Assembling and disassembling mechanism for wafer test fixture

Abstract

The invention provides a mounting and dismounting mechanism for a wafer test fixture, and relates to the technical field of wafer test. The first driving part of the first jacking mechanism drives the bearing platform to move upwards so as to abut against the cover plate assembly, and the wafer testing clamp is jacked up so as to be separated from the conveying device. In addition, a second jacking mechanism is used for driving a bearing disc to penetrate through a first receding hole of the bearing platform, so that the sealing assembly is supported, and then a locking mechanism unlocks the cover plate assembly and the sealing assembly. According to the technical scheme, the cover plate assembly and the sealing assembly can be unlocked at the position of the conveying device, the wafer testing clamp does not need to be moved away from the conveying device to be unlocked through an independently-arranged assembling and disassembling mechanism, the wafer testing efficiency can be improved, and the labor cost is saved.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer testing, in particular to an assembly and disassembly mechanism for a wafer testing fixture. Background Art

[0002] When testing a wafer, it must be placed within the sealed test chamber of a wafer test fixture. This fixture typically includes a cover assembly and a sealing assembly, which connect to form a sealed test chamber. After functional testing of the wafer, the cover assembly and sealing assembly must be removed before the wafer can be removed.

[0003] In the prior art, after the wafer test is completed, the wafer test fixture needs to be manually moved to an independently arranged assembly and disassembly mechanism for disassembly. After disassembly, the wafer that has completed the test is first taken out, and then the wafer to be tested is placed, and then the wafer test fixture is locked. After the wafer test fixture is locked, it needs to be manually moved back to the wafer testing system for testing. This method is relatively time-consuming and affects the testing efficiency of the wafer. Therefore, it is urgent to design an assembly and disassembly mechanism that can improve the efficiency of wafer testing. Summary of the Invention

[0004] An object of the present invention is to provide an assembly and disassembly mechanism for a wafer test fixture, so as to solve the technical problem in the prior art that the wafer test fixture needs to be transported for assembly and disassembly, thereby affecting the wafer testing efficiency.

[0005] A further object of the present invention is to increase the load-bearing capacity of the first lifting mechanism.

[0006] In particular, the present invention provides an assembly and disassembly mechanism for a wafer test fixture, wherein the wafer test fixture includes a cover assembly and a sealing assembly, wherein the cover assembly and the sealing assembly are connected to form a test cavity for placing a wafer to be tested; the assembly and disassembly mechanism includes:

[0007] a support, a conveying device being mounted on the support, and the wafer test fixture being conveyed on the conveying device;

[0008] a first lifting mechanism mounted on the bracket, comprising a carrying platform and a first driving member, wherein the carrying platform is connected to the first driving member and is provided with a first avoidance hole extending vertically therethrough; driven by the first driving member, the carrying platform moves upward to abut against the cover assembly and lift the wafer test fixture to separate from the conveying device;

[0009] a second lifting mechanism mounted on the bracket, the second lifting mechanism comprising a second driving member and a support tray connected to the second driving member, wherein the support tray moves upward under the drive of the second driving member and passes through the first avoidance hole to support the sealing assembly;

[0010] A locking mechanism is connected to the bracket and is located above the first lifting mechanism, and is used to unlock the cover assembly and the sealing assembly.

[0011] Optionally, under the drive of the second driving member, the tray drives the sealing assembly to pass through the first avoidance hole and move downward; after the tested wafer is removed from the sealing assembly and a new wafer is placed in, the tray drives the sealing assembly to move upward and abut against the cover assembly;

[0012] The locking mechanism is also used to lock the cover assembly and the sealing assembly;

[0013] Driven by the first driving member, the carrying platform moves downward, driving the locked wafer testing fixture to return to the conveying device.

[0014] Optionally, the first lifting mechanism further includes:

[0015] a support plate connected to the bracket and located below the carrying platform, the carrying platform and the support plate being slidably connected vertically, the support plate having a second avoidance hole arranged corresponding to the first avoidance hole;

[0016] Two first slide rails are arranged on the support plate in parallel and at intervals;

[0017] a plurality of first sliding blocks, respectively mounted on the two first slide rails and connected to the first driving member, each of the first sliding blocks having at least one inclined surface;

[0018] A plurality of rollers are respectively installed on the sides of the carrying platform, and each roller is arranged corresponding to one of the inclined surfaces;

[0019] Driven by the first driving member, the first sliding block moves along the first sliding rail to drive the inclined surface to move relative to the roller, thereby driving the carrying platform to move vertically.

