Dry film photoresist multi-parameter online detection device

Abstract

The invention discloses a dry film photoresist multi-parameter online detection device, and belongs to the technical field of photoresist detection. Aiming at the problems that the detection structure of the existing product on the dry film photoresist production line is dispersed and a probe of a detection instrument needs to be manually cleaned, the invention provides the following technical scheme: the air floatation vibration isolation device comprises a support frame and an air floatation vibration isolation platform, and the air floatation vibration isolation platform is positioned at the top of the support frame; detection units used for conducting multi-parameter detection on materials are arranged on the air floatation vibration isolation platform in a front-back symmetry mode. The two detection units are arranged on the same supporting frame, so that integration of multi-parameter detection of dry film photoresist on a production line is achieved, multi-parameter synchronous detection of the dry film photoresist on the production line can be achieved, the equipment cost is reduced, the detection accuracy and the detection efficiency are improved, corresponding cleaning mechanisms are arranged on the detection units, and the detection efficiency is improved. Airflow purging and wiping cleaning are integrated, and the trouble of manual cleaning is further reduced under the condition that the accuracy of a detection area is guaranteed.

Description

Technical Field

[0001] This invention relates to the field of photoresist inspection technology, specifically to an online multi-parameter inspection device for dry film photoresist. Background Technology

[0002] Dry film photoresist is a photolithography material used in microelectronics manufacturing and printed circuit board (PCB) production. It is mainly composed of photosensitive resin, photoinitiator and solvent. Under ultraviolet light irradiation, it undergoes a chemical reaction to form a patterned protective layer for subsequent etching or electroplating processes. Its film thickness, uniformity, surface defects, color and other parameters directly determine the resolution, etching accuracy and yield of the photolithography process.

[0003] Current dry film photoresist inspection methods mostly employ offline sampling inspection, using SEM, AFM, or single optical inspection instruments for parameter measurement. This approach suffers from low inspection efficiency, inability to provide real-time feedback on production status, and the need for multiple equipment changes for multi-parameter inspection. Some online inspection devices can only perform single-parameter inspection, requiring multiple inspection stations on the production line for multi-parameter photoresist inspection. This fails to integrate multiple optical inspection principles, making it impossible to simultaneously inspect multiple core parameters at a single station. This increases the cost of equipment deployment on the production line and reduces inspection efficiency, making it difficult to meet the demands of multi-parameter, high-precision, real-time online inspection for continuous industrial production. Furthermore, the cleanliness of the instrument probes directly affects the accuracy of dry film photoresist quality assessment, necessitating regular dust removal and cleaning of these probes. Otherwise, dust or contaminants can cause measurement deviations, false defect reports, and even affect the yield of the entire batch of products. The existing cleaning method is to blow away floating dust with airflow. For stubborn stains, manual cleaning is required. Using a clean cotton swab dipped in a small amount of medicine for wiping is time-consuming, labor-intensive, and cumbersome. Summary of the Invention

[0004] To overcome the aforementioned deficiencies of the prior art, this invention provides a multi-parameter online inspection device for dry film photoresist. By configuring two inspection units on the same support frame, it integrates the inspection of multiple parameters of dry film photoresist on the production line, enabling simultaneous inspection of multiple parameters. This not only reduces the configuration of inspection stations and lowers equipment costs, but also improves the accuracy and efficiency of inspection. Furthermore, the inspection unit is equipped with a corresponding cleaning mechanism that integrates airflow purging and wiping cleaning. While ensuring the accuracy of the inspection area, it replaces manual labor with machinery, further reducing the trouble of manual cleaning and improving cleaning efficiency, thereby solving the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A multi-parameter online detection device for dry film photoresist includes a support frame and an air-float vibration isolation platform. The air-float vibration isolation platform is located on top of the support frame. Detection units for multi-parameter detection of materials are symmetrically arranged on the air-float vibration isolation platform. A tray located on the support frame is provided between two detection units. A liquid spraying assembly for pumping reagents and a blower body for blowing air are installed on the tray. Both the liquid spraying assembly and the blower body are connected to the two detection units. The detection unit includes an auxiliary component mounted on an air-float vibration isolation platform. A housing is installed on the auxiliary component. Inside the housing is the main body of the detector for detecting materials. A self-cleaning mechanism is provided around the bottom of the housing. A lifting component for lifting and adjusting is installed on the cleaning mechanism.

[0006] As a further embodiment of the present invention, the support frame includes a horizontal plate and support legs, wherein there are two support legs, which are respectively disposed at the bottom ends of the horizontal plate, and the support legs are fixedly connected to the horizontal plate by bolts. The air-bearing vibration isolation platform is placed on the top of the horizontal plate, and both sides of the air-bearing vibration isolation platform are provided with side frames for auxiliary positioning, which are fixedly connected to the horizontal plate by bolts. The tray is fixedly connected to the bottom shell wall of the horizontal plate by bolts. The spraying assembly includes a medicine tank, a water pump body, and a liquid guide pipe. The medicine tank and the water pump body are both located on the top of the tray and are connected by a conduit. The liquid guide pipe is located at the discharge end of the water pump body, and both ends of the liquid guide pipe are connected to the corresponding cleaning mechanism via hoses. The blower body is also located on the top of the tray. An air guide pipe is installed at the output end of the blower body. Both ends of the air guide pipe correspond to the corresponding detection unit, and both ends of the air guide pipe are provided with two air outlet ports. The two air outlet ports are connected to the corresponding shell and the cleaning mechanism via hoses.

