Optical component vacuum coating equipment and coating process thereof

Abstract

The invention discloses optical component vacuum coating equipment and a coating process thereof, and relates to the field of vacuum coating equipment.The optical component vacuum coating equipment comprises a coating equipment body, a draught fan, an ultrasonic cleaning device and feeding equipment.The middle positions of the coating equipment body, the draught fan, the ultrasonic cleaning device and the feeding equipment are provided with linkage mechanisms through embedded bolts on the ground; the linkage mechanism further comprises a steering assembly, a movable plate, a lifting assembly, a clamping assembly and a spraying assembly, the steering assembly further comprises a bottom plate installed through embedded bolts, and a rotating disc is rotationally connected to the center position of the upper surface of the bottom plate. Through cross linkage among the steering assembly, the lifting assembly, the clamping assembly, the spraying assembly, the movable plate, the fan and the ultrasonic cleaning device, a worker can be prevented from repeatedly moving a base material, meanwhile, front procedures are integrated and automated, the labor intensity of the worker is reduced, the occupied area of a machining line is reduced, and the environment application range is wider.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, and in particular to vacuum coating equipment for optical components and a coating process thereof. Background Art

[0002] Vacuum coating machines mainly refer to a type of coating that needs to be performed under a high vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. In order to change the physical properties of some optical lenses, vacuum coating machines are generally used to coat optical lenses;

[0003] The coating process of optical lenses is generally carried out in a vacuum chamber, which is roughly divided into several pre-treatment steps: cleaning process, drying process and coating process. Among them, the cleaning process is particularly important. It is necessary to remove the oxide layer and dirt on the surface of the substrate to ensure the cleanliness of the substrate surface. After the substrate is cleaned, it needs to be sent to the drying area to dry the substrate to facilitate the quality of the subsequent coating process.

[0004] Existing vacuum coating equipment requires many pre-processes before coating, among which cleaning and drying of the substrate is particularly important. However, most existing coating equipment requires a series of steps such as manually holding the substrate for cleaning, drying, and feeding, which is not only time-consuming and labor-intensive, but also increases the labor intensity of the staff and reduces the coating efficiency. Summary of the invention

[0005] Based on this, the purpose of the present invention is to provide an optical component vacuum coating device and a coating process thereof to solve the technical problems mentioned in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a vacuum coating device for optical components, comprising a coating device body, a fan, an ultrasonic cleaning device, and a feeding device, wherein a linkage mechanism is installed at the middle position of the coating device body, the fan, the ultrasonic cleaning device, and the feeding device through pre-embedded bolts on the ground, and the linkage mechanism further comprises a steering assembly, a moving plate, a lifting assembly, a clamping assembly, and a spraying assembly, and the steering assembly further comprises a base plate installed through pre-embedded bolts, a turntable is rotatably connected at the center position of the upper surface of the base plate, a threaded rod is fixedly connected at the center position of the turntable, and the bottom end of the threaded rod extends to the inside of the base plate, the upper surface of the turntable is located at the edge of the threaded rod, and a plurality of groups of limit rods are fixedly connected around the center of the circle at equal distances, the outer wall of the bottom curved surface of the threaded rod is located inside the base plate and fixedly sleeved with a worm gear, a first servo motor is fixedly installed inside the base plate, and the output end of the first servo motor is connected to a worm through a coupling;

[0007] The outer wall of the threaded rod is threadedly connected to a threaded sleeve in the lifting assembly, and the outer wall of the threaded sleeve is movably sleeved with a moving plate, and two groups of sliding grooves are symmetrically opened on the surface of the moving plate, and a sliding rod is fixed at a position above each group of sliding grooves on the upper surface of the moving plate, and a second motor is fixedly installed on the upper surface of the moving plate between the two groups of sliding grooves, and the output shaft of the second motor extends to the lower surface of the moving plate, and the output end of the second motor is connected to a first connecting rod, and both ends of the first connecting rod are rotatably connected to one end of the second connecting rod, and an L rod is slidably connected to the inside of the sliding groove, and a clamping plate is fixedly connected to the bottom end of the L rod, and the clamping plate is rotatably connected to the other end of the second connecting rod;

[0008] A first transmission wheel is fixed at the axial position of the upper surface of the threaded sleeve, a stepper motor is fixedly installed on the upper surface of the movable plate, a second transmission wheel is fixedly sleeved on the output end of the stepper motor, and the second transmission wheel is connected to the first transmission wheel through a transmission belt.