[0020] Optionally, each of the first sliding blocks further has at least one horizontal surface, the horizontal surface being located on the top of the first sliding block, and each of the horizontal surfaces being arranged corresponding to one of the inclined surfaces;

[0021] Under the drive of the first driving member, the inclined surface moves relative to the roller, so that the roller continues to roll to the horizontal surface when it rolls to the highest point of the inclined surface.

[0022] Optionally, the first lifting mechanism further includes a plurality of sliding assemblies, each of the sliding assemblies including:

[0023] A second slide rail is arranged vertically and connected to the support plate at one end;

[0024] The second sliding block is slidably mounted on the second sliding rail and is connected to the carrying platform.

[0025] Optionally, the first lifting mechanism further includes: a plurality of elastic members, one end of each of the elastic members is connected to the support plate, and the other end is connected to the bearing platform.

[0026] Optionally, the second lifting mechanism further includes:

[0027] An installation component connected to the bracket;

[0028] a plurality of third sliders connected to the mounting assembly;

[0029] A plurality of third slide rails extend vertically, each of the third slide rails is connected to the second driving member and the support tray, each of the third slide rails is slidably connected to one of the third slide rails, and is configured to move vertically relative to the third slider under the drive of the second driving member, thereby driving the support tray to move vertically.

[0030] Optionally, the number of the third slide rails and the number of the third sliding blocks are both three, and the three third slide rails are arranged in an equilateral triangle.

[0031] Optionally, the receiving tray has a first suction cup, and the first suction cup is configured to absorb the sealing assembly when the receiving tray abuts against the sealing assembly.

[0032] Optionally, a plurality of vent holes are provided at the bottom of the sealing assembly;

[0033] A plurality of second suction cups are provided on the support tray, and each second suction cup is configured to be aligned with the corresponding vent hole when the support tray supports the sealing assembly, so as to vacuum the test cavity.

[0034] The present invention drives the carrier platform to move upward through the first driving member of the first lifting mechanism to abut against the cover assembly and lift the wafer test fixture to separate from the conveying device. In addition, the second lifting mechanism is used to drive the support tray through the first avoidance hole of the carrier platform to support the sealing assembly, and then the locking mechanism unlocks the cover assembly and the sealing assembly. The above technical solution can realize the unlocking of the cover assembly and the sealing assembly at the conveying device, and there is no need to move the wafer test fixture away from the conveying device and use an independently arranged assembly and disassembly mechanism for unlocking, which can improve the testing efficiency of the wafer and save labor costs.

[0035] Furthermore, in the present invention, each first slider comprises an inclined surface and a horizontal surface, the horizontal surface being located at the top of the first slider, and each horizontal surface being arranged corresponding to one of the inclined surfaces. Driven by the first driving member, the inclined surface moves relative to the roller, causing the roller to roll to the highest point of the inclined surface and then continue to roll to the horizontal surface. The inclined surface and the roller cooperate to achieve the raising and lowering of the load-bearing platform, and the horizontal surface provides support for the load-bearing platform, thereby improving the load-bearing capacity of the first lifting mechanism and enabling it to withstand greater external forces.

[0036] Based on the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more aware of the above and other objects, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0038] Figure 1 is a schematic structural diagram of an assembly and disassembly mechanism for a wafer test fixture according to one embodiment of the present invention;

[0039] Figure 2 is a schematic front view of an assembly and disassembly mechanism for a wafer testing fixture according to one embodiment of the present invention;

[0040] Figure 3 is a schematic structural diagram of a cover assembly and a sealing assembly of a wafer testing fixture according to one embodiment of the present invention;

[0041] Figure 4 yes Figure 1 A schematic structural diagram of the first lifting mechanism of the assembly and disassembly mechanism shown;

[0042] Figure 5 yes Figure 1 The schematic structural diagram of the second lifting mechanism of the assembly and disassembly mechanism shown is a diagram in which the supporting tray is hidden;

[0043] Figure 6 yes Figure 1 A schematic structural diagram of the second lifting mechanism of the assembly and disassembly mechanism shown;

[0044] Figure 7 yes Figure 6 A schematic structural diagram of the supporting tray of the second lifting mechanism is shown.