[0007] As a further embodiment of the present invention, the auxiliary component includes a support arm that is fixedly connected to the air-floating vibration isolation platform by bolts. A rectangular through groove is provided on the bottom shell wall of the support arm. Both sides of the rectangular through groove are fixedly connected to L-shaped plates by bolts. An adjustment seat is installed between the two L-shaped plates by adjusting bolts. The outer casing includes a housing, a maintenance plate, an end plate, and a light shield. The housing is bolted to the bottom shell wall of the adjusting seat. An inspection port is provided on the outer shell wall of the housing. The maintenance plate is bolted to the inspection port. The bottom of the housing is designed to be open. The end plate is bolted to the bottom opening of the housing and serves as a base plate. The light shield is screwed to the bottom shell wall of the end plate. A filter is provided on the bottom shell wall of the light shield. The main body of the detector is located inside the housing, and the probe of the main body of the detector passes through the end plate. A rectangular groove is provided on the inner wall of the housing, and a housing cover is integrally provided around the rectangular groove. An air inlet pipe is installed on the side end of the housing cover, and the air inlet pipe is connected to a corresponding flexible hose.

[0008] As a further embodiment of the present invention, the cleaning mechanism includes a base component, an auxiliary plate, a wiping component and an air blowing component. The base component includes side bars arranged symmetrically on the left and right sides. A crossbeam and an electric slide rail are connected between the two side bars by bolts. The crossbeam is located behind the electric slide rail, and both the crossbeam and the electric slide rail are provided with sliding sleeves. The auxiliary plate is fixedly connected to the two side bars by bolts, and the auxiliary plate is located above the electric slide rail. The wiping assembly is set on the two sliding sleeves, and the air blowing assembly is set between the crossbeam and the electric slide rail. The air blowing assembly is also connected to the corresponding hose.

[0009] As a further embodiment of the present invention, the wiping assembly includes a hollow shaft, and a carrier cylinder is integrally provided on the outer ring of the hollow shaft. Both sides of the carrier cylinder are rotatably connected to the fixing brackets located on the hollow shaft through bearings. The two fixing brackets are respectively fixedly connected to the corresponding sliding sleeves by bolts. Multiple grooves for loading wiping cotton strips are opened along the circumferential direction on the outer circumferential wall of the carrier cylinder. Multiple liquid permeation holes are opened laterally on the bottom shell wall of each groove. The liquid permeation holes are connected to the inner cavity of the hollow shaft. A collection shell for loading waste is also provided below the carrier cylinder. Both sides of the collection shell are respectively fixedly connected to the corresponding fixing brackets by screws. Both fixed frames have side end pieces for pressing against the wiping cotton strip on their inner sides. The two fixed frames have friction sleeves and gears on the hollow shaft on their outer sides, respectively. A switching component is provided below the gear, and a limiting component for limiting and locking is provided below the friction sleeve. The hollow shaft also has a spray pipe in its inner cavity. Multiple liquid outlet holes are linearly opened on the top of the peripheral wall of the spray pipe. Each liquid outlet hole corresponds to a corresponding liquid permeation hole. A sub-frame is also fixedly connected to the spray pipe. The sub-frame is fixed to the corresponding sliding sleeve by bolts. The outer end of the spray pipe is connected to a corresponding hose.

[0010] As a further embodiment of the present invention, the side end component includes a side ring, with notches at the top and bottom. A filling plate 1 is provided in the upper notch, and a filling plate 2 is provided in the lower notch. An electric push rod 1 is provided on the outer wall of both the filling plate 1 and the filling plate 2. The electric push rod 1 is connected to a corresponding fixing frame. Two cylinders are fixedly connected to the outer wall of the side ring, and the other ends of the two cylinders are respectively connected to the corresponding fixing frame by screws. The switching component includes a base plate, a second electric push rod, and a rack. The second electric push rod is fixedly connected to the top of the base plate, the rack is located at the output end of the second electric push rod and meshes with a gear, and the base plate is fixedly connected to the corresponding side bar by bolts.

[0011] As a further embodiment of the present invention, the limiting component includes a fixed plate, a U-shaped plate, and a movable rod. The fixed plate is fixedly connected to a corresponding fixed frame by bolts. The U-shaped plate is located above the fixed plate. The movable rod is welded to the bottom of the U-shaped plate, and the bottom end of the movable rod passes through the fixed plate and is tactilely connected to a ball bearing. The ball bearing makes rolling contact with an auxiliary plate. A positioning ring is integrally provided on the outer shell wall of the movable rod, and a return spring located on the movable rod is sleeved between the positioning ring and the fixed plate.

