Resistance value calculation method of trimmable metal film cap-shaped resistor

Abstract

The invention discloses a method for calculating the resistance value of a trimmable metal film cap-shaped resistor. The method comprises the following steps: pre-determining the size parameters of the trimmable metal film cap-shaped resistor; dividing the adjustable metal film cap-shaped resistor into four areas, and respectively calculating the resistance of the first area, the resistance of the second area and the resistance of the third area; calculating the resistance of the fourth region according to a predetermined resistance correction parameter; and calculating the total resistance of the adjustable metal film cap-shaped resistor according to the resistances of the four areas. According to the method, the partial resistance of the trimmable metal film hat-shaped resistor of the high-precision amplifier is calculated in a split and parallel connection mode, correction factors are added, and the calculated resistance error is within 5% through a fitting mode of combining segmentation and tape-out, so that the calculation precision of the trimmable metal film hat-shaped resistor is greatly improved. The calculated resistance precision is obviously improved, and the method can be used for the design of a trimmable metal film cap-shaped resistor of a high-precision amplifier.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor technology, and in particular relates to a method for calculating the resistance of an adjustable metal film cap resistor. Background Art

[0002] The adjustable metal film cap resistor of the high-precision amplifier is an indispensable part of the analog integrated circuit. Conventional resistors (not used for online high-precision trimming resistors) are generally designed to have the same width, and the resistor accuracy calculated according to the normal aspect ratio is relatively high; due to the high-precision requirements of high-precision operational amplifiers, instrumentation amplifiers and other applications in analog circuits, it is necessary to design adjustable metal film cap resistors for online laser trimming to improve the accuracy of circuit parameters.

[0003] There is a large difference between the resistance calculated by conventional method and the actual resistance of the adjustable metal film cap resistor. The difference between the resistance value calculated by conventional method and the actual resistance value is often more than 100%. As a result, the resistance value of the designed circuit exceeds the upper limit of the adjustable range before adjustment due to the inaccurate calculated resistance value, resulting in unqualified products. Therefore, it is necessary to improve the calculation accuracy of the adjustable metal film cap resistor of the high-precision amplifier. Summary of the invention

[0004] In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is to provide a method for calculating the resistance of an adjustable metal film cap resistor.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0006] A method for calculating the resistance of an adjustable metal film cap-shaped resistor, the adjustable metal film cap-shaped resistor comprising a cap structure and a first brim structure and a second brim structure respectively arranged on both sides of the cap structure, wherein the width of the first brim structure is equal to the width of the second brim structure, comprising the following steps:

[0007] S100, predetermining the size parameters of the adjustable metal thin film cap-shaped resistor, wherein the size parameters include the length of the first brim structure, the length of the second brim structure, the widths of the first brim structure and the second brim structure, the length of the cap structure, and the width difference between the cap structure and the first brim structure;

[0008] S200, dividing the adjustable metal thin film cap-shaped resistor into four regions, wherein the region where the first cap brim structure is located is divided into a first region, the region where the second cap brim structure is located is divided into a second region, the region where the lower part of the cap structure is flush with the first cap brim structure and the second cap brim structure is divided into a third region, and the remaining region of the cap structure is divided into a fourth region;

[0009] S300, calculating the resistance R1 of the first region according to the width and length of the first region of the adjustable metal thin film cap-shaped resistor; calculating the resistance R2 of the second region according to the width and length of the second region of the adjustable metal thin film cap-shaped resistor; calculating the resistance R3 of the third region according to the width and length of the third region of the adjustable metal thin film cap-shaped resistor;

[0010] S400, calculating the resistance R4 of the fourth region of the adjustable metal film cap resistor according to a predetermined resistance correction parameter;

[0011] S500 , calculating a total resistance R of the adjustable metal thin film cap-shaped resistor according to the resistances of the first region, the second region, the third region, and the fourth region of the adjustable metal thin film cap-shaped resistor.

[0012] Further, the width W1 of the first brim structure and the second brim structure is used as the side length of the square resistor of the adjustable metal film cap-shaped resistor to determine the resistance value R of the square resistor of the adjustable metal film. S ; The resistance of each part of the adjustable metal film cap resistor is calculated based on the number of block resistors.

