipe 36 is fixedly embedded in the short axis 33, an end of the liquid discharge pipe 36 is fixedly connected to and connected to the other end of the cold liquid coil 34, a liquid inlet joint 37 is fixedly connected to the end of the long axis 32, the liquid inlet joint 37 is connected to the liquid inlet pipe 35, and a liquid discharge joint 38 is fixedly connected to the end of the short axis 33. The drain pipe 36 is connected to the drain joint 38, the end of the liquid inlet joint 37 is rotatably connected to the first high-speed joint 39, and the end of the drain joint 38 is rotatably connected to the second high-speed joint 310. The roller body 31 on the substrate support roller assembly 3 supports the flexible substrate film 9, and the flexible substrate film 9 on the roller body 31 is continuously cooled by cold liquid. In this way, under the premise of ensuring sufficient sputtering time, the heat of the flexible substrate film 9 is discharged through the cold liquid circulation to avoid the phenomenon of high temperature of the flexible substrate film 9. Under the premise of ensuring sufficient sputtering time, the temperature of the flexible substrate film 9 is reduced to avoid deformation caused by heat.

[0035] The magnetic field cavity 11 is located near one of the retractable roller assemblies 2 and is rotatably connected to the first guide roller 12. The magnetic field cavity 11 is located near the other retractable roller assembly 2 and is rotatably connected to the third guide roller 14 and the fourth guide roller 15. The magnetic field cavity 11 is located between the two substrate support roller assemblies 3 and is rotatably connected to the second guide roller 13. The magnetic field cavity 11 is located on both sides below one of the substrate support roller assemblies 3 and is rotatably connected to the first squeezing roller 16 and the second squeezing roller 17. The magnetic field cavity 11 is located on both sides below the other substrate support roller assembly 3 and is rotatably connected to the third squeezing roller 18 and the fourth squeezing roller 19. A tension adjustment assembly 7 and a tension detection mechanism 8 are provided in the magnetic field cavity 11 between the two substrate support roller assemblies 3. One end of the flexible substrate film 9 is fixedly provided on one of the retractable roller assemblies 2 The other end of the flexible substrate film 9 is fixedly arranged on another retractable roller assembly 2, and the flexible substrate film 9 is wound around the first guide roller 12, the first squeezing roller 16, the second squeezing roller 17, the second guide roller 13, the third squeezing roller 18, the fourth squeezing roller 19, the third guide roller 14, the fourth guide roller 15, two substrate support roller assemblies 3, the tension adjustment assembly 7 and the tension detection mechanism 8. The function of the squeezing roller is to make the flexible substrate film 9 contact the roller body 31 with a larger surface area, and the roller body 31 is used to support the flexible substrate film 9. At the same time, the tension detection mechanism 8 is used to detect the tension of the flexible substrate film 9 in real time, and the tension of the flexible substrate film 9 is adjusted in cooperation with the tension adjustment assembly 7 to make the tension appropriate, avoid wrinkles on the flexible substrate film 9 or damage to the flexible substrate film 9 due to excessive force, and ensure the quality of the coating.

[0036] Embodiment 2:

[0037] See also Figure 1-10 , which is the second embodiment of the present invention, and is based on the previous embodiment. The tension adjustment component 7 includes a panel 71, which is fixedly embedded in the side wall of the magnetic field cavity 11. The side wall of the panel 71 is provided with a side slide groove 72. The panel 71 is provided with two plate-shaped slide grooves 73 at the top and bottom surfaces of the end of the side slide groove 72. The two plate-shaped slide grooves 73 are slidably connected to the top and bottom ends of the sealing slide plate 74. The side slide groove 72 is vertically slidably connected to the side slider 77. The side slider 77 is fixedly connected to the middle side wall of the sealing slide plate 74, and the middle side wall of the sealing slide plate 74 is far away from the side slider 77. A core shaft 75 is fixedly connected horizontally on one side, and a roller 76 is rotatably sleeved on the core shaft 75. The roller 76 rolls and contacts the flexible substrate film 9. A screw rod 78 is vertically rotated in the side slide groove 72. A threaded sleeve 79 is fixedly connected to the side slide block 77. The screw rod 78 is threadedly connected to the threaded sleeve 79. The top surface of the panel 71 is fixedly sleeved with a fourth servo reduction motor 710. The shaft end of the fourth servo reduction motor 710 is fixedly connected to the top of the screw rod 78. The flexible substrate film 9 is supported by the roller 76. The position of the roller 76 is adjusted up and down to change the tension of the flexible substrate film 9, thereby realizing the adjustment of the tension.

