Surface treatment process for end of rotating cathode target

Abstract

The invention discloses a surface treatment process for an end of a rotating cathode target. The surface treatment process comprises the following steps: S1, designing and processing: designing the end of the rotating cathode target and carrying out corresponding machining; s2, deburring is conducted, specifically, deburring and chamfering are conducted on the end, machined in the S1, of the rotating cathode target; s3, primary cleaning is conducted, specifically, alcohol is used for conducting primary cleaning on the rotating cathode target end subjected to deburring and chamfering in S2; s4, secondary cleaning: carrying out secondary cleaning on the rotating cathode target end subjected to primary cleaning in S3 by utilizing ultrasonic equipment; s5, drying: drying the end of the rotating cathode target subjected to secondary cleaning in the step S4; and S6, PVD vacuum plating is conducted, specifically, the dried rotating cathode target end in the step S5 is fed into a PVD reaction furnace for PVD vacuum plating, a target material is a high-entropy alloy target material, a high-entropy alloy coating is formed on the surface of the rotating cathode target end after PVD vacuum plating is completed, and the thickness of the high-entropy alloy coating is 50-200 nm. The material has the advantages of corrosion and wear resistance, good compactness and the like.

Description

Technical Field

[0001] This invention belongs to the field of surface treatment technology, and specifically relates to a surface treatment process for the tip of a rotating cathode target. Background Technology

[0002] The rotating cathode is the core component of a magnetron sputtering vacuum system. Magnetron sputtering is a commonly used thin film preparation technology, widely applied in fields such as surface coatings, optical thin films, and electronic devices. During magnetron sputtering, the ion beam generated by the rotating cathode under the influence of a magnetic field bombards the target material, causing atoms or molecules on the target surface to detach and deposit onto the substrate.

[0003] The rotating cathode mainly consists of components such as the target tip, magnetic core, target material, and mounting interface. The main function of the target tip is to introduce cooling water and electricity into the target device while rotating the target material. In addition to water transmission, the rotating head component of the target tip is also responsible for cooling water and vacuum dynamic sealing. The rotating head in the target device must have high wear resistance, high lubrication effect, and high corrosion resistance. Existing technology usually uses SUS304 material to make the target rotating head. Its disadvantages are: A) Because the surface hardness of SUS304 is not high, scale will be generated by the cooling water during long-term operation, which will accelerate the corrosion and wear of the material surface; B) Due to the insufficient density of the material surface, the rotational resistance between the worn surface and the rubber sealing ring will increase, thus affecting the normal operation of the rotating target. Summary of the Invention

[0004] In order to overcome the shortcomings of the prior art, the present invention provides a surface treatment process for the tip of a rotating cathode target that is resistant to corrosion and wear and has good density.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] The surface treatment process for the tip of a rotating cathode target includes the following steps:

[0007] S1. Design and Machining: Design the rotating cathode target tip and perform corresponding machining.

[0008] S2, Deburring: Deburring and chamfering the rotating cathode target end that has been machined in S1;

[0009] S3, First cleaning: Use alcohol to clean the rotating cathode target end that has been deburred and chamfered in S2.

[0010] S4. Secondary cleaning: The rotating cathode target end that has completed the first cleaning in S3 is cleaned a second time using ultrasonic equipment.

[0011] S5. Drying: Drying the rotating cathode target tip that has completed the secondary cleaning in S4;

[0012] S6. PVD Vacuum Deposition: The dried rotating cathode target tip from S5 is fed into a PVD reactor for PVD vacuum deposition. The target material is a high-entropy alloy target. After PVD vacuum deposition, a high-entropy alloy coating is formed on the surface of the rotating cathode target tip. The thickness of the high-entropy alloy coating is 50-200 nm. The high-entropy alloy coating is a CoCrNi coating, or a CoCrNiAlTi coating, or a TiZrHfNbMo coating, or a CoCrFeNiMo coating, or a TiZrTaMoNb coating, or a CoCrFeNi coating, or a FeMnCoCrCx coating, or a TiZrHfVNb coating, or a NbMoTaVW coating, or a FeCoNiCr coating, or an AlCoCrFeNi coating, or a CoCrFeNiMn coating, or an AlCoCrFeNi coating, or a TiZrHfVTa coating, or a WMoTaZr coating, or a ZrVMoHfNb coating, or a CoCrFeNiMn coating.