[0045] Reference numerals:

[0046] 100-assembly and disassembly mechanism, 200-transport device, 300-wafer test fixture, 310-cover assembly, 320-sealing assembly, 330-clamp assembly, 400-heat sink, 500-wafer under test, 10-bracket, 20-second lifting mechanism, 30-first lifting mechanism, 40-locking mechanism, 11-first frame, 12-second frame, 31-support plate, 32-carrying platform, 33-first driving member, 34-first slide rail, 35-first slider, 351-protruding plate, 352-inclined surface, 3 53-horizontal plane, 36-sliding assembly, 37-elastic member, 38-connecting rod, 39-protective pad, 321-first avoidance hole, 322-roller, 21-second driving member, 211-motor, 214-screw, 212-screw, 213-nut, 22-trachea collecting member, 23-third slider, 24-third slide rail, 251-first mounting plate, 252-second mounting plate, 253-third mounting plate, 26-fourth mounting plate, 27-support tray, 271-first suction cup, 272-second suction cup. DETAILED DESCRIPTION

[0047] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and are not to be construed as limiting the present invention.

[0048] In the description of the present invention, it should be understood that the terms "upper" and "lower" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0049] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features, that is, include one or more of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. When a feature "includes or contains" one or more of the features it covers, unless otherwise specifically described, this indicates that other features are not excluded and may further include other features.

[0050] Unless otherwise specified or limited, the terms "connection" and "installation" should be interpreted broadly. For example, they can refer to fixed or detachable connections, or integration; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art should be able to understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0051] Unless otherwise defined, all terms (including technical terms and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0052] Figure 1 FIG. 1 is a schematic structural diagram of an assembly and disassembly mechanism 100 for a wafer test fixture 300 according to an embodiment of the present invention. Figure 2 FIG. 1 is a schematic front view of a mounting and dismounting mechanism 100 for a wafer test fixture 300 according to an embodiment of the present invention. Figure 3 3 is a schematic structural diagram of a cover assembly 310 and a sealing assembly 320 of a wafer testing fixture 300 according to an embodiment of the present invention. Figure 4 yes Figure 1 The schematic structural diagram of the first lifting mechanism 30 of the assembly and disassembly mechanism 100 is shown. Figure 5 yes Figure 1 The second lifting mechanism 20 of the assembly and disassembly mechanism 100 is shown in a schematic structural diagram without the supporting tray 27. Figure 6 yes Figure 1 Schematic structural diagram of the second lifting mechanism 20 of the assembly and disassembly mechanism 100 is shown.

[0053] like Figures 1 to 6As shown, the wafer test fixture 300 includes a cover assembly 310 and a sealing assembly 320, and the cover assembly 310 and the sealing assembly 320 are connected to form a test chamber for placing the wafer 500 to be tested. In a specific embodiment, the assembly and disassembly mechanism 100 for the wafer test fixture 300 includes a bracket 10, a first lifting mechanism 30 and a second lifting mechanism 20. The conveying device 200 is mounted on the bracket 10, and the wafer test fixture 300 is transported on the conveying device 200. The first lifting mechanism 30 is mounted on the bracket 10, and the first lifting mechanism 30 includes a carrying platform 32 and a first driving member 33. The carrying platform 32 is connected to the first driving member 33 and is provided with a first avoidance hole 321 that passes through in the vertical direction. Driven by the first driving member 33, the carrying platform 32 moves upward to abut against the cover assembly 310, and lifts the wafer test fixture 300 to separate from the conveying device 200. The second lifting mechanism 20 is mounted on the bracket 10 and includes a second driving member 21 and a support tray 27. Driven by the second driving member 21, the support tray 27 moves upward and passes through the first avoidance hole 321 to support the sealing assembly 320. The locking mechanism 40 is connected to the bracket 10 and is located on the top of the first lifting mechanism 30. The locking mechanism 40 is used to unlock the cover assembly 310 and the sealing assembly 320. Here, it is equivalent to setting the assembly and disassembly mechanism 100 at the assembly and disassembly station of the wafer testing system. The wafer testing fixture 300 is transported on the conveying device 200. When the wafer testing fixture 300 runs to the assembly and disassembly station, the assembly and disassembly mechanism 100 unlocks the wafer testing fixture 300. The size of the first avoidance hole 321 needs to be larger than the size of the sealing assembly 320 and is arranged opposite to the sealing assembly 320. When the supporting platform 32 supports the cover assembly 310, the sealing assembly 320 is located in the first avoidance hole 321. The heat sink 400 and the wafer under test 500 are placed on the sealing assembly 320 of the wafer test fixture 300 . The heat sink 400 and the wafer under test 500 are transported as a whole.