[0012] As a further embodiment of the present invention, the air blowing assembly includes an air jet pipe, an adjusting component, and a hanger, wherein there are two hangers, both of which are disposed on the air jet pipe, and the two hangers are respectively fixedly connected to the corresponding crossbeam and the electric slide rail by bolts. The adjusting component includes a sleeve fitted onto the air inlet port of the jet pipe. An adjusting rod is provided inside the sleeve. A sealing plug is installed at the bottom end of the adjusting rod. The top end of the adjusting rod extends to the top of the sleeve and is integrally provided with a contact plate. A compression spring located on the adjusting rod is fitted between the contact plate and the sleeve. An air inlet pipe for air intake is provided on the peripheral wall of the sleeve, and the air inlet pipe is connected to a corresponding hose.

[0013] As a further embodiment of the present invention, the lifting assembly includes a lifting component and an electric push rod. The lifting component includes a base frame that is fixedly connected to the outer walls of the left and right sides of the housing by bolts. Two round rods are movably connected to each base frame. A retainer is installed at the bottom end of each round rod, and the retainer is connected to a corresponding one. An integrated plate is installed at the top of the multiple round rods. A shielding cover is provided above the wiping assembly on the housing, and the shielding cover is used to cover the wiping assembly.

[0014] As a further embodiment of the present invention, the electric push rod three is disposed on the outer wall of the housing and located above the lifting component, and the output end of the electric push rod three is connected to the integrated plate.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. By configuring two detection units on the same support frame, the multi-parameter detection of dry film photoresist on the production line is integrated, enabling simultaneous detection of multiple parameters (film thickness, uniformity, surface defects, and color). This not only reduces the configuration of detection stations and lowers equipment costs, but also improves the accuracy and efficiency of detection.

[0016] 2. Each detection unit is equipped with a housing that mounts the corresponding detector body. The probe irradiation area of ​​the detector body is filtered by a filter to ensure the accuracy of simultaneous use of both. Each detection unit is also equipped with a cleaning mechanism to automatically clean the outer surface of the filter, improve the cleaning effect of the detection area, reduce the burden of manual cleaning, and improve the efficiency of subsequent equipment operation.

[0017] 3. The cleaning mechanism integrates airflow purging and wiping cleaning, which improves cleaning efficiency while ensuring the cleanliness of the inspection area. It avoids damage such as lens scratches caused by uneven force during manual wiping cleaning, and extends the service life of the product.

[0018] 4. The airflow that sweeps away the floating dust also enters the interior of the outer casing, thereby further improving the heat dissipation effect of the main body of the detector during use and ensuring the service life of the equipment.

[0019] 5. After the wiping component in the cleaning mechanism finishes wiping the filter, the carrier cylinder on it will rotate slightly during the reset movement. This allows for the switching and adjustment of the wiping strips arranged on it. In conjunction with the side end pieces located at both ends, the used wiping strips can be automatically discarded, avoiding frequent manual cleaning of the wiping component and further reducing the burden on the staff. Attached Figure Description

[0020] Figure 1 A three-dimensional structural schematic diagram of a multi-parameter online detection device for dry film photoresist; Figure 2 for Figure 1 Schematic diagram of the air-floating vibration isolation platform and its support plate structure; Figure 3 for Figure 1 A schematic diagram of the detection unit structure; Figure 4 for Figure 3 A schematic diagram of the structure viewed from the side; Figure 5 for Figure 3 A schematic diagram of the outer casing and the main structure of the detector; Figure 6 for Figure 5 A schematic diagram of the structure viewed from the side; Figure 7 for Figure 3 A schematic diagram of the cleaning mechanism structure; Figure 8 for Figure 7 A schematic diagram of the axial side view structure; Figure 9 for Figure 7 A schematic diagram of the air blowing assembly structure; Figure 10 for Figure 9 A magnified schematic diagram of the local structure at point A; Figure 11 for Figure 7 A schematic diagram of the wiping component structure; Figure 12 for Figure 11 A schematic diagram of the axial side view structure; Figure 13 for Figure 11 A top-view structural diagram; Figure 14 for Figure 11 A schematic diagram of the limiting component structure; Figure 15 for Figure 12 A schematic diagram of the side end component structure.

[0021] In the diagram: 1. Support frame; 11. Horizontal plate; 12. Support leg; 2. Air-floating vibration isolation platform; 3. Detection unit; 31. Auxiliary component; 311. Support arm; 312. Adjustment seat; 32. Outer shell; 321. Housing; 322. Inspection plate; 323. End plate; 324. Light shield; 33. Detector body; 34. Cleaning mechanism; 341. Basic component; 3411. Side bar; 3412. Crossbeam; 3413. Electric slide rail; 342. Auxiliary plate; 343. Wiping component; 3431. Hollow shaft; 3432. Loading cylinder; 3433. Collection shell; 3434. Side end piece; 34341. Side ring; 34342. Filling plate one; 34343. Filling plate two; 34344. Electric... 3435. Moving push rod 1; 3436. Gear; 3437. Switching component; 34361. Base plate; 34362. Electric push rod 2; 34363. Rack; 3437. Limiting component; 34371. U-shaped plate; 34372. Moving rod; 3438. Spray pipe; 344. Air blowing assembly; 3441. Air jet pipe; 3442. Adjusting component; 34421. Sleeve; 34422. Adjusting rod; 34423. Sealing plug; 35. Lifting assembly; 351. Lifting component; 3511. Base frame; 3512. Round rod; 3513. Integration plate; 3514. Shielding cover; 352. Electric push rod 3; 4. Support plate; 5. Spray assembly; 51. Medicine tank; 52. Water pump body; 6. Blower body. Detailed Implementation

