Immersion head detection device and method for immersion photoetching machine

Abstract

The invention discloses an immersion head detection device and method for an immersion lithography machine, and relates to the technical field of immersion head detection. Comprising an outer box, a detection maintenance mechanism is arranged at one end in the outer box, a detection execution mechanism is arranged in the outer box in a sliding mode, the detection execution mechanism comprises a working table, an ultrasonic cleaning mechanism is arranged on one end face of the working table, and a sample disc is arranged on the other end face in a matched mode; a flow field detection camera is arranged in the working table, a shooting hole is formed in the sample disc, and a lens of the flow field detection camera is arranged in the shooting hole in the sample disc in a matched mode; the detection part is used for maintaining and detecting the sample disc; according to the invention, bubbles in a medium flow field can be conveniently detected, excessive participation of manpower is not needed in the detection process, an operation form during wafer photoetching is simulated, efficient detection is realized, functions are rich, and maintenance can be conveniently realized.

Description

Technical Field

[0001] The present invention relates to the technical field of immersion head detection, and in particular to an immersion head detection device and method for an immersion lithography machine. Background Art

[0002] The immersion head of the lithography machine is a key component used in lithography technology and is widely used in semiconductor manufacturing. Immersion lithography is one of the most advanced lithography technologies at present. The resolution is improved by adding a liquid medium between the objective lens and the silicon wafer during the lithography process. Immersion lithography is to break through the resolution limitations of traditional lithography technology. Traditional dry lithography technology uses air as the medium between the lens and the silicon wafer, but the refractive index of air is relatively low, resulting in a sufficiently high resolution that cannot be achieved. In order to manufacture smaller circuit structures, immersion lithography technology came into being, using the higher refractive index of the liquid medium to improve the resolution. The current immersion head is extremely inconvenient to detect, the manual operation is cumbersome, and it is easy to damage the lithography components, especially for the detection of bubbles in the medium flow field, the detection process is extremely complicated; based on this, the present invention proposes an immersion head detection device, which can facilitate the detection of bubbles in the medium flow field, the detection process does not require too much human participation, simulates the operation form during wafer lithography, realizes efficient detection, has rich functions, and can be easily maintained. Summary of the invention

[0003] In response to the above technical problems, the present invention can facilitate the detection of bubbles in the medium flow field. The detection process does not require excessive human participation, simulates the operation form during wafer lithography, realizes efficient detection, has rich functions, and can be easily maintained.

[0004] The scheme used in the present invention is: an immersion head detection device for an immersion lithography machine, comprising an outer box, a detection and maintenance mechanism is arranged at one end inside the outer box, the detection and maintenance mechanism comprises a toothed disc rotatably mounted on the outer box, a detection disc is slidably arranged on the toothed disc, and a detection piece is slidably arranged on the detection disc; a detection actuator is slidably arranged inside the outer box, the detection actuator comprises a moving frame slidably mounted on the outer box, a mounting ring is rotatably mounted on the moving frame, a position seat is slidably arranged on the mounting ring, a lifting electric cylinder is arranged on the position seat, a workbench is rotatably arranged on the telescopic rod of the lifting electric cylinder, on two end surfaces of the workbench, an ultrasonic cleaning mechanism is arranged on one end surface, and a sample tray is cooperatively arranged on the other end surface, a flow field detection camera is arranged inside the workbench, and a shooting hole is arranged on the sample tray, and the lens of the flow field detection camera is cooperatively arranged in the shooting hole on the sample tray; the detection piece is used for maintenance and detection of the sample tray.

[0005] Furthermore, a moving belt and a moving motor are provided at the bottom end of the inner part of the outer box, the moving motor is used to drive the moving belt, and the moving belt is used to control the movement of the detection actuator.

[0006] Furthermore, the detection actuator includes a mounting frame arranged on the mobile frame, the mounting frame is attached to the moving belt; and a motor three is arranged on the mobile frame, a gear three is arranged on the output shaft of the motor three, and the gear three is meshed with the mounting ring; a motor four, a screw rod four and a guide rod four are arranged on the mounting ring, and the motor four is used to drive the screw rod four; the position seat is movably arranged on the screw rod four and the guide rod four, and the position seat and the screw rod four form a spiral pair.