[0013] Preferably, the temperature range for forming the high-entropy alloy coating in S6 is 120–250°C.

[0014] Preferably, when the high-entropy alloy coating is a CoCrNiAlTi coating, the ratio of Co:Cr:Ni:Al:Ti is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a TiZrHfNbMo coating, the ratio of Ti:Zr:Hf:Nb:Mo is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a CoCrFeNiMo coating, the ratio of Co:Cr:Fe:Ni:Mo is 20%:20%:20%:20%:20%; the high-entropy alloy coating is... When the TiZrTaMoNb coating is used, the ratio of Ti:Zr:Ta:Mo:Nb is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is FeMnCoCrCx, the ratio of Fe:Mn:Co:Cr:Cx is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is TiZrHfVNb, the ratio of Ti:Zr:Hf:V:Nb is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is NbMoTaVW, the ratio of Nb:Mn:Co:Cr:Cx is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is NbMoTaVW, the ratio of Ti ... The ratio of o:Ta:V:W is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is an AlCoCrFeNi coating, the ratio of Al:Co:Cr:Fe:Ni is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a CoCrFeNiMn coating, the ratio of Co:Cr:Fe:Ni:Mn is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is an AlCoCrFeNi coating, the ratio of Al:Co:Cr:Fe:Ni is 20%. The high-entropy alloy coating is TiZrHfVTa, with the ratio of Ti:Zr:Hf:V:Ta being 20%:20%:20%:20%:20%; when the high-entropy alloy coating is ZrVMoHfNb, the ratio of Zr:V:Mo:Hf:Nb is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is CoCrFeNiMn, the ratio of Co:Cr:Fe:Ni:Mn is 20%:20%:20%:20%:20%:20%.

[0015] Preferably, when the high-entropy alloy coating is a CoCrNiAlTi coating, the proportion of any one of Co, Cr, Ni, Al, and Ti in the total number of atoms of the CoCrNiAlTi coating ranges from 0% to 60%; when the high-entropy alloy coating is a TiZrHfNbMo coating, the proportion of any one of Ti, Zr, Hf, Nb, and Mo in the total number of atoms of the TiZrHfNbMo coating ranges from 0% to 60%; when the high-entropy alloy coating is a CoCrFeNiMo coating, the proportion of any one of Co, Cr, Fe, Ni, and Mo in the total number of atoms of the CoCrFeNiMo coating ranges from 0% to 60%; when the high-entropy alloy coating is a TiZrHfNb ...%. When the TiZrTaMoNb coating is used, any one of Ti, Zr, Ta, Mo, and Nb occupies 0-60% of the total atomic number of the TiZrTaMoNb coating; when the high-entropy alloy coating is FeMnCoCrCx coating, any one of Fe, Mn, Co, Cr, and Cx occupies 0-60% of the total atomic number of the FeMnCoCrCx coating; when the high-entropy alloy coating is TiZrHfVNb coating, any one of Ti, Zr, Hf, V, and Nb occupies 0-60% of the total atomic number of the TiZrHfVNb coating; when the high-entropy alloy coating is NbMoTaVW coating, Nb, Mo, Ta, and V... The proportion of any one of Al, Co, Cr, Fe, and Ni in the total atomic number of the NbMoTaVW coating ranges from 0% to 60%. When the high-entropy alloy coating is an AlCoCrFeNi coating, the proportion of any one of Al, Co, Cr, Fe, and Ni in the total atomic number of the AlCoCrFeNi coating ranges from 0% to 60%. When the high-entropy alloy coating is a CoCrFeNiMn coating, the proportion of any one of Co, Cr, Fe, Ni, and Mn in the total atomic number of the CoCrFeNiMn coating ranges from 0% to 60%. When the high-entropy alloy coating is an AlCoCrFeNi coating, the proportion of any one of Al, Co, Cr, Fe, and Ni in the total atomic number of the AlCoCr coating ranges from 0% to 60%. The proportion of the total number of atoms in the FeNi coating ranges from 0% to 60%; when the high-entropy alloy coating is a TiZrHfVTa coating, any one of the elements Ti, Zr, Hf, V, and Ta occupies a proportion of the total number of atoms in the TiZrHfVTa coating ranging from 0% to 60%; when the high-entropy alloy coating is a ZrVMoHfNb coating, any one of the elements Zr, V, Mo, Hf, and Nb occupies a proportion of the total number of atoms in the ZrVMoHfNb coating ranging from 0% to 60%; when the high-entropy alloy coating is a CoCrFeNiMn coating, any one of the elements Co, Cr, Fe, Ni, and Mn occupies a proportion of the total number of atoms in the CoCrFeNiMn coating ranging from 0% to 60%.