[0038] The driving mechanism 5 includes a driving warehouse 51 fixedly connected to the side wall of the machine body 1, and two driving columns 52 are horizontally rotatably connected to the positions of the two retracting roller assemblies 2 inside the driving warehouse 51, and the long axis 32 is rotatably sleeved on the side wall of the magnetic field cavity 11. The long axis 32 on each substrate supporting roller assembly 3 passes through the side wall of the magnetic field cavity 11 and is located inside the driving warehouse 51 and is fixedly sleeved with a first driven pulley 55. One of the driving columns 52 is fixedly sleeved with a first driving pulley 54, and the first driving pulley 54 and the two first driven pulleys 55 are sleeved with a third synchronous belt 56. The driving warehouse 51 is rotatably connected to two first idle pulleys 57 at positions on both sides of the top surface of the first driving pulley 54, and the driving warehouse 51 is rotatably connected to two second idle pulleys 58 at positions near each first driven pulley 55, and the first idle pulley 57 and the second idle pulley 58 both roll in contact with the outer wall of the third synchronous belt 56.

[0039] The first high-speed joint 39 is fixedly sleeved on the side wall of the driving bin 51. The interior of the driving bin 51 is located between the two driving columns 52 and is horizontally rotatably connected to two rotating shafts 53. A second driving pulley 59 is fixedly sleeved on each rotating shaft 53. A second driven pulley 510 is fixedly sleeved on each driving column 52. A fourth synchronous belt 511 is sleeved on the second driving pulley 59 and the second driven pulley 510. A third servo reduction motor 513 is fixedly connected to the inner wall of the driving bin 51. The shaft end of the third servo reduction motor 513 is fixedly connected to one of the ends of the rotating shafts 53. A gear 512 is fixedly sleeved on each rotating shaft 53. The gears 512 on the two rotating shafts 53 are meshed and connected with each other. The driving mechanism 5 can simultaneously drive the two retracting roller assemblies 2 and the substrate supporting roller assembly 3, so that the flexible substrate film 9 is subjected to more uniform force when being transported.

[0040] The retractable roller assembly 2 includes a sleeve shaft 21 and a winding roller 22. The sleeve shaft 21 is rotatably connected to the side wall of the magnetic field cavity 11. The end of the driving column 52 passes through the side wall of the body 1 and is fixedly connected to the end of the sleeve shaft 21. A column cavity 24 is opened at the center of one end of the winding roller 22. The column cavity 24 is sleeved with the sleeve shaft 21. The side wall of the sleeve shaft 21 is fixedly connected to the positioning plate 23. A plate cavity 25 is opened on the side wall of the column cavity 24. The positioning plate 23 is plugged into the plate cavity 25. A plurality of first threaded through holes 27 are opened at the center of the end of the winding roller 22. A plurality of first threaded holes 26 are opened at the end of the sleeve shaft 21 at positions corresponding to the plurality of first threaded through holes 27. The first threaded holes 26 and the first threaded through holes 27 are threadedly connected to the first bolts 28 for easy installation of the winding roller 22.

