Micro-hemisphere coating jig

Abstract

The invention discloses a micro hemisphere coating jig which comprises a positioner, a clamp and a driving assembly connected with the clamp, a counter bore for accommodating a micro hemisphere is formed in the top surface of the positioner, a mask cavity matched with the lip edge surface of the micro hemisphere is formed in the counter bore, and the part, without being coated, of the surface of the micro hemisphere extends into the mask cavity for masking. The fixture comprises a tip cone part, the tip cone part penetrates through the bottom of the positioner and then extends into the mask cavity, the tip cone part comprises a plurality of tip cone blocks, and the driving assembly is used for driving the fixture to be opened and closed, so that the plurality of tip cone blocks are folded to extend into the anchor column cavity of the micro hemisphere, or the plurality of tip cone blocks are dispersed to abut against the cavity wall of the anchor column cavity of the micro hemisphere in the mask cavity. The method can ensure that the surface quality of the micro hemisphere is not damaged while meeting the requirements of clamping and masking at the same time.

Description

Technical Field

[0001] The invention relates to the technical field of micro-hemispherical gyroscopes, and in particular to a micro-hemispherical coating fixture. Background Art

[0002] Micro-hemispherical gyroscope belongs to hemispherical resonant gyroscope. It is a solid wave gyroscope based on the Coriolis effect. It has the advantage of low cost and is an important direction for the development of gyroscopes in the future. Conventional micro-hemispherical gyroscopes are bowl-shaped structures with hollow anchor columns in the middle, which are blown from a flat quartz sheet. They are then ground, polished, pickled, annealed, and other processes to make the shape and size meet the processing requirements. Since quartz is an insulator, a layer of metal conductive film must be prepared on its surface to form an electrostatic force through the formation of a capacitor with the electrode for excitation and sensing.

[0003] Quartz micro-hemispheres are small, thin, light, and fragile. From blow molding to gyro assembly, each process needs to be protected to ensure that the micro-hemispheres can be safely and intactly turned into finished products. The surface coating of the micro-hemispheres is required to extend from the top of the anchor column to the equatorial edge or the outer arc surface, so it is particularly important to design a fixture that meets both the clamping and masking requirements. Summary of the invention

[0004] In view of the problems in the background technology, the present invention proposes a micro-hemispherical coating fixture which can meet the requirements of clamping and masking and ensure that the surface quality of the micro-hemispherical is not damaged.

[0005] The present invention adopts the following technical solutions:

[0006] A micro-hemispherical coating fixture comprises a positioner, a fixture, and a driving assembly connected to the fixture. A sink hole for accommodating the micro-hemispherical is provided on the top surface of the positioner. A mask cavity is provided in the sink hole to match the lip edge of the micro-hemispherical. The part of the micro-hemispherical surface that does not need to be coated extends into the mask cavity for masking.

[0007] The clamp includes a top cone portion, which passes through the bottom of the locator and extends into the mask cavity. The top cone portion includes a plurality of top cone blocks. The driving component is used to drive the clamp to open and close so that the plurality of top cone blocks are retracted to extend into the anchor column cavity of the micro-hemispherical, or the plurality of top cone blocks are dispersed to abut against the cavity wall of the anchor column cavity of the micro-hemispherical in the mask cavity.

[0008] As a further improvement of the above technical solution:

[0009] The clamp also includes an opening and closing portion, which includes a plurality of opening and closing blocks. The plurality of opening and closing blocks correspond one-to-one to the plurality of top cone blocks. The top cone blocks are connected to the inner end portions of the top surfaces of the corresponding opening and closing blocks. The driving assembly is connected to the opening and closing portion for driving the plurality of opening and closing blocks to open and close.

[0010] The bottom surface of the positioner is provided with a mounting hole, which extends upward to communicate with the sink hole.

[0011] The driving assembly includes a base and a rotating rod. The upper part of the base extends into the mounting hole and is detachably connected to the positioner.

[0012] The clamp also includes a mounting portion, an opening and closing portion is arranged on the top surface of the mounting portion, a receiving groove is opened on the top surface of the base, the mounting portion and the opening and closing portion of the clamp are located in the receiving groove, the lower portion of the outer wall of the opening and closing portion forms a first conical surface which is larger at the top and smaller at the bottom, and the upper portion of the inner wall of the receiving groove forms a second conical surface which matches the first conical surface, the rotating rod is rotatably connected to the base, the upper portion of which passes through the base and extends into the receiving groove and is threadedly connected to the mounting portion, and when the rotating rod rotates, it drives the clamp to move up and down so that the multiple opening and closing blocks can be folded or opened.

