Xenon-mercury lamp regulation and control method and device, storage medium and electronic equipment

Abstract

The invention provides a xenon-mercury lamp regulation and control method and device, a storage medium and electronic equipment, and relates to the field of semiconductor manufacturing. The electronic equipment obtains the current temperature of the xenon-mercury lamp; wherein the xenon-mercury lamp is provided with a temperature control system; determining a first control parameter of the temperature control system according to the temperature difference between the current temperature and the target temperature; and controlling the temperature control system by using the first control parameter, so that the xenon-mercury lamp is maintained at the target temperature. Therefore, by performing closed-loop control on the temperature in the xenon-mercury lamp, stable working temperature can be provided for the xenon-mercury lamp, and the risk that the service life of the xenon-mercury lamp is shortened due to temperature change is reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing, and more specifically, to a mercury-xenon lamp control method, device, storage medium, and electronic equipment. Background Art

[0002] As a highly efficient, high-brightness gas discharge light source, the mercury-xenon lamp is used to measure transmittance and phase shift in the field of ultra-large-scale integrated circuits. Its operating principle relies on the interaction between xenon gas and mercury vapor in the discharge tube. High voltage excitation during ignition generates ultraviolet light, which in turn stimulates mercury atoms to produce fluorescence, ultimately emitting 248nm ultraviolet light.

[0003] However, research has found that the power sources currently used in lighting systems are mostly constant current sources, and the power does not change with environmental factors and the characteristics of the light source itself. This leads to instability in the optical parameters of the mercury-xenon lamp, such as the light intensity and irradiance, which in turn reduces the service life of the mercury-xenon lamp. Summary of the Invention

[0004] In order to overcome at least one deficiency in the prior art, the present application provides a mercury-xenon lamp control method, device, storage medium, and electronic device, including:

[0005] In a first aspect, the present application provides a mercury-xenon lamp control method, the method comprising:

[0006] Acquiring a current temperature of a mercury-xenon lamp, wherein the mercury-xenon lamp is equipped with a temperature control system;

[0007] determining a first control parameter of the temperature control system according to a temperature difference between the current temperature and the target temperature;

[0008] The temperature control system is controlled using the first control parameter to maintain the mercury-xenon lamp at the target temperature.

[0009] In a second aspect, the present application further provides a mercury-xenon lamp control device, the device comprising:

[0010] A data acquisition module, for acquiring the current temperature of the mercury-xenon lamp, wherein the mercury-xenon lamp is equipped with a temperature control system;

[0011] a state control module, configured to determine a first control parameter of the temperature control system according to a temperature difference between the current temperature and the target temperature;

[0012] The state control module is further configured to control the temperature control system using the first control parameter so as to maintain the mercury-xenon lamp at the target temperature.

[0013] In a third aspect, the present application further provides a storage medium storing a computer program, which, when executed by a processor, implements the mercury-xenon lamp control method.

[0014] In a fourth aspect, the present application further provides an electronic device, comprising a processor and a memory, wherein the memory stores a computer program, and when the computer program is executed by the processor, the mercury-xenon lamp control method is implemented.

[0015] Compared with the prior art, this application has the following beneficial effects:

[0016] This application provides a mercury-xenon lamp control method, device, storage medium, and electronic device. The electronic device obtains the current temperature of the mercury-xenon lamp; the mercury-xenon lamp is equipped with a temperature control system; a first control parameter of the temperature control system is determined based on the temperature difference between the current temperature and a target temperature; and the temperature control system is controlled using the first control parameter to maintain the mercury-xenon lamp at the target temperature. By performing closed-loop temperature control on the mercury-xenon lamp, a stable operating temperature can be maintained for the lamp, reducing the risk of shortening the lamp's service life due to temperature fluctuations. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 This is a flow chart of a mercury-xenon lamp control method according to an embodiment of the present application;

[0019] Figure 2 This is one of the schematic diagrams of the control principle of the mercury-xenon lamp provided in the embodiment of the present application;

[0020] Figure 3 This is a second flow chart of the mercury-xenon lamp control method provided in an embodiment of the present application;

[0021] Figure 4 The second schematic diagram of the control principle of the mercury-xenon lamp provided in the embodiment of the present application;

[0022] Figure 5 The third schematic diagram of the control principle of the mercury-xenon lamp provided in the embodiment of the present application;

[0023] Figure 6 A schematic diagram of the structure of a mercury-xenon lamp control device provided in an embodiment of the present application;

[0024] Figure 7 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0025] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0028] In the description of this application, the terms "first", "second", "third", etc. are used only to distinguish descriptions and should not be understood as indicating or implying relative importance. In addition, the terms "comprises", "comprising" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further limitations, an element limited by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article or device that includes the element.

