Accurate temperature measurement system and method based on liquid phase epitaxy method

Abstract

The invention relates to an accurate temperature measurement system and method based on a liquid phase epitaxy method, and relates to the technical field of material growth and temperature measurement. The temperature measurement system comprises a liquid phase epitaxial growth system, an infrared temperature measurement module, a thermocouple temperature measurement module, a data acquisition and processing system and a temperature feedback control system. Through a dual temperature measurement mode of the infrared temperature measurement module and the thermocouple temperature measurement module, data fusion and calibration are carried out in combination with the data acquisition and processing system, and accurate measurement and control of the temperature in the liquid phase epitaxial growth process are realized. The method can effectively improve the measurement precision of the temperature in the liquid phase epitaxial growth process, reduces the temperature field gradient of the solution, ensures the uniformity and consistency of material growth, and is suitable for a liquid phase epitaxial growth process in the fields of semiconductor materials, optical materials and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of material growth and temperature measurement, and particularly to an accurate temperature measurement system and method based on liquid phase epitaxy method. Background Art

[0002] Liquid Phase Epitaxy (LPE) is a commonly used material growth technology, which is widely applied in the fields of semiconductor materials, optical materials, etc.

[0003] During the liquid phase epitaxial growth process, precise temperature control is a key factor to ensure the quality of material growth. Traditional temperature measurement methods mainly rely on contact temperature measurement means such as thermocouples. However, due to the complexity of the liquid phase epitaxial growth system and the dynamic change of temperature distribution, a single thermocouple temperature measurement method is difficult to meet the requirements of high-precision temperature measurement. Summary of the Invention

[0004] Technical Problems to be Solved

[0005] 1. The purpose of the present invention is to provide an accurate temperature measurement system based on liquid phase epitaxy method to solve the problem that it is difficult to accurately measure the liquid phase temperature in the prior art.

[0006] 2. The second purpose of the present invention is to provide an accurate temperature measurement method based on liquid phase epitaxy method. Through the dual temperature measurement methods of an infrared temperature measurement module and a thermocouple temperature measurement module, combined with a data acquisition and processing system for data fusion and calibration, accurate measurement and control of the temperature during the liquid phase epitaxial growth process are realized.

[0007] Technical Solutions

[0008] To achieve the above first purpose, in the first aspect, the present invention provides an accurate temperature measurement system based on liquid phase epitaxy method, including a liquid phase epitaxial growth system, an infrared temperature measurement module, a thermocouple temperature measurement module, a data acquisition and processing system, and a temperature feedback control system.

[0009] The infrared temperature measurement module includes a digital infrared temperature sensor and an infrared temperature measurement probe. The digital infrared temperature sensor is used to sense the temperature of the solution to be detected, and the infrared temperature measurement probe can be adjusted to directly above the solution.

[0010] The thermocouple temperature measurement module includes a thermoelectrode, a ceramic tube, and a connection point. The thermoelectrode is adjusted to the center position of the solution and is set to extend elliptically below the liquid surface for accurate temperature detection.

[0011] The data acquisition and processing system includes an infrared recognition amplifier, an infrared processor, and a temperature controller. The infrared recognition amplifier and the infrared processor are connected to a digital infrared temperature sensor, and the infrared recognition amplifier is used to display the infrared detection signal in real time. The temperature controller is connected to the wiring point of the thermocouple temperature measurement module through a compensation wire of the corresponding model, and is used to process and display the thermocouple temperature measurement signal in real time.

[0012] The temperature feedback control system includes a liquid phase epitaxy system temperature controller and a heating element. According to the feedback signals of the infrared temperature measurement module and the thermocouple temperature measurement module, the power of the heating element is adjusted for power compensation to optimize and reset the temperature field gradient of the melt.

[0013] To achieve the second object of the present invention, in a second aspect, the present invention also provides an accurate temperature measurement method based on the liquid phase epitaxy method, using the accurate temperature measurement system based on the liquid phase epitaxy method in the first aspect, including the following steps:

[0014] Preparation step: Calibrate the thermocouple, start the liquid phase epitaxy growth system, and set the initial temperature.

[0015] Measurement step: Extend the thermocouple to the furnace body through a lifting support component. The electrodes of the thermocouple should be adjusted to the center position of the solution. After closing the furnace lid and waiting for the temperature to be constant for one hour, the thermocouple detects the temperature at different heights of the solution at a fixed moving speed to form the temperature distribution of the solution.

[0016] After the thermocouple detects the solution temperature, connect the infrared thermometer to the position directly above the solution, adjust the infrared rays emitted by the infrared temperature measurement probe so that the digital infrared temperature sensor receives the detection signal feedback from the infrared temperature measurement probe. After the display value of the infrared recognition amplifier is stable, record the local temperature of the liquid surface.

[0017] The temperature feedback control system compensates the power of the liquid phase epitaxy growth system according to the output result of the data acquisition and processing system, and then repeats the measurement step until the precise control of the temperature gradient during the liquid phase epitaxy growth process is completed.

[0018] The present invention realizes the accurate measurement and control of the temperature during the liquid phase epitaxy growth process through the dual temperature measurement methods of the infrared temperature measurement module and the thermocouple temperature measurement module, combined with data fusion and calibration by the data acquisition and processing system, which can effectively improve the uniformity and consistency of material growth and has broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings of the present invention are provided only for illustrative purposes, and the proportions and quantities of the components in the drawings are not necessarily consistent with the actual products.