[0013] A first stop structure is provided between the base and the clamp to prevent the clamp from rotating.

[0014] The first stop structure comprises a stop key arranged on the side wall of the mounting portion and a stop groove opened on the wall of the accommodating groove. The stop key cooperates with the stop groove and is slidably arranged in the stop groove.

[0015] A second stop structure is provided between the rotating rod and the base to prevent the rotating rod from moving up and down.

[0016] The second stop structure includes a step portion arranged in the middle of the rotating rod, a mounting groove opened on the bottom surface of the base, and a stop member passing through the lower part of the rotating rod. The stop member is detachably connected to the base. The step portion is arranged in the mounting groove and stops between the bottom of the mounting groove and the stop member.

[0017] The stopper is located in the installation groove and is threadedly connected to the base.

[0018] A double-headed nut is passed through the lower part of the rotating rod and is used for transmission connection with the rotating driving member.

[0019] The upper part of the base extends into the mounting hole and is connected to the positioner thread, so that the positioner can move up and down relative to the base until the lip edge of the micro-hemispheric is flush with the bottom surface of the positioner, or the part of the outer surface of the micro-hemispheric to be coated is exposed outside the coating cavity.

[0020] It also includes an adjusting ring, which is sleeved in the countersunk hole, with its outer wall fitting against the side wall of the countersunk hole, and its inner cavity being a truncated cone cavity that is larger at the top and smaller at the bottom. The truncated cone cavity forms the coating cavity, and its small diameter end has a diameter slightly smaller than the diameter of the micro-hemispherical lip edge, and its large diameter end has a diameter slightly larger than the diameter of the micro-hemispherical lip edge.

[0021] The lower part of the base extends radially outward to form a stop platform, and a compression spring is arranged between the stop platform and the positioner.

[0022] Compared with the prior art, the advantages of the present invention are:

[0023] Since the quartz micro-hemisphere has the characteristics of small size, thin wall thickness, fragility, and high surface quality requirements, it is not suitable to clamp its surface in subsequent processing steps after surface machining is completed. The clamping method in the conventional micro-hemisphere coating process is generally to apply glue in the mask cavity to bond the part of the micro-hemisphere located in the mask cavity, and then coat the film after the glue is cured. After coating, the glue is heated to soften the glue, and the micro-hemisphere is taken out and then the glue on its surface is cleaned. This not only increases the process, but also the glue and cleaning agent have the risk of contaminating the micro-hemisphere, resulting in a decrease in its Q value.

[0024] The micro-hemispherical coating fixture of the present invention comprises a positioner and a clamp. A mask cavity is provided in the positioner to mask the part of the micro-hemispherical surface that does not need coating. Then, the particularity of the micro-hemispherical structure is cleverly utilized to design a clamp that matches the hollow anchor rod cavity of the micro-hemispherical. The clamp passes through the positioner and extends into the mask cavity. The micro-hemispherical can be sleeved on the clamp by driving the clamp to close. The clamp is then opened by driving the clamp until each top cone block of the clamp abuts against the cavity wall of the anchor column cavity of the micro-hemispherical, so that the micro-hemispherical can be temporarily fixed, so that the micro-hemispherical will not move during the coating process. After the coating is completed, the clamp is driven to close to release the fixation of the micro-hemispherical. Therefore, the present invention can ensure that the surface quality of the micro-hemispherical is not damaged while meeting the requirements of clamping and masking. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to make the present invention more easily understood, the present invention will be described in more detail by referring to the specific embodiments shown in the accompanying drawings. These drawings only depict typical embodiments of the present invention and should not be considered as limiting the scope of protection of the present invention.

[0026] Figure 1 Schematic diagram of the exploded structure of the micro-hemispherical coating fixture according to an embodiment of the present invention.

[0027] Figure 2 It is a schematic diagram of the three-dimensional exploded structure of the micro-hemispherical coating fixture according to an embodiment of the present invention.