[0029] Based on the above statement, as described in the background, most current power sources used in lighting systems are constant-current sources, whose power does not change with environmental factors or the characteristics of the light source itself. This constant current supply can lead to instabilities in optical parameters such as light intensity and irradiance of mercury-xenon lamps, thereby shortening the lamp's service life.

[0030] For example, the working principle of a mercury-xenon lamp relies on the interaction between xenon gas and mercury vapor in the discharge tube. During the ignition process, ultraviolet light is generated by high-voltage excitation, thereby achieving the light emission of the light source. In order to maintain the normal operation of the mercury-xenon lamp, mercury vapor must continue to exist in the discharge tube. However, if the temperature of the mercury-xenon lamp drops due to various reasons, the mercury vapor may condense and adhere to the bulb (i.e., the transparent shell of the mercury-xenon lamp), which will not only affect the light intensity, but also further reduce the luminous efficiency. In addition, temperature changes will also significantly affect the luminous intensity and stability of the mercury-xenon lamp.

[0031] Based on the discovery of the above technical problems, the inventors have proposed the following technical solutions after creative work to solve or improve the above problems. It should be noted that the defects existing in the solutions in the above prior art are the results obtained by the inventors after practice and careful research. Therefore, the discovery process of the above problems and the solutions proposed in the embodiments of this application below for the above problems should all be the contributions made by the inventors to this application in the process of invention and creation, and should not be understood as technical contents known to those skilled in the art.

[0032] In view of the above-mentioned problems, this embodiment provides a method for controlling a mercury-xenon lamp. Figure 1 As shown, the method includes:

[0033] S1, obtain the current temperature of the mercury-xenon lamp.

[0034] Among them, the mercury-xenon lamp is equipped with a temperature control system.

[0035] S2, determining a first control parameter of the temperature control system according to the temperature difference between the current temperature and the target temperature.

[0036] S3, controlling the temperature control system using the first control parameter to maintain the mercury-xenon lamp at a target temperature.

[0037] In this way, by performing closed-loop control on the temperature in the mercury-xenon lamp, a stable operating temperature can be provided for the mercury-xenon lamp, thereby reducing the risk of shortening the service life of the mercury-xenon lamp due to temperature changes.

[0038] As an optional embodiment of the present application, the electronic device that implements the above-mentioned mercury-xenon lamp control method can be, but is not limited to, an embedded device integrated with a mercury-xenon lamp, a desktop computer, a laptop computer, etc.

[0039] For example, take a desktop computer as an example. Figure 2As shown in the figure, a desktop computer 11 serves as the host computer for a mercury-xenon lamp 12, communicating with the controller 13 of the mercury-xenon lamp 12 via a serial port (e.g., RS232). The mercury-xenon lamp 12 is also equipped with a driving power supply 14, a ignition trigger 15, and a temperature control system 16. The driving power supply 14 is a power-adaptive constant-current power supply connected to the mercury-xenon lamp 12 via the ignition trigger 15. The ignition trigger 15 is used to output a ignition voltage to illuminate the mercury-xenon lamp. Once the mercury-xenon lamp 12 is illuminated, it outputs a rated voltage to maintain the lamp 12's illumination.

[0040] The ignition trigger 15 includes a half-bridge LLC series resonant circuit, an output control circuit, and a voltage doubler rectifier circuit. The working principle of the ignition trigger 15 is as follows:

[0041] First, a half-bridge LLC series resonant circuit generates a high starting voltage. This circuit utilizes an LLC resonant topology and precisely adjusts circuit parameters to produce the required high-voltage pulses. When the mercury-xenon lamp output current reaches zero, the half-bridge LLC series resonant circuit outputs a high starting voltage, causing the lamp to break down and ignite.

