Radial target system for hydrogen ion implanter

Abstract

The invention discloses a radial target system for a hydrogen ion implanter, and relates to the field of cyclotrons. The radial target system for the hydrogen ion implanter comprises a vacuum chamber and a supporting frame installed on the outer wall of the vacuum chamber, a target head integrated part is arranged in the vacuum chamber in a sliding mode, a water conveying needle is arranged in the supporting frame, the tail end of the water conveying needle is fixedly welded to the target head integrated part, and the water conveying needle is driven by a linear transmission module in the supporting frame. And a stay wire sensor is arranged between the water conveying needle and the supporting frame. According to the radial target system for the hydrogen ion implanter, the small-size compact design is adopted, meanwhile, the radial target system integrates and optimizes the functions of water-cooling heat dissipation, beam measurement, linear transmission, position feedback and the like, the number of machined parts is reduced, the cost and the assembly difficulty are reduced, meanwhile, no sensing lead needs to be added in a vacuum chamber, and the production cost is reduced. And the problem of bombardment damage of the beam to the cable is fundamentally solved.

Description

Technical Field

[0001] The invention relates to the technical field of cyclotron accelerators, in particular to a radial target system for a hydrogen ion implanter. Background Art

[0002] According to the operating principle of cyclotron particle acceleration, as the number of circles a charged particle makes in the magnetic field increases, the cyclotron radius relative to the accelerator magnetic pole increases, the particle speed increases, the energy increases, and ultimately high-energy particles are obtained. For a cyclotron used in a hydrogen ion implanter, it is necessary to be able to draw out hydrogen ion beams of different energies within a certain energy range, and ensure that each beam energy point is accurately adjustable.

[0003] Therefore, during the debugging process of the cyclotron, a "radial target system" is needed to accurately measure the beam signal and beam intensity at each cyclotron radius to ensure that the accelerator can draw a beam of predetermined energy at the corresponding cyclotron radius when it is operating normally. Almost all existing cyclotron beam diagnostic systems are equipped with related components of the radial target system for beam diagnosis. However, in actual application, there are problems such as large size, large number of parts, and difficulty in assembly. Therefore, a radial target system for hydrogen ion implantation is provided. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides a radial target system for a hydrogen ion implanter, which solves the problems of the radial target system of the existing hydrogen ion implanter in actual application, such as excessive size, large number of parts and great difficulty in assembly.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: A radial target system for a hydrogen ion implanter, comprising a vacuum chamber and a support frame installed on the outer wall of the vacuum chamber, a target head integrated component is slidably arranged in the vacuum chamber, a water transport needle is arranged inside the support frame, the end of the water transport needle is fixedly welded to the target head integrated component, a connecting portion is arranged between the water transport needle and the target head integrated component, and the water transport needle is connected to the inside of the target head integrated component through the connecting portion; The connecting portion is deformed by telescoping; A linear transmission module is provided at the inner bottom of the support frame, the water transport needle is fixedly mounted on the linear transmission module, a pull-wire sensor is installed at one end of the inner wall of the support frame away from the target head integrated component, the other end of the pull-wire sensor is connected to the water transport needle, and the pull-wire sensor is used to monitor the position of the water transport needle; The target head integrated component, the connecting part and the water transport needle are all installed to be insulated from the ground by using insulating parts.

[0006] Preferably, the target head integrated component comprises a target head receiving body, one end of the target head receiving body is provided with a beam receiving notch, and the other end of the target head receiving body is provided with a connecting flange.

[0007] Preferably, an insulating plate is provided between the target head receiver and the connecting flange, the target head receiver, the insulating plate and the connecting flange are fixed by a first screw, and an insulating sleeve is provided on the inner wall of the connecting flange, and the first screw passes through the insulating sleeve.

[0008] Preferably, the connecting portion includes a telescopic pipe fixedly welded to the end face of the target head receiving body, a vacuum mounting interface is fixedly installed at the end of the support frame, a positioning ring is installed between one end of the telescopic pipe and the outer wall of the vacuum mounting interface, the other end of the telescopic pipe extends to the interior of the support frame and is fixedly welded with an adapter plate, and the water transport needle is fixedly installed on the side of the adapter plate away from the telescopic pipe.