[0028] Figure 3 Schematic diagram of the structure of a micro-hemispherical coating fixture according to an embodiment of the present invention.

[0029] Figure 4 Schematic diagram of the cross-sectional structure of a micro-hemispherical coating fixture according to an embodiment of the present invention.

[0030] Figure 5 FIG. 4 is a schematic cross-sectional structure diagram of a micro-hemispherical coating fixture from another perspective according to an embodiment of the present invention.

[0031] Figure 6 A schematic diagram of the three-dimensional structure of the fixture.

[0032] Reference numerals:

[0033] 1. Micro-hemisphere; 11. Anchor column cavity; 2. Adjustment ring; 21. Cone cavity; 3. Positioner; 31. Countersunk hole; 32. Mounting hole; 33. Thread hole; 4. Compression spring; 5. Clamp; 51. Top cone; 511. Top cone block; 52. Opening and closing portion; 521. Opening and closing block; 522. First conical surface; 53. Mounting portion; 531. Stop key; 6. Rotary rod; 61. Step portion; 7. Base; 71. Receiving groove; 711. Second conical surface; 712. Stop groove; 72. Mounting groove; 73. Stop platform; 8. Stop member; 9. Stud nut. DETAILED DESCRIPTION

[0034] The following describes the implementation modes of the present invention with reference to the accompanying drawings so that those skilled in the art can better understand the present invention and implement it. However, the enumerated embodiments are not intended to limit the present invention. In the absence of conflict, the following embodiments and the technical features in the embodiments may be combined with each other, wherein the same components are represented by the same figure marks.

[0035] like Figure 1-Figure 6 As shown, the micro-hemispherical coating fixture of this embodiment includes a positioner 3, a fixture 5, and a driving assembly connected to the fixture 5. The top surface of the positioner 3 is provided with a sink hole 31 for accommodating the micro-hemispherical 1. The sink hole 31 has a mask cavity that matches the lip edge of the micro-hemispherical 1. The part of the surface of the micro-hemispherical 1 that does not need to be coated extends into the mask cavity for masking.

[0036] The clamp 5 includes a top cone portion 51, which passes through the bottom of the locator 3 and extends into the mask cavity. The top cone portion 51 includes a plurality of top cone blocks 511. The driving component is used to drive the clamp 5 to open and close, so that the plurality of top cone blocks 511 are retracted to extend into the anchor column cavity 11 of the micro-hemispherical 1, or the plurality of top cone blocks 511 are dispersed to abut against the cavity wall of the anchor column cavity 11 of the micro-hemispherical 1 in the mask cavity.

[0037] The micro-hemispherical coating fixture of the present invention provides a mask cavity in a positioner to mask the part of the micro-hemispherical surface that does not need coating, and then cleverly utilizes the particularity of the micro-hemispherical structure to design a fixture that matches the hollow anchor cavity of the micro-hemispherical. The fixture passes through the positioner and extends into the mask cavity. The micro-hemispherical can be sleeved on the fixture by driving the fixture to close. The fixture is then driven to open until each top cone block of the fixture abuts against the cavity wall of the anchor cavity of the micro-hemispherical, so that the micro-hemispherical can be temporarily fixed, so that the micro-hemispherical will not move during the coating process. After the coating is completed, the fixture is driven to close to release the fixation of the micro-hemispherical. Therefore, the present invention can ensure that the surface quality of the micro-hemispherical is not damaged while meeting the requirements of clamping and masking.

[0038] In this embodiment, the clamp 5 also includes an opening and closing portion 52, which includes a plurality of opening and closing blocks 521. The plurality of opening and closing blocks 521 correspond one-to-one to the plurality of top cone blocks 511. The top cone blocks 511 are connected to the inner end portions of the top surfaces of the corresponding opening and closing blocks 521. The driving assembly is connected to the opening and closing portion 52 for driving the plurality of opening and closing blocks 521 to open and close.

[0039] Due to the small size of the micro-hemisphericity, the top cone block of the top cone is correspondingly smaller, and it is difficult to drive its opening and closing through a conventional driving structure. By designing the opening and closing part to be connected between the top cone and the driving structure, stable and reliable opening and closing of the top cone can be achieved.

[0040] In this embodiment, a mounting hole 32 is formed on the bottom surface of the positioner 3, and the mounting hole 32 extends upward to communicate with the sink hole 31.