[0042] The output control circuit manages and controls the output of the half-bridge LLC series resonant circuit. It enables or disables the high-starting voltage output at the appropriate time based on the controller's instructions. This section typically includes switching devices and driver circuits to ensure accurate control of the high-starting voltage.

[0043] Finally, the voltage-doubling rectifier circuit is responsible for converting the output voltage of the mercury-xenon lamp to the rated voltage suitable for its operation after it is ignited. When the output current of the mercury-xenon lamp is not zero, the voltage-doubling rectifier circuit outputs the rated voltage to maintain normal operation. The voltage-doubling rectifier circuit typically includes multiple diodes and capacitors. Through rectification and filtering, it converts high-voltage pulses into stable low-voltage DC power.

[0044] Continue to see Figure 2 The controller is also connected to the temperature control system, so that the desktop computer can control the temperature of the mercury xenon lamp through the controller.

[0045] In order to make the solution provided by this embodiment clearer, a desktop computer is used as an electronic device to implement the mercury xenon lamp control method. Figure 1 Each step in the method shown is described in detail. However, it should be understood that the operations in the flowchart can be implemented in any order, and steps that have no logical contextual relationship can be reversed or implemented simultaneously. In addition, those skilled in the art can add one or more other operations to the flowchart or remove one or more operations from the flowchart under the guidance of the content of this application. Figure 1 As shown, the method includes:

[0046] S1, obtain the current temperature of the mercury-xenon lamp.

[0047] In practice, it has been found that after starting, a mercury-xenon lamp needs to run for a period of time before reaching stability. Therefore, in some optional embodiments of the present application, after the mercury-xenon lamp has been preheated for a target period of time, the desktop computer obtains multiple historical power values ​​of the mercury-xenon lamp; if the deviation between the multiple historical power values ​​is less than a deviation threshold, the current temperature of the mercury-xenon lamp is obtained.

[0048] For example, the mercury xenon lamp may be preheated for 15 minutes, and then the electrical power of the light output may be measured more than three times within at least 30 minutes. The deviation of the electrical power of the light output may be less than 0.5%.

[0049] In addition, the mercury xenon lamp is equipped with a temperature control system. The temperature control system may include a temperature sensor, a fan or other cooling system, a first processor, etc. Figure 2 The first processor can send the collected temperature to the mercury-xenon lamp controller via a temperature sensor. The mercury-xenon lamp controller then forwards the temperature to the host computer. The host computer then outputs control parameters based on the current temperature and sends them to the mercury-xenon lamp controller. The mercury-xenon lamp controller then forwards the control parameters to the first processor, which then controls the fan or other cooling system according to the control parameters.

[0050] Based on the description of the current temperature of the mercury xenon lamp in the above embodiment, continue to refer to Figure 1 , the method further comprises:

[0051] S2, determining a first control parameter of the temperature control system according to the temperature difference between the current temperature and the target temperature.

[0052] To this end, a currently available controller is selected to process the temperature difference between the current temperature and the target temperature to obtain the first control parameter of the temperature control system. As an optional implementation of this embodiment, a desktop computer can process the temperature difference between the current temperature and the target temperature using a first PID controller to obtain the first control parameter of the mercury-xenon lamp temperature control system.

[0053] It should be understood that the first PID controller is a classic control algorithm for temperature control. This algorithm uses a combination of three parts: proportional (P), integral (I), and differential (D) to accurately adjust the parameters in the temperature control system to achieve precise control of the target temperature. Specifically, the first PID controller is used to process the temperature difference between the current temperature and the target temperature to obtain the optimal control parameters to ensure that the mercury-xenon lamp can operate in an ideal temperature environment. Among them, the target temperatures of different parts of the mercury-xenon lamp may vary to a certain extent. For example, the anode and cathode temperatures are 150°C, the temperature of the bulb surface is 600°C, and the top heat dissipation temperature is 100°C.

[0054] Based on the above description of the first control parameter of the temperature control system, continue to participate Figure 1 , the method further comprises:

[0055] S3, controlling the temperature control system using the first control parameter to maintain the mercury-xenon lamp at a target temperature.

[0056] In this way, by performing closed-loop control on the temperature in the mercury-xenon lamp, a stable operating temperature can be provided for the mercury-xenon lamp, reducing the occurrence of mercury vapor adhering to the bulb due to temperature changes, thereby increasing the service life of the mercury-xenon lamp.