[0009] The substrate is neatly stacked in the mesh basket and placed on the feeding device. When the workpiece is sent to the bottom of the clamping plate, the stepper motor is started to drive the second transmission wheel and the threaded sleeve to rotate through the meshing of the transmission belt. The threaded sleeve is meshed with the threaded rod and cooperates with multiple sets of limit rods to provide lifting force for the moving plate, thereby causing the moving plate to drop to a height close to the mesh basket.

[0010] Then the second motor drives the first connecting rod to rotate and pulls the second connecting rods and the clamping plates on both sides to the middle position along the slide groove and the slide rod to the middle position to clamp the net basket. When the clamping plates on both sides move to the middle position, the spraying component is driven to pump liquid, and then the lifting component is started to drive the net basket to rise.

[0011] When the clamping assembly drives the net basket to rise, the first motor is started to drive the worm to rotate, and the worm is engaged with the worm wheel to drive the turntable, the threaded rod, the electrode contact rod, multiple sets of limit rods and the moving plate to rotate. When the net basket rotates to above the ultrasonic cleaning device, the lifting assembly is started to drive the net basket down into the ultrasonic cleaning tank. At this time, the electrode contact rod is not released from the electrode ring, so the circuit is disconnected, and the power supply to the electromagnetic water valve (a normally closed electromagnetic water valve) is disconnected. At this time, the clamping assembly is started to release the limit on the net basket. The above can eliminate the feeding step of the staff and reduce the labor intensity of the staff.

[0012] Furthermore, a movable rod in the spray assembly is fixed to the outer wall of the L-rod, a movable cylinder is fixedly mounted on the upper surface of the movable plate at one end of the movable rod away from the second motor, and the movable rod is in a sliding sleeve relationship with the inner wall of the movable cylinder.

[0013] By adopting the above technical solution, the movable cylinder and the movable rod can cooperate with the clamping assembly to perform initial washing on the substrate in the basket when it is placed in the ultrasonic cleaning device.

[0014] Furthermore, one end of the active cylinder away from the second motor is connected to one end of an electromagnetic water valve through a hose, and the other end of the electromagnetic water valve is connected to a water tank through a hose. One end of the active cylinder away from the second motor is connected to one end of a row of nozzles through a hose, and the row of nozzles is fixedly installed on the lower surface of the moving plate. The surface of one end of the electromagnetic water valve away from the water tank is located on the outer wall of the hose and is connected to a one-way valve.

[0015] By adopting the above technical solution, a one-way valve is connected to the outer wall of the hose at one end surface of the electromagnetic water valve away from the water tank, which can prevent the active cylinder from being stuck due to the closing of the electromagnetic water valve when the electrode contact rod is disconnected from the electrode ring, that is, the electrode contact rod is rotated to the notch of the electrode ring and the net basket is clamped by the clamping assembly after the substrate is cleaned. At this time, the space between the active cylinder and the hose is in a negative pressure state, and the one-way valve is in a single-open air intake state.

[0016] Furthermore, bolt holes are provided at the four corners of the base plate, a rotating groove matching the turntable is provided on the upper surface of the base plate, an electrode ring is embedded in the upper surface of the turntable, the electrode ring is electrically connected to the external power supply through a wire, the cross-sectional shape of the electrode ring is the letter "C", a pressure button is embedded in the upper surface of the base plate, the pressure button is connected to the fan and the external power supply through a wire, and a bevel is provided on the top of the pressure button.

[0017] By adopting the above technical solution, bolt holes are opened at the four corners of the base plate, which can be stably installed on the ground through pre-embedded bolts in the ground. The trigger end cross-section of the push button is trapezoidal, and the fan can be automatically turned on by squeezing the push button at an angle when the electrode contact rod sweeps over.

[0018] Furthermore, an electrode contact rod is fixedly mounted on the upper surface of the turntable, and the lower surface of the electrode contact rod is in contact with the surface of the bottom plate, and one end of the electrode contact rod is electrically connected to the electromagnetic water valve through a wire.

[0019] By adopting the above technical solution, the electrode at one end of the electrode contact rod can be attached to the electrode ring to form a passage to provide power supply for the electromagnetic water valve, and when the electrode contact rod rotates to the gap of the electrode ring, that is, close to the ultrasonic cleaning device, the circuit is disconnected and the electromagnetic water valve is automatically closed.

[0020] Furthermore, matching sliding holes are provided at the contact positions of the movable plate and the limiting rod, one end of the upper surface of the movable plate is fixedly connected to a mounting frame, and the water tank is fixed to the movable plate by bolts.

[0021] By adopting the above technical solution, multiple sets of limit rods can limit the movable plate to prevent it from rotating during the lifting process, thereby ensuring the normal operation of the equipment.