[0022] Please see Figures 1-2 In this embodiment of the invention, a multi-parameter online detection device for dry film photoresist includes a support frame 1 and an air-floating vibration isolation platform 2. The air-floating vibration isolation platform 2 is located on top of the support frame 1. The air-floating vibration isolation platform 2 is a desktop air-floating vibration isolation platform, which is used to reduce the impact of vibration on the detection accuracy of the detection unit 3 during use. The air flotation vibration isolation platform 2 is symmetrically arranged with detection units 3 for multi-parameter detection of materials. Between the two detection units 3, there is a support plate 4 located on the support frame 1. The support plate 4 is equipped with a spraying component 5 for pumping the agent and a blower body 6 for blowing air. Both the spraying component 5 and the blower body 6 are connected to the two detection units 3. The spraying component 5 is used for wiping and cleaning in the detection unit 3, while the blower body 6 is used to improve the heat dissipation of the equipment in the detection unit 3 during operation and to blow away the floating dust in the detection area to further ensure the accuracy of the detection. Please see Figures 1-4 In this embodiment of the invention, the detection unit 3 includes an auxiliary component 31 disposed on the air flotation vibration isolation platform 2. A housing 32 is installed on the auxiliary component 31. The housing 32 contains a detection instrument body 33 for detecting materials. The bottom of the housing 32 is provided with a self-cleaning cleaning mechanism 34. A lifting component 35 for lifting and adjusting is installed on the cleaning mechanism 34. The position of the cleaning mechanism 34 is adjusted by the lifting component 35, so that not only the cleaning of the housing 32 can be guaranteed, but the detection of materials will not be hindered.

[0023] The support frame 1 includes a horizontal plate 11 and support legs 12. There are two support legs 12, which are respectively located at the bottom ends of the horizontal plate 11. The support legs 12 are fixedly connected to the horizontal plate 11 by bolts. The support legs 12 are also fixed to the ground by bolts, which facilitates the disassembly and assembly of the support frame 1. The air-floating vibration isolation platform 2 is placed on top of the horizontal plate 11. Both sides of the air-floating vibration isolation platform 2 are provided with side frames for auxiliary positioning. The side frames are fixedly connected to the horizontal plate 11 by bolts. The configuration of the side frames is used to lock the assembly of the air-floating vibration isolation platform 2 and ensure its stability during use. The tray 4 is fixedly connected to the bottom shell wall of the horizontal plate 11 by bolts. The spraying assembly 5 includes a medicine tank 51, a water pump body 52 and a liquid guide pipe. The medicine tank 51 and the water pump body 52 are both located on the top of the tray 4 and are connected by a conduit. The liquid guide pipe is located at the discharge end of the water pump body 52. ​​Both ends of the liquid guide pipe are connected to the corresponding cleaning mechanism 34 by hoses. The medicine stored in the medicine tank 51 is pumped to the corresponding cleaning mechanism 34 by the water pump body 52 through the liquid guide pipe and hoses, so as to facilitate the wiping and cleaning of the filter. The blower body 6 is also located on the top of the tray 4. The output end of the blower body 6 is equipped with an air guide pipe. The two ends of the air guide pipe correspond to the corresponding detection units 3, and each end of the air guide pipe is provided with two air outlet ports. The two air outlet ports are connected to the corresponding housing 32 and the cleaning mechanism 34 through hoses. The two air outlet ports, together with the corresponding hoses, deliver gas to the housing 32 and the cleaning mechanism 34. On the one hand, this improves the heat dissipation effect of the detector body 33 in the housing 32 during operation. On the other hand, it blows air to the area of ​​the material being detected in the housing 32, reducing the residence and adhesion of floating dust in the detection area, and further improving the accuracy of material detection. The auxiliary component 31 includes a support arm 311 that is fixedly connected to the air-float vibration isolation platform 2 by bolts. A rectangular through groove is provided on the bottom shell wall of the support arm 311. L-shaped plates are fixedly connected to both sides of the rectangular through groove by bolts. An adjusting seat 312 is installed between the two L-shaped plates by adjusting bolts. The setting of the L-shaped plates and adjusting bolts allows the adjusting seat 312 to be adjusted to an adaptive angle, so that it drives the corresponding shell 32 to be adjusted according to the configuration of the material production line.