[0054] This embodiment can realize unlocking of the cover assembly 310 and the sealing assembly 320 at the conveying device 200, without moving the wafer test fixture 300 away from the conveying device 200 and using an independently arranged assembly and disassembly mechanism for unlocking, which can improve the test efficiency of the wafer 500 under test and save labor costs.

[0055] In some embodiments, driven by the second drive member 21, the tray 27 drives the sealing assembly 320 through the first avoidance hole 321 and moves downward. After removing the tested wafer 500 from the sealing assembly 320 and inserting a new wafer 500, the tray 27 drives the sealing assembly 320 upward and abuts against the cover assembly 310. The locking mechanism 40 is also used to lock the cover assembly 310 and the sealing assembly 320. Driven by the first drive member 33, the carrying platform 32 moves downward, driving the wafer test fixture 300 back onto the conveying device 200. Here, before the carrying platform 32 moves downward, the second drive member 21 is required to drive the tray 27 downward to abut against the sealing assembly 320. It can be understood that the assembly and disassembly mechanism 100 of this embodiment can not only unlock the wafer test fixture 300, but also lock the wafer test fixture 300.

[0056] In some embodiments, the cover assembly 310 and the sealing assembly 320 are connected via multiple snap assemblies 330. The locking mechanism 40 is configured to apply an external force to the multiple snap assemblies 330, thereby unlocking the cover assembly 310 and the sealing assembly 320. When the external force applied to the snap assemblies 330 is removed, the cover assembly 310 and the sealing assembly 320 are locked. The snap assemblies 330 and the locking mechanism 40 are both conventional technologies and are not described in detail here.

[0057] Generally, when the wafer test fixture 300 is unlocked, a certain external force needs to be applied to the wafer test fixture 300. The conveying device 200 generally uses a synchronous belt to convey the wafer test fixture 300. If the wafer test fixture 300 located on the conveying device 200 is unlocked directly, the synchronous belt cannot support the wafer test fixture 300, so personnel are required to move the wafer test fixture 300 to the independently set assembly and disassembly mechanism 100 for disassembly. In this embodiment, the wafer test fixture 300 is first lifted by the first lifting mechanism 30, so that the wafer test fixture 300 is separated from the synchronous belt, and the wafer test fixture 300 is supported. The second lifting mechanism 20 supports the sealing assembly 320, and then the locking mechanism 40 unlocks the cover assembly 310 and the sealing assembly 320. The first lifting mechanism 30 and the second lifting mechanism 20 can withstand a certain pressure, so that the wafer test fixture 300 can be smoothly unlocked at the conveying device 200.

[0058] In some embodiments, the bracket 10 includes a first frame 11 and a second frame 12 spaced apart from each other from top to bottom. The first lifting mechanism 30 is mounted on the first frame 11, and the second lifting mechanism 20 is mounted on the second frame 12. The conveying device 200 is mounted on the first frame 11. In other words, the first lifting mechanism 30 is mounted near the conveying device 200, and the second lifting mechanism 20 is mounted below the first lifting mechanism 30. In addition, the locking mechanism 40 is mounted on the top of the bracket 10.

[0059] In some embodiments, the first lifting mechanism 30 further includes a support plate 31, two first rails 34, a plurality of first sliders 35, and a plurality of rollers 322. The support plate 31 is connected to the bracket 10 and is located below the supporting platform 32. The supporting platform 32 is vertically slidably connected to the support plate 31. The support plate 31 has a second avoidance hole corresponding to the first avoidance hole 321. The two first rails 34 are arranged parallel to and spaced apart from each other on the support plate 31. A plurality of first sliders 35 are mounted on the two first rails 34 and connected to the first driving member 33. Each first slider 35 has at least one inclined surface 352. A plurality of rollers 322 are mounted on the sides of the supporting platform 32, each roller 322 corresponding to one inclined surface 352. Driven by the first driving member 33, the first sliders 35 move along the first rails 34, causing the inclined surfaces 352 to move relative to the rollers 322, thereby driving the supporting platform 32 vertically. Here, the two first slide rails 32 are arranged in parallel on opposite sides of the first avoidance hole 321. The first driving member 22 is arranged in the horizontal direction to provide a driving force in the horizontal direction.