[0041] Two sides of the machine body 1 are fixedly connected to two side frames 111 at the same height of the two substrate support roller assemblies 3. The short shaft 33 and the drainage joint 38 are rotatably sleeved inside the side frame 111. The second high-speed joint 310 is fixedly plugged into the side frame 111. The liquid supply assembly 6 includes a cold liquid tank 61. The top surface of the cold liquid tank 61 is fixedly connected and connected to the liquid inlet pump 62 and the drainage pump 65. The liquid inlet pump 62 is fixedly connected and connected to the liquid inlet main pipe 63. The end of the liquid inlet main pipe 63 is fixedly connected and connected to the liquid inlet sub-pipe 64. Both ends of the sub-pipe 64 are fixedly connected to and communicated with the first high-speed connectors 39 on the two substrate support roller assemblies 3, the drainage pump 65 is fixedly connected to and communicated with the drainage main pipe 66, the drainage main pipe 66 is fixedly connected to and communicated with the drainage sub-pipe 67, both ends of the drainage sub-pipe 67 are fixedly inserted inside the two side frames 111, and the end of the drainage sub-pipe 67 is fixedly connected to and communicated with the second high-speed connector 310. The liquid supply assembly 6 ensures the circulation of cold liquid in the cold liquid coil 34 in the substrate support roller assembly 3 to take away the heat of the flexible substrate film 9.

[0042] The target material assembly 4 includes an arc-shaped shell 41, which is fixedly embedded on the side wall of the magnetic field cavity 11. A plurality of cylindrical targets 42 are evenly rotated and arranged on the surface of the arc-shaped shell 41. A plurality of plug-in plates 44 are evenly rotated and connected on the side wall of the arc-shaped shell 41. An insert cavity 45 is provided at one end of the cylindrical target 42 close to the arc-shaped shell 41. The plug-in plate 44 is plugged into the insert cavity 45. Two second threaded through holes 412 are provided at the end of the cylindrical target 42. Two second threaded holes 411 are provided at the end of the plug-in plate 44. Second bolts 413 are threadedly connected to the second threaded holes 411 and the second threaded through holes 412.

[0043] The arc-shaped shell 41 has multiple cylindrical targets 42 corresponding to the positions thereof, which are horizontally rotatably connected to multiple drive shafts 43. The ends of the drive shafts 43 pass through the side walls of the arc-shaped shell 41 and are fixedly connected to the rotating shafts of the plug plates 44. Two first synchronous pulleys 46 are fixedly sleeved on each drive shaft 43. The first synchronous pulleys 46 on the two adjacent drive shafts 43 are sleeved with the first synchronous belt 47. A second servo reduction motor 48 is fixedly connected to the inside of one end of the arc-shaped shell 41. The rotating shaft end of the second servo reduction motor 48 is fixedly connected to the second synchronous pulley 49. The first synchronous pulley 46 and the second synchronous pulley 49 on the drive shaft 43 close to the second servo reduction motor 48 are sleeved with the second synchronous belt 410. The cylindrical targets 42 are rotated, which can improve the utilization rate of the target material.

[0044] An argon tank 112 is arranged at the outer side of the body 1, and the argon tank 112 is fixedly connected to and connected to an air pump 113, the air pump 113 is fixedly connected to and connected to one end of an air supply pipe 114, the other end of the air supply pipe 114 is fixedly connected to the top surface of the body 1, the air supply pipe 114 is connected to the magnetic field cavity 11, and a vacuum pump 115 is fixedly connected to the side wall of the body 1, and the vacuum pump 115 is connected to the magnetic field cavity 11. The tension detection mechanism 8 includes a tension detector 81 fixedly connected to the side wall of the magnetic field cavity 11, the side wall of the tension detector 81 is fixedly connected to a roller seat 82, the side wall of the roller seat 82 is rotatably connected to a detection roller 83, and the detection roller 83 rolls in contact with the flexible substrate film 9.