[0016] By adopting the above technical solution, the present invention has the following beneficial effects:

[0017] In this invention, a high-entropy alloy coating is formed on the surface of the rotating cathode target tip. Different high-entropy alloy layers can be selected to form the high-entropy alloy coating. Forming a high-entropy alloy coating on the surface of the rotating cathode target tip can give the target tip of the rotating cathode higher corrosion resistance, better protection effect, better density and heat resistance, and prevent deformation and expansion. Moreover, the formed high-entropy alloy coating has good smoothness, is easy to clean and maintain, does not easily accumulate contaminants, has better lubricity, reduces the friction between the rotating cathode and external accessories such as sealing rings during rotation, and has better wear resistance, thereby giving the rotating cathode a longer service life.

[0018] In summary, the present invention has advantages such as corrosion and wear resistance and good density. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the production process of the present invention. Detailed Implementation

[0020] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0021] The components of the embodiments of the invention described and shown in the accompanying drawings can typically be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention.

[0022] Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0025] Example 1

[0026] In this embodiment, a surface treatment process for the tip of a rotating cathode target is proposed. This process can treat the tip of the rotating cathode target to improve its corrosion resistance and smoothness, thereby facilitating cleaning and extending its service life.

[0027] like Figure 1 As shown, in one embodiment of the present invention, the surface treatment process of the rotating cathode target tip, that is, performing surface treatment on the rotating cathode target tip, ultimately gives the target tip of the resulting rotating cathode higher corrosion resistance, better protection effect, better density and heat resistance, no deformation or expansion, and the formed high-entropy alloy coating has good smoothness, is easy to clean and maintain, does not easily accumulate contaminants, has better lubricity, reduces the friction between the rotating cathode and external accessories such as sealing rings during rotation, and has better wear resistance, thereby giving the rotating cathode a longer service life. Specifically, the present invention includes the following steps:

[0028] S1. Design and processing: Design the rotating cathode target tip and perform corresponding machining. In actual production, you can first design the drawings, then open the mold and perform the corresponding machining.

[0029] S2, Deburring: Deburring and chamfering are performed on the rotating cathode target end that has been machined in S1 to further improve the smoothness of the rotating cathode target end, which is convenient for subsequent PVD vacuum plating.

[0030] S3, First cleaning: Use alcohol to clean the rotating cathode target end that has been deburred and chamfered in S2.

[0031] S4. Secondary cleaning: The rotating cathode target end that has completed the first cleaning in S3 is cleaned a second time using ultrasonic equipment.

[0032] S5. Drying: Dry the rotating cathode target tip that has completed the secondary cleaning in S4. Specifically, the rotating cathode target tip can be dried using a dryer or a heating machine.