[0060] This embodiment utilizes the cooperation of the roller 322 and the inclined surface 352 to achieve the raising and lowering of the load-bearing platform 32. When the inclined surface 352 moves, the roller 322 rolls from the lower point of the inclined surface 352 to the upper point of the inclined surface 352, thereby raising the load-bearing platform 32. The roller 322 rolls from the upper point of the inclined surface 352 to the upper point of the inclined surface 352, thereby lowering the load-bearing platform 32. Through the cooperation of the roller 322 and the inclined surface 352, this embodiment converts the horizontal driving force of the first driving member 22 into a vertical driving force, thus replacing a vertically arranged lifting mechanism and saving vertical layout space.

[0061] In some embodiments, the first avoidance hole 321 is provided at the middle position of the carrying platform 32, and the second avoidance hole is also provided at the middle position of the support plate 31, so that the second jacking mechanism 20 can pass through the first jacking mechanism 30. Here, the support plate 31 is connected to the first frame 11.

[0062] In some embodiments, the carrying platform 32 is provided with a protective pad 39 around the avoidance hole 321 to avoid hard contact between the carrying platform 32 and the cover assembly 310 and protect the cover assembly 310 from being damaged.

[0063] In some embodiments, two first slide rails 34 are respectively arranged on opposite sides of the carrying platform 32. There are two first sliders 35, and each first slider 35 is correspondingly mounted on one first slide rail 34.

[0064] In some embodiments, each first slider 35 further has at least one horizontal surface 353 located at the top of the first slider 35, and each horizontal surface 353 is arranged corresponding to an inclined surface 352. Driven by the first driving member 33, the inclined surface 352 moves relative to the roller 322, so that when the roller 322 reaches the highest point of the inclined surface 352, it continues to roll onto the horizontal surface 353.

[0065] This embodiment utilizes the cooperation of the inclined surface 352 and the roller 322 to realize the lifting of the carrying platform 32, and utilizes the horizontal surface 353 to support the carrying platform 32, which can improve the carrying capacity of the first lifting mechanism 30 and can withstand greater external forces.

[0066] In some embodiments, each first slider 35 includes a plurality of vertically extending protruding plates 351. The protruding plates 351 are spaced apart along the extension direction of the first slide rail 34. Each protruding plate 351 has a horizontal surface 353 and an inclined surface 352. Each protruding plate 351 is correspondingly arranged to a roller 322.

[0067] In some embodiments, each first slider 35 is provided with two protruding plates 351, for a total of four protruding plates 351, and thus four rollers 322. Two rollers 322 are positioned on opposite sides of the support platform 32. The simultaneous movement of the four rollers 322 enables the overall lifting and lowering of the support platform 32, allowing the support platform 32 to withstand heavy loads.

[0068] In some embodiments, the first lifting mechanism 30 further includes a connecting rod 38, the ends of which are respectively connected to the two first sliders 35, and the middle portion of the connecting rod 38 is connected to the first driving member 33. In other words, in this embodiment, only one first driving member 33 is required to drive the two first sliders 35 to move, thereby lifting the supporting platform 32. When the first driving member 33 pushes the first slider 35 to move, the protruding plate 351 moves relative to the roller 322, causing the roller 322 to roll from the bottom of the inclined surface 352 to the top of the inclined surface 352 and finally to the horizontal surface 353. It can be understood that the supporting platform 32 does not move horizontally, but only vertically, while the first slider 35 moves horizontally.

[0069] In some embodiments, the first lifting mechanism 30 further includes a plurality of sliding assemblies 36, each of which includes a second slide rail and a second slider. The second slide rail is arranged vertically and one end of the second slide rail is connected to the support plate 31. The second slider is slidably mounted on the second slide rail and connected to the carrying platform 32.