[0022] Furthermore, the top outer wall of the L-rod is slidably sleeved with the slide bar, and a matching through hole is provided at the contact position between the L-rod and the slide bar. The outer walls on both sides of the L-rod are located on the lower surface of the movable plate and are rotatably connected to rollers.

[0023] By adopting the above technical solution, the sliding rod can strengthen the limit of the L rod to prevent the L rod from shaking or deviating. The roller can fit with the lower surface of the moving plate to reduce friction and prevent the splint from getting stuck, thereby ensuring stable operation of the equipment.

[0024] Furthermore, one-way valves are installed at the connection points between the movable cylinder and the two groups of hoses, and the opening and closing states of the two groups of one-way valves are opposite.

[0025] By adopting the above technical solution, the active cylinder is connected to the water tank and the row nozzles respectively through two sets of hoses. When the splints move toward the middle position, the active rod is stretched to generate negative pressure inside the active cylinder. Cleaning liquid is drawn into the water tank through the hose and the one-way valve in the open state. When the splints are separated to both sides, the active rod is squeezed to fill the cleaning liquid into the row nozzles through the soft roller and the one-way valve in the open state. The two sets of one-way valves play the role of automatically closing the passage to ensure the normal operation of the equipment.

[0026] The present invention also provides a vacuum coating process for optical components, the use process of which includes the following steps:

[0027] S1: First, the substrate is neatly stacked in the mesh basket, and the mesh basket is neatly placed on the feeding device. Finally, the feeding device is started to send the mesh basket and the internal substrate to the bottom of the clamping assembly, and then the second motor is started to drive the clamping plates on both sides to move closer and separate to clamp the mesh basket;

[0028] S2: Then start the first servo motor to drive the worm to mesh with the worm wheel, and then drive the threaded rod, the turntable, the moving plate and the substrate to rotate as a whole, so as to achieve the effect of rotating the work station, reduce the equipment footprint, and make the operation spacing smaller for easy adjustment.

[0029] S3: When the clamps are close together, the active rod is driven to move in the active cylinder to generate negative pressure to draw the cleaning liquid from the water tank into the active cylinder. When the clamps on both sides are separated, the active rod squeezes the cleaning liquid in the active cylinder, so that the cleaning liquid is filled into the row of nozzles through the hose to perform preliminary washing of the substrate, and then the ultrasonic cleaning device is started to perform deep cleaning of the substrate;

[0030] S4: When the substrate is rotated to different workstations, it is also necessary to start the stepper motor to drive the threaded sleeve to rotate, thereby driving the moving plate and the substrate in the clamping state to be raised and lowered.

[0031] In summary, the present invention mainly has the following beneficial effects:

[0032] The present invention first starts the clamping assembly to clamp the net basket and the substrate. At this time, the clamping assembly drives the active rod to pump inside the active cylinder through the clamping plates on both sides, generates negative pressure, and draws cleaning liquid from the water tank. Then, the steering assembly is started to drive the net basket and the internal substrate to rotate at the working position. When the substrate in the net basket rotates to the top of the ultrasonic cleaning device, the lifting device is started again to put the net basket and the internal substrate into the cleaning tank of the ultrasonic cleaning device. Then, the clamping assembly is started again to release the clamping of the net basket. At this time, the clamping assembly drives the active rod to fill the cleaning liquid inside the active cylinder into the row of nozzles through the hose and clean the substrate. After the cleaning is completed, the ultrasonic cleaning device is started, and then the clamping assembly and the lifting assembly are used to reset the substrate in the basket to the top of the ultrasonic cleaning device, and then the steering assembly is started. When the electrode contact rod squeezes the button, the fan is started to air-dry the substrate, and finally it is rotated to the storage table set in front of the coating equipment body. The substrate can be placed in the coating equipment body manually or by a robotic arm for processing. In summary, the staff can avoid repeatedly moving the substrate, and at the same time, the front process is integrated and automated, which reduces the labor intensity of the staff. Secondly, it reduces the floor space of the processing line and has a wider range of environmental applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a front view of the present invention;

[0034] Figure 2 It is a split diagram of the present invention;

[0035] Figure 3 2 is a bottom-up split diagram of the present invention;

[0036] Figure 4 A detailed view of the clamping assembly of the present invention;

[0037] Figure 5 For the present invention Figure 2 Enlarged detail of point A in the middle.