[0009] Preferably, the telescopic pipe is composed of two groups of hard pipes connected together, and a telescopic sealing sleeve is provided at the connection between the two groups of hard pipes. The outer surface of the telescopic pipe is provided with a bellows, and the two ends of the bellows are fixedly connected to the vacuum installation interface and the adapter plate respectively.

[0010] Preferably, the vacuum installation interface is fixedly installed on the outer wall of the vacuum chamber by a second screw, and a sealing ring is provided between the vacuum installation interface and the vacuum chamber.

[0011] Preferably, the adapter plate is connected to the linear transmission module, the movable end of the wire sensor is fixedly arranged on the adapter plate, a limit trigger block is fixedly installed on the outer surface of the adapter plate, and the limit trigger block is control-connected to the linear transmission module.

[0012] Preferably, the linear transmission module includes a guide rail fixedly arranged in a supporting frame, a sliding nut is slidably arranged in the guide rail, a lead screw is rotatably connected inside the guide rail, the lead screw is threadedly connected to the sliding nut, and the adapter plate is fixedly installed on the top of the sliding nut.

[0013] Preferably, rollers are rotatably provided on both sides of the sliding nut, and the rollers are rollingly connected to the side walls of the guide rail. A motor connecting seat is fixedly installed at one end of the guide rail, and a servo motor is fixedly installed on the motor connecting seat. The output end of the servo motor is connected to the screw drive through a coupling, and the end of the servo motor passes through the outer wall of the support frame.

[0014] Preferably, the lead screw is a trapezoidal lead screw, and the guide rail is made of aluminum alloy.

[0015] The present invention discloses a radial target system for a hydrogen ion implanter, which has the following beneficial effects: 1. The radial target system for hydrogen ion implantation machine fills the design gap of radial target system for small low-energy cyclotron accelerator in the field of domestic hydrogen ion implantation machine. Its small volume and simple structure are very suitable for small cyclotron accelerators with very limited internal and external space, which greatly improves the installation and maintenance costs of on-site installation and commissioning personnel. At the same time, the radial target system integrates and optimizes functions such as water cooling, beam measurement, linear transmission, and position feedback, reduces the number of processed parts, improves the assembly structure, and reduces manufacturing costs. At the same time, it can also ensure high performance, providing new design innovation ideas for the compactness, efficiency, and functional integration optimization of cyclotron equipment.

[0016] 2. The radial target system for the hydrogen ion implanter is fixedly connected to the target head assembly through a water transport needle. A pull-wire sensor is arranged on the water transport needle, so that the water transport needle and the target head assembly move synchronously. The moving path of the water transport needle is measured to calculate the moving path of the target head assembly. The beam measurement principle and structure of the target head assembly do not require any sensor leads to be added inside the vacuum chamber, which fundamentally solves the problem of damage to the cable caused by the beam bombardment. Finally, the beam signal is directly led out at the end of the water transport needle through various metal parts. The lead-out position is located on the atmosphere side and can be directly connected to the beam measurement cable. There is no need to set a vacuum through-electric plug in the middle. The beam measurement cable is integrated with the inlet and outlet water cooling pipes through a drag chain. The measurement principle is simple and maintenance is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the outer surface structure of the target head integrated component of the present invention; Figure 3 This is a schematic diagram of the structure of the linear transmission module of the present invention; Figure 4 It is a schematic diagram of the assembly structure of the support frame and the vacuum chamber of the present invention.