[0070] This embodiment uses a sliding assembly 36 to achieve the up and down movement of the carrying platform 32 and also to support the carrying platform 32 .

[0071] In some embodiments, the carrying platform 32 is square, and there are four sliding assemblies 36, which are respectively arranged at the four corners of the carrying platform 32. In other embodiments, the shape of the carrying platform 32 can also be determined according to specific design requirements.

[0072] In some embodiments, the first lifting mechanism 30 further includes multiple elastic members 37 , each of which is connected to the support plate 31 at one end and to the support platform 32 at the other end. Here, the elastic members 37 are springs. There are four elastic members 37 , each positioned at an angle at the four corners of the support platform 32 . This embodiment, by providing the elastic members 37 , provides a downward pull on the support platform 32 , ensuring its return to its original position.

[0073] In some embodiments, the first driving member 33 is a cylinder. When the piston rod of the cylinder is extended, it drives the first slider 35 to move, thereby driving the carrying platform 32 to move upward. When the piston rod of the cylinder is retracted, it drives the first slider 35 to move in the opposite direction, thereby driving the carrying platform 32 to move downward. This embodiment is equivalent to converting the driving force in the horizontal direction into the driving force in the vertical direction to achieve the lifting and lowering of the carrying platform 32. The first driving member 33 is arranged in the horizontal direction. Compared with the lifting mechanism in which the ball screw 22 or the cylinder is arranged vertically, the vertical space occupied is small, the structure is more compact, and the wafer test fixture 300 can be accurately positioned. In addition, the vertical load force of the lifting mechanism in which the ball screw 22 or the cylinder is arranged vertically is small, while this embodiment supports the wafer test fixture 300 through the carrying platform 32, can withstand large vertical loads, and has strong structural rigidity.

[0074] In some embodiments, the second lifting mechanism 20 further includes a mounting assembly, a plurality of third sliders 23, and a plurality of third slide rails 24. The mounting assembly is connected to the bracket 10. The plurality of third sliders 23 are connected to the mounting assembly. The plurality of third slide rails 24 extend vertically, each of which is connected to the second drive member 21 and the support tray 27. Each third slide rail 24 is slidably connected to a third slide rail 24 and is configured to move vertically relative to the third slider 23 under the drive of the second drive member 21, thereby driving the support tray 27 to move vertically. Here, the mounting plate is connected to the second frame 12.

[0075] This embodiment uses a linear slide rail, which can improve the rigidity and precision of the second lifting mechanism 20 and improve the stability of the movement of the support tray 27.

[0076] In one embodiment, the number of the third slide rails 24 and the number of the third sliders 23 are both three, and the three third slide rails 24 are arranged in an equilateral triangle. This structural arrangement greatly improves the structural rigidity and has better stability.

[0077] In one embodiment, the mounting assembly includes a first mounting plate 251 and multiple second mounting plates 252. The first mounting plate 251 is annular, and multiple second mounting plates 252 are installed on the first mounting plate 251 at intervals and are all connected to the second frame 12. Three third sliders 23 are installed on the inner side of the first mounting plate 251, and each third slider 23 is connected to a second mounting plate 252. Here, the second mounting plates 252 are L-shaped.

[0078] In some embodiments, the second driving member 21 is a screw motion mechanism, which includes a motor 211 and a screw 214 . The screw 214 includes a screw rod 212 and a nut 213 mounted on the screw rod 212 . The screw rod 212 is located at the center of the three third slide rails 24 .

[0079] This embodiment uses a screw motion mechanism to drive the third slide rail 24 up and down, which is equivalent to installing the third slide rail 24 in reverse and moving it relative to the third slider 23, thereby increasing the rigidity of the entire Z-axis. The second lifting mechanism 20 provided by this embodiment has the characteristics of long travel, high load, and high precision.

[0080] In some embodiments, the second lifting mechanism 20 further includes a third mounting plate 253, which is located in the middle of the first mounting plate 251 and is connected to the first mounting plate 251. Furthermore, the third mounting plate 253 is connected to the nut 213. It can be understood that in this embodiment, the screw rod 212 moves relative to the nut 213, which is stationary. When the screw rod 212 moves, it drives the three third slide rails 24 to move up and down relative to the corresponding third sliders 23, thereby achieving the raising and lowering of the support tray 27.