[0024] Please see Figures 5-6 In this embodiment of the invention, the outer shell 32 includes a shell 321, a maintenance plate 322, an end plate 323, and a light shield 324. The shell 321 is fixedly connected to the bottom shell wall of the adjusting seat 312 by bolts. An inspection port is provided on the outer shell wall of the shell 321. The maintenance plate 322 is fixedly connected to the inspection port by bolts. The bottom of the shell 321 is designed to be open. The end plate 323 is fixedly connected to the bottom opening of the shell 321 by bolts and serves as a base plate. The light shield 324 is set on the bottom shell wall of the end plate 323 by screws, and a filter is provided on the bottom shell wall of the light shield 324. The configuration of the inspection plate 322 facilitates simple maintenance of the detector body 33 inside the housing 321. If it is necessary to replace it, the internal structure of the housing 321 can be maintained by disassembling the end plate 323. The light shield 324 is configured to shield and protect the probe of the detector body 33, avoiding frequent cleaning, while the filter configured on it is used to ensure the accuracy of material detection by the detector body 33 inside the housing 32. The main body 33 of the detector is located inside the housing 321, and the probe of the main body 33 passes through the end plate 323. A rectangular groove is provided on the inner wall of the housing 321. A housing cover is integrally provided around the rectangular groove. An air inlet pipe is installed on the side end of the housing cover. The air inlet pipe is connected to a corresponding hose. The connection between the air inlet pipe and the hose allows airflow to enter the interior of the housing 321. With the help of the heat dissipation slots arranged on it, the heat dissipation effect of the main body 33 of the detector inside is improved during operation. The front detector body 33 uses an industrial camera to detect surface defects and color of materials, while the rear detector body 33 uses a white light interferometer to detect film thickness and uniformity of materials.

[0025] Please see Figures 7-8 In this embodiment of the invention, the cleaning mechanism 34 includes a base component 341, an auxiliary plate 342, a wiping component 343, and an air blowing component 344. The base component 341 includes side bars 3411 arranged symmetrically on the left and right. A crossbeam 3412 and an electric slide rail 3413 are bolted together between the two side bars 3411. The crossbeam 3412 is located behind the electric slide rail 3413, and both the crossbeam 3412 and the electric slide rail 3413 are provided with sliding sleeves. The electric slide rail 3413 drives the corresponding sliding sleeves to adjust their displacement. The inner walls of both side bars 3411 are provided with slots. When the crossbeam 3412 and the electric slide rail 3413 are assembled with the corresponding side bars 3411, their ends are respectively inserted into the corresponding slots and then fixed with bolts. The auxiliary plate 342 is fixedly connected to the two side bars 3411 by bolts, and the auxiliary plate 342 is located above the electric slide rail 3413. The wiping assembly 343 is set on the two sliding sleeves, so that when the electric slide rail 3413 is running, it drives the wiping assembly 343 to make linear movement and adjustment. The air blowing assembly 344 is located between the crossbeam 3412 and the electric slide rail 3413, and the air blowing assembly 344 is also connected to the corresponding hose. The air blowing assembly 344 is designed on one side of the base assembly 341 to blow away the floating dust in the detection area.

[0026] Please see Figures 7-8 and Figures 11-15 In this embodiment of the invention, the wiping assembly 343 includes a hollow shaft 3431, and a carrier cylinder 3432 is integrally provided on the outer ring of the hollow shaft 3431. Both sides of the carrier cylinder 3432 are rotatably connected to the fixing brackets located on the hollow shaft 3431 through bearings. The two fixing brackets are respectively fixedly connected to the corresponding sliding sleeves by bolts. Thus, when the electric slide rail 3413 runs, the wiping assembly 343 is moved by the sliding sleeves. The outer circumferential wall of the container 3432 has multiple grooves for loading wiping cotton strips along the circumferential direction. Each groove has multiple horizontally linear liquid perforations on the bottom shell wall, which are connected to the inner cavity of the hollow shaft 3431. Below the container 3432, there is also a collection shell 3433 for loading waste. The two sides of the collection shell 3433 are fixedly connected to the corresponding fixing frame by screws. The configuration of the collection shell 3433 and the two fixing frames ensures that it is always directly below the container 3432, thereby achieving accurate collection of the wiping cotton strips loaded on it and preventing the wiping cotton strips from falling into the external environment when they detach. The inner sides of both fixed frames are provided with side end pieces 3434 for pressing against the wiping cotton strip. The outer sides of the two fixed frames are respectively provided with friction sleeves and gears 3435 located on the hollow shaft 3431. A switching piece 3436 is provided below the gear 3435, and a limiting piece 3437 for limiting and locking is provided below the friction sleeve. The cooperation between the switching component 3436 and the gear 3435 enables the wiping assembly 343 to rotate the hollow shaft 3431 during the reset motion, thereby adjusting the position of the wiping cotton strip located on the hollow shaft 3431. The hollow shaft 3431 is also provided with a spray pipe 3438. The top of the peripheral wall of the spray pipe 3438 is linearly provided with multiple liquid outlet holes, which correspond one-to-one with the corresponding liquid permeation holes. A sub-frame is also fixedly connected to the spray pipe 3438. The sub-frame is fixed to the corresponding sliding sleeve by bolts. The outer end of the spray pipe 3438 is connected to the corresponding hose. The spray pipe 3438 is fixed in position inside the hollow shaft 3431 by the setting of the sliding sleeve mounted on the sub-frame. The multiple liquid outlets on the spray pipe 3438 are located at the top of its peripheral wall, and thus can only correspond to the liquid permeation holes in the groove at the highest point. Therefore, when liquid is poured into the spray pipe 3438, the correspondence between the liquid outlet and the corresponding liquid permeation hole ensures that the liquid will only soak the wiping cotton strip loaded at the highest point and will not cause soaking problems for the wiping cotton strips at other positions on the carrier cylinder 3432.