[0041] The driving assembly includes a base 7 and a rotating rod 6. The upper portion of the base 7 extends into the mounting hole 32 and is detachably connected to the positioner 3.

[0042] The clamp 5 also includes a mounting portion 53, and the opening and closing portion 52 is arranged on the top surface of the mounting portion 53. A receiving groove 71 is opened on the top surface of the base 7. The mounting portion 53 and the opening and closing portion 52 of the clamp 5 are located in the receiving groove 71. The lower part of the outer wall of the opening and closing portion 52 forms a first conical surface 522 which is larger at the top and smaller at the bottom. The upper part of the inner wall of the receiving groove 71 forms a second conical surface 711 which cooperates with the first conical surface 522. The rotary rod 6 is rotatably connected to the base 7, and its upper part passes through the base 7 and then extends into the receiving groove 71 and is threadedly connected to the mounting portion 53. When the rotary rod 6 rotates, it drives the clamp 5 to move up and down so that the multiple opening and closing blocks 521 can be folded or opened.

[0043] The present invention ingeniously utilizes a wedge structure + nut-screw pair driving mode to realize the opening and closing of the clamp, so as to fine-tune the opening size of the top cone portion and achieve the purpose of fastening the micro-hemisphere. The driving and fastening modes are simple and reliable.

[0044] In this embodiment, a first stop structure is provided between the base 7 and the clamp 5 to prevent the clamp 5 from rotating.

[0045] In this embodiment, the first stop structure includes a stop key 531 disposed on the side wall of the mounting portion 53 and a stop groove 712 opened on the groove wall of the accommodating groove 71 . The stop key 531 cooperates with the stop groove 712 and is slidably disposed in the stop groove 712 .

[0046] In this embodiment, a second stop structure is provided between the rotating rod 6 and the base 7 to prevent the rotating rod 6 from moving up and down.

[0047] In this embodiment, the second stop structure includes a step portion 61 arranged in the middle of the rotating rod 6, a mounting groove 72 opened on the bottom surface of the base 7, and a stop member 8 passing through the lower part of the rotating rod 6. The stop member 8 is detachably connected to the base 7. The step portion 61 is arranged in the mounting groove 72 and is stopped between the bottom of the mounting groove 72 and the stop member 8.

[0048] In this embodiment, the stopper 8 is located in the installation groove 72 and is threadedly connected to the base 7 .

[0049] In this embodiment, a stud nut 9 is provided at the lower portion of the rotary rod 6 for transmission connection with the rotary drive member.

[0050] In this embodiment, the upper portion of the base 7 extends into the mounting hole 32 and is threadedly connected to the positioner 3, so that the positioner 3 can move up and down relative to the base 7 until the lip surface of the micro-hemispherical 1 is flush with the bottom surface of the positioner 3, or the portion of the outer surface of the micro-hemispherical 1 to be coated is exposed outside the coating cavity.

[0051] The excitation methods of micro-hemispherical resonators can be divided into two types: planar electrode excitation and 3D electrode excitation. Planar electrode excitation mainly resonates and measures by forming capacitance between the equatorial plane of the micro-hemispherical resonator and the planar electrode, while 3D electrode excitation resonates and measures by forming capacitance between the outer surface arc of the micro-hemispherical resonator and the 3D excitation electrode. Therefore, for different excitation and measurement methods, the metallized film on the surface of the micro-hemispherical resonator is prepared at different positions to better ensure high quality factors and long decay time, which is also a necessary condition for ensuring high precision of navigation-grade gyroscopes. For planar electrodes, the coating can extend from the top of the middle column to the equatorial edge, while for 3D electrodes, it needs to extend from the top of the middle column to the outer arc surface, and the height of the outer arc coating is determined according to the height of the 3D electrode. The present invention connects the base with the positioner by threading, and can roughly adjust the height of the micro-hemispherical exposed from the coating cavity by rotating the positioner, and can finely adjust the height of the micro-hemispherical exposed from the coating cavity by rotating the rotary rod to drive the clamp to move up and down. Therefore, the present invention can accurately adjust the metal film preparation position according to the different electrode excitation modes required by the micro-hemispherical resonant gyroscope, so as to effectively ensure the optimal performance of the metalized film on the surface of the micro-hemispherical resonator, and is suitable for mass production of magnetron sputtering coating of micro-hemispherical resonators.