[0033] S6. PVD Vacuum Deposition: The dried rotating cathode target tip from S5 is fed into a PVD reactor for PVD vacuum deposition. The target material is a high-entropy alloy target. After PVD vacuum deposition, a high-entropy alloy coating is formed on the surface of the rotating cathode target tip. The thickness of the high-entropy alloy coating is 50–200 nm, and the temperature range for forming the high-entropy alloy coating is 120–250 °C. That is, the temperature for forming the coating in the PVD vacuum deposition reactor is 120–250 °C. The high-entropy alloy coating is a CoCrNi coating or a CoCrNiAlT coating. i coating or TiZrHfNbMo coating or CoCrFeNiMo coating or TiZrTaMoNb coating or CoCrFeNi coating or FeMnCoCrCx coating or TiZrHfVNb coating or NbMoTaVW coating or FeCoNiCr coating or AlCoCrFeNi coating or CoCrFeNiMn coating or AlCoCrFeNi coating or TiZrHfVTa coating or WMoTaZr coating or ZrVMoHfNb coating or CoCrFeNiMn coating.

[0034] In this invention, when using high-entropy alloy coatings with various compositions, the proportions of each component can be equal. For example, when the high-entropy alloy coating contains five metal materials, each metal material is in equal proportion, i.e., 20%:20%:20%:20%:20%. Specifically, when the high-entropy alloy coating is a CoCrNiAlTi coating, the ratio of Co:Cr:Ni:Al:Ti is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a TiZrHfNbMo coating, the ratio of Ti:Zr:Hf:Nb:Mo is 20%:20%:20%:20%:20%; When the high-entropy alloy coating is a CoCrFeNiMo coating, the ratio of Co:Cr:Fe:Ni:Mo is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a TiZrTaMoNb coating, the ratio of Ti:Zr:Ta:Mo:Nb is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a FeMnCoCrCx coating, the ratio of Fe:Mn:Co:Cr:Cx is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a TiZrHfVNb coating, the ratio of Ti:Zr:Hf:V:Nb is... The high-entropy alloy coating is NbMoTaVW, with the ratio of Nb:Mo:Ta:V:W being 20%:20%:20%:20%:20%; when the high-entropy alloy coating is AlCoCrFeNi, the ratio of Al:Co:Cr:Fe:Ni is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is CoCrFeNiMn, the ratio of Co:Cr:Fe:Ni:Mn is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is AlCoCrFeNi... When the high-entropy alloy coating is a TiZrHfVTa coating, the ratio of Ti:Zr:Hf:V:Ta is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a ZrVMoHfNb coating, the ratio of Zr:V:Mo:Hf:Nb is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a CoCrFeNiMn coating, the ratio of Co:Cr:Fe:Ni:Mn is 20%:20%:20%:20%:20%:20%.