[0019] In the figure: 1. Target head integrated part; 2. Linear transmission module; 3. Vacuum installation interface; 4. Bellows; 5. Support frame; 6. Adapter plate; 7. Water transport needle; 8. Pull wire sensor; 9. Servo motor; 10. Limit trigger block; 11. Positioning ring; 12. Vacuum chamber; 13. Second screw; 1-1, target head receiving body; 1-2, beam receiving notch; 1-3, insulating plate; 1-4, connecting flange; 1-5, telescopic pipe; 1-6, insulating spacer; 1-7, first screw; 2-1, sliding nut; 2-2, guide rail; 2-3, motor connection seat; 2-4, roller; 2-5, screw rod. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] The embodiment of the present application provides a radial target system for a hydrogen ion implanter, thereby solving the problems of the radial target system of the existing hydrogen ion implanter in actual application, such as excessive size, large number of parts and great difficulty in assembly.

[0022] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0023] An embodiment of the present invention discloses a radial target system for a hydrogen ion implanter.

[0024] According to the attached Figure 1-4 As shown, it includes a vacuum chamber 12 and a support frame 5 installed on the outer wall of the vacuum chamber 12, a target head integrated component 1 is slidably arranged in the vacuum chamber 12, a water transport needle 7 is arranged inside the support frame 5, the end of the water transport needle 7 is fixedly welded to the target head integrated component 1, a connecting portion is arranged between the water transport needle 7 and the target head integrated component 1, and the water transport needle 7 is connected to the inside of the target head integrated component 1 through the connecting portion; The connecting part is deformed by expansion and contraction; A linear transmission module 2 is provided at the inner bottom of the support frame 5, and the water transport needle 7 is fixedly mounted on the linear transmission module 2. A pull-wire sensor 8 is installed at one end of the inner wall of the support frame 5 away from the target head integrated component 1, and the other end of the pull-wire sensor 8 is connected to the water transport needle 7. The pull-wire sensor 8 is used to monitor the position of the water transport needle 7; The target head integrated component 1, the connecting part and the water transport needle 7 are all insulated from the ground by insulating parts. The cooling water input through the water transport needle 7 is deionized high-purity water. For the cyclotron accelerator, deionized high-purity water is usually used to cool the main magnet coil. The water flow rate is greater than 20-30L / min, while the cooling water flow rate of the radial target is less than 1L / min. When in use, an additional channel is added through the accelerator drainage to meet the cooling of the radial target system. The target head receiver 1-1 is made of radiation-resistant, high-melting-point, and high-thermal-conductivity oxygen-free copper. The cooling water is transported to the cavity inside the target head receiver 1-1 through the water transport needle 7. The target head integrated component 1 is efficiently cooled by direct contact convective heat transfer. Compared with spacing water cooling, it avoids the risk of deformation and cracking caused by high temperature. For low-energy accelerators used in hydrogen ion implanters, even if the maximum beam energy that can be achieved is received, this cooling structure can ensure full efficiency and safe operation.

[0025] The insulating parts used for ground insulation are all made of ordinary alumina ceramics. Compared with high-strength aluminum nitride ceramics, organic substances and other insulating materials, they are resistant to high temperature and radiation and can further reduce costs. The insulating plates 1-3 are vacuum sealed by O-rings on both sides. The beam measurement principle and structure of the target head integrated component 1 do not require the addition of any sensor leads inside the vacuum chamber, which fundamentally solves the problem of damage to the cable caused by the beam bombardment. Finally, the beam signal is directly led out at the end of the water transport needle 7 through various metal parts. The lead-out position is located on the atmosphere side and can be directly connected to the beam measurement cable. There is no need to set a vacuum through-electric plug in the middle. The beam measurement cable is integrated with the inlet and outlet water cooling pipes through a drag chain. The measurement principle is simple and maintenance is convenient.

[0026] The target head integrated component 1 comprises a target head receiving body 1-1, one end of which is provided with a beam receiving notch 1-2, and the other end of which is provided with a connecting flange 1-4.

[0027] An insulating plate 1-3 is provided between the target head receiver 1-1 and the connecting flange 1-4. The target head receiver 1-1, the insulating plate 1-3 and the connecting flange 1-4 are fixed by a first screw 1-7, and an insulating sleeve 1-6 is provided on the inner wall of the connecting flange 1-4, and the first screw 1-7 passes through the insulating sleeve 1-6.