[0007] Furthermore, two transmission mechanisms are arranged on the position seat, one of which is used to transmit cleaning liquid to the ultrasonic cleaning mechanism, and the other is used to transmit the cleaning liquid collected in the ultrasonic cleaning mechanism; the transmission mechanism includes a cleaning transmission box and a docking electric cylinder arranged on the position seat, and a docking joint is arranged on the telescopic rod of the docking electric cylinder, and the docking joint is connected to the cleaning transmission box.

[0008] Furthermore, the ultrasonic cleaning mechanism includes a cleaning tank arranged on the end surface of the workbench, and an ultrasonic controller arranged inside the workbench. A connecting ring is attached to the outside of the cleaning tank, and two transmission docking parts are arranged on the outside of the connecting ring. The two transmission docking parts are respectively connected to the docking parts on the transmission mechanism to transmit the cleaning liquid.

[0009] Furthermore, a deflection motor is provided on the telescopic rod of the lifting electric cylinder, and the deflection motor is used to drive the workbench; a fixing mechanism is arranged on the workbench to fix the sample tray; the fixing mechanism includes a control ring rotatably arranged inside the workbench, and an angle electric cylinder rotatably arrayed and installed inside the workbench, the telescopic rod of the angle electric cylinder is rotatably connected to the control ring to control the rotation of the control ring, a pushing part is arranged on the circumference of the control ring, and a fixed L rod is arrayed and slidably arranged on the workbench, a spring for providing elastic force is connected between the fixed L rod and the workbench, a push wheel is provided at one end of the fixed L rod, and the push wheel is pushed by the pushing part to move the fixed L rod, and the sample tray is fixed by the fixed L rod.

[0010] Furthermore, an insertion shaft is arranged on the sample tray, and the insertion shaft is inserted on the end surface of the workbench and fixed by fixing the L rod.

[0011] Furthermore, the detection and maintenance mechanism includes a motor 1 arranged on the outer box, a gear 1 is arranged on the output shaft of the motor 1, the gear 1 is meshed with the gear disc, a control electric cylinder is arranged on the gear disc, and the control electric cylinder is used to control the movement of the detection disc; a motor 2 and a screw rod 2 are arranged on the detection disc, and the motor 2 is used to drive the screw rod 2; the detection piece is driven by the screw rod 2; a clean transmission cylinder is arranged in the central area of ​​the gear disc for transmitting clean water.

[0012] Furthermore, the detection component includes a detection seat that forms a spiral pair with the second screw rod, and a nozzle is arranged on the detection seat, and the nozzle is connected to the cleaning transmission cylinder; and a cleaning motor is arranged on the detection seat, and a cleaning part is arranged on the output shaft of the cleaning motor for cleaning and maintaining the sample plate; a detection camera is arranged at one end of the detection seat for detecting the surface quality of the sample plate; a protective motor is arranged on the detection seat, and a protective electric cylinder is arranged on the output shaft of the protective motor, and a protective cover is arranged on the telescopic rod of the protective electric cylinder, and the protective cover is used to cover the detection camera.

[0013] A method for detecting an immersion head comprises the following steps:

[0014] S10: The sample tray is mounted on the workbench, and the detection actuator is controlled to be located below the immersion head assembly, and the height of the sample tray is adjusted, and the distance from the immersion head assembly is controlled;

[0015] S20: transmitting the liquid medium through the immersion head assembly, the liquid medium forms a medium flow field between the objective lens and the sample plate, and shooting is performed through a flow field detection camera to detect whether bubbles are generated in the medium flow field;

[0016] S30: Control the sample tray to move, so as to photograph and detect the medium flow field when the sample tray moves;

[0017] S40: by changing the position of the workbench, the immersion head is cleaned and maintained by an ultrasonic cleaning mechanism to remove dust and impurities;

[0018] S50: Control the movement of the sample tray so that the sample tray moves and deflects toward the detection and maintenance mechanism to perform surface detection on the sample tray and perform a cleaning operation.