[0027] The side end piece 3434 includes a side ring 34341. The side ring 34341 has notches at the top and bottom. The upper notch contains a filling plate 34342, and the lower notch contains a filling plate 34343. The outer walls of the filling plate 34342 and the filling plate 34343 are provided with electric push rods 34344. The electric push rods 34344 are connected to the corresponding fixing brackets. Two cylinders are fixedly connected to the outer wall of the side ring 34341. The other ends of the two cylinders are connected to the corresponding fixing brackets by screws. The central hole of the side ring 34341 is used for the passage of the hollow shaft 3431, so as not to obstruct its rotation. The filling plate 34342 and the corresponding electric push rod 34344 are configured to feed the wiping cotton strips on the loading cylinder 3432. The filling plate 34343 and the corresponding electric push rod 34344 facilitate the automatic detachment of the used wiping cotton strips by gravity when the loading cylinder 3432 rotates. The inner walls of the side ring 34341, the filling plate 34342 and the filling plate 34343 are all provided with two arc-shaped plates, which together form an arc-shaped slide to constrain and guide each wiping cotton strip loaded on the loading cylinder 3432, ensuring its stability when assembled on the loading cylinder 3432. The switching component 3436 includes a base plate 34361, an electric push rod 34362, and a rack 34363. The electric push rod 34362 is fixedly connected to the top of the base plate 34361. The rack 34363 is disposed at the output end of the electric push rod 34362 and meshes with the gear 3435. The base plate 34361 and the corresponding side bar 3411 are fixedly connected by bolts. The operation of the electric push rod 34362 drives the rack 34363 on it to rise and fall, realizing the engagement and disengagement between it and the gear 3435, so that the hollow shaft 3431 can be switched and adjusted during the reset movement.

[0028] The limiting component 3437 includes a fixed plate, a U-shaped plate 34371, and a movable rod 34372. The fixed plate is fixedly connected to the corresponding fixed frame by bolts. The U-shaped plate 34371 is located above the fixed plate. The movable rod 34372 is welded to the bottom of the U-shaped plate 34371, and the bottom end of the movable rod 34372 passes through the fixed plate and is connected to a ball bearing. The ball bearing makes rolling contact with the auxiliary plate 342. A positioning ring is integrally provided on the outer shell wall of the movable rod 34372. A return spring located on the movable rod 34372 is sleeved between the positioning ring and the fixed plate. When the wiping assembly 343 moves laterally, the rolling contact between the ball and the auxiliary plate 342 causes the movable rod 34372 to move upward, which causes the reset spring to deform and drive the U-shaped plate 34371 to move upward. The U-shaped plate 34371 presses against the friction sleeve, thereby ensuring that the hollow shaft 3431 will not rotate during the lateral movement, so that the wiping cotton strip on it can stably clean the filter.

[0029] Please see Figures 7-10 In this embodiment of the invention, the air blowing assembly 344 includes an air jet pipe 3441, an adjusting member 3442 and a hanger. There are two hangers, both of which are disposed on the air jet pipe 3441, and the two hangers are respectively fixedly connected to the corresponding crossbeam 3412 and the electric slide rail 3413 by bolts. Two hangers ensure the stability of the jet pipe 3441, so that the hole for emitting gas is located below the outer casing 32, i.e., the detection area. The airflow makes it difficult for dust to accumulate and adhere, ensuring the accuracy of the detection. The adjusting component 3442 includes a sleeve 34421 fitted onto the air inlet port of the jet pipe 3441. An adjusting rod 34422 is provided inside the sleeve 34421. A sealing plug 34423 is installed at the bottom end of the adjusting rod 34422. The top end of the adjusting rod 34422 extends to the top of the sleeve 34421 and is integrally provided with a contact plate. A compression spring located on the adjusting rod 34422 is fitted between the contact plate and the sleeve 34421. An air inlet pipe for air intake is provided on the peripheral wall of the sleeve 34421, and the air inlet pipe is connected to a corresponding hose. When the cleaning mechanism 34 is in the high position, the contact plate on the adjusting rod 34422 presses against the outer shell 32, and the sealing plug 34423 at the bottom of the adjusting rod 34422 is below the air inlet pipe, so that the gas can enter the jet pipe 3441 to sweep away the floating dust. When the cleaning mechanism 34 is in the low position, the contact plate on the adjusting rod 34422 disengages from the housing 32. Under the action of the compression spring, the adjusting rod 34422 drives the sealing plug 34423 to move upward, thereby sealing the air intake pipe.

