Dry vacuum pump cooling system
By leveraging the synergistic effect of the cooling water circulation components and the fan, combined with the adaptive adjustment of the digital twin model, the problems of low cooling efficiency and high energy consumption of traditional dry vacuum pumps are solved, achieving efficient and stable cooling and intelligent control.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-26
- Publication Date
- 2026-03-10
AI Technical Summary
Traditional dry vacuum pump cooling methods are inefficient and cannot be dynamically adjusted, resulting in unstable operation and high energy consumption. They also lack precise monitoring and intelligent control, making it difficult to detect equipment abnormalities in a timely manner.
By employing the synergistic effect of cooling water circulation components and cooling fans, combined with temperature sensors, flow sensors, and power analyzers, adaptive adjustment is achieved through a digital twin model to optimize the operation of the cooling system.
It improves cooling efficiency, reduces energy consumption, ensures stable operation of the vacuum pump, and enables accurate monitoring and timely anomaly detection.
Smart Images
Figure CN121630748A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of vacuum pump technology, and in particular to a dry vacuum pump cooling system. Background Technology
[0002] Dry vacuum pumps are widely used in industries such as semiconductor manufacturing, chemicals, and photovoltaics. During operation, the high-speed rotation of the motor and the friction of the rotor inside the pump body generate a large amount of heat. Traditional cooling methods are generally single water cooling or air cooling, which have limited cooling efficiency and are prone to localized overheating, leading to decreased operational stability and shortened service life of the vacuum pump. Traditional cooling systems mostly operate at a fixed power, cannot dynamically adjust according to actual temperature changes, have high energy consumption, lack precise monitoring and intelligent control, rely on manual adjustment, have a delayed response, and are difficult to detect equipment abnormalities in a timely manner. Summary of the Invention
[0003] The purpose of this invention is to provide a dry vacuum pump cooling system, which includes a cooling water circulation component and a cooling fan to achieve the synergistic effect of water cooling and air cooling, ensuring the cooling effect, and a control system to achieve adaptive adjustment of the cooling system.
[0004] To achieve the above objectives, the present invention provides a dry vacuum pump cooling system, comprising a motor and a vacuum pump body. The vacuum pump body and the motor are mounted on top of a cooling plate. Circulating water channels are provided inside both the vacuum pump body and the cooling plate. An inlet and an outlet are provided on the top of the vacuum pump body and one side of the cooling plate. A cooling fan is mounted on the top of the cooling plate on the side of the motor, and a removable filter is installed on the cooling fan. Temperature sensors are provided on the top of the vacuum pump body, the top of the motor, and at the inlet and outlet of the vacuum pump body and the cooling plate. Flow sensors are provided at the inlet of the vacuum pump body and the cooling plate. The cooling fan is connected to a power analyzer, and the motor is connected to a power meter.
[0005] Preferably, the inlet and outlet of the vacuum pump body and the cooling plate are connected to the cooling water circulation assembly. The cooling water circulation assembly includes a hot water inlet pipe. The outlet of the vacuum pump body and the cooling plate is connected to a hot water tank through the hot water inlet pipe. The hot water tank is connected to a cooling tower through a hot water outlet pipe. The cooling tower is connected to a cold water tank through a cold water inlet pipe. The cold water tank is connected to the inlet of the vacuum pump body and the cooling plate through a cold water outlet pipe.
[0006] Preferably, a water pump is installed on the cold water outlet pipe, the water pump is connected to a water pump frequency converter, and a cooling tower fan is installed inside the cooling tower.
[0007] Preferably, the vacuum pump body has an air inlet on one side and an air outlet at the bottom on the other side.
[0008] Preferably, the circulating water channel consists of a straight pipe and a U-shaped pipe, with both ends of the U-shaped pipe connected to the straight pipe.
[0009] Preferably, the temperature sensor, humidity sensor, flow sensor, power analyzer, power meter, cooling fan, cooling tower fan, and water pump frequency converter are all connected to the control system. The control system includes a data acquisition module, a data processing module, and a data transmission module. The temperature sensor, humidity sensor, flow sensor, and power analyzer are all connected to the data acquisition module, and the cooling fan, cooling tower fan, and water pump frequency converter are connected to the data transmission module. The data acquisition module collects data from temperature sensors, humidity sensors, flow sensors, power analyzers, and power meters. The data processing module is used to preprocess the data and build a digital twin model to simulate the operation of the cooling system and optimize the operating instructions of the cooling system. The data transmission module transmits the simulated operating instructions output by the data processing module to the cooling fan, cooling tower fan, and water pump frequency converter.