[0028] The connection part includes a telescopic pipe 1-5 fixedly welded to the end face of the target head receiving body 1-1, a vacuum installation interface 3 is fixedly installed at the end of the support frame 5, a positioning ring 11 is installed between one end of the telescopic pipe 1-5 and the outer wall of the vacuum installation interface 3, the other end of the telescopic pipe 1-5 extends to the inside of the support frame 5 and is fixedly welded with an adapter plate 6, and a water transport needle 7 is fixedly installed on the side of the adapter plate 6 away from the telescopic pipe 1-5; The bellows 4, telescopic pipes 1-5, water transport needle 7 and its water cooling pipe adopt a coaxial integrated structure, and high-precision assembly is achieved through the cooperation of the internal step hole shaft, which can reduce the volume, reduce the number of parts, simplify the assembly steps, and the outer diameter of the bellows can be controlled within 50mm.

[0029] The telescopic pipe 1-5 is composed of two groups of hard pipes plugged in, and a telescopic sealing sleeve is provided at the plug-in position of the two groups of hard pipes. The outer surface of the telescopic pipe 1-5 is provided with a bellows 4, and the two ends of the bellows 4 are respectively fixedly connected to the vacuum installation interface 3 and the adapter plate 6. The adapter plate 6 is provided with an insulating interface, and the bellows 4 is insulated and connected to the insulating interface.

[0030] The vacuum installation interface 3 is fixedly installed on the outer wall of the vacuum chamber 12 by means of a second screw 13 , and a sealing ring is provided between the vacuum installation interface 3 and the vacuum chamber 12 .

[0031] The adapter plate 6 is connected to the linear transmission module 2, the movable end of the wire sensor 8 is fixedly arranged on the adapter plate 6, the outer surface of the adapter plate 6 is fixedly installed with a limit trigger block 10, the limit trigger block 10 is control-connected to the linear transmission module 2, and the wire sensor 8 is installed and fixed using the free space on the rear side of the bellows 4. Through the designed parts combination size, the measured length of the wire sensor 8 can be converted into the radius position of the target head integrated component 1 relative to the accelerator pole, thereby realizing real-time absolute position feedback.

[0032] The linear transmission module 2 includes a guide rail 2-2 fixedly arranged in a support frame 5, a sliding nut 2-1 is slidably arranged in the guide rail 2-2, a lead screw 2-5 is rotatably connected inside the guide rail 2-2, the lead screw 2-5 is threadedly connected to the sliding nut 2-1, and an adapter plate 6 is fixedly installed on the top of the sliding nut 2-1 through an insulating interface on its surface to achieve an insulating connection between the two.

[0033] Rollers 2-4 are rotatably provided on both sides of the sliding nut 2-1, and the rollers 2-4 are rollingly connected to the side walls of the guide rail 2-2. A motor connecting seat 2-3 is fixedly installed at one end of the guide rail 2-2, and a servo motor 9 is fixedly installed on the motor connecting seat 2-3. The output end of the servo motor 9 is transmission-connected to the screw rod 2-5 through a coupling, and the end of the servo motor 9 passes through the outer wall of the support frame 5.

[0034] The lead screw 2-5 is a trapezoidal lead screw. Compared with the commonly used transmission structures such as ball screws and servo linear motors, it has a smaller size and a simpler structure. It is combined with the sliding nut 2-1 to form a trapezoidal lead screw pair. It is a common standard part on the market. It does not require secondary processing or customization, and the cost is relatively low. At the same time, the trapezoidal lead screw has a self-locking function. Even in the face of power failure, the system will still be safely stationary. The guide rail 2-2 is made of aluminum alloy with a simple structure to further reduce weight. When installing, the sliding nut 2-1 can be slid in through the roller 2-4. Compared with the commonly used linear rails, it does not occupy additional volume in width and does not affect the magnetic field. For small cyclotrons used for ion implantation, the measurement stroke and movement speed of the radial target will not be very large, and a direct lead screw with a tolerance of 12-16mm is sufficient. Finally, the cross-sectional size of the linear transmission module 2 can be controlled within the range of 70x30mm, and the length can be controlled within 400mm.