[0019] Compared with the prior art, the present invention has the following advantages: (1) the sample tray is mounted on the end surface of the workbench, and the lens of the flow field detection camera is installed in the shooting hole on the sample tray. The control ring is rotated by the sample tray, and the push part pushes the push wheel to move the fixed L rod and fix the plug shaft, thereby fixing the sample tray, which is convenient for assembly and disassembly; (2) the situation of the wafer under photolithography is simulated by the sample tray, that is, the position of the sample tray is controlled, the moving belt drives the moving frame to move, and then the height of the workbench and the sample tray is controlled by the lifting electric cylinder to adjust the distance between the sample tray and the immersion head assembly; the medium is transmitted by the medium transmission system to form a medium flow field between the objective lens and the sample tray, and the medium flow field is photographed by the flow field detection camera, that is, whether bubbles are generated in the flow field; (3) the docking head is controlled by the docking electric cylinder Move and dock with the transmission docking part, transmit the cleaning liquid through the cleaning transmission box, that is, transmit it to the inside of the cleaning tank, and operate the ultrasonic controller to perform ultrasonic cleaning on the immersion head assembly; (4) make the sample disk face the detection part; specifically, the cleaning liquid can be transmitted through the cleaning transmission cylinder, released through the nozzle, and the gear disk can be rotated by the motor one, and the electric cylinder can be controlled to control the extension distance of the detection disk. The detection seat can be moved by the motor two, and the screw rod two can be rotated. The cleaning motor controls the cleaning part to clean the surface of the sample disk, and the detection camera can detect the surface of the sample disk. When replacement is required, the fixed L rod releases the fixation of the plug shaft to remove the sample disk; the protective motor controls the rotation of the protective electric cylinder, and the protective electric cylinder controls the movement of the protective cover to cover the detection camera lens to achieve a protective effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0021] Figure 2 It is a schematic diagram of the inner structure of the outer box of the present invention.

[0022] Figure 3 It is a schematic diagram of the structure of the detection and maintenance mechanism of the present invention.

[0023] Figure 4 It is a schematic diagram of the structure of the detection element of the present invention.

[0024] Figure 5 It is a schematic diagram of the bottom structure of the detection actuator of the present invention.

[0025] Figure 6 This is a schematic diagram of the mounting structure of the mounting ring of the present invention.

[0026] Figure 7 It is a schematic diagram of the installation structure of the position seat of the present invention.

[0027] Figure 8 It is a schematic diagram of the internal structure of the workbench of the present invention.

[0028] Fig. 9 This is a schematic diagram of the installation structure of the ultrasonic cleaning mechanism of the present invention.

[0029] Fig.10 It is a schematic diagram of the installation structure of the fixing mechanism of the present invention.

[0030] Fig.11 It is a schematic diagram of the local structure of the fixing mechanism of the present invention.

[0031] Fig.12 It is a cross-sectional schematic diagram of the fixing mechanism of the present invention.

[0032] Fig.13 For the present invention Fig.12 A is an enlarged schematic diagram of the area marked in the middle.

[0033] Figure numerals: 1-outer box; 2-control panel; 3-objective lens; 4-immersion head; 5-medium transmission system; 6-moving belt; 7-moving motor; 8-guide plate; 9-motor one; 10-gear one; 11-toothed disc; 12-cleaning transmission cylinder; 13-control electric cylinder; 14-detection disc; 15-motor two; 16-screw rod two; 17-detection seat; 18-spray head; 19-cleaning part; 20-cleaning motor; 21-protection motor; 22-protection electric cylinder; 23-detection camera; 24-protection cover; 25-movable frame; 26-mounting frame; 27-motor 3; 28-gear three; 29-mounting ring; 30-motor four; 31-screw rod four; 32-guide rod four; 33-position seat; 34-lifting electric cylinder; 35-deflection motor; 36-workbench; 37-sample plate; 3701-insertion shaft; 38-cleaning transmission box; 39-docking head; 40-docking electric cylinder; 41-ultrasonic controller; 42-flow field detection camera; 43-transmission docking part; 44-connecting ring; 45-cleaning groove; 46-control ring; 4601-pushing part; 47-angle electric cylinder; 48-fixed L rod; 49-spring; 50-push wheel. DETAILED DESCRIPTION