[0057] Furthermore, it should be understood that mercury-xenon lamps are commonly used as components in precision instruments such as photolithography machines. Therefore, the optical stability of mercury-xenon lamps is particularly important to the final yield of photolithography machines. Although temperature control can reduce the amount of mercury vapor adhering to the bulb, as the life of the mercury-xenon lamp increases, mercury vapor will gradually adhere to the bulb, causing the light intensity of the mercury-xenon lamp to change.

[0058] In this regard, Figure 3 As shown, in an optional embodiment of the present application, the method further includes:

[0059] S4, obtaining the current power of the mercury-xenon lamp.

[0060] Exemplarily, a desktop computer collects the current and voltage of the mercury-xenon lamp through an analog-to-digital converter (ADC), thereby obtaining the current power of the mercury-xenon lamp.

[0061] S5, obtaining a second control parameter of the driving power supply according to the power difference between the current power and the target power.

[0062] Similarly, a currently mature controller is selected to process the power difference between the current power and the target power to obtain the second control parameter of the driving power supply. In an optional embodiment of the present application, the desktop computer can process the power difference between the current power and the target power through a second PID controller to obtain the second control parameter of the driving power supply. It should be understood that the second PID controller is a classic control algorithm for power control. The algorithm uses a combination of three parts: proportional (P), integral (I), and differential (D) to accurately adjust the parameters in the driving power supply to achieve precise control of the power of the mercury-xenon lamp.

[0063] Based on the introduction of the second control parameter above, continue to refer to Figure 3 , the method further comprises:

[0064] S6, controlling the driving power supply using the second control parameter to maintain the target power of the mercury-xenon lamp.

[0065] For example, see Figure 2 The driving power supply in the figure includes a control system, an electromagnetic interference filtering circuit, a three-phase rectifier filtering circuit, a full-bridge inverter circuit, a high-frequency transformer, and an output synchronous rectifier filtering circuit, etc. It is controlled by the pulse width modulation (PWM) signal output by the controller. Figure 2 On the basis of Figure 4 As shown, the mercury-xenon lamp is also equipped with a light intensity control system 17. This system includes a second processor, sensors for measuring the lamp's current and voltage, and an ADC for analog-to-digital conversion. The second processor uses the ADC to collect the lamp's voltage and current and transmits them to the lamp's controller 13. The controller 13 then forwards the lamp's current and voltage data to the desktop computer 11.

[0066] Desktop computer 11 calculates the current power of mercury-xenon lamp 12 based on the current and voltage of xenon lamp 12 and compares it with the target power to obtain a power difference. Finally, a built-in second PID controller processes the power difference to obtain a second control parameter for power supply 14. Desktop computer 11 transmits the second control parameter to controller 13, which then outputs an appropriate PWM signal to power supply 14 based on the second control parameter, ensuring that power supply 14 maintains the target power of mercury-xenon lamp 12.

[0067] Finally, if Figure 5 As shown, the mercury xenon lamp 12 is also equipped with an overcurrent protection circuit 18 for disconnecting the circuit for overcurrent protection when the output current exceeds a predetermined value range during PWM modulation, thereby improving the stability and safety of the mercury xenon lamp.

[0068] Based on the same inventive concept as the mercury xenon lamp control method provided in this embodiment, this embodiment also provides a mercury xenon lamp control device, which includes at least one software function module that can be stored in the memory 31 in software form or fixed in the electronic device. The processor 32 in the electronic device is used to execute the executable module stored in the memory 31. For example, the software function module and computer program included in the device. Please refer to Figure 6 Functionally, the device can include:

[0069] The data acquisition module 21 obtains the current temperature of the mercury-xenon lamp, wherein the mercury-xenon lamp is equipped with a temperature control system;

[0070] The state control module 22 is used to determine a first control parameter of the temperature control system according to the temperature difference between the current temperature and the target temperature;

[0071] The state control module 22 is further configured to control the temperature control system using the first control parameter so as to maintain the mercury-xenon lamp at a target temperature.

[0072] In the embodiment of the present application, the data acquisition module 21 is used to implement Figure 1 In step S1, the state control module 22 is used to implement Figure 1 Therefore, for the detailed description of each of the above modules, please refer to the specific implementation of the corresponding steps, and this application will not go into details.