[0052] In order to be applicable to the coating clamping of micro-hemispherical balls with poor size consistency in the same batch and reduce the number of molds, the micro-hemispherical ball coating fixture of this embodiment also includes an adjustment ring 2, which is sleeved in the countersunk hole 31, and its outer side wall is in contact with the side wall of the countersunk hole 31, and its inner cavity is a truncated cone cavity 21 with a large top and a small bottom, and the truncated cone cavity 21 forms a coating cavity, and its small diameter end has a diameter slightly smaller than the diameter of the micro-hemispherical ball lip edge, and its large diameter end has a diameter slightly larger than the diameter of the micro-hemispherical ball lip edge. The depth of the adjustment ring 2 inserted into the countersunk hole 31 is adjusted to adapt to the masks of the micro-hemispherical balls with poor size consistency in the same batch.

[0053] In this embodiment, the lower portion of the base 7 extends radially outward to form a stop platform 73 , and a compression spring 4 is provided between the stop platform 73 and the positioner 3 .

[0054] The process of clamping the micro-hemisphere before coating in this embodiment is as follows:

[0055] Step 1: Tighten the clamp 5 and the rotating rod 6 through the thread; the lower half of the clamp 5 is designed with a boss, namely the stop key 531, the limiting function of the boss is to ensure that the clamp 5 will not rotate when the screw is rotated up and down; the conical structure of the upper part of the clamp 5, namely the top cone, is designed to adapt to the shape of the micro-hemispheric center pin, and a cross groove is opened on the conical structure to achieve elastic clamping; in addition, the middle part of the clamp 5 is designed with an inverted cone mechanism, namely the opening and closing part, so that when the thread of the rotating rod 6 is pulled down, the clamp is closed so that the top cone is reduced, and the inner cavity of the micro-hemispheric center pin can be directly put on, and when the screw is loose, the top cone pops open and clamps the inner cavity wall of the micro-hemispheric center pin;

[0056] Step 2: The stopper 8 is inserted into the optical axis of the rotating rod 6, and the stopper 8 is connected to the rotating rod 6 with a small gap shaft hole, and the rotating rod 6 is adjusted to be able to rotate easily, so as to facilitate the adjustment of the opening and closing of the clamp 5. Then the stopper 8 is connected to the base 7 through a thread;

[0057] Step 3: Install the spring 4 on the outside of the base 7;

[0058] Step 4: Screw the positioner 3 with up and down adjustment screw function into the base 7;

[0059] Step 5: Insert the adjusting ring 2 into the locator 3 until the outer edge of the micro-hemispherical lip surface contacts the inner wall of the adjusting ring 2. The side wall of the locator 3 is provided with a thread hole 33, and the two are fastened by a top screw;

[0060] Step 6: Screw in the stud nut 9, and apply rotational force by clamping the stud nut 9 with a tool to rotate the rotary rod 6 to drive the clamp 5 to move up and down, thereby achieving fine-tuning of the tightness of the top cone of the clamp 5 and the micro-hemisphere 1 until it is fully tightened.

[0061] The embodiments described above are only preferred specific implementations of the present invention. This specification uses the phrases "in one embodiment", "in another embodiment", "in yet another embodiment" or "in other embodiments" to refer to one or more of the same or different embodiments according to the present disclosure. Common changes and substitutions made by those skilled in the art within the scope of the technical solution of the present invention should be included in the protection scope of the present invention.

Claims

1. A micro-hemispherical coating fixture, characterized in that: The invention comprises a positioner (3), a fixture (5), and a driving assembly connected to the fixture (5); the top surface of the positioner (3) is provided with a sink hole (31) for accommodating a micro-hemispherical (1); the sink hole (31) has a mask cavity matched with the lip edge surface of the micro-hemispherical (1); the part of the surface of the micro-hemispherical (1) that does not need to be coated extends into the mask cavity for masking; The clamp (5) comprises a top cone portion (51), the top cone portion (51) extends from the bottom of the positioner (3) through the rear thereof into the mask cavity, the top cone portion (51) comprises a plurality of top cone blocks (511), and a driving component is used to drive the clamp (5) to open and close, so that the plurality of top cone blocks (511) are retracted to extend into the anchor column cavity (11) of the micro-hemispheric (1), or the plurality of top cone blocks (511) are dispersed to abut against the cavity wall of the anchor column cavity (11) of the micro-hemispheric in the mask cavity.