[0010] Preferably, the data preprocessing of the data processing module is based on 3 The criteria remove outliers and utilize moving average filtering to transform the non-standardized data into the input format of the digital twin model, thereby obtaining the temperature at the top of the vacuum pump body. Motor temperature Inlet cooling water temperature Cooling water temperature at the outlet Instantaneous flow rate of cooling water at the inlet The current power of the fan Operating load of vacuum pump ; The outlier removal formula is as follows: ; in, Data from a single collection point. The average of data from multiple collection points. Standard deviation of data from multiple collection points; The formula for moving average filtering is shown below: ; in, For the first Filtered data at time 10:00 To resize the window.
[0011] Preferably, the digital twin model is based on the heat balance equation to simulate the total heat dissipation of the vacuum pump, the heat carried away by the cooling water, and the heat exchange efficiency of the cooling system. The formula for calculating the total heat dissipation of a vacuum pump is shown below: ; in, This refers to the heat dissipation of the vacuum pump body; This refers to the heat dissipation of the motor. ; in, The heat dissipation coefficient of the vacuum pump body. The ambient temperature; ; in, For motor input power, For motor efficiency; The formula for calculating the heat removed by cooling water is as follows: ; in, The specific heat capacity of water, The density of water; The formula for calculating the heat exchange efficiency of a cooling system is shown below: .
[0012] Preferably, the cooling system's operating state is simulated using a digital twin model, and the current state is compared with the target state; The formula for calculating the target cooling flow rate is as follows: ; in, For the target heat exchange rate, The maximum allowable outlet temperature of the cooling water; The formula for calculating the target cooling fan power is shown below: ; in, This is the power adjustment coefficient for the cooling fan. The target temperature for the motor; Collect real-time operational data after adjustment, compare the actual results with the model prediction results, and calculate the deviation value; The formula for calculating the average temperature deviation is as follows: ; ; ; in, This is due to the temperature deviation of the vacuum pump body. Motor temperature deviation; The formula for calculating the optimization effect evaluation index is as follows: ; in, The maximum permissible temperature, This is a safety margin for temperature.
[0013] Therefore, the present invention adopts the above-mentioned dry vacuum pump cooling system, which is equipped with a cooling water circulation component and a cooling fan to achieve the synergistic effect of water cooling and air cooling, ensuring the cooling effect, and sets up a control system to realize the adaptive adjustment of the cooling system.
[0014] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description
[0015] Figure 1 This is a three-dimensional structural schematic diagram of a dry vacuum pump cooling system according to the present invention; Figure 2 This is a cross-sectional view of a dry vacuum pump cooling system of the present invention, showing the removal of the cooling plate; Figure 3 This is a schematic diagram of the cooling water channel of a dry vacuum pump cooling system according to the present invention; Figure 4 This is a schematic diagram of the cooling water circulation component of a dry vacuum pump cooling system according to the present invention.
[0016] Figure Labels 1. Motor; 2. Vacuum pump body; 3. Air inlet; 4. Air outlet; 5. Cooling plate; 6. Cooling fan; 7. Water inlet; 8. Water outlet; 9. Temperature sensor; 10. Straight pipe; 11. U-shaped pipe; 12. Hot water inlet pipe; 13. Hot water tank; 14. Hot water outlet pipe; 15. Cooling tower; 16. Cold water inlet pipe; 17. Cold water tank; 18. Cold water outlet pipe; 19. Water pump; 20. Circulating waterway. Detailed Implementation
[0017] The technical solution of the present invention will be further described below with reference to the accompanying drawings and embodiments.
[0018] Unless otherwise defined, the technical or scientific terms used in this invention shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.
[0019] Example 1 like Figures 1 to 4 As shown, the present invention provides a dry vacuum pump cooling system, including a motor 1 and a vacuum pump body 2. The vacuum pump body 2 has an air inlet 3 on one side and an air outlet 4 at the bottom of the other side. When the motor 1 is started, air enters through the air inlet 3 on the vacuum pump body and is output from the air outlet 4. Air is delivered through mechanical movement to provide and maintain a vacuum environment.