[0081] In some embodiments, the second lifting mechanism 20 further includes a fourth mounting plate 26 , which is mounted on top of and connected to the three third slide rails 24 . A support tray 27 is mounted on the fourth mounting plate 26 .

[0082] Figure 7 yes Figure 6 FIG. 2 is a schematic structural diagram of the support tray 27 of the second lifting mechanism 20. Figure 7 As shown, in some embodiments, the tray 27 has a first suction cup 271. The first suction cup 271 is configured to absorb the sealing assembly 320 when the tray 27 abuts the sealing assembly 320, thereby preventing the sealing assembly 320 from moving. It can be understood that the first suction cup 271 absorbs the sealing assembly 320 while moving the sealing assembly 320, thereby improving the alignment accuracy of the test probes of the cover assembly 310 and the wafer under test 500 in the sealing assembly 320, achieving drag-free needle marks and good needle insertion stability.

[0083] In some embodiments, the bottom of the sealing assembly 320 is provided with multiple vent holes. The support tray 27 is provided with multiple second suction cups 272 . Each second suction cup 272 is configured to align with a corresponding vent hole when the support tray 27 supports the sealing assembly 320, thereby evacuating the test chamber. Here, it can be understood that the first suction cup 271 is a large, integrated suction cup, and the multiple second suction cups 272 are smaller suction cups located within the first suction cup 271 , and the two use different air paths.

[0084] In some embodiments, the second lifting mechanism 20 further includes a tubular trachea collecting member 27 for storing trachea. The trachea is connected to a first suction cup 271 and a second suction cup 272 and to an external vacuum device. The trachea collecting member 27 collects and positions the trachea, preventing leakage that could affect normal operation of the device.

[0085] The working principle of the assembly and disassembly mechanism 100 of this embodiment is as follows:

[0086] When the wafer test jig 300 moves from the conveyor device 200 to the loading and unloading station, the first driving member 33 of the first lifting mechanism 30 pushes the first slider 35 along the corresponding first slide rail 34, causing the inclined surface 352 to move relative to the roller 322, thereby driving the supporting platform 32 upward. The supporting platform 32 presses against the cover assembly 310 of the wafer test jig 300 and drives the wafer test jig 300 upward to separate from the conveyor device 200. The second driving member 21 of the second lifting mechanism 20 then drives the third slide rail 24 upward, driving the support plate 27 upward. The support plate 27 presses against the sealing assembly 320 of the wafer test jig 300 and causes the first suction cup 271 to absorb the sealing assembly 320. The second suction cup 272 evacuates the test chamber to absorb the heat sink 400 and the wafer under test 500, preventing them from shifting. The locking mechanism 40 then unlocks the snap assembly 330 of the wafer test fixture 300, thereby unlocking the cover assembly 310 and the sealing assembly 320. The second driving member 21 of the second lifting mechanism 20 then drives the third slide rail 24 downward to move the sealing assembly 320 downward. Once the sealing assembly 320 is in place, the wafer handling mechanism removes the tested wafer 500 from the sealing assembly 320, and then places a new wafer 500 to be tested. The second driving member 21 of the second lifting mechanism 20 then drives the third slide rail 24 upward again, causing the sealing assembly 320 to abut against the cover assembly 310. The locking mechanism 40 then locks the snap assembly 330 of the wafer test fixture 300, thereby locking the cover assembly 310 and the sealing assembly 320. Finally, the second driving member 21 of the second lifting mechanism 20 drives the third slide rail 24 downward, thereby driving the support tray 27 downward. The first driving member 33 of the first lifting mechanism 30 drives the first slider 35 to move in the reverse direction, so that the carrying platform 32 drives the wafer testing fixture 300 to move downward and return to the conveying device 200 .

[0087] The assembly and disassembly mechanism 100 designed in this embodiment realizes the fully automatic locking and disassembly of the wafer test fixture 300 , and does not require the wafer test fixture 300 to be transported, thereby reducing manual operations and improving wafer testing efficiency.

[0088] At this point, those skilled in the art will recognize that, although a number of exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications consistent with the principles of the present invention may be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and deemed to cover all such other variations or modifications.