[0073] In addition, given that the mercury-xenon lamp control method provided in this application has the same inventive concept, the mercury-xenon lamp control device can also implement other steps or sub-steps of the method through the above modules.

[0074] For example:

[0075] Optionally, the state control module 22 is further specifically configured to:

[0076] The temperature difference between the current temperature and the target temperature is processed by the first PID controller to obtain a first control parameter of the mercury-xenon lamp temperature control system.

[0077] Optionally, the mercury-xenon lamp is further configured with a driving power supply, and the data acquisition module 21 is also used to obtain the current power of the mercury-xenon lamp;

[0078] The state control module 22 is further configured to obtain a second control parameter of the driving power supply according to the power difference between the current power and the target power; and control the driving power supply using the second control parameter to maintain the target power of the mercury-xenon lamp.

[0079] Optionally, the state control module 22 is further specifically configured to:

[0080] The power difference between the current power and the target power is processed by the second PID controller to obtain a second control parameter of the driving power supply.

[0081] Optionally, the data acquisition module 21 is further configured to obtain multiple historical powers of the mercury-xenon lamp after the mercury-xenon lamp is preheated for a target time; if the deviation between the multiple historical powers is less than a deviation threshold, obtain the current temperature of the mercury-xenon lamp.

[0082] In addition, the functional modules in each embodiment of the present application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0083] It should also be understood that if the above embodiments are implemented in the form of software function modules and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art, or part of the technical solution, can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for enabling a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application.

[0084] Therefore, this embodiment further provides a storage medium, which is a computer-readable storage medium. The storage medium stores a computer program, which, when executed by a processor, implements the mercury-xenon lamp control method provided in this embodiment. The storage medium can be any medium capable of storing program code, such as a USB flash drive, a mobile hard drive, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk.

[0085] This application also provides an electronic device for implementing the mercury xenon lamp control method. Figure 7 As shown, the electronic device includes a processor 32 and a memory 31. In addition, the memory 31 stores a computer program, and the processor implements the mercury xenon lamp control method provided in this embodiment by reading and executing the computer program corresponding to the above embodiment in the memory 31.

[0086] Continue to see Figure 7 The electronic device further includes a communication unit 33. The memory 31, the processor 32 and the communication unit 33 are electrically connected to each other directly or indirectly via a system bus 34 to achieve data transmission or interaction.

[0087] The memory 31 may be an information recording device based on any electronic, magnetic, optical or other physical principles, for recording execution instructions, data, etc. In some embodiments, the memory 31 may be, but is not limited to, a volatile memory, a non-volatile memory, a storage drive, etc.

[0088] In some embodiments, the volatile memory may be a random access memory (RAM); in some embodiments, the non-volatile memory may be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), a flash memory, etc.; in some embodiments, the storage drive may be a magnetic disk drive, a solid-state drive, any type of storage disk (such as a CD, DVD, etc.), or a similar storage medium, or a combination thereof.

[0089] The communication unit 33 is used to send and receive data through a network. In some embodiments, the network may include a wired network, a wireless network, a fiber optic network, a telecommunications network, an intranet, the Internet, a local area network (LAN), a wide area network (WAN), a wireless local area network (WLAN), a metropolitan area network (MAN), a wide area network (WAN), a public switched telephone network (PSTN), a Bluetooth network, a ZigBee network, or a near field communication (NFC) network, or any combination thereof. In some embodiments, the network may include one or more network access points. For example, the network may include a wired or wireless network access point, such as a base station and / or a network switching node, through which one or more components of the service request processing system can connect to the network to exchange data and / or information.

[0090] The processor 32 may be an integrated circuit chip having signal processing capabilities, and the processor may include one or more processing cores (e.g., a single-core processor or a multi-core processor). By way of example only, the processor may include a central processing unit (CPU), an application-specific integrated circuit (ASIC), an application-specific instruction set processor (ASIP), a graphics processing unit (GPU), a physical processing unit (PPU), a digital signal processor (DSP), a field programmable gate array (FPGA), a programmable logic device (PLD), a controller, a microcontroller unit, a reduced instruction set computer (RISC), or a microprocessor, or any combination thereof.