[0020] The vacuum pump body 2 and motor 1 are mounted on top of the cooling plate 5. Both the vacuum pump body 2 and the cooling plate 5 have internal circulation channels 20, which consist of straight pipes 10 and U-shaped pipes 11. Both ends of the U-shaped pipes 11 are connected to the straight pipes 10. The circulation channels 20 serve as the core channel for cooling water flow. The straight pipes 10 ensure smooth water flow, while the U-shaped pipes 11 extend the water flow path and increase the heat exchange area, achieving dual cooling for both the vacuum pump body 2 and the motor 1, thus preventing localized overheating. The top of the vacuum pump body 2 and one side of the cooling plate 5 are equipped with inlets 7 and outlets 8. These inlets 7 and outlets 8 of the vacuum pump body 2 and the cooling plate 5 are connected to the cooling water circulation assembly, allowing the cooling water circulation assembly to connect with the vacuum pump body 2 and the cooling plate 5, achieving the circulation of cooling water and cooling down both the vacuum pump body 2 and the motor 1.
[0021] The cooling water circulation assembly includes a hot water inlet pipe 12. The outlet 8 of the vacuum pump body 2 and the cooling plate 5 is connected to the hot water tank 13 through the hot water inlet pipe 12. The hot water tank 13 is connected to the cooling tower 15 through the hot water outlet pipe 14. The cooling tower 15 is connected to the cold water tank 17 through the cold water inlet pipe 16. The cold water tank 17 is connected to the inlet 7 of the vacuum pump body 2 and the cooling plate 5 through the cold water outlet pipe 18. The hot water that has undergone heat exchange flows out of the vacuum pump body 2 and the cooling plate 5 into the hot water tank 13 through the hot water inlet pipe 12. The hot water then enters the cooling tower 15 from the hot water tank 13 through the hot water outlet pipe 14. After being cooled into cold water in the cooling tower 15, the hot water flows into the cold water tank 17 through the cold water inlet pipe 16. The cold water in the cold water tank 17 flows into the vacuum pump body 2 and the cooling plate 5 through the cold water outlet pipe 18, thereby achieving cooling of the vacuum pump body 2 and the motor 1.
[0022] A water pump 19 is installed on the cold water outlet pipe 18, and the water pump 19 is connected to a frequency converter. A cooling tower fan is installed inside the cooling tower 15. The water pump 19 can send cold water from the cold water pool 17 into the vacuum pump body 2 and the circulating water channel 20 inside the cooling plate 5 to achieve heat exchange. The frequency converter of the water pump 19 can change the speed of the water pump 19, thereby regulating the flow rate. The cooling tower fan can enhance the heat dissipation effect of the cooling tower 15. The operating power of the water pump 19 and the cooling tower fan can be dynamically adjusted according to the needs, so as to balance the cooling effect and energy saving requirements and reduce the operating energy consumption.
[0023] A cooling fan 6 is installed on the top of the cooling plate 5 on one side of the motor 1. A removable filter is installed on the cooling fan 6. The cooling fan 6 provides auxiliary air cooling for the motor 1. The removable filter prevents dust from entering the cooling fan 6 and is easy to disassemble and clean, preventing excessive dust from affecting air cooling efficiency. Temperature sensors 9 are installed on the top of the vacuum pump body 2, the top of the motor 1, and at the inlet 7 and outlet 8 of the vacuum pump body 2 and the cooling plate 5. Flow sensors are installed at the inlet 7 of the vacuum pump body 2 and the cooling plate 5. The temperature and flow sensors can detect the temperature and cooling water flow in real time, providing accurate data support for the control system and enabling adaptive adjustment of the cooling water system. The cooling fan 6 is connected to a power analyzer, and the motor 1 is connected to a power meter. The power analyzer can detect the operating power of the cooling fan 6, and the power meter can detect the working power and operating load of the motor 1, allowing for real-time monitoring of energy consumption and equipment load.
[0024] Temperature sensor 9, humidity sensor, flow sensor, power analyzer, power meter, cooling fan 6, cooling tower 15 fan, and water pump 19 frequency converter are all connected to the control system. The control system includes a data acquisition module, a data processing module, and a data transmission module. Temperature sensor 9, humidity sensor, flow sensor, and power analyzer are all connected to the data acquisition module, while cooling fan 6, cooling tower 15 fan, and water pump 19 frequency converter are connected to the data transmission module. The data acquisition module collects data from temperature sensor 9, humidity sensor, flow sensor, power analyzer, and power meter. The data processing module is used to preprocess the data and build a digital twin model to simulate the operation of the cooling system and optimize the operating instructions of the cooling system. The data transmission module transmits the simulated operating instructions output by the data processing module to the cooling fan 6, cooling tower 15 fan, and water pump 19 frequency converter.