[0035] Alternatively, the components of the high-entropy alloy coating in this invention can be non-uniform. For example, any element in the high-entropy alloy coating can occupy a proportion of 0-60% of the total number of atoms of all elements in the high-entropy alloy. Specifically, when the high-entropy alloy coating is a CoCrNiAlTi coating, any one of Co, Cr, Ni, Al, and Ti occupies a proportion of 0-60% of the total number of atoms in the CoCrNiAlTi coating; when the high-entropy alloy coating is a TiZrHfNbMo coating, any one of Ti, Zr, Hf, Nb, and Mo occupies a proportion of 0-60% of the total number of atoms in the TiZrHfNbMo coating; when the high-entropy alloy coating is a CoCrFeNi When the high-entropy alloy coating is a Mo coating, the proportion of any one of Co, Cr, Fe, Ni, and Mo in the total atomic number of the CoCrFeNiMo coating ranges from 0% to 60%. When the high-entropy alloy coating is a TiZrTaMoNb coating, the proportion of any one of Ti, Zr, Ta, Mo, and Nb in the total atomic number of the TiZrTaMoNb coating ranges from 0% to 60%. When the high-entropy alloy coating is a FeMnCoCrCx coating, the proportion of any one of Fe, Mn, Co, Cr, and Cx in the total atomic number of the FeMnCoCrCx coating ranges from 0% to 60%. When the high-entropy alloy coating is a TiZrHfVNb coating, the proportion of any one of Ti, Zr, Hf, and Mo in the total atomic number of the CoCrFeNiMo coating ranges from 0% to 60%. The proportion of any one of V and Nb in the total atomic number of the TiZrHfVNb coating ranges from 0% to 60%; when the high-entropy alloy coating is an NbMoTaVW coating, the proportion of any one of Nb, Mo, Ta, V, and W in the total atomic number of the NbMoTaVW coating ranges from 0% to 60%; when the high-entropy alloy coating is an AlCoCrFeNi coating, the proportion of any one of Al, Co, Cr, Fe, and Ni in the total atomic number of the AlCoCrFeNi coating ranges from 0% to 60%; when the high-entropy alloy coating is a CoCrFeNiMn coating, the proportion of any one of Co, Cr, Fe, Ni, and Mn in the total atomic number of the CoCrFeNn coating ranges from 0% to 60%. The proportion of the total number of atoms in the iMn coating ranges from 0 to 60%; when the high-entropy alloy coating is an AlCoCrFeNi coating, any one of the elements Al, Co, Cr, Fe, and Ni occupies a proportion of the total number of atoms in the AlCoCrFeNi coating ranging from 0 to 60%; when the high-entropy alloy coating is a TiZrHfVTa coating, any one of the elements Ti, Zr, Hf, V, and Ta occupies a proportion of the total number of atoms in the TiZrHfVTa coating ranging from 0 to 60%; when the high-entropy alloy coating is a ZrVMoHfNb coating, any one of the elements Zr, V, Mo, Hf, and Nb occupies a proportion of the total number of atoms in the ZrVMoHfNb coating ranging from 0 to 60%.When the high-entropy alloy coating is a CoCrFeNiMn coating, the proportion of any one of the elements Co, Cr, Fe, Ni, and Mn in the total number of atoms of the CoCrFeNiMn coating ranges from 0% to 60%.

[0036] The various high-entropy alloy coatings used in this invention possess corresponding characteristics. For example, Ti: Titanium is a high-melting-point element. During alloy bonding, because it is located in the intermediate transition region of the periodic table, it easily forms an interstitial solid solution structure with the alloy. Under the effect of solid solution strengthening, it can improve the overall mechanical properties of the alloy to a certain extent. In addition, titanium has the effect of refining the alloy grain structure. The resulting fine and dense structure has a positive effect on improving the strength and toughness of the alloy. During wear, titanium is easily oxidized to form an oxide film, which plays a lubricating and protective role during friction, thereby reducing the alloy wear rate and further improving corrosion resistance.

[0037] For example, boron (B) can act as a modifier in alloy systems, refining grains, lowering melting points, reducing expansion, and improving alloy strength, hardness, and wear resistance. Furthermore, boron has a purifying effect on the alloy smelting process, significantly reducing the accumulation of impurity atoms at grain boundaries, narrowing grain boundary width, and reducing the hindering effect of grain boundaries on dislocations, thereby improving the alloy smelting effect and further enhancing corrosion resistance.

[0038] For example, chromium (Cr) is a key element in common alloy systems for resisting high-temperature oxidation. Due to its high melting point, it generates chromium trioxide or chromium-containing spinel structures during wear and heating, forming a dense and continuous oxide layer that blocks further contact between the gas and the alloy matrix, thus improving the material's resistance to high-temperature oxidation. Furthermore, chromium is a strong carbide-forming element, capable of forming large amounts of carbides such as chromium hexacarbonide (CH6), effectively improving the alloy's wear resistance. A higher chromium content enhances the alloy's hardenability, making it less prone to cracking under extreme conditions such as rapid heating and cooling, thus extending its service life. Excessively high chromium content increases production costs; therefore, the chromium content in this invention is 21.5–23.5 wt.%, ensuring the prepared high-entropy alloy coating has good practicality in alternating hot and cold working environments, including excellent high-temperature oxidation resistance and good wear resistance, thereby further improving corrosion resistance.

[0039] For example, Ni: Nickel is a hard, ductile, and ferromagnetic metal that is highly polishable and corrosion-resistant. As a siderophile element, nickel readily combines with iron in alloys, increasing the alloy's hardness. Nickel is insoluble in water and forms a dense oxide film on its surface in humid air at room temperature, preventing further oxidation of the base metal and improving the alloy's surface wear resistance, thus further enhancing its corrosion resistance.