[0038] In the figure: 1, coating equipment body; 2, fan; 3, ultrasonic cleaning device; 4, feeding equipment; 5, linkage mechanism; 51, steering assembly; 511, bottom plate; 512, turntable; 5121, electrode contact rod; 513, threaded rod; 514, limit rod; 515, worm gear; 516, first servo motor; 517, worm; 518, push button; 519, electrode ring; 52, moving plate; 521, mounting frame; 522, slide groove; 523, slide rod ; 53. Lifting assembly; 531. Threaded sleeve; 532. First transmission wheel; 533. Transmission belt; 534. Stepping motor; 535. Second transmission wheel; 54. Clamping assembly; 541. Second motor; 542. First connecting rod; 543. Second connecting rod; 544. L rod; 545. Roller; 546. Clamp; 55. Spraying assembly; 551. Active rod; 552. Active cylinder; 553. Row nozzle; 554. Solenoid water valve; 555. Water tank. DETAILED DESCRIPTION

[0039] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0040] The following describes an embodiment of the present invention based on its overall structure.

[0041] An optical component vacuum coating device, such as Figure 1 - Figure 5 As shown, it includes a coating device body 1, a fan 2, an ultrasonic cleaning device 3, and a feeding device 4. A linkage mechanism 5 is installed in the middle of the coating device body 1, the fan 2, the ultrasonic cleaning device 3, and the feeding device 4 through pre-buried bolts on the ground. The linkage mechanism 5 includes a steering assembly 51, a moving plate 52, a lifting assembly 53, a clamping assembly 54, and a spraying assembly 55. The steering assembly 51 includes a bottom plate 511 installed through pre-buried bolts. A turntable 5 is rotatably connected at the center of the upper surface of the bottom plate 511. 12. A threaded rod 513 is fixedly connected to the center of the turntable 512, and the bottom end of the threaded rod 513 extends to the inside of the bottom plate 511. The upper surface of the turntable 512 is located at the edge of the threaded rod 513 and is fixedly connected with multiple groups of limit rods 514 at equal intervals around the center of the circle. The outer wall of the bottom curved surface of the threaded rod 513 is located inside the bottom plate 511 and is fixedly sleeved with a worm gear 515. A first servo motor 516 is fixedly installed inside the bottom plate 511, and the output end of the first servo motor 516 is connected to a worm 517 through a coupling.

[0042] The outer wall of the threaded rod 513 is threadedly connected with a threaded sleeve 531 in the lifting assembly 53, and the outer wall of the threaded sleeve 531 is movably sleeved with a movable plate 52, and the surface of the movable plate 52 is symmetrically provided with two groups of sliding grooves 522, and a sliding rod 523 is fixed at the upper position of each group of sliding grooves 522 on the upper surface of the movable plate 52, and a second motor 541 is fixedly installed on the upper surface of the movable plate 52 between the two groups of sliding grooves 522, and the output shaft of the second motor 541 extends to the lower surface of the movable plate 52, and the output end of the second motor 541 is connected to the first connecting rod 542, and both ends of the first connecting rod 542 are rotatably connected to one end of the second connecting rod 543, and the interior of the sliding groove 522 is slidably connected with an L rod 544, and the bottom end of the L rod 544 is fixedly connected with a clamping plate 546, and the clamping plate 546 is rotatably connected to the other end of the second connecting rod 543;

[0043] A first transmission wheel 532 is fixed at the axial position of the upper surface of the threaded sleeve 531, a stepper motor 534 is fixedly installed on the upper surface of the movable plate 52, a second transmission wheel 535 is fixedly sleeved on the output end of the stepper motor 534, and the second transmission wheel 535 is transmission-connected to the first transmission wheel 532 via a transmission belt 533.

[0044] The substrates are neatly stacked in the mesh basket and placed on the feeding device 4. When the workpiece is sent to the bottom of the clamping plate 546, the stepping motor 534 is started to drive the second transmission wheel 535 and the threaded sleeve 531 to rotate through the engagement of the transmission belt 533. The threaded sleeve 531 is engaged with the threaded rod 513 and cooperates with the multiple groups of limit rods 514 to provide a lifting force for the movable plate 52, so that the movable plate 52 is lowered to a height close to the mesh basket.

[0045] Then the second motor 541 drives the first connecting rod 542 to rotate and pulls the second connecting rods 543 and the clamping plates 546 on both sides to the middle position along the slide groove 522 and the slide rod 523 to the middle position to clamp the net basket. When the clamping plates 546 on both sides move toward the middle position, they drive the spraying assembly 55 to pump liquid, and then start the lifting assembly 53 to drive the net basket to rise.