[0013] Furthermore, the method for calculating the resistance of the first region includes the following sub-steps:

[0014] S311, calculate the number of blocks S1 in the first area, the calculation formula is as follows

[0015]

[0016] Wherein, L1 represents the length of the first brim structure;

[0017] S312, calculating the resistance R1 of the first region, the calculation formula is as follows

[0018] R1=S1×R S

[0019] The method for calculating the resistance of the second region comprises the following sub-steps:

[0020] S321, calculate the number of blocks S2 in the first area, the calculation formula is as follows

[0021]

[0022] Wherein, L2 represents the length of the second brim structure;

[0023] S322, calculate the resistance R2 of the second region, the calculation formula is as follows

[0024] R2=S2×R S

[0025] The method for calculating the resistance of the third region comprises the following sub-steps:

[0026] S331, calculate the number of blocks S3 in the third area, the calculation formula is as follows

[0027]

[0028] Wherein, L3 represents the length of the cap structure;

[0029] S332, calculate the resistance R3 of the third region, the calculation formula is as follows

[0030] R3=S3×R S .

[0031] Further, the predetermined resistance correction parameters include an equivalent width of the fourth region, a first correction factor, and a second correction factor, and the step S400 includes the following sub-steps:

[0032] S410, calculating the equivalent resistance R of the fourth region according to the equivalent width of the fourth region 41 , the calculation formula is as follows

[0033]

[0034] Wherein, L3 represents the length of the cap structure;

[0035] S420, calculating the first correction resistance R of the fourth region according to the first correction factor Q1 42 , the calculation formula is as follows

[0036] R 42 =R S ×Q1×L3

[0037] S430, calculating the second correction resistance R of the fourth region according to the second correction factor Q2 43 , the calculation formula is as follows

[0038] R 43 =R s ×(-W2×L3 2 -4W2×L3+0.224)

[0039] S440, calculating the resistance R4 of the fourth region, the calculation formula is as follows

[0040] R4=R 41 +R 42 +R 43

[0041] Furthermore, the calculation formula of the equivalent width of the fourth region, the value range of the first correction factor, the calculation formula of the first correction resistance, the value range of the second correction factor and the calculation formula of the second correction resistance are all obtained by fitting experimental data.

[0042] Furthermore, in the step S100, the predetermined width difference W2 between the cap structure and the first brim structure should be greater than or equal to the equivalent width W of the fourth region. d .

[0043] Furthermore, the calculation formula of the equivalent width of the fourth region obtained by fitting is as follows:

[0044]

[0045] Furthermore, the value range of the first correction factor Q1 obtained by fitting is 0.03-0.04.

[0046] Furthermore, the value range of the second correction factor Q2 obtained by fitting is 0.00008-0.00012.

[0047] Furthermore, in the step S500, the total resistance R of the adjustable metal film cap resistor is calculated as follows:

[0048]

[0049] In the present invention, the adjustable metal film cap-shaped resistor is divided into multiple regions that can be equivalent to resistors in series and parallel form, and a calculation formula for the equivalent width of the fourth region of the adjustable metal film cap-shaped resistor of the high-precision amplifier, a value range of the first correction factor, a calculation formula for the first correction resistance, a value range of the second correction factor and a calculation formula for the second correction resistance are summarized in advance through a large number of experiments, and an approximate calculation formula for the equivalent resistance of the adjustable metal film cap-shaped resistor of the high-precision amplifier is obtained, and then the resistance value of the adjustable metal film cap-shaped resistor of the entire high-precision amplifier is calculated, and the calculated resistance error is within 5%, and the calculated resistance accuracy is significantly improved, which can be used for the design of the adjustable metal film cap-shaped resistor of the high-precision amplifier. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0051] Figure 1 It is a structural schematic diagram of an adjustable metal film cap-shaped resistor.

[0052] Figure 2The figure is a flow chart of an embodiment of a method for calculating the resistance of an adjustable metal film cap resistor according to the present invention.

[0053] Figure 3 A schematic diagram of the partitioning of the adjustable metal film cap resistor.

[0054] Adjustable metal film cap-shaped resistor-100; first cap brim structure-101; second cap brim structure-102; cap structure-103; first welding part-104; second welding part-105; first area-111; second area-112; third area-113; fourth area-114; pad-200. DETAILED DESCRIPTION

[0055] The following describes the implementation methods of the present invention through specific examples. The illustrations provided in the following embodiments are only used to schematically illustrate the basic concept of the present invention. The following embodiments and features in the embodiments may be combined with each other without conflict.