[0030] The lifting assembly 35 includes a lifting component 351 and an electric push rod 352. The lifting component 351 includes a base frame 3511 that is fixedly connected to the outer walls of the left and right sides of the housing 321 by bolts. Two round rods 3512 are movably connected to each base frame 3511. Each round rod 3512 has a retainer installed at its bottom end. The retainer is connected to the corresponding 34311, thereby driving the base assembly 341 to move synchronously when the round rod 3512 moves. An integrated plate 3513 is mounted on the top of multiple round rods 3512. A shield 3514 is provided above the wiping assembly 343 on the housing 32. The shield 3514 is used to cover and protect the wiping assembly 343 in its initial state.

[0031] Electric push rod 352 is mounted on the outer wall of housing 32 and located above lifting component 351. The output end of electric push rod 352 is connected to integrated plate 3513. The operation of electric push rod 352 drives lifting component 351 to move up and down.

[0032] The working principle of this invention is as follows: When the equipment is running, the cleaning mechanism 34 in each detection unit 3 is first adjusted to ensure that it does not affect the accuracy of the detection. The electric push rod 352 of the lifting component 35 in each detection unit 3 is then retracted via the external controller, causing the lifting component 351 to drive the corresponding cleaning mechanism 34 upwards. When the electric push rod 352 retracts to its maximum range, the corresponding cleaning mechanism 34 also adjusts to its maximum range. At this time, the base component 341 in the cleaning mechanism 34 is slightly higher than the shielding component in the outer casing 32. The bottom of the photomask 324 is so as not to affect the detection of materials. When the base component 341 moves up to the maximum mileage, the top of the contact plate of the adjusting component 3442 in the blowing component 344 contacts the corresponding outer shell 32. Under the action of the extrusion force, the adjusting rod 34422 drives the sealing plug 34423 to move down, and the extrusion spring is adjusted. At this time, the air inlet pipe in the adjusting component 3442 and the jet pipe 3441 are connected to each other, and the wiping component 343 in the cleaning mechanism 34 of the lifting component 351 in the lifting component 35 is covered. Then, the corresponding detector bodies 33 in the two detection units 3 are started by the external controller body, so as to detect the moving materials on the dry film photoresist production line. The front detector body 33 is used to detect the surface defects and color of the materials, while the rear detector body 33 is used to detect the film thickness and uniformity of the materials. During the operation of the detector body 33, the external controller body also starts the blower body 6 at the same time. The airflow generated by the blower body 6 enters the corresponding housing 32 and the blowing assembly 344 of the cleaning mechanism 34 under the action of the air guide pipe and the hose. The airflow entering the housing 32 improves the heat dissipation effect of the corresponding detector body 33 during operation. The airflow entering the blowing assembly 344 is discharged from the jet pipe 3441, thereby blowing away the floating dust in the bottom area of ​​the light shield 324 in each corresponding housing 32, thereby improving the cleanliness of the filter on the light shield 324. When the filter needs to be wiped and cleaned, the electric push rod 352 of the lifting component 35 in each detection unit 3 is activated by the external controller. This causes the lifting component 351 to drive the corresponding cleaning mechanism 34 to move downward. As the cleaning mechanism 34 moves downward, the compression spring in each blowing component 344 drives the corresponding adjusting rod 34422 to reset, thereby pulling the corresponding sealing plug 34423 upward, thus sealing the air inlet pipe and preventing the airflow from entering the jet pipe 3441. The blowing work on the outer shell 32 is suspended, but the airflow still enters the interior of the outer shell 32 to efficiently dissipate heat from the internal detector body 33. When the electric push rod 352 extends to the maximum range, the shield 3514 in the lifting component 351 is completely disengaged from the wiping component 343 in the cleaning mechanism 34, and the wiping cotton strip at the highest point of the carrier tube 3432 in the wiping component 343 is level with the filter on the bottom shell wall of the light shield 324 in the outer shell 32. When the electric push rod 352 extends to its maximum range, it automatically stops. Then, the program in the external controller first activates the water pump 52 in the spray assembly 5, pumping the liquid from the medicine tank 51 through the guide pipe and corresponding hose to the spray pipe 3438 of the wiping assembly 343 in the corresponding cleaning mechanism 34. The liquid entering the spray pipe 3438 wets the wiping cotton strips at higher positions in the carrier cylinder 3432 through various outlet holes and aligned permeation holes. The water pump 52 automatically stops after running for a period of time. After it stops running, the program in the controller activates the electric push rod 34362 in the switching component 3436, causing the rack 34363 to move downwards and engage with the gear 343. 5. Disengagement. Then, the program in the controller body activates the electric slide rails 3413 in each cleaning mechanism 34, causing the wiping assembly 343 to be displaced and adjusted on the base assembly 341. When the wiping assembly 343 moves laterally, its upper limit member 3437 moves accordingly. When the movable rod 34372 on the limit member 3437 cooperates with the auxiliary plate 342 during the movement, the U-shaped plate 34371 in the limit member 3437 contacts the friction sleeve before the wiping cotton strip on the carrier cylinder 3432 contacts the filter, thereby locking the hollow shaft 3431 and keeping the wiping cotton strip stable when it contacts the filter during the movement, thus achieving stable wiping of the filter. After wiping the outer side of the filter, the wiping assembly 343 is reset and adjusted. When the wiping assembly 343 is not returning to its original position, the program in the external controller body activates the electric push rod 34362 in the switching component 3436 in advance, causing the gear 3435 to move upward. Then, when the wiping assembly 343 is reset and adjusted, the limit component 3437 first disengages from the lock on the hollow shaft 3431. Then, during its continuous reset movement, the gear 3435 on it contacts the raised rack 34363, thereby realizing a small-amplitude rotational adjustment of the hollow shaft 3431. This causes the carrier cylinder 3432 on it to rotate and switch the various wiping cotton strips, thereby achieving the switching of the wiping cotton strip at the highest point in the carrier cylinder 3432. After wiping and cleaning is completed, the electric push rod 352 in the lifting assembly 35 is activated by the external controller, and the cleaning mechanism 34 is reset by the lifting component 351. The number of wiping cotton strips loaded on the container 3432 is clearly defined. After continuous switching and adjustment, the controller body continuously adjusts the electric push rod 34344 corresponding to the filling plate 34343 in the two side end parts 3434, so that the corresponding filling plate 34343 retracts. This allows the used wiping cotton strips to fall into the collection shell 3433 by gravity when they move downwards for collection.