[0040] For example, Al: Aluminum itself has an FCC structure, but it is also an element that promotes the formation of the BCC phase in high-entropy alloy systems. Adding an appropriate amount of aluminum increases the proportion of the BCC phase structure in the alloy system, improving the overall strength, hardness, and wear resistance of the alloy. Aluminum has a significant regulatory effect on the performance of dual-phase high-entropy alloys, promoting the formation of a bidirectional structure with superior performance compared to a unidirectional structure. Aluminum is a light metal element with an atomic radius of 0.143 nm. Adding aluminum can distort the original crystal lattice structure, reduce the free energy of the system, and play a role in solid solution strengthening. At the same time, aluminum can also form a dense oxide film on the alloy surface, improving the alloy's resistance to high-temperature oxidation and wear resistance, thereby further enhancing its corrosion resistance.

[0041] The rotating cathode target tip obtained by the above process of the present invention is coated with a high-entropy alloy, which forms a smooth coating on the rotating cathode target tip. Therefore, the whole has corrosion resistance and wear resistance, good density, and the resistance and friction between it and the sealing ring will be reduced, so as not to affect the normal operation of the rotating target.

[0042] This embodiment does not impose any limitation on the shape, material, structure, etc. of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims

1. A surface treatment process for the tip of a rotating cathode target, characterized in that, Includes the following steps: S1. Design and Machining: Design the rotating cathode target tip and perform corresponding machining. S2, Deburring: Deburring and chamfering the rotating cathode target end that has been machined in S1; S3, First cleaning: Use alcohol to clean the rotating cathode target end that has been deburred and chamfered in S2. S4. Secondary cleaning: The rotating cathode target end that has completed the first cleaning in S3 is cleaned a second time using ultrasonic equipment. S5. Drying: Drying the rotating cathode target tip that has completed the secondary cleaning in S4; S6. PVD Vacuum Deposition: The dried rotating cathode target tip from S5 is fed into a PVD reactor for PVD vacuum deposition. The target material is a high-entropy alloy target. After PVD vacuum deposition, a high-entropy alloy coating is formed on the surface of the rotating cathode target tip. The thickness of the high-entropy alloy coating is 50-200 nm. The high-entropy alloy coating is a CoCrNi coating, or a CoCrNiAlTi coating, or a TiZrHfNbMo coating, or a CoCrFeNiMo coating, or a TiZrTaMoNb coating, or a CoCrFeNi coating, or a FeMnCoCrCx coating, or a TiZrHfVNb coating, or a NbMoTaVW coating, or a FeCoNiCr coating, or an AlCoCrFeNi coating, or a CoCrFeNiMn coating, or an AlCoCrFeNi coating, or a TiZrHfVTa coating, or a WMoTaZr coating, or a ZrVMoHfNb coating, or a CoCrFeNiMn coating.

2. The surface treatment process for the rotating cathode target tip according to claim 1, characterized in that: The temperature range for forming the high-entropy alloy coating in S6 is 120–250°C.

3. The surface treatment process for the tip of the rotating cathode target according to claim 1, characterized in that: When the high-entropy alloy coating is a CoCrNiAlTi coating, the ratio of Co:Cr:Ni:Al:Ti is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a TiZrHfNbMo coating, the ratio of Ti:Zr:Hf:Nb:Mo is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a CoCrFeNiMo coating, the ratio of Co:Cr:Fe:Ni:Mo is 20%:20%:20%:20%:20%:20%. When the high-entropy alloy coating is a TiZrTaMoNb coating, Ti:Zr: The ratio of Ta:Mo:Nb is 20%:20%:20%:20%:20%; When the high-entropy alloy coating is a FeMnCoCrCx coating, the ratio of Fe:Mn:Co:Cr:Cx is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a TiZrHfVNb coating, the ratio of Ti:Zr:Hf:V:Nb is 20%:20%:20%:20%:20%; When the high-entropy alloy coating is an NbMoTaVW coating, the ratio of Nb:Mo:Ta:V:W is 20%:20%:20%:20%:20%; When the high-entropy alloy coating is an AlCoCrFeNi coating, the ratio of Al:Co:Cr:Fe:Ni is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a CoCrFeNiMn coating, the ratio of Co:Cr:Fe:Ni:Mn is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is an AlCoCrFeNi coating, the ratio of Al:Co:Cr:Fe:Ni is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a TiZrHfVTa coating, the ratio of Ti:Zr:Hf:V:Ta is 20%:20%:20%:20%:20%; When the high-entropy alloy coating is a ZrVMoHfNb coating, the ratio of Zr:V:Mo:Hf:Nb is 20%:20%:20%:20%:20%; when the high-entropy alloy coating is a CoCrFeNiMn coating, the ratio of Co:Cr:Fe:Ni:Mn is 20%:20%:20%:20%:20%:20%.