[0046] When the clamping assembly 54 drives the net basket to rise, the first motor is started to drive the worm 517 to rotate, and the worm 517 is engaged with the worm wheel 515 to drive the turntable 512, the threaded rod 513, the electrode contact rod 5121, multiple groups of limit rods 514 and the moving plate 52 to rotate. When the net basket rotates to above the ultrasonic cleaning device 3, the lifting assembly 53 is started to drive the net basket to descend into the ultrasonic cleaning tank. At this time, the electrode contact rod 5121 is not released from the electrode ring 519, so the circuit is disconnected, and the power supply to the electromagnetic water valve 554 (which is a normally closed electromagnetic water valve 554) is disconnected. At this time, the clamping assembly 54 is started to release the limit on the net basket. The above can eliminate the feeding step of the staff and reduce the labor intensity of the staff.

[0047] See also Figure 2 - Figure 5 The outer wall of the L-rod 544 is fixed with a movable rod 551 in the spray assembly 55, and the upper surface of the movable plate 52 is located at the end of the movable rod 551 away from the second motor 541 and is fixedly installed with a movable cylinder 552. The movable rod 551 and the inner wall of the movable cylinder 552 are in a sliding sleeve relationship. By setting the above structure, the movable cylinder 552 and the movable rod 551 can cooperate with the clamping assembly 54 to perform the initial rinse on the substrate in the basket when it is placed in the ultrasonic cleaning device 3.

[0048] See also Figure 2 - Figure 5 The end of the cylinder 552 away from the second motor 541 is connected to one end of the electromagnetic water valve 554 through a hose, and the other end of the electromagnetic water valve 554 is connected to the water tank 555 through a hose. The end of the cylinder 552 away from the second motor 541 is connected to one end of the row of nozzles 553 through a hose, and the row of nozzles 553 is fixedly installed on the lower surface of the moving plate 52. The end surface of the electromagnetic water valve 554 away from the water tank 555 is located on the outer wall of the hose and is connected to a one-way valve. By setting the above structure, the present invention The surface of the end of the electromagnetic water valve 554 away from the water tank 555 is located on the outer wall of the hose and is connected to a one-way valve, which can be used to disconnect the electrode contact rod 5121 from the electrode ring 519, that is, when the electrode contact rod 5121 rotates to the notch of the electrode ring 519 and the net basket is clamped by the clamping assembly 54 after the substrate is cleaned, to avoid the situation where the pump 552 is stuck due to the closing of the electromagnetic water valve 554. At this time, the space between the pump 552 and the hose is in a negative pressure state, and the one-way valve is in a single open air intake state.

[0049] See also Figure 2 - Figure 3 , bolt holes are provided at the four corners of the bottom plate 511, and a rotating groove matching the turntable 512 is provided on the upper surface of the bottom plate 511, an electrode ring 519 is embedded in the upper surface of the turntable 512, and the electrode ring 519 is electrically connected to the external power supply through a wire, and the cross-sectional shape of the electrode ring 519 is the letter "C" shape, and a press button 518 is embedded in the upper surface of the bottom plate 511, and the press button 518 is connected to the fan 2 and the external power supply through a wire, and an oblique opening is provided at the top of the press button 518. By setting the above structure, the present invention has bolt holes at the four corners of the bottom plate 511, which can be easily stably installed on the ground through pre-embedded bolts in the ground, and the trigger end cross-section of the press button 518 is trapezoidal, and the fan 2 can be automatically turned on by squeezing the press button 518 through the oblique opening when the electrode contact rod 5121 sweeps over.

[0050] See also Figure 2 - Figure 3An electrode contact rod 5121 is fixedly installed on the upper surface of the turntable 512, and the lower surface of the electrode contact rod 5121 is in contact with the surface of the bottom plate 511, and one end of the electrode contact rod 5121 is electrically connected to the electromagnetic water valve 554 through a wire. By setting the above structure, the electrode at one end of the electrode contact rod 5121 can be in contact with the electrode ring 519 to form a passage, thereby providing power supply for the electromagnetic water valve 554, and when the electrode contact rod 5121 rotates to the gap of the electrode ring 519, that is, close to the ultrasonic cleaning device 3, the circuit is disconnected and the electromagnetic water valve 554 is automatically closed.

[0051] See also Figure 2 - Figure 4 Matching sliding holes are provided at the contact positions of the movable plate 52 and the limiting rod 514. One end of the upper surface of the movable plate 52 is fixedly connected to the mounting frame 521. The water tank 555 is fixed to the movable plate 52 by bolts. By setting the above structure, the present invention can limit the movable plate 52 with multiple sets of limiting rods 514 to prevent it from rotating during the lifting process, thereby ensuring the normal operation of the equipment.