[0034] Example: Figures 1 to 13As shown, a control panel 2 is arranged on the outside of the outer box 1, and an immersion head assembly is arranged above the outer box 1, the immersion head assembly includes an objective lens 3, an immersion head 4, and a medium transmission system 5, the medium transmission system 5 is used to transmit the medium to form a medium flow field, and a guide plate 8 is arranged at one end of the inner side of the outer box 1; a detection and maintenance mechanism is arranged at one end inside the outer box 1, and the detection and maintenance mechanism includes a toothed disc 11 rotatably mounted on the outer box 1, a detection disc 14 is slidably arranged on the toothed disc 11, and a detection member is slidably arranged on the detection disc 14; a detection actuator is slidably arranged inside the outer box 1, and the detection actuator includes a A movable frame 25 is provided, on which a mounting ring 29 is rotatably mounted, on which a position seat 33 is slidably mounted, on which a lifting electric cylinder 34 is mounted, and on which a working table 36 is rotatably mounted on a telescopic rod of the lifting electric cylinder 34. On two end faces of the working table 36, an ultrasonic cleaning mechanism is provided on one end face, and a sample tray 37 is provided on the other end face. A flow field detection camera 42 is provided inside the working table 36, and a shooting hole is arranged on the sample tray 37, and a lens of the flow field detection camera 42 is cooperatedly mounted in the shooting hole on the sample tray 37; the detection component is used for maintenance and detection of the sample tray 37.

[0035] A moving belt 6 and a moving motor 7 are provided at the bottom end of the inner part of the outer box 1, and the moving motor 7 is used to drive the moving belt 6, and the moving belt 6 is used to control the movement of the detection actuator; the detection actuator includes a mounting frame 26 arranged on the moving frame 25, and the mounting frame 26 is attached to the moving belt 6; and a motor three 27 is provided on the moving frame 25, and a gear three 28 is provided on the output shaft of the motor three 27, and the gear three 28 is meshed with the mounting ring 29; a motor four 30, a screw rod four 31 and a guide rod four 32 are provided on the mounting ring 29, and the motor four 30 is used to drive the screw rod four 31; the position seat 33 is movably arranged on the screw rod four 31 and the guide rod four 32, and the position seat 33 and the screw rod four 31 form a spiral pair.

[0036] Two transmission mechanisms are arranged on the position seat 33, one of which is used to transmit cleaning liquid to the ultrasonic cleaning mechanism, and the other is used to transmit the cleaning liquid collected in the ultrasonic cleaning mechanism; the transmission mechanism includes a cleaning transmission box 38 and a docking electric cylinder 40 arranged on the position seat 33, and a docking joint 39 is arranged on the telescopic rod of the docking electric cylinder 40, and the docking joint 39 is connected to the cleaning transmission box 38; the ultrasonic cleaning mechanism includes a cleaning groove 45 arranged on the end face of the working table 36, and an ultrasonic controller 41 arranged inside the working table 36, and a connecting ring 44 is attached and connected to the outside of the cleaning groove 45, and two transmission docking parts 43 are arranged on the outside of the connecting ring 44, and the two transmission docking parts 43 are respectively connected to the docking joint 39 on the transmission mechanism to transmit the cleaning liquid.