[0025] Data preprocessing in the data processing module is based on 3 The criteria remove outliers and utilize moving average filtering to transform the non-standardized data into the input format of the digital twin model, thereby obtaining the temperature at the top of the vacuum pump body. Motor temperature Inlet cooling water temperature Cooling water temperature at the outlet Instantaneous flow rate of cooling water at the inlet The current power of the fan Operating load of vacuum pump ; The outlier removal formula is as follows: ; in, Data from a single collection point. The average of data from multiple collection points. Standard deviation of data from multiple collection points; The formula for moving average filtering is shown below: ; in, For the first Filtered data at time 10:00 To resize the window.
[0026] The digital twin model is based on the heat balance equation to simulate the total heat dissipation of the vacuum pump, the heat carried away by the cooling water, and the heat exchange efficiency of the cooling system. The formula for calculating the total heat dissipation of a vacuum pump is shown below: ; in, This refers to the heat dissipation of the vacuum pump body; This refers to the heat dissipation of the motor. ; in, The heat dissipation coefficient of the vacuum pump body. The ambient temperature; ; in, For motor input power, For motor efficiency; The formula for calculating the heat removed by cooling water is as follows: ; in, The specific heat capacity of water, The density of water; The formula for calculating the heat exchange efficiency of a cooling system is shown below: .
[0027] The cooling system's operating state is simulated using a digital twin model, and the current state is compared with the target state. The formula for calculating the target cooling flow rate is as follows: ; in, For the target heat exchange rate, The maximum allowable outlet temperature of the cooling water; The formula for calculating the target cooling fan power is shown below: ; in, This is the power adjustment coefficient for the cooling fan. The target temperature for the motor; Collect real-time operational data after adjustment, compare the actual results with the model prediction results, and calculate the deviation value; The formula for calculating the average temperature deviation is as follows: ; ; ; in, This is due to the temperature deviation of the vacuum pump body. Motor temperature deviation; The formula for calculating the optimization effect evaluation index is as follows: ; in, The maximum permissible temperature, This is a safety margin for temperature.
[0028] In the dry vacuum pump cooling system provided by this invention, cold water from the cold water tank 17, driven by the water pump 19, flows through the cold water outlet pipe 18 into the circulating water channels 20 inside the vacuum pump body 2 and the cooling plate 5, respectively, absorbing the heat dissipated by the vacuum pump body 2 and the motor 1, and undergoing heat exchange. After heat exchange, the cold water absorbs heat and becomes hot water. The hot water flows through the hot water inlet pipe 12 into the hot water tank 13, and then through the hot water outlet pipe 14 into the cooling tower 15. After being cooled by the cooling tower 15, the cold water flows through the cold water inlet pipe 16 into the cold water tank 17, completing the circulating cooling. The cooling fan 6 provides air cooling for the motor 1, working in conjunction with the cooling water circulation components for cooling. The control system processes data collected in real time by the temperature sensor 9, flow sensor, power analyzer, and power meter, and simulates operation through a digital twin model and dynamically adjusts the operating commands based on feedback from the cooling system.
[0029] Therefore, the present invention adopts the above-mentioned dry vacuum pump cooling system, which is equipped with a cooling water circulation component and a cooling fan to achieve the synergistic effect of water cooling and air cooling, ensuring the cooling effect, and sets up a control system to realize the adaptive adjustment of the cooling system.
[0030] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the technical solutions of the present invention, and these modifications or equivalent substitutions cannot cause the modified technical solutions to deviate from the spirit and scope of the technical solutions of the present invention.
Claims
1. A dry vacuum pump cooling system, characterized by: The motor and the vacuum pump body are installed on the top of the cooling plate, the vacuum pump body and the cooling plate are internally provided with circulating water channels, the top of the vacuum pump body and one side of the cooling plate are provided with water inlets and water outlets; the top of the cooling plate on one side of the motor is provided with a cooling fan, and a detachable filter screen is installed on the cooling fan; temperature sensors are arranged at the water inlets and water outlets of the top of the vacuum pump body, the top of the motor, the vacuum pump body and the cooling plate; flow sensors are arranged at the water inlets of the vacuum pump body and the cooling plate; the cooling fan is connected with a power analyzer, and the motor is connected with a power meter.