[0045] The top surface of the machine body 1 is fixedly connected to the vertical plate 117, and the middle part of the vertical plate 117 is fixedly sleeved with a pneumatic push rod 118, and the output end of the pneumatic push rod 118 is fixedly connected to a hinge seat 119, and the hinge seat 119 is rotatably connected to a hinge block 120. The bottom surface of the end of the hinge block 120 is fixedly connected to the top surface of the sealed door plate 116, and two guide holes 123 are horizontally opened on both sides of the vertical plate 117. A guide rod 122 is horizontally slidably sleeved on each guide hole 123, and the end of the guide rod 122 is fixedly connected to the side wall of the hinge seat 119, and the end of the hinge seat 119 is fixedly connected to the first servo reduction motor 121. The end of the rotating shaft of the first servo reduction motor 121 is fixedly connected to the rotating shaft of the hinge block 120, and two sealing ports 124 are opened on both sides of the sealed door plate 116, and the sealing ports 124 are plugged into the side frame 111.

[0046] Embodiment 3:

[0047] See also Figure 1-10 , which is the third embodiment of the present invention. This embodiment is based on the above two embodiments. When the present invention is used, the winding roller 22 carrying the flexible substrate film 9 is fixed to the sleeve shaft 21, and then the end of the flexible substrate film 9 is wound around the first guide roller 12, the first squeezing roller 16 in sequence, and then wound around the roller body 31 of one of the substrate support roller assemblies 3, and then wound around the second squeezing roller 17, the detection roller 83 of the tension detection mechanism 8, the second guide roller 13, the rotating roller 76 of the tension adjustment assembly 7, the third squeezing roller 18 in sequence, and then wound around the roller body 31 of another substrate support roller assembly 3, and then wound around the fourth squeezing roller 19, the third guide roller 14, and the fourth guide roller 15, and the end is fixed on the winding roller 22 of another retractable roller assembly 2, and then the sealing door panel 116 is rotated to a vertical position, and horizontally moved to cover the surface of the body 1 for sealing, and then the magnetic field chamber 11 is evacuated and argon gas is introduced for protection, and the flexible substrate film 9 is firstly subjected to the first time on the roller body 31 of the first substrate support roller assembly 3. After sputtering coating, when it moves to the roller body 31 of the substrate supporting roller assembly 3, the other side will be on the outside, and then the coating work will be carried out on the other side, so that the flexible substrate film 9 can be continuously coated; the present invention supports the flexible substrate film 9 by the roller body 31 on the substrate supporting roller assembly 3, and continuously cools the flexible substrate film 9 on the roller body 31 by means of cold liquid, so that the heat of the flexible substrate film 9 is discharged through the cold liquid circulation under the premise of ensuring sufficient sputtering time, so as to avoid the phenomenon of high temperature of the flexible substrate film 9, and reduce the temperature of the flexible substrate film 9 under the premise of ensuring sufficient sputtering time, so as to avoid its deformation caused by heat; the present invention adopts the roller body 31 to support the flexible substrate film 9, and uses the tension detection mechanism 8 to detect the tension of the flexible substrate film 9 in real time, and cooperates with the tension adjustment component 7 to adjust the tension of the flexible substrate film 9 so that the tension is appropriate, so as to avoid the phenomenon of wrinkles on the flexible substrate film 9 or the phenomenon of the flexible substrate film 9 being damaged by excessive force, thereby ensuring the coating quality.