[0035] The support frame 5 is made of aluminum alloy to reduce weight, and the processing technology can be spliced, cast or integrally processed. All parts are assembled in the inner area of ​​the support frame 5, making the radial target system compact and portable, and small in size. For the radial target system of the cyclotron used in the hydrogen ion implanter, the final overall size can be controlled within 600mmx140mmx80mm; the radial target system can be installed by inserting the entire system along the hole of the vacuum chamber 12 and installing the screws. The disassembly is similar. The vacuum installation interface 3 has a simple structure, is easy to install and disassemble, and is easy to maintain. The system itself has formed modularization. For cyclotrons of similar structure and energy, this radial target system can be used universally or replaced. The vacuum installation interface 3 of the radial target is vacuum sealed by an O-ring.

[0036] Working principle: personnel control the servo motor 9 to rotate, and drive the screw 2-5 in the linear transmission module 2 to rotate through the coupling, thereby driving the sliding nut 2-1 to perform high-precision linear motion along the guide rail 2-2; under the push of the sliding nut 2-1, the adapter plate 6 and the water transport needle 7 connected thereto perform linear motion together with the target head integrated component 1; in this process, the telescopic pipe 1-5 is extended and retracted, the bellows 4 is compressed or stretched, and the adapter plate 6 pulls the wire sensor 8 to provide real-time position feedback during the movement. The telescopic pipe 1-5 and the target head integrated component 1 are supported and fixed by the positioning ring 11 and perform telescopic motion through the hole axis; the limit trigger block 10 is used to trigger the limit switch before and after the movement stroke, so that the sliding nut 2-1 drives the adapter plate 6 to perform reciprocating linear motion along the guide rail 2-2; Deionized cooling water is transported to the target head integrated component 1 through the water transport needle 7 through the telescopic pipe 1-5. The cooling water is in direct contact with the internal cavity of the target head receiving body 1-1 and conducts convection heat transfer. The high-temperature return water is then transported to the outside through the coaxial pipe of the water transport needle 7 shell. The inlet and outlet water pipes are connected to the end interface of the water transport needle 7, thereby realizing direct cooling of the inside of the target head integrated component 1, with good cooling effect and fast speed.

[0037] When the accelerator is conducting beam debugging, the beam particles are blocked and received by the beam receiving notch 1-2 of the target head receiver 1-1, and the current signal formed thereby passes through the target head receiver 1-1, the telescopic pipe 1-5 and the internal pipe of the water transport needle 7, and is finally led out to the water inlet and outlet at the end of the water transport needle 7; on the current signal transmission path, the target head receiver 1-1 uses the insulating plate 1-3 and the insulating spacer 1-6 to achieve insulation isolation of the connecting flange 1-4; the water cooling pipe of the water transport needle 7 uses the insulating interface in the middle of the adapter plate 6 to achieve insulation isolation of the bellows 4 and the linear transmission module 2, and finally achieves complete insulation to the ground.

[0038] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A radial target system for a hydrogen ion implanter, comprising a vacuum chamber (12) and a support frame (5) mounted on the outer wall of the vacuum chamber (12), wherein a target head integrated component (1) is slidably arranged in the vacuum chamber (12), characterized in that: A water transport needle (7) is arranged inside the support frame (5), the end of the water transport needle (7) is fixedly welded to the target head integrated component (1), a connecting portion is arranged between the water transport needle (7) and the target head integrated component (1), and the water transport needle (7) is connected to the inside of the target head integrated component (1) through the connecting portion; The connecting portion is deformed by telescoping; A linear transmission module (2) is arranged at the inner bottom of the support frame (5), the water transport needle (7) is fixedly mounted on the linear transmission module (2), a pull-wire sensor (8) is mounted at one end of the inner wall of the support frame (5) away from the target head integrated component (1), the other end of the pull-wire sensor (8) is connected to the water transport needle (7), and the pull-wire sensor (8) is used to monitor the position of the water transport needle (7); The target head integrated component (1), the connecting portion and the water transport needle (7) are all installed to be insulated from the ground using insulating components.