[0052] See also Figure 2 - Figure 4 The top outer wall of the L rod 544 is slidably connected to the slide bar 523, and a matching through hole is provided at the contact position between the L rod 544 and the slide bar 523. The outer walls on both sides of the L rod 544 are located on the lower surface of the movable plate 52 and are rotatably connected to rollers 545. By setting the above structure, the slide bar 523 can strengthen the limit of the L rod 544 to prevent the L rod 544 from shaking or deviating. The roller 545 can fit with the lower surface of the movable plate 52 to reduce friction and prevent the clamping plate 546 from getting stuck, thereby ensuring stable operation of the equipment.

[0053] See also Figure 5 One-way valves are installed at the connection between the active cylinder 552 and the two sets of hoses, and the opening and closing states of the two sets of one-way valves are opposite. By setting the above structure, the active cylinder 552 is respectively connected to the water tank 555 and the row nozzle 553 through the two sets of hoses. When the clamping plate 546 moves toward the middle position, it drives the active rod 551 to stretch to generate negative pressure inside the active cylinder 552, and the cleaning liquid is drawn into the water tank 555 through the hose and the open one-way valve. When the clamping plate 546 separates to both sides, the active rod 551 is squeezed to fill the cleaning liquid into the row nozzle 553 through the soft roller and the open one-way valve. The two sets of one-way valves play the role of automatically closing the passage to ensure the normal operation of the equipment.

[0054] The present invention also provides a vacuum coating process for optical components, such as Figure 1 - Figure 5 As shown, the process includes the following steps:

[0055] S1 firstly stacks the substrate neatly in the mesh basket and places the mesh basket neatly on the feeding device, and finally starts the feeding device to send the mesh basket and the inner substrate to the bottom of the clamping assembly, and then starts the second motor to drive the clamping plates on both sides to move closer and apart to clamp the mesh basket;

[0056] S2: Then start the first servo motor to drive the worm to mesh with the worm wheel, and then drive the threaded rod, the turntable, the moving plate and the substrate to rotate as a whole, so as to achieve the effect of rotating the work station, reduce the equipment footprint, and make the operation spacing smaller for easy adjustment.

[0057] S3: When the clamps are close together, the active rod is driven to move in the active cylinder to generate negative pressure to draw the cleaning liquid from the water tank into the active cylinder. When the clamps on both sides are separated, the active rod squeezes the cleaning liquid in the active cylinder, so that the cleaning liquid is filled into the row of nozzles through the hose to perform preliminary washing of the substrate, and then the ultrasonic cleaning device is started to perform deep cleaning of the substrate;

[0058] S4: When the substrate rotates to different workstations, the stepper motor needs to be started to drive the threaded sleeve to rotate, thereby driving the moving plate and the substrate in the clamping state to be raised and lowered:

[0059] The working principle of the present invention is as follows: first, the substrate is neatly stacked in the mesh basket and placed on the feeding device 4, and then when the workpiece is sent to the bottom of the clamping plate 546, the stepping motor 534 is started to drive the second transmission wheel 535 and the threaded sleeve 531 to rotate through the meshing of the transmission belt 533, and the threaded sleeve 531 is meshed with the threaded rod 513 and cooperates with the multiple groups of limit rods 514 to provide a lifting force for the movable plate 52, so that the movable plate 52 is lowered to a height close to the mesh basket;

[0060] Then the second motor 541 drives the first connecting rod 542 to rotate and pulls the second connecting rods 543 and the clamping plates 546 on both sides to the middle position along the slide groove 522 and the slide rod 523 to the middle position to clamp the net basket. When the clamping plates 546 on both sides move toward the middle position, they drive the spraying assembly 55 to pump liquid, and then start the lifting assembly 53 to drive the net basket to rise.

[0061] When the clamping assembly 54 drives the net basket to rise, the first motor is started to drive the worm 517 to rotate, and the worm 517 is engaged with the worm wheel 515 to drive the turntable 512, the threaded rod 513, the electrode contact rod 5121, the multiple groups of limit rods 514 and the moving plate 52 to rotate. When the net basket rotates to the top of the ultrasonic cleaning device 3, the lifting assembly 53 is started to drive the net basket to descend into the ultrasonic cleaning tank. At this time, the electrode contact rod 5121 is not released from the electrode ring 519, so the circuit is disconnected, and the power supply to the electromagnetic water valve 554 (which is a normally closed electromagnetic water valve 554) is disconnected. At this time, the clamping assembly 54 is started to release the limit on the net basket. The above can save the staff from the feeding step and reduce the staff's labor intensity;