[0056] See also Figure 1 The adjustable metal film cap-shaped resistor is generally made of CrSi material, and includes a cap structure 103 with a wider middle portion and a first brim structure 101 and a second brim structure 102 with narrower portions disposed on both sides of the cap structure 103. The width of the first brim structure 101 is equal to the width of the second brim structure 102. The length of the first brim structure 101 and the length of the second brim structure 102 may be equal or unequal. Of course, in order to facilitate welding of the adjustable metal film cap-shaped resistor 100 and the pad 200, the first brim structure 101 also extends outward to form a first welding portion 104, and the second brim structure 102 also extends outward to form a second welding portion 105. When connecting the adjustable metal film cap-shaped resistor 100, the first welding portion 104 and the second welding portion 105 are respectively welded and fixed on the pad 200.

[0057] See also Figure 2 , Figure 2 The flowchart of an embodiment of a method for calculating the resistance of a trimmable metal film cap resistor of the present invention is shown in FIG. The method for calculating the resistance of a trimmable metal film cap resistor of the present invention comprises the following steps:

[0058] S100, predetermine the size parameters of the adjustable metal film cap-shaped resistor, the size parameters including the length L1 of the first brim structure 101, the length L2 of the second brim structure 102, the width W1 of the first brim structure 101 and the second brim structure 102, the length L3 of the cap structure 103, and the width difference W2 between the cap structure 103 and the first brim structure 101. The size parameters of the adjustable metal film cap-shaped resistor 100 are determined in advance when designing the adjustable metal film cap-shaped resistor 100, as a basis for calculating the resistance value of the adjustable metal film cap-shaped resistor 100. The value of the width W1 of the first brim structure 101 and the second brim structure 102 generally satisfies W1≥10μm, and the value of the length L3 of the cap structure 103 generally satisfies 160μm≥L3≥40μm.

[0059] S200, dividing the adjustable metal film cap-shaped resistor 100 into four regions, wherein the region where the first brim structure 101 is located is divided into a first region 111, the region where the second brim structure 102 is located is divided into a second region 112, the region where the lower part of the cap structure 103 is flush with the first brim structure 101 and the second brim structure 102 (i.e., the region where the lower part of the cap structure 103 has a width of W1) is a third region 113, and the remaining region of the cap structure 103 is a fourth region 114. Since the first welding portion 104 and the second welding portion 105 are both welded and fixed on the pad 200 after the adjustable metal film cap-shaped resistor 100 is connected, almost no resistance is generated, therefore, the first welding portion 104 and the second welding portion 105 are not considered when dividing the regions. By dividing the adjustable metal film cap-shaped resistor 100 into the above four regions, a new model for calculating the resistance value of the adjustable metal film cap-shaped resistor 100 is constructed.

[0060] S300, calculate the resistance R1 of the first area 111 according to the width and length of the first area 111 of the adjustable metal film cap-shaped resistor 100; calculate the resistance R2 of the second area 112 according to the width and length of the second area 112 of the adjustable metal film cap-shaped resistor 100; calculate the resistance R3 of the third area 113 according to the width and length of the third area 113 of the adjustable metal film cap-shaped resistor 100. For the convenience of calculation, the resistance of each area is calculated by counting the block resistance in this embodiment. In this embodiment, the width W1 of the first brim structure 101 and the second brim structure 102 is used as the side length of the block resistance of the adjustable metal film cap-shaped resistor 100, so that the resistance value R of the block resistance of the adjustable metal film can be determined. S Then, the resistance of each part of the adjustable metal film cap resistor 100 can be calculated according to the number of block resistors.

[0061] Specifically, the method for calculating the resistance of the first region 111 includes the following sub-steps:

[0062] S311, calculating the number of blocks S1 in the first area 111, the calculation formula is as follows:

[0063]

[0064] S312, calculating the resistance R1 of the first region 111, the calculation formula is as follows:

[0065]

[0066] The method for calculating the resistance of the second region 112 includes the following sub-steps:

[0067] S321, calculate the number of blocks S2 in the first area 111, and the calculation formula is as follows:

[0068]

[0069] S322, calculating the resistance R2 of the second region 112, the calculation formula is as follows:

[0070]

[0071] The method for calculating the resistance of the third region 113 includes the following sub-steps:

[0072] S331, calculate the number of blocks S3 in the third area 113, the calculation formula is as follows:

[0073]

[0074] S332, calculating the resistance R3 of the third region 113, the calculation formula is as follows:

[0075]

[0076] S400, calculating the resistance R4 of the fourth region 114 of the adjustable metal film cap resistor 100 according to the predetermined resistance correction parameter. The predetermined resistance correction parameter includes the equivalent width W of the fourth region 114 d , a first correction factor Q1 and a second correction factor Q2, the equivalent width W of the fourth region 114 d The calculation formula, the value range of the first correction factor Q1 and the value range of the second correction factor Q2 are all obtained by fitting the test data. In this embodiment, the test data is obtained by tape-out. Tape-out means that after the device is designed, a small amount of physical device is produced for testing. In simple terms, tape-out is the process of converting digital design into actual devices.

[0077] The equivalent width W of the fourth region 114 isd It refers to the width of the fourth region 114 that actually works. According to the test data, it is found that after the width of the fourth region 114 exceeds a certain width value, the influence of its width on the resistance value becomes negligible and can be basically ignored. Therefore, in this embodiment, the above width value is used as the equivalent width of the fourth region 114. By using multiple adjustable metal film cap resistors 100 of different sizes for testing, the equivalent width W of the fourth region 114 is finally obtained by fitting. d The calculation formula is as follows:

[0078]

[0079] Of course, since the width of the fourth region 114 exceeds the equivalent width W d Therefore, in the step S100, the predetermined width difference W2 between the cap structure 103 and the first brim structure 101 should not be less than the equivalent width W of the fourth region 114. d .

[0080] This step may include the following sub-steps:

[0081] S410, calculating the equivalent resistance R of the fourth region 114 according to the equivalent width of the fourth region 114 41 , the equivalent resistance refers to the actual effective resistance. Of course, due to the special location of the fourth region 114, there is no accurate calculation method for its resistance. Therefore, the equivalent resistance R of the fourth region 114 is 41 It is an approximate value calculated based on test data and needs further correction. The calculation formula is as follows:

[0082]

[0083] S420, calculating the first correction resistance R of the fourth region 114 according to the first correction factor Q1 42 The value range of the first correction factor Q1 obtained by fitting is 0.03-0.04. The first correction resistor R 42 The calculation formula is also obtained by fitting the experimental data, and the specific calculation formula is as follows:

[0084] R 42 =R S ×Q1×L3

[0085] S430, calculating the second correction resistance R of the fourth region 114 according to the second correction factor Q2 43 The value range of the second correction factor Q2 obtained by fitting is 0.00008 to 0.00012. The second correction resistor R 43 The calculation formula is also obtained by fitting the experimental data, and the specific calculation formula is as follows:

[0086] R 43 =R s ×(-Q2×L3 2 -4Q2×L3+0.224)

[0087] S440, calculating the resistance R4 of the fourth region 114, the calculation formula is as follows:

[0088]

[0089] S500, calculating the total resistance R of the adjustable metal film cap resistor 100 according to the resistances of the first region 111, the second region 112, the third region 113 and the fourth region 114 of the adjustable metal film cap resistor 100. This step may include the following sub-steps:

[0090] S510, calculating the resistance R5 of the cap structure 103 (i.e., the third region 113 and the fourth region 114). From a structural point of view, the third region 113 and the fourth region 114 are connected to the circuit in parallel, so the parallel resistance of the third region 113 and the fourth region 114 is used as the resistance R5 of the cap structure 103, and the calculation formula of the resistance R5 of the cap structure 103 is obtained as follows:

[0091]

[0092] S520, calculate the total resistance R of the adjustable metal film cap resistor 100. From a structural point of view, the first region 111, the cap structure 103 and the second region 112 are connected to the circuit in series. Therefore, the series resistance of the first region 111, the cap structure 103 and the second region 112 is used as the resistance R5 of the cap structure 103, and the calculation formula of the total resistance R of the adjustable metal film cap resistor 100 is obtained as follows:

[0093]

[0094] The calculation method of this embodiment is described below with several specific examples:

[0095] Example 1

[0096] A trimmable metal film cap resistor 100 for a metal film high-precision amplifier is designed, with size parameters of L1=L2=30μm, W1=10μm, L3=40μm, W2=30μm, the block resistance of the trimmable metal film cap resistor 100 is 1KΩ / block, Q1 is 0.035, and Q2 is 0.0001.