[0037] A deflection motor 35 is arranged on the telescopic rod of the lifting electric cylinder 34, and the deflection motor 35 is used to drive the workbench 36; a fixing mechanism is arranged on the workbench 36 for fixing the sample tray 37; the fixing mechanism includes a control ring 46 rotatably arranged inside the workbench 36, and an angle electric cylinder 47 rotatably arranged in an array inside the workbench 36, the telescopic rod of the angle electric cylinder 47 is rotatably connected to the control ring 46 to control the rotation of the control ring 46, a pushing portion 4601 is arranged on the circumference of the control ring 46, and a fixed L rod 48 is arrayed and slidably arranged on the workbench 36, a spring 49 for providing elastic force is connected between the fixed L rod 48 and the workbench 36, a push wheel 50 is arranged at one end of the fixed L rod 48, and the push wheel 50 is pushed by the pushing portion 4601 to move the fixed L rod 48, and the sample tray 37 is fixed by the fixed L rod 48; an insertion shaft 3701 is arranged on the sample tray 37, the insertion shaft 3701 is inserted on the end face of the workbench 36, and is fixed by the fixed L rod 48.

[0038] The detection and maintenance mechanism includes a motor 19 arranged on the outer box 1, a gear 10 is arranged on the output shaft of the motor 19, the gear 10 is meshed with the toothed disc 11, and a control electric cylinder 13 is arranged on the toothed disc 11, and the control electric cylinder 13 is used to control the movement of the detection disc 14; a motor 2 15 and a screw 2 16 are arranged on the detection disc 14, and the motor 2 15 is used to drive the screw 2 16; the detection member is driven by the screw 2 16; a cleaning transmission cylinder 12 is arranged in the central area of ​​the toothed disc 11 for transmitting clean water; the detection member includes a detection seat 17 that forms a spiral pair with the screw 2 16 A nozzle 18 is provided on the detection seat 17, and the nozzle 18 is connected to the cleaning transmission cylinder 12; and a cleaning motor 20 is provided on the detection seat 17, and a cleaning part 19 is provided on the output shaft of the cleaning motor 20 for cleaning and maintaining the sample tray 37; a detection camera 23 is provided at one end of the detection seat 17 for detecting the surface quality of the sample tray 37; a protection motor 21 is provided on the detection seat 17, and a protection electric cylinder 22 is provided on the output shaft of the protection motor 21, and a protection cover 24 is provided on the telescopic rod of the protection electric cylinder 22, and the protection cover 24 is used to cover the detection camera 23.

[0039] The principle of the present invention is as follows: the outer box 1 is placed under the immersion head assembly, the sample tray 37 is mounted on the end surface of the workbench 36, and the lens of the flow field detection camera 42 is mounted in the shooting hole on the sample tray 37, the control ring 46 is controlled to rotate by the sample tray 37, and the push part 4601 pushes the push wheel 50 to move the fixed L rod 48 and fix the plug shaft 3701, thereby fixing the sample tray 37; the sample tray 37 is used to simulate the situation of the wafer under lithography, that is, the position of the sample tray 37 is controlled, the moving belt 6 drives the moving frame 25 to move, and then the lifting electric cylinder 34 controls the workbench 36, The height of the sample tray 37 is adjusted to adjust the distance between the sample tray 37 and the immersion head assembly; the medium is transmitted through the medium transmission system 5 to form a medium flow field between the objective lens 3 and the sample tray 37, and the medium flow field is photographed by the flow field detection camera 42, that is, to detect whether bubbles are generated in the flow field; further, the motor three 27 can be operated to rotate the mounting ring 29, and the motor four 30 can be operated to rotate the screw four 31, that is, the position seat 33 is moved, thereby controlling the adjustment of the sample tray 37 at different positions to simulate the movement of the wafer during lithography, that is, to detect whether bubbles are generated in the flow field under the moving condition.

[0040] Furthermore, the deflection of the workbench 36 can be controlled by the deflection motor 35 so that the cleaning tank 45 is directed toward the immersion head assembly, and the immersion head assembly is located inside the cleaning tank 45. At this time, the access end of the transmission docking part 43 is directed toward the docking head 39, and the docking head 39 is controlled by the docking electric cylinder 40 to move and dock with the transmission docking part 43. The cleaning liquid is transmitted through the cleaning transmission box 38, that is, transmitted to the inside of the cleaning tank 45, and the ultrasonic controller 41 is operated to perform ultrasonic cleaning on the immersion head assembly.