[0062] When the two groups of clamping plates 546 separate to both sides to release the clamping of the net basket, the L rod 544 drives the active rods 551 on both sides to squeeze the cleaning liquid in the active cylinder 552 at the same time, and the cleaning liquid is filled into the row of nozzles 553 through the water outlet and the hose to perform the initial flushing of the substrate in the net basket. At the same time, the ultrasonic cleaning device 3 can use the cleaning liquid to clean the substrate again, thereby realizing automatic cleaning and feeding of the substrate, further reducing the labor intensity of the staff, and then the clamping assembly 54 and the lifting assembly 53 are started in sequence to drive the net basket and the substrate to rise;

[0063] Specifically, when the two sets of clamps 546 clamp the net basket above the feeding device 4, the L rod 544 will be used to pull the active rod 551 at the same time to draw the cleaning liquid from the water tank 555 by negative pressure. At this time, the electrode contact rod 5121 and the electrode ring 519 are connected, and the electromagnetic water valve 554 is opened. When the net basket rotates to the top of the ultrasonic cleaning device 3, the circuit is disconnected.

[0064] When the net basket rises above the ultrasonic cleaning device 3 again, the steering assembly 51 is first started to drive the net basket to rotate. During the rotation of the motor contact rod, the button 518 is squeezed and the fan 2 is started to air-dry the substrate in the net basket, wherein the single start time of the fan 2 is preset to be more than 5 seconds. When the net basket rotates to above the preset storage table in front of the coating equipment body 1, the lifting assembly 53 is first started to lower the net basket and place it on the surface of the storage table, and then the clamping assembly 54 is started to release the clamping of the net basket. Finally, the substrate in the net basket is placed into the coating equipment body 1 by a robotic arm or manually to carry out the coating process. In summary, the clamping assembly 54 is used in conjunction with the ultrasonic cleaning device 3, the spraying assembly 55, and the fan 2 started by squeezing the button 518 through the electrode contact rod 5121 to feed the net basket and the substrate in an integrated manner, and the cleaning and air-drying steps reduce the labor intensity of the staff and realize the processing automation. At the same time, the rotating processing path can reduce the equipment footprint to a certain extent.

[0065] Although an embodiment of the present invention has been shown and described, this specific embodiment is only an explanation of the present invention and is not a limitation of the invention. The specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions and variations to the embodiments without creative contribution as needed without departing from the principles and purpose of the present invention. However, as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. An optical component vacuum coating device, comprising a coating device body (1), a fan (2), an ultrasonic cleaning device (3), and a feeding device (4), characterized in that: A linkage mechanism (5) is installed in the middle of the coating equipment body (1), the fan (2), the ultrasonic cleaning device (3), and the feeding equipment (4) through pre-buried bolts on the ground. The linkage mechanism (5) further includes a steering assembly (51), a moving plate (52), a lifting assembly (53), a clamping assembly (54), and a spraying assembly (55). The steering assembly (51) further includes a base plate (511) installed through pre-buried bolts. A turntable (512) is rotatably connected at the center of the upper surface of the base plate (511). The center position of the turntable (512) A threaded rod (513) is fixedly connected, and the bottom end of the threaded rod (513) extends to the inside of the bottom plate (511); the upper surface of the turntable (512) is located at the edge of the threaded rod (513) and is fixedly connected to multiple groups of limit rods (514) at equal intervals around the center of the circle; the outer wall of the bottom curved surface of the threaded rod (513) is located inside the bottom plate (511) and is fixedly sleeved with a worm gear (515); a first servo motor (516) is fixedly installed inside the bottom plate (511); and the output end of the first servo motor (516) is connected to a worm gear (517) via a coupling; The outer wall of the threaded rod (513) is threadedly connected to a threaded sleeve (531) in the lifting assembly (53); the outer wall of the threaded sleeve (531) is movably sleeved with a movable plate (52); two groups of slide grooves (522) are symmetrically opened on the surface of the movable plate (52); a slide rod (523) is fixed on the upper surface of the movable plate (52) at a position above each group of slide grooves (522); and a second motor (541) is fixedly installed on the upper surface of the movable plate (52) between the two groups of slide grooves (522). , and the output shaft of the second motor (541) extends to the lower surface of the movable plate (52), the output end of the second motor (541) is connected to the first connecting rod (542), both ends of the first connecting rod (542) are rotatably connected to one end of the second connecting rod (543), the interior of the slide groove (522) is slidably connected to an L rod (544), the bottom end of the L rod (544) is fixedly connected to a clamping plate (546), and the clamping plate (546) is rotatably connected to the other end of the second connecting rod (543); A first transmission wheel (532) is fixed at the axial center position of the upper surface of the threaded sleeve (531), a stepper motor (534) is fixedly installed on the upper surface of the movable plate (52), a second transmission wheel (535) is fixedly sleeved on the output end of the stepper motor (534), and the second transmission wheel (535) is transmission-connected to the first transmission wheel (532) via a transmission belt (533).