[0097] The calculation process of the resistance value of the adjustable metal film cap resistor 100 of the high-precision amplifier is as follows:

[0098]

[0099] R1=R S ×S1=3R S

[0100]

[0101] R2=S2×R S =3R S

[0102]

[0103] R3=S3×R S =4R S

[0104]

[0105] R 42 =R S ×Q1×L3=1.4R S

[0106] R 43 =R s ×(-Q2×L3 2 -4Q2×L3+0.224)=0.048R S

[0107] R4=R 41 +R 42 +R 43 =5.448R S

[0108]

[0109] R=R1+R2+R5=8.3065R S

[0110] R S =1K / block Substituting into the above formula, we get:

[0111] R=8.3065KΩ

[0112] Example 2

[0113] A trimmable metal film cap resistor 100 for a metal film high-precision amplifier is designed, and its size parameters are: L1=L2=0μm, W1=10μm, L3=120μm, W2=110μm, the block resistance of the trimmable metal film cap resistor 100 is 1KΩ / block, Q1 is 0.035, and Q2 is 0.0001.

[0114] The calculation process of the resistance value of the adjustable metal film cap resistor 100 of the high-precision amplifier is as follows:

[0115]

[0116] R1=R S ×S1=0

[0117]

[0118] R2=S2×R S =0

[0119]

[0120] R3=S3×R S =12R S

[0121]

[0122] R 42 =R S ×q1×L3=4.2R S

[0123] R 43 =R s ×(-q2×L3 2 -4Q2×L3+0.224)=-1.264R S

[0124] R4=R 41 +R 42 +R 43 =5.336R S

[0125]

[0126] R=R1+R2+R5=3.69R S

[0127] R S =1K / block Substituting into the above formula, we get:

[0128] R=3.69KΩ

[0129] Please refer to Table 1, which shows the test data of the adjustable metal film cap resistor 100 with multiple different size parameters when L1 = L2 = 0 μm.

[0130] Table 1

[0131]

[0132] In Table 1, S 41represents the equivalent resistance R of the fourth region 114 41 Quantity converted to sheet resistance, S 42 Represents the first correction resistor R 42 Quantity converted to sheet resistance, S 43 Represents the second correction resistor R 43 When converted into a square resistance, S4 represents the number of resistors R4 of the fourth region 114 when converted into a square resistance, so that the resistance value of the resistor is represented by the number of square resistances. It can be seen from Table 1 that the error between the resistance calculated by the method of this embodiment and the actual resistance value is within 5%, and in most cases the error is within 2%, and the error between the calculated resistance value and the actual resistance value is already very small.

[0133] In this embodiment, the adjustable metal film cap resistor 100 is divided into multiple regions that can be equivalent to resistors in series and parallel form, and a calculation formula for the equivalent width of the fourth region 114 of the adjustable metal film cap resistor 100 of the high-precision amplifier, a value range of the first correction factor, a calculation formula for the first correction resistance, a value range of the second correction factor, and a calculation formula for the second correction resistance are summarized in advance through a large number of experiments, and an approximate calculation formula for the equivalent resistance of the adjustable metal film cap resistor 100 of the high-precision amplifier is obtained, and then the resistance value of the adjustable metal film cap resistor 100 of the entire high-precision amplifier is calculated, and the calculated resistance error is within 5%, and the calculated resistance accuracy is significantly improved, which can be used for the design of the adjustable metal film cap resistor 100 of the high-precision amplifier.

[0134] The above embodiments only express the preferred implementation modes of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for those of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A method for calculating the resistance of a trimmable metal film cap-shaped resistor, wherein the trimmable metal film cap-shaped resistor comprises a cap structure and a first brim structure and a second brim structure respectively arranged on both sides of the cap structure, wherein the width of the first brim structure is equal to the width of the second brim structure, and wherein: The following steps are involved: S100, predetermining the size parameters of the adjustable metal thin film cap-shaped resistor, wherein the size parameters include the length of the first brim structure, the length of the second brim structure, the widths of the first brim structure and the second brim structure, the length of the cap structure, and the width difference between the cap structure and the first brim structure; S200, dividing the adjustable metal thin film cap-shaped resistor into four regions, wherein the region where the first cap brim structure is located is divided into a first region, the region where the second cap brim structure is located is divided into a second region, the region where the lower part of the cap structure is flush with the first cap brim structure and the second cap brim structure is divided into a third region, and the remaining region of the cap structure is divided into a fourth region; S300, calculating the resistance R1 of the first region according to the width and length of the first region of the adjustable metal thin film cap-shaped resistor; calculating the resistance R2 of the second region according to the width and length of the second region of the adjustable metal thin film cap-shaped resistor; calculating the resistance R3 of the third region according to the width and length of the third region of the adjustable metal thin film cap-shaped resistor; S400, calculating the resistance R4 of the fourth region of the adjustable metal film cap resistor according to a predetermined resistance correction parameter; S500 , calculating a total resistance R of the adjustable metal thin film cap-shaped resistor according to the resistances of the first region, the second region, the third region, and the fourth region of the adjustable metal thin film cap-shaped resistor.