[0048] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A flexible material magnetron sputtering vacuum coating machine, comprising a machine body (1), a liquid supply component (6), and a flexible substrate film (9), characterized in that: A magnetic field cavity (11) is provided inside the machine body (1), one side of the magnetic field cavity (11) is an open structure, a sealing door plate (116) is rotatably provided on the machine body (1) at the side of the opening of the magnetic field cavity (11), two retractable roller assemblies (2) are rotatably provided at the lower part of the magnetic field cavity (11), two substrate support roller assemblies (3) are rotatably provided at the upper part of the magnetic field cavity (11), a target material assembly (4) is provided at a position above each substrate support roller assembly (3) in the magnetic field cavity (11), an anode mechanism (110) is fixedly connected to a position above the target material assembly (4) in the magnetic field cavity (11), and a driving mechanism (5) is provided on a side of the machine body (1) away from the opening of the magnetic field cavity (11); The substrate supporting roller assembly (3) comprises a roller body (31), the roller body (31) has a diameter of 60-130 cm, a long axis (32) is fixedly connected to the center of one end of the roller body (31), a short axis (33) is fixedly connected to the center of the other end of the roller body (31), a cold liquid coil (34) is fixedly connected to the inside of the roller body (31), a liquid inlet pipe (35) is fixedly embedded in the inside of the long axis (32), an end of the liquid inlet pipe (35) is fixedly connected to and communicates with one end of the cold liquid coil (34), and a drain pipe (35) is fixedly embedded in the inside of the short axis (33). The end of the long shaft (32) is fixedly connected to a liquid inlet joint (37), the liquid inlet joint (37) is connected to the liquid inlet pipe (35), the end of the short shaft (33) is fixedly connected to a liquid discharge joint (38), the liquid discharge pipe (36) is connected to the liquid discharge joint (38), the end of the liquid inlet joint (37) is rotatably connected to a first high-speed joint (39), and the end of the liquid discharge joint (38) is rotatably connected to a second high-speed joint (310); The magnetic field cavity (11) is located near one of the retractable roller assemblies (2) and is rotatably connected to the first guide roller (12); the magnetic field cavity (11) is located near another retractable roller assembly (2) and is rotatably connected to the third guide roller (14) and the fourth guide roller (15); the magnetic field cavity (11) is located between two substrate support roller assemblies (3) and is rotatably connected to the second guide roller (13); the magnetic field cavity (11) is located at both sides below one of the substrate support roller assemblies (3) and is rotatably connected to the first squeezing roller (16) and the second squeezing roller (17); the magnetic field cavity (11) is located at both sides below another substrate support roller assembly (3) and is rotatably connected to the third squeezing roller (18) and the fourth squeezing roller (19). A tension adjustment component (7) and a tension detection mechanism (8) are arranged between the two substrate support roller assemblies (3) in the magnetic field cavity (11); one end of the flexible substrate film (9) is fixedly arranged on one of the retractable roller assemblies (2); the other end of the flexible substrate film (9) is fixedly arranged on the other retractable roller assembly (2); the flexible substrate film (9) is wound around a first guide roller (12), a first squeezing roller (16), a second squeezing roller (17), a second guide roller (13), a third squeezing roller (18), a fourth squeezing roller (19), a third guide roller (14), a fourth guide roller (15), two substrate support roller assemblies (3), a tension adjustment component (7) and a tension detection mechanism (8).

2. The flexible material magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The tension adjustment assembly (7) comprises a panel (71), the panel (71) is fixedly embedded in the side wall of the magnetic field cavity (11), the side wall of the panel (71) is provided with a side slide groove (72), the panel (71) is provided with two plate-shaped slide grooves (73) at the top and bottom surfaces of the end of the side slide groove (72), the two plate-shaped slide grooves (73) are slidably connected to the top and bottom ends of the sealing slide plate (74), the side slide groove (72) is vertically slidably connected to the side slider (77), the side slider (77) is fixedly connected to the middle side wall of the sealing slide plate (74), and the sealing slide plate (7 4) A central side wall is horizontally fixedly connected to a core shaft (75) on one side away from the side slider (77); a roller (76) is rotatably sleeved on the core shaft (75); the roller (76) rolls in contact with the flexible substrate film (9); a screw rod (78) is vertically rotatably connected in the side slide groove (72); a threaded sleeve (79) is fixedly connected to the side slider (77); the screw rod (78) is threadedly connected to the threaded sleeve (79); a fourth servo reduction motor (710) is fixedly sleeved on the top surface of the panel (71); and the shaft end of the fourth servo reduction motor (710) is fixedly connected to the top of the screw rod (78).