2. A radial target system for a hydrogen ion implanter according to claim 1, characterized in that: The target head integrated component (1) comprises a target head receiving body (1-1), one end of the target head receiving body (1-1) is provided with a beam receiving notch (1-2), and the other end of the target head receiving body (1-1) is provided with a connecting flange (1-4).

3. A radial target system for a hydrogen ion implanter according to claim 2, characterized in that: An insulating plate (1-3) is provided between the target head receiving body (1-1) and the connecting flange (1-4); the target head receiving body (1-1), the insulating plate (1-3) and the connecting flange (1-4) are fixed by means of a first screw (1-7); an insulating sleeve (1-6) is provided on the inner wall of the connecting flange (1-4); and the first screw (1-7) passes through the insulating sleeve (1-6).

4. A radial target system for a hydrogen ion implanter according to claim 2, characterized in that: The connecting portion comprises a telescopic pipe (1-5) fixedly welded to the end surface of the target head receiving body (1-1); a vacuum installation interface (3) is fixedly installed at the end of the support frame (5); a positioning ring (11) is installed between one end of the telescopic pipe (1-5) and the outer wall of the vacuum installation interface (3); the other end of the telescopic pipe (1-5) extends to the inside of the support frame (5) and is fixedly welded with an adapter plate (6); and the water transport needle (7) is fixedly installed on a side of the adapter plate (6) away from the telescopic pipe (1-5).

5. A radial target system for a hydrogen ion implanter according to claim 4, characterized in that: The telescopic pipe (1-5) is formed by plugging two groups of hard pipes together, and a telescopic sealing sleeve is provided at the plugging point of the two groups of hard pipes. The outer surface of the telescopic pipe (1-5) is provided with a bellows (4), and the two ends of the bellows (4) are respectively fixedly connected to the vacuum installation interface (3) and the adapter plate (6).

6. A radial target system for a hydrogen ion implanter according to claim 4, characterized in that: The vacuum installation interface (3) is fixedly installed on the outer wall of the vacuum chamber (12) by means of a second screw (13), and a sealing ring is provided between the vacuum installation interface (3) and the vacuum chamber (12).

7. A radial target system for a hydrogen ion implanter according to claim 4, characterized in that: The adapter plate (6) is connected to the linear transmission module (2), the movable end of the pull-wire sensor (8) is fixedly arranged on the adapter plate (6), the outer surface of the adapter plate (6) is fixedly mounted with a limit trigger block (10), and the limit trigger block (10) is controllably connected to the linear transmission module (2).

8. A radial target system for a hydrogen ion implanter according to claim 7, characterized in that: The linear transmission module (2) comprises a guide rail (2-2) fixedly arranged in a support frame (5), a sliding nut (2-1) slidably arranged in the guide rail (2-2), a lead screw (2-5) rotatably connected inside the guide rail (2-2), the lead screw (2-5) being threadedly connected to the sliding nut (2-1), and the adapter plate (6) being fixedly mounted on the top of the sliding nut (2-1).

9. A radial target system for a hydrogen ion implanter according to claim 8, characterized in that: Rollers (2-4) are rotatably provided on both sides of the sliding nut (2-1), the rollers (2-4) are rollingly connected to the side walls of the guide rail (2-2), a motor connection seat (2-3) is fixedly mounted on one end of the guide rail (2-2), a servo motor (9) is fixedly mounted on the motor connection seat (2-3), an output end of the servo motor (9) is transmission-connected to a lead screw (2-5) via a coupling, and a terminal end of the servo motor (9) penetrates the outer wall of the support frame (5).

10. A radial target system for a hydrogen ion implanter according to claim 9, characterized in that: The lead screw (2-5) is a trapezoidal lead screw, and the guide rail (2-2) is made of aluminum alloy.

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