[0020] Figure 1 is a schematic diagram of the overall structure of the system according to the present invention; Figure 2 is a block diagram of the working principle of an infrared and thermocouple dual temperature measurement device and a data processing device proposed by the present invention. In the figure: 1: Liquid phase epitaxial growth system; 2: Temperature feedback control system; 3: Digital infrared temperature sensor; 4: Infrared temperature measurement probe; 5: Thermoelectrode of thermocouple; 6: Ceramic tube; 7: Wiring point; 8: Infrared identification amplifier; 9: Infrared processor; 10: Temperature controller. Detailed implementation mode

[0021] See Figure 1 As shown, the system according to the present invention includes a liquid phase epitaxial growth system, an infrared temperature measurement module, a thermocouple temperature measurement module, a data acquisition and processing system, and a temperature feedback control system. The infrared temperature measurement module includes an infrared temperature sensor and an infrared temperature measurement probe. The thermocouple temperature measurement module includes a thermoelectrode, a ceramic tube, and a wiring point. The data acquisition and processing system includes an infrared identification amplifier and a temperature controller. The temperature feedback control system includes a liquid phase epitaxial system temperature controller and a heating element.

[0022] See Figure 2 As shown, the method according to the present invention includes the following steps:

[0023] 1. Calibrate the thermocouple, start the liquid phase epitaxial growth system, and set the initial temperature.

[0024] 2. Measure the temperature in the liquid phase epitaxial growth system through the infrared temperature measurement module and the thermocouple temperature measurement module respectively.

[0025] 3. The data acquisition and processing system collects the data of the infrared temperature measurement module and the thermocouple temperature measurement module, and performs data fusion and calibration.

[0026] 4. The temperature feedback control system adjusts the temperature of the liquid phase epitaxial growth system according to the output result of the data acquisition and processing system.

[0027] 5. Repeat steps 2 to 4 until the precise control of the temperature gradient during the liquid phase epitaxial growth process is completed.

Claims

1. A precise temperature measurement system based on liquid phase epitaxy, characterized in that: include: A liquid phase epitaxial growth system (1), used for liquid phase epitaxial growth of materials; Infrared temperature measurement module, used for non-contact measurement of the local temperature of the liquid surface in the liquid phase epitaxial growth system; thermocouple temperature measurement module, used for contact measurement of the temperature distribution of the solution in the liquid phase epitaxial growth system; data acquisition and processing system, used for collecting data from the infrared temperature measurement module and the thermocouple temperature measurement module, and performing data fusion and calibration; The temperature feedback control system (2) is used to adjust the temperature of the liquid phase epitaxial growth system according to the output result of the data acquisition and processing system.

2. The system according to claim 1, characterized in that The infrared temperature measurement module comprises a digital infrared temperature sensor (3) and an infrared temperature measurement probe (4); the digital infrared temperature sensor (3) is used to monitor the local temperature in the liquid phase epitaxial growth system in real time; and the infrared temperature measurement probe (4) is used to measure the temperature of a specific area.

3. The system according to claim 1, characterized in that The thermocouple temperature measurement module comprises a thermoelectrode (5), a ceramic tube (6) and a connection point (7). The working end of the thermoelectrode (5) contacts the solution to be measured, and the reference end is connected to the connection point (7). The ceramic tube (6) is used to separate different electrodes of the temperature measurement element to avoid interference between the two poles or contact short circuit, so that the temperature measurement is accurate. The compensation wire is inserted into the connection point and is used to connect to a data acquisition and processing system.

4. The system according to claim 1, characterized in that The data acquisition and processing system comprises an infrared recognition amplifier (8), an infrared processor (9) and a temperature controller (10). The infrared recognition amplifier (8) and the infrared processor (9) are used to acquire data from the infrared temperature measurement module in real time. The temperature controller (10) is used to acquire data from the thermocouple temperature measurement module in real time and to perform fusion and calibration (such as automatic cold end compensation).

5. The system according to claim 1, characterized in that The temperature feedback control system (2) comprises a liquid phase epitaxial growth system temperature controller and a heating element. The liquid phase epitaxial growth system temperature controller adjusts the power of the heating element according to the output result of the data acquisition and processing system to achieve accurate control of the temperature gradient of the liquid phase epitaxial growth system.

6. A precise temperature measurement method based on liquid phase epitaxy, characterized in that: The following steps are involved: Preparation steps: calibrate the thermocouple, start the liquid phase epitaxial growth system, and set the initial temperature; Measurement steps: measure the local temperature in the liquid phase epitaxial growth system through the infrared temperature measurement module and the thermocouple temperature measurement module respectively; The data acquisition and processing system collects the data of the infrared temperature measurement module and the thermocouple temperature measurement module respectively, and performs data fusion and calibration; The temperature feedback control system of the liquid phase epitaxial growth system adjusts the temperature of the liquid phase epitaxial growth system according to the output results of the data acquisition and processing system; repeat steps 2 to 4 until the precise control of the temperature gradient during the liquid phase epitaxial growth process is completed.

7. The method according to claim 6, characterized in that The data fusion and calibration steps include: time synchronization of the data of the infrared temperature measurement module and the thermocouple temperature measurement module; calibrating the data of the infrared temperature measurement module through the data of the thermocouple temperature measurement module, and verifying the data of the thermocouple temperature measurement module with the data of the infrared temperature measurement module; and generating the temperature distribution of the liquid phase epitaxial growth system using the calibrated and verified temperature measurement module data.

8. The method according to claim 6, characterized in that The temperature feedback control system adjusts the power of the heating element according to the temperature distribution diagram to achieve accurate control of the temperature gradient during the liquid phase epitaxial growth process.

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