3. The flexible material magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The driving mechanism (5) comprises a driving chamber (51) fixedly connected to the side wall of the machine body (1); the driving chamber (51) is horizontally rotatably connected to two driving columns (52) at positions corresponding to the two retractable roller assemblies (2); the long shaft (32) is rotatably sleeved on the side wall of the magnetic field cavity (11); the long shaft (32) on each substrate supporting roller assembly (3) passes through the side wall of the magnetic field cavity (11) and is located in the driving chamber (51) and is fixedly sleeved with a first driven pulley (55); one of the driving columns (52) is fixedly sleeved with a first main pulley (55); The first driving pulley (54) and the two first driven pulleys (55) are sleeved with a third synchronous belt (56); the inside of the driving chamber (51) is rotatably connected to two first idler pulleys (57) at positions on both sides of the top surface of the first driving pulley (54); the inside of the driving chamber (51) is rotatably connected to two second idler pulleys (58) at positions near each first driven pulley (55); the first idler pulley (57) and the second idler pulley (58) both roll in contact with the outer side wall of the third synchronous belt (56).

4. The flexible material magnetron sputtering vacuum coating machine according to claim 3, characterized in that: The first high-speed joint (39) is fixedly sleeved on the side wall of the driving chamber (51); the driving chamber (51) is located between the two driving columns (52) and is horizontally rotatably connected to two rotating shafts (53); a second driving pulley (59) is fixedly sleeved on each rotating shaft (53); a second driven pulley (510) is fixedly sleeved on each driving column (52); a fourth synchronous belt (511) is sleeved on the second driving pulley (59) and the second driven pulley (510); a third servo reduction motor (513) is fixedly connected to the inner side wall of the driving chamber (51); a rotating shaft end of the third servo reduction motor (513) is fixedly connected to the end of one of the rotating shafts (53); a gear (512) is fixedly sleeved on each rotating shaft (53); and the gears (512) on the two rotating shafts (53) are meshed and connected with each other.

5. The flexible material magnetron sputtering vacuum coating machine according to claim 3, characterized in that: The retractable roller assembly (2) comprises a sleeve shaft (21) and a roller (22); the sleeve shaft (21) is rotatably connected to the side wall of the magnetic field cavity (11); the end of the driving column (52) passes through the side wall of the machine body (1) and is fixedly connected to the end of the sleeve shaft (21); a column cavity (24) is provided at the center of one end of the roller (22); the column cavity (24) is sleeved with the sleeve shaft (21); the side wall of the sleeve shaft (21) is fixedly connected to a positioning plate (23); a plate cavity (25) is provided at the side wall of the column cavity (24); the positioning plate (23) is plugged into the plate cavity (25); a plurality of first threaded through holes (27) are provided at the center of the end of the roller (22); a plurality of first threaded holes (26) are provided at the end of the sleeve shaft (21) at positions corresponding to the plurality of first threaded through holes (27); the first threaded holes (26) and the first threaded through holes (27) are threadedly connected to first bolts (28).

6. The flexible material magnetron sputtering vacuum coating machine according to claim 1, characterized in that: Two side frames (111) are fixedly connected to the two sides of the machine body (1) at the same height position of the two substrate support roller assemblies (3); the short shaft (33) and the liquid discharge joint (38) are rotatably sleeved inside the side frames (111); the second high-speed joint (310) is fixedly plugged into the side frames (111); the liquid supply assembly (6) includes a cold liquid bin (61); the top surface of the cold liquid bin (61) is fixedly connected to and connected to a liquid inlet pump (62) and a liquid discharge pump (65); the liquid inlet pump (62) is fixedly connected to and connected to a liquid inlet main pipe (63) The end of the liquid inlet main pipe (63) is fixedly connected to and connected to the liquid inlet sub-pipe (64), and the two ends of the liquid inlet sub-pipe (64) are fixedly connected to and connected to the first high-speed joints (39) on the two substrate support roller assemblies (3). The liquid discharge pump (65) is fixedly connected to and connected to the liquid discharge main pipe (66), and the liquid discharge main pipe (66) is fixedly connected to and connected to the liquid discharge sub-pipe (67). The two ends of the liquid discharge sub-pipe (67) are fixedly inserted into the two side frames (111), and the end of the liquid discharge sub-pipe (67) is fixedly connected to and connected to the second high-speed joint (310).