2. The optical component vacuum coating device according to claim 1, characterized in that: A movable rod (551) in the spray assembly (55) is fixed to the outer wall of the L-rod (544); a movable cylinder (552) is fixedly mounted on the upper surface of the movable plate (52) at one end of the movable rod (551) away from the second motor (541); and the movable rod (551) and the inner wall of the movable cylinder (552) are in a sliding sleeve connection.

3. The optical component vacuum coating device according to claim 2, characterized in that: One end of the active cylinder (552) away from the second motor (541) is connected to one end of the electromagnetic water valve (554) through a hose, and the other end of the electromagnetic water valve (554) is connected to a water tank (555) through a hose. One end of the active cylinder (552) away from the second motor (541) is connected to one end of a row of nozzles (553) through a hose, and the row of nozzles (553) is fixedly mounted on the lower surface of the moving plate (52). The surface of one end of the electromagnetic water valve (554) away from the water tank (555) is located on the outer wall of the hose and is connected to a one-way valve.

4. The optical component vacuum coating equipment according to claim 1, characterized in that: Bolt holes are provided at the four corners of the bottom plate (511), a rotating groove matching the rotating disk (512) is provided on the upper surface of the bottom plate (511), an electrode ring (519) is embedded in the upper surface of the rotating disk (512), the electrode ring (519) is electrically connected to an external power supply via a wire, the cross-section of the electrode ring (519) is in the shape of the letter "C", a pressing button (518) is embedded in the upper surface of the bottom plate (511), the pressing button (518) is connected to the fan (2) and the external power supply via a wire, and an oblique opening is provided at the top of the pressing button (518).

5. The optical component vacuum coating equipment according to claim 1, characterized in that: An electrode contact rod (5121) is fixedly mounted on the upper surface of the rotating disk (512), and the lower surface of the electrode contact rod (5121) is in contact with the surface of the bottom plate (511), and one end of the electrode contact rod (5121) is electrically connected to the electromagnetic water valve (554) via a wire.

6. The optical component vacuum coating equipment according to claim 3, characterized in that: Matching sliding holes are provided at the contact positions between the movable plate (52) and the limiting rod (514); one end of the upper surface of the movable plate (52) is fixedly connected to a mounting frame (521); and the water tank (555) is fixed to the movable plate (52) by bolts.

7. The optical component vacuum coating device according to claim 1, characterized in that: The top outer wall of the L-rod (544) is slidably sleeved with the slide bar (523), and a matching through hole is provided at the contact position between the L-rod (544) and the slide bar (523). The outer walls on both sides of the L-rod (544) are located on the lower surface of the movable plate (52) and are rotatably connected to rollers (545).

8. The optical component vacuum coating device according to claim 2, characterized in that: One-way valves are installed at the connection points between the movable cylinder (552) and the two sets of hoses, and the opening and closing states of the two sets of one-way valves are opposite.

9. A vacuum coating process for optical components, characterized in that Using the optical component vacuum coating equipment according to any one of claims 1 to 8, the process comprises the following steps: S1: First, the substrate is neatly stacked in the mesh basket, and the mesh basket is neatly placed on the feeding device. Finally, the feeding device is started to send the mesh basket and the internal substrate to the bottom of the clamping assembly, and then the second motor is started to drive the clamping plates on both sides to move closer and separate to clamp the mesh basket; S2: Then start the first servo motor to drive the worm to mesh with the worm wheel, and then drive the threaded rod, the turntable, the moving plate and the substrate to rotate as a whole, so as to achieve the effect of rotating the work station, reduce the equipment footprint, and make the operation spacing smaller for easy adjustment. S3: When the clamps are close together, the active rod is driven to move in the active cylinder to generate negative pressure to draw the cleaning liquid from the water tank into the active cylinder. When the clamps on both sides are separated, the active rod squeezes the cleaning liquid in the active cylinder, so that the cleaning liquid is filled into the row of nozzles through the hose to perform preliminary washing of the substrate, and then the ultrasonic cleaning device is started to perform deep cleaning of the substrate; S4: When the substrate is rotated to different workstations, it is also necessary to start the stepper motor to drive the threaded sleeve to rotate, thereby driving the moving plate and the substrate in the clamping state to be raised and lowered.

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