2. The method for calculating the resistance of the adjustable metal film cap resistor according to claim 1, wherein: The width W1 of the first brim structure and the second brim structure is used as the side length of the square resistance of the adjustable metal film cap-shaped resistor to determine the resistance value R of the square resistance of the adjustable metal film. S ; The resistance of each part of the adjustable metal film cap resistor is calculated based on the number of block resistors.

3. The method for calculating the resistance of the adjustable metal film cap resistor according to claim 2, characterized in that: The method for calculating the resistance of the first region comprises the following sub-steps: S311, calculate the number of blocks S1 in the first area, the calculation formula is as follows Wherein, L1 represents the length of the first brim structure; S312, calculating the resistance R1 of the first region, the calculation formula is as follows R1=S1×R S The method for calculating the resistance of the second region comprises the following sub-steps: S321, calculate the number of blocks S2 in the first area, the calculation formula is as follows Wherein, L2 represents the length of the second brim structure; S322, calculate the resistance R2 of the second region, the calculation formula is as follows R2=S2×R S The method for calculating the resistance of the third region comprises the following sub-steps: S331, calculate the number of blocks S3 in the third area, the calculation formula is as follows Wherein, L3 represents the length of the cap structure; S332, calculate the resistance R3 of the third region, the calculation formula is as follows R3=S3×R S 。 4. The method for calculating the resistance of the adjustable metal film cap resistor according to claim 2, wherein: The predetermined resistance correction parameters include the equivalent width of the fourth region, the first correction factor, and the second correction factor. The step S400 includes the following sub-steps: S410, calculating the equivalent resistance R of the fourth region according to the equivalent width of the fourth region 41 , the calculation formula is as follows Wherein, L3 represents the length of the cap structure; S420, calculating the first correction resistance R of the fourth region according to the first correction factor Q1 42 , the calculation formula is as follows R 42 =R S ×Q1×L3 S430, calculating the second correction resistance R of the fourth region according to the second correction factor Q2 43 , the calculation formula is as follows R 43 =R s ×(-Q2×L3 2 -4Q2×L3+0.224) S440, calculating the resistance R4 of the fourth region, the calculation formula is as follows R4=R 41 +R 42 +R 43 。 5. The method for calculating the resistance of the adjustable metal film cap resistor according to claim 4, characterized in that: The calculation formula of the equivalent width of the fourth region, the value range of the first correction factor, the calculation formula of the first correction resistance, the value range of the second correction factor and the calculation formula of the second correction resistance are all obtained by fitting experimental data.

6. The method for calculating the resistance of the adjustable metal film cap resistor according to claim 5, characterized in that: In the step S100, the predetermined width difference W2 between the cap structure and the first brim structure should be greater than or equal to the equivalent width W of the fourth region. d .

7. The method for calculating the resistance of the adjustable metal film cap resistor according to claim 5, characterized in that: The calculation formula of the equivalent width of the fourth region obtained by fitting is as follows:

8. The method for calculating the resistance of the adjustable metal film cap resistor according to claim 5, characterized in that: The value range of the first correction factor Q1 obtained by fitting is 0.03-0.

04.

9. The method for calculating the resistance of the adjustable metal film cap resistor according to claim 5, characterized in that: The value range of the second correction factor Q2 obtained by fitting is 0.00008-0.00012.

10. The method for calculating the resistance of an adjustable metal film cap resistor according to any one of claims 1 to 9, characterized in that: In the step S500, the total resistance R of the adjustable metal film cap resistor is calculated as follows:

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