[0041] Further, the position of the movable rack 25 is transferred, and the orientation of the sample tray 37 is adjusted so that the sample tray 37 faces the detection part; specifically, the cleaning liquid can be transmitted through the cleaning transmission cylinder 12, released through the nozzle 18, and operated by the motor 19 to rotate the toothed disk 11, and the electric cylinder 13 is controlled to control the extension and retraction distance of the detection disk 14. The motor 2 15 is operated and the screw 2 16 is rotated to move the detection seat 17. The cleaning motor 20 controls the cleaning part 19 to clean the surface of the sample tray 37, and the detection camera 23 can detect the surface of the sample tray 37. When replacement is required, the fixed L rod 48 releases the fixation of the plug shaft 3701 to remove the sample tray 37; the protection motor 21 controls the protection electric cylinder 22 to rotate, and the protection electric cylinder 22 controls the protection cover 24 to move, so as to cover the lens of the detection camera 23 and achieve a protective effect.

Claims

1. An immersion head detection device for an immersion lithography machine, comprising an outer box (1), characterized in that: A detection and maintenance mechanism is arranged at one end inside the outer box (1), the detection and maintenance mechanism comprising a toothed disc (11) rotatably mounted on the outer box (1), a detection disc (14) slidably mounted on the toothed disc (11), and a detection member slidably mounted on the detection disc (14); a detection actuator is slidably arranged inside the outer box (1), the detection actuator comprises a moving frame (25) slidably mounted on the outer box (1), a mounting ring (29) rotatably mounted on the moving frame (25), a position seat (33) slidably mounted on the mounting ring (29), and the position seat (33) A lifting electric cylinder (34) is arranged on the lifting electric cylinder (34), and a workbench (36) is rotatably arranged on the telescopic rod of the lifting electric cylinder (34). On the two end faces of the workbench (36), one end face is arranged with an ultrasonic cleaning mechanism, and the other end face is matched with a sample tray (37). A flow field detection camera (42) is arranged inside the workbench (36), and a shooting hole is arranged on the sample tray (37). The lens of the flow field detection camera (42) is matched with the shooting hole on the sample tray (37); the detection component is used to perform maintenance and detection on the sample tray (37).

2. The immersion head detection device for an immersion lithography machine according to claim 1, characterized in that: A moving belt (6) and a moving motor (7) are arranged at the bottom of the inner part of the outer box (1); the moving motor (7) is used to drive the moving belt (6); and the moving belt (6) is used to control the movement of the detection actuator.

3. The immersion head detection device for an immersion lithography machine according to claim 2, characterized in that: The detection actuator comprises a mounting frame (26) arranged on a moving frame (25), the mounting frame (26) being attached to a moving belt (6); a motor (27) being arranged on the moving frame (25), a gear (28) being arranged on an output shaft of the motor (27), the gear (28) being meshed with a mounting ring (29); a motor (30), a screw rod (31) and a guide rod (32) being arranged on the mounting ring (29), the motor (30) being used for driving the screw rod (31); a position seat (33) being movably arranged on the screw rod (31) and the guide rod (32), and the position seat (33) and the screw rod (31) forming a spiral pair.

4. The immersion head detection device for an immersion lithography machine according to claim 3, characterized in that: The position seat (33) is provided with two transmission mechanisms, one of which is used to transmit cleaning liquid to the ultrasonic cleaning mechanism, and the other is used to transmit the cleaning liquid collected in the ultrasonic cleaning mechanism; the transmission mechanism comprises a cleaning transmission box (38) and a docking electric cylinder (40) arranged on the position seat (33), a docking joint (39) is arranged on the telescopic rod of the docking electric cylinder (40), and the docking joint (39) is connected to the cleaning transmission box (38).