[0091] I understand. Figure 7 The structure shown is for reference only. Figure 7 More or fewer components than shown, or with Figure 7 Different configurations shown. Figure 7 The components shown may be implemented in hardware, software, or a combination thereof.

[0092] It should be understood that the devices and methods disclosed in the above embodiments may also be implemented in other ways. The device embodiments described above are merely illustrative. For example, the flowcharts and block diagrams in the accompanying drawings show the possible architectures, functions, and operations of the devices, methods, and computer program products according to multiple embodiments of the present application. In this regard, each box in the flowchart or block diagram may represent a module, a program segment, or a portion of code, which contains one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box may also occur in an order different from that marked in the accompanying drawings. For example, two consecutive boxes may actually be executed substantially in parallel, or they may sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flowchart, and the combination of boxes in the block diagram and / or flowchart, may be implemented using a dedicated hardware-based system that performs a specified function or action, or may be implemented using a combination of dedicated hardware and computer instructions.

[0093] The above descriptions are merely examples of various embodiments of the present application, but the scope of protection of the present application is not limited thereto. Any modifications or substitutions that can be readily conceived by a person skilled in the art within the technical scope disclosed in the present application should be included within the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A mercury xenon lamp control method, characterized in that: The method comprises: Acquiring a current temperature of a mercury-xenon lamp, wherein the mercury-xenon lamp is equipped with a temperature control system; Determining a first control parameter of the temperature control system according to a temperature difference between the current temperature and the target temperature; The temperature control system is controlled by using the first control parameter to maintain the mercury-xenon lamp at the target temperature.

2. The mercury-xenon lamp control method according to claim 1, characterized in that: Determining the first control parameter of the mercury-xenon lamp temperature control system according to the temperature difference between the current temperature and the target temperature includes: The temperature difference between the current temperature and the target temperature is processed by a first PID controller to obtain a first control parameter of the mercury-xenon lamp temperature control system.

3. The mercury xenon lamp control method according to claim 1, characterized in that: The mercury xenon lamp is also equipped with a driving power supply, and the method further comprises: Get the current power of the mercury xenon lamp; Obtaining a second control parameter of the driving power source according to a power difference between the current power and the target power; The driving power supply is controlled by using the second control parameter so that the mercury-xenon lamp maintains the target power.

4. The mercury-xenon lamp control method according to claim 3, characterized in that: The obtaining, according to the power difference between the current power and the target power, a second control parameter of the driving power source comprises: The power difference between the current power and the target power is processed by a second PID controller to obtain a second control parameter of the driving power supply.

5. The mercury-xenon lamp control method according to claim 3, characterized in that: The mercury xenon lamp is also equipped with a ignition trigger, and the driving power supply is connected to the mercury xenon lamp via the ignition trigger; The ignition trigger is used to output an ignition voltage to light the mercury-xenon lamp, and after the mercury-xenon lamp is lit, output a rated voltage to maintain the lighting state of the mercury-xenon lamp.

6. The mercury-xenon lamp control method according to any one of claims 3 to 5, characterized in that: The driving power supply is a constant current power supply controlled by a PWM signal.

7. The mercury-xenon lamp control method according to claim 1, characterized in that: The method further comprises: After the mercury-xenon lamp is preheated for a target time, obtaining multiple historical powers of the mercury-xenon lamp; If the deviation between the multiple historical powers is less than the deviation threshold, the current temperature of the mercury-xenon lamp is obtained.

8. A mercury xenon lamp control device, characterized in that: The device comprises: A data acquisition module, for acquiring the current temperature of the mercury-xenon lamp, wherein the mercury-xenon lamp is equipped with a temperature control system; A state control module, used for determining a first control parameter of the temperature control system according to a temperature difference between the current temperature and the target temperature; The state control module is further used to control the temperature control system using the first control parameter so that the mercury-xenon lamp is maintained at the target temperature.

9. A storage medium, characterized in that: The storage medium stores a computer program, and when the computer program is executed by a processor, the mercury-xenon lamp control method according to any one of claims 1 to 7 is implemented.

10. An electronic device, characterized in that: The electronic device includes a processor and a memory, wherein the memory stores a computer program, and when the computer program is executed by the processor, the mercury-xenon lamp control method according to any one of claims 1 to 7 is implemented.

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