7. The flexible material magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The target assembly (4) comprises an arc-shaped shell (41), the arc-shaped shell (41) is fixedly embedded in the side wall of the magnetic field cavity (11), a plurality of cylindrical targets (42) are evenly rotated and arranged on the surface of the arc-shaped shell (41), a plurality of plug-in plates (44) are evenly rotated and connected on the side wall of the arc-shaped shell (41), an inserting cavity (45) is provided at one end of the cylindrical target (42) close to the arc-shaped shell (41), the plug-in plate (44) is plugged into the inserting cavity (45), two second threaded through holes (412) are provided at the end of the cylindrical target (42), two second threaded holes (411) are provided at the end of the plug-in plate (44), and second bolts (413) are threadedly connected to the second threaded holes (411) and the second threaded through holes (412).

8. The flexible material magnetron sputtering vacuum coating machine according to claim 7, characterized in that: The arc-shaped shell (41) is internally connected to a plurality of drive shafts (43) for horizontal rotation at positions corresponding to a plurality of columnar targets (42). The ends of the drive shafts (43) pass through the side walls of the arc-shaped shell (41) and are fixedly connected to the rotating shafts of the plug plate (44). Two first synchronous pulleys (46) are fixedly sleeved on each of the drive shafts (43). The first synchronous pulleys (46) on two adjacent drive shafts (43) are sleeved with a first synchronous belt (47). A second servo reduction motor (48) is fixedly connected to the interior of one end of the arc-shaped shell (41). The rotating shaft end of the second servo reduction motor (48) is fixedly connected to a second synchronous pulley (49). The first synchronous pulley (46) and the second synchronous pulley (49) on the drive shaft (43) close to the second servo reduction motor (48) are sleeved with a second synchronous belt (410).

9. The flexible material magnetron sputtering vacuum coating machine according to claim 1, characterized in that: An argon tank (112) is arranged at an outer position of the machine body (1), the argon tank (112) is fixedly connected to and connected to an air pump (113), the air pump (113) is fixedly connected to and connected to one end of an air supply pipe (114), the other end of the air supply pipe (114) is fixedly connected to the top surface of the machine body (1), the air supply pipe (114) is connected to the magnetic field cavity (11), a vacuum pump (115) is fixedly connected to the side wall of the machine body (1), the vacuum pump (115) is connected to the magnetic field cavity (11), the tension detection mechanism (8) comprises a tension detector (81) fixedly connected to the side wall of the magnetic field cavity (11), the side wall of the tension detector (81) is fixedly connected to a roller seat (82), the side wall of the roller seat (82) is rotatably connected to a detection roller (83), and the detection roller (83) rolls in contact with the flexible substrate film (9).

10. The flexible material magnetron sputtering vacuum coating machine according to claim 1, characterized in that: The top surface of the machine body (1) is fixedly connected to a vertical plate (117), the middle of the vertical plate (117) is fixedly sleeved with a pneumatic push rod (118), the output end of the pneumatic push rod (118) is fixedly connected to a hinge seat (119), the hinge seat (119) is rotatably connected to a hinge block (120), the bottom surface of the end of the hinge block (120) is fixedly connected to the top surface of a sealed door plate (116), two guide holes (123) are horizontally provided on both sides of the vertical plate (117), each of the guide holes ( A guide rod (122) is horizontally slidably sleeved on the upper surface of the sealing door panel (123), the end of the guide rod (122) is fixedly connected to the side wall of the hinge seat (119), the end of the hinge seat (119) is fixedly connected to the first servo reduction motor (121), the rotating shaft end of the first servo reduction motor (121) is fixedly connected to the rotating shaft of the hinge block (120), two sealing openings (124) are provided on both sides of the sealing door panel (116), and the sealing openings (124) are plugged into the side frame (111).

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