4. The surface treatment process for the tip of the rotating cathode target according to claim 1, characterized in that: When the high-entropy alloy coating is a CoCrNiAlTi coating, the proportion of any one of Co, Cr, Ni, Al, and Ti in the total atomic number of the CoCrNiAlTi coating ranges from 0% to 60%; when the high-entropy alloy coating is a TiZrHfNbMo coating, the proportion of any one of Ti, Zr, Hf, Nb, and Mo in the total atomic number of the TiZrHfNbMo coating ranges from 0% to 60%; when the high-entropy alloy coating is a CoCrFeNiMo coating, the proportion of any one of Co, Cr, Fe, Ni, and Mo in the total atomic number of the CoCrFeNiMo coating ranges from 0% to 60%; when the high-entropy alloy coating is a TiZrTa When the high-entropy alloy coating is a MoNb coating, the proportion of any one of Ti, Zr, Ta, Mo, and Nb in the total atomic number of the TiZrTaMoNb coating ranges from 0% to 60%. When the high-entropy alloy coating is a FeMnCoCrCx coating, the proportion of any one of Fe, Mn, Co, Cr, and Cx in the total atomic number of the FeMnCoCrCx coating ranges from 0% to 60%. When the high-entropy alloy coating is a TiZrHfVNb coating, the proportion of any one of Ti, Zr, Hf, V, and Nb in the total atomic number of the TiZrHfVNb coating ranges from 0% to 60%. When the high-entropy alloy coating is a NbMoTaVW coating, the proportion of Nb, Mo, Ta, V, and W in the total atomic number of the TiZrHfVNb coating ranges from 0% to 60%. The proportion of any one element in the total atomic number of the NbMoTaVW coating ranges from 0% to 60%; when the high-entropy alloy coating is an AlCoCrFeNi coating, the proportion of any one element among Al, Co, Cr, Fe, and Ni in the total atomic number of the AlCoCrFeNi coating ranges from 0% to 60%; when the high-entropy alloy coating is a CoCrFeNiMn coating, the proportion of any one element among Co, Cr, Fe, Ni, and Mn in the total atomic number of the CoCrFeNiMn coating ranges from 0% to 60%; when the high-entropy alloy coating is an AlCoCrFeNi coating, the proportion of any one element among Al, Co, Cr, Fe, and Ni in the total atomic number of the AlCoCrF The proportion of the total number of atoms in the eNi coating ranges from 0% to 60%; when the high-entropy alloy coating is a TiZrHfVTa coating, any one of the elements Ti, Zr, Hf, V, and Ta occupies a proportion of the total number of atoms in the TiZrHfVTa coating ranging from 0% to 60%; when the high-entropy alloy coating is a ZrVMoHfNb coating, any one of the elements Zr, V, Mo, Hf, and Nb occupies a proportion of the total number of atoms in the ZrVMoHfNb coating ranging from 0% to 60%; when the high-entropy alloy coating is a CoCrFeNiMn coating, any one of the elements Co, Cr, Fe, Ni, and Mn occupies a proportion of the total number of atoms in the CoCrFeNiMn coating ranging from 0% to 60%.

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