2. A dry vacuum pump cooling system according to claim 1, characterized in that: The water inlets and water outlets of the vacuum pump body and the cooling plate are connected with a cooling water circulating assembly, the cooling water circulating assembly comprises a hot water inlet pipe, the water outlets of the vacuum pump body and the cooling plate are communicated with a hot water pool through the hot water inlet pipe, the hot water pool is communicated with a cooling tower through a hot water outlet pipe, the cooling tower is communicated with a cold water pool through a cold water inlet pipe, and the cold water pool is communicated with the water inlets of the vacuum pump body and the cooling plate through a cold water outlet pipe.
3. A dry vacuum pump cooling system according to claim 2, characterized in that: A water pump is arranged on the cold water outlet pipe, the water pump is connected with a water pump frequency converter, and a cooling tower fan is arranged in the cooling tower.
4. A dry vacuum pump cooling system according to claim 3, characterized in that: An air inlet is arranged on one side of the vacuum pump body, and an air outlet is arranged at the bottom of the other side of the vacuum pump body.
5. A dry vacuum pump cooling system according to claim 4, characterized in that: The circulating water channel is composed of a straight pipe and a U-shaped pipe, and the two ends of the U-shaped pipe are communicated with the straight pipe.
6. A dry vacuum pump cooling system according to claim 5, characterized in that: The temperature sensor, the humidity sensor, the flow sensor, the power analyzer, the power meter, the cooling fan, the cooling tower fan and the water pump frequency converter are connected with a control system, the control system comprises a data acquisition module, a data processing module and a data transmission module, the temperature sensor, the humidity sensor, the flow sensor and the power analyzer are connected with the data acquisition module, and the cooling fan, the cooling tower fan and the water pump frequency converter are connected with the data transmission module; The data acquisition module acquires data detected by the temperature sensor, the humidity sensor, the flow sensor, the power analyzer and the power meter; The data processing module is used for pre-processing data and constructing a digital twin model to simulate the operation of the cooling system and optimize the operation instruction of the cooling system; The data transmission module transmits the operation instruction simulated and output by the data processing module to the cooling fan, the cooling tower fan and the water pump frequency converter.
7. A dry vacuum pump cooling system according to claim 6, characterized in that: The data preprocessing of the data processing module is based on 3 The criterion eliminates outliers and converts non-standardized data into the input format of the digital twin model by using a moving average filter, obtaining the vacuum pump body top temperature , motor temperature , inlet cooling water temperature , outlet cooling water temperature , instantaneous flow of cooling water at the inlet , current power of the fan , running load of the vacuum pump ; The abnormal value elimination formula is as follows: ； wherein, a mean of data for a plurality of collection points, a mean of data for a plurality of collection points, a standard deviation of data for a plurality of collection points; The moving average filtering formula is as follows: ； wherein, is the first filtered data at the time instant, is the moving window size.
8. A dry vacuum pump cooling system according to claim 7, characterized in that: The digital twin model is simulated based on a heat balance equation, and the total heat dissipation of the vacuum pump, the heat carried away by the cooling water and the heat exchange efficiency of the cooling system are calculated; The calculation formula of the total heat dissipation of the vacuum pump is as follows: ； wherein, is the heat dissipation amount of the vacuum pump body; is the heat dissipation amount of the motor, ； wherein is a heat dissipation coefficient of the vacuum pump body, is an ambient temperature; ； wherein, Pm is the motor input power, ηm is the motor efficiency; The calculation formula of the heat carried away by the cooling water is as follows: ； wherein Cp is the specific heat capacity of water, is the density of water; The calculation formula of the heat exchange efficiency of the cooling system is as follows: 。 9. A dry vacuum pump cooling system according to claim 8, characterized in that: The current state is compared with the target state by simulating the operation state of the cooling system through the digital twin model; The calculation formula of the target cooling flow is as follows: ； wherein, is a target heat exchange rate, is a maximum allowable outlet water temperature for the cooling water; The calculation formula of the target cooling fan power is as follows: ； wherein, is a cooling fan power regulation coefficient, is a motor target temperature; The deviation value is calculated by comparing the actual result with the model prediction result through the collected real-time operation data after adjustment; The calculation formula of the average temperature deviation is as follows: ； ； ； wherein, is a vacuum pump body temperature deviation, is a motor temperature deviation; The calculation formula of the optimization effect evaluation index is as follows: ； wherein, the maximum temperature allowed, the temperature safety margin.