2. The micro-hemispherical coating fixture according to claim 1, characterized in that: The clamp (5) also includes an opening and closing portion (52), the opening and closing portion (52) includes a plurality of opening and closing blocks (521), the plurality of opening and closing blocks (521) correspond one-to-one to the plurality of top cone blocks (511), the top cone blocks (511) are connected to the inner end portions of the top surfaces of the corresponding opening and closing blocks (521), and the driving component is connected to the opening and closing portion (52) for driving the plurality of opening and closing blocks (521) to open and close.

3. The micro-hemispherical coating fixture according to claim 2, characterized in that: The bottom surface of the positioner (3) is provided with a mounting hole (32), and the mounting hole (32) extends upward to communicate with the sink hole (31). The driving assembly comprises a base (7) and a rotating rod (6). The upper portion of the base (7) extends into the mounting hole (32) and is detachably connected to the positioner (3). The clamp (5) also includes a mounting portion (53), an opening and closing portion (52) is arranged on the top surface of the mounting portion (53), and a receiving groove (71) is opened on the top surface of the base (7). The mounting portion (53) and the opening and closing portion (52) of the clamp (5) are located in the receiving groove (71), and the lower part of the outer wall of the opening and closing portion (52) forms a first conical surface (522) which is larger at the top and smaller at the bottom, and the upper part of the inner wall of the receiving groove (71) forms a second conical surface (711) which matches the first conical surface (522). The rotating rod (6) is rotatably connected to the base (7), and its upper part passes through the base (7) and then extends into the receiving groove (71) and is threadedly connected to the mounting portion (53). When the rotating rod (6) rotates, it drives the clamp (5) to move up and down, so that the multiple opening and closing blocks (521) are folded or opened.

4. The micro-hemispherical coating fixture according to claim 3, characterized in that: A first stop structure for preventing the clamp (5) from rotating is provided between the base (7) and the clamp (5).

5. The micro-hemispherical coating fixture according to claim 4, characterized in that: The first stop structure comprises a stop key (531) arranged on the side wall of the mounting portion (53) and a stop groove (712) opened on the groove wall of the accommodating groove (71); the stop key (531) cooperates with the stop groove (712) and is slidably arranged in the stop groove (712).

6. The micro-hemispherical coating fixture according to claim 3, characterized in that: A second stop structure is provided between the rotating rod (6) and the base (7) to prevent the rotating rod (6) from moving up and down.

7. The micro-hemispherical coating fixture according to claim 6, characterized in that: The second stop structure comprises a step portion (61) arranged in the middle of the rotating rod (6), a mounting groove (72) provided on the bottom surface of the base (7), and a stop member (8) passing through the lower part of the rotating rod (6), the stop member (8) being detachably connected to the base (7), the step portion (61) being arranged in the mounting groove (72) and being stopped between the bottom of the mounting groove (72) and the stop member (8).

8. The micro-hemispherical coating fixture according to any one of claims 3 to 7, characterized in that: The upper portion of the base (7) extends into the mounting hole (32) and is threadedly connected to the positioner (3), so that the positioner (3) can move up and down relative to the base (7) until the lip edge surface of the micro-hemispheric (1) is flush with the bottom surface of the positioner (3), or the portion of the outer surface of the micro-hemispheric (1) to be coated is exposed outside the coating cavity.

9. The micro-hemispherical coating fixture according to any one of claims 1 to 7, characterized in that: It also includes an adjustment ring (2), which is sleeved in the countersunk hole (31), and its outer wall is in contact with the side wall of the countersunk hole (31). Its inner cavity is a truncated cone cavity (21) that is larger at the top and smaller at the bottom. The truncated cone cavity (21) forms the coating cavity, and its small diameter end has a diameter slightly smaller than the diameter of the micro-hemispherical lip edge, and its large diameter end has a diameter slightly larger than the diameter of the micro-hemispherical lip edge.

10. The micro-hemispherical coating fixture according to any one of claims 3 to 7, characterized in that: The lower part of the base (7) extends radially outward to form a stop platform (73), and a compression spring (4) is provided between the stop platform (73) and the positioner (3).

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