Claims

1. A wafer test fixture assembly and disassembly mechanism, the wafer test fixture comprising a cover assembly and a sealing assembly, the cover assembly and the sealing assembly being connected to form a test cavity for placing a wafer to be tested; characterized in that: The assembly and disassembly mechanism comprises: a support, a conveying device being mounted on the support, and the wafer test fixture being conveyed on the conveying device; a first lifting mechanism mounted on the bracket, comprising a carrying platform and a first driving member, wherein the carrying platform is connected to the first driving member and is provided with a first avoidance hole extending vertically therethrough; driven by the first driving member, the carrying platform moves upward to abut against the cover assembly and lift the wafer test fixture to separate from the conveying device; a second lifting mechanism mounted on the bracket, the second lifting mechanism comprising a second driving member and a support tray connected to the second driving member, wherein the support tray moves upward under the drive of the second driving member and passes through the first avoidance hole to support the sealing assembly; A locking mechanism is connected to the bracket and is located above the first lifting mechanism, and is used to unlock the cover assembly and the sealing assembly.

2. The assembly and disassembly mechanism according to claim 1, wherein: Under the drive of the second driving member, the tray drives the sealing assembly to pass through the first avoidance hole and move downward; after the tested wafer is removed from the sealing assembly and a new wafer is placed in, the tray drives the sealing assembly to move upward and abut against the cover assembly; The locking mechanism is also used to lock the cover assembly and the sealing assembly; Driven by the first driving member, the carrying platform moves downward, driving the locked wafer testing fixture to return to the conveying device.

3. The assembly and disassembly mechanism according to claim 1, wherein: The first lifting mechanism also includes: a support plate connected to the bracket and located below the carrying platform, the carrying platform and the support plate being slidably connected in a vertical direction, the support plate having a second avoidance hole arranged corresponding to the first avoidance hole; Two first slide rails are arranged on the support plate in parallel and at intervals; a plurality of first sliding blocks, respectively mounted on the two first slide rails and connected to the first driving member, each of the first sliding blocks having at least one inclined surface; A plurality of rollers are respectively installed on the sides of the carrying platform, and each roller is arranged corresponding to one of the inclined surfaces; Driven by the first driving member, the first sliding block moves along the first sliding rail to drive the inclined surface to move relative to the roller, thereby driving the carrying platform to move vertically.

4. The assembly and disassembly mechanism according to claim 3, wherein: Each of the first sliders further has at least one horizontal surface, the horizontal surface being located on the top of the first slider, and each of the horizontal surfaces being arranged corresponding to one of the inclined surfaces; Under the drive of the first driving member, the inclined surface moves relative to the roller, so that the roller continues to roll to the horizontal surface when it rolls to the highest point of the inclined surface.

5. The assembly and disassembly mechanism according to claim 4, characterized in that: The first lifting mechanism further includes a plurality of sliding assemblies, each of the sliding assemblies including: A second slide rail is arranged vertically and connected to the support plate at one end; The second sliding block is slidably mounted on the second sliding rail and is connected to the carrying platform.

6. The assembly and disassembly mechanism according to claim 5, characterized in that: The first lifting mechanism also includes: A plurality of elastic members, one end of each elastic member is connected to the support plate, and the other end is connected to the carrying platform.

7. The assembly and disassembly mechanism according to any one of claims 1 to 6, characterized in that: The second lifting mechanism also includes: An installation component connected to the bracket; a plurality of third sliders connected to the mounting assembly; A plurality of third slide rails extend vertically, each of the third slide rails is connected to the second driving member and the support tray, each of the third slide rails is slidably connected to one of the third slide rails, and is configured to move vertically relative to the third slider under the drive of the second driving member, thereby driving the support tray to move vertically.

8. The assembly and disassembly mechanism according to claim 7, characterized in that: The number of the third slide rails and the number of the third sliding blocks are both three, and the three third slide rails are arranged in an equilateral triangle.

9. The assembly and disassembly mechanism according to claim 7, characterized in that: The receiving tray has a first suction cup, and the first suction cup is configured to absorb the sealing assembly when the receiving tray abuts against the sealing assembly.

10. The assembly and disassembly mechanism according to claim 7, characterized in that: The bottom of the sealing component is provided with a plurality of vent holes; A plurality of second suction cups are provided on the support tray, and each second suction cup is configured to be aligned with the corresponding vent hole when the support tray supports the sealing assembly, so as to vacuum the test cavity.

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