5. The immersion head detection device for an immersion lithography machine according to claim 4, characterized in that: The ultrasonic cleaning mechanism comprises a cleaning tank (45) arranged on the end surface of a workbench (36), and an ultrasonic controller (41) arranged inside the workbench (36); a connecting ring (44) is attached and connected to the outside of the cleaning tank (45); two transmission docking parts (43) are arranged on the outside of the connecting ring (44); the two transmission docking parts (43) are respectively connected to the docking heads (39) on the transmission mechanism to transmit the cleaning liquid.

6. The immersion head detection device for an immersion lithography machine according to claim 1, characterized in that: The telescopic rod of the lifting electric cylinder (34) is provided with a deflection motor (35), and the deflection motor (35) is used to drive the working table (36); a fixing mechanism is arranged on the working table (36) for fixing the sample plate (37); the fixing mechanism includes a control ring (46) rotatably arranged inside the working table (36), and an angle electric cylinder (47) rotatably arranged inside the working table (36); the telescopic rod of the angle electric cylinder (47) is rotatably connected to the control ring (46) to control the control ring (46) The control ring (46) is rotated, a pushing portion (4601) is arranged on the circumference of the control ring (46), and a fixed L rod (48) is arranged in an array and slidably on the working table (36), a spring (49) for providing elastic force is connected between the fixed L rod (48) and the working table (36), and a push wheel (50) is arranged at one end of the fixed L rod (48), and the push wheel (50) is pushed by the pushing portion (4601) to move the fixed L rod (48), and the sample plate (37) is fixed by the fixed L rod (48).

7. The immersion head detection device for an immersion lithography machine according to claim 6, characterized in that: The sample plate (37) is provided with an insertion shaft (3701), which is inserted into the end surface of the workbench (36) and fixed by a fixed L rod (48).

8. The immersion head detection device for an immersion lithography machine according to claim 1, characterized in that: The detection and maintenance mechanism comprises a motor (9) arranged on an outer box (1); a gear (10) is arranged on the output shaft of the motor (9); the gear (10) is meshed with a toothed disc (11); a control electric cylinder (13) is arranged on the toothed disc (11); the control electric cylinder (13) is used to control the movement of a detection disc (14); a motor (15) and a screw rod (16) are arranged on the detection disc (14); the motor (15) is used to drive the screw rod (16); the detection element is driven by the screw rod (16); a cleaning transmission cylinder (12) is arranged in the central area of ​​the toothed disc (11) for transmitting cleaning water.

9. The immersion head detection device for an immersion lithography machine according to claim 8, characterized in that: The detection component comprises a detection seat (17) which forms a spiral pair with the second screw rod (16); a nozzle (18) is arranged on the detection seat (17), and the nozzle (18) is connected to the cleaning transmission cylinder (12); a cleaning motor (20) is arranged on the detection seat (17), and a cleaning part (19) is arranged on the output shaft of the cleaning motor (20) for cleaning and maintaining the sample plate (37); a detection camera (23) is arranged at one end of the detection seat (17) for detecting the surface quality of the sample plate (37); a protection motor (21) is arranged on the detection seat (17), a protection electric cylinder (22) is arranged on the output shaft of the protection motor (21), and a protection cover (24) is arranged on the telescopic rod of the protection electric cylinder (22), and the protection cover (24) is used to cover the detection camera (23).

10. A method for detecting an immersion head, characterized in that The following steps are involved: S10: The sample tray (37) is mounted on the workbench (36), and the detection actuator is controlled to be located below the immersion head assembly, and the height of the sample tray (37) is adjusted, and the distance from the immersion head assembly is controlled; S20: transmitting a liquid medium through the immersion head assembly, the liquid medium forms a medium flow field between the objective lens and the sample plate (37), and photographing the medium flow field through a flow field detection camera (42) to detect whether bubbles are generated in the medium flow field; S30: Controlling the sample plate (37) to move so as to photograph and detect the medium flow field while in motion; S40: by turning the working table (36) in position, the immersion head is cleaned and maintained by an ultrasonic cleaning mechanism to remove dust and impurities; S50: Control the movement of the sample tray (37), so that the sample tray (37) moves and deflects toward the detection and maintenance mechanism, so as to perform surface detection on the sample tray (37) and perform a cleaning operation.

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