[0033] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A multi-parameter online detection device for dry film photoresist, comprising a support frame (1) and an air-bearing vibration isolation platform (2), wherein, The air flotation vibration isolation platform (2) is located on the top of the support frame (1). The air flotation vibration isolation platform (2) is symmetrically arranged with detection units (3) for multi-parameter detection of materials. A tray (4) is provided between the two detection units (3) on the support frame (1). A spraying assembly (5) for pumping the agent and a blower body (6) for blowing air are installed on the tray (4). The spraying assembly (5) and the blower body (6) are both connected to the two detection units (3). The detection unit (3) includes an auxiliary component (31) set on the air flotation vibration isolation platform (2). A housing (32) is installed on the auxiliary component (31). The housing (32) contains a detection instrument body (33) for detecting materials. A cleaning mechanism (34) for self-cleaning is provided around the bottom of the housing (32). A lifting component (35) for lifting and adjusting is installed on the cleaning mechanism (34).

2. The online detection device for multiple parameters of dry film photoresist according to claim 1, characterized in that, The support frame (1) includes a horizontal plate (11) and support legs (12). There are two support legs (12), which are respectively set at the bottom ends of the horizontal plate (11). The support legs (12) and the horizontal plate (11) are fixedly connected by bolts. The air-floating vibration isolation platform (2) is placed on the top of the horizontal plate (11). Both sides of the air-floating vibration isolation platform (2) are provided with side frames for auxiliary positioning. The side frames are fixedly connected to the horizontal plate (11) by bolts. The pallet (4) is fixedly connected to the bottom shell wall of the horizontal plate (11) by bolts. The spraying assembly (5) includes a medicine tank (51), a water pump body (52) and a liquid guide pipe. The medicine tank (51) and the water pump body (52) are both located on the top of the pallet (4), and the medicine tank (51) and the water pump body (52) are connected by a conduit. The liquid guide pipe is located at the discharge end of the water pump body (52). The two ends of the liquid guide pipe are connected to the corresponding cleaning mechanism (34) by hoses. The blower body (6) is also located on the top of the pallet (4). The output end of the blower body (6) is equipped with an air guide pipe. The two ends of the air guide pipe correspond to the corresponding detection unit (3), and the two ends of the air guide pipe are provided with two air outlet ports. The two air outlet ports are connected to the corresponding shell (32) and the cleaning mechanism (34) by hoses.

3. The online multi-parameter detection device for dry film photoresist according to claim 2, characterized in that, The auxiliary component (31) includes a support arm (311) that is fixedly connected to the air-floating vibration isolation platform (2) by bolts. A rectangular through groove is provided on the bottom shell wall of the support arm (311). Both sides of the rectangular through groove are fixedly connected to L-shaped plates by bolts. An adjustment seat (312) is installed between the two L-shaped plates by adjusting bolts. The outer casing (32) includes a casing (321), a maintenance plate (322), an end plate (323), and a light shield (324). The casing (321) is fixedly connected to the bottom shell wall of the adjusting seat (312) by bolts. An inspection port is provided on the outer shell wall of the casing (321). The maintenance plate (322) is fixedly connected to the inspection port by bolts. The bottom of the casing (321) is designed as an opening. The end plate (323) is fixedly connected to the bottom opening of the casing (321) by bolts and is used as a base plate. The light shield (324) is set on the bottom shell wall of the end plate (323) by screws. A filter is provided on the bottom shell wall of the light shield (324). The main body (33) of the detector is located inside the housing (321), and the probe of the main body (33) passes through the end plate (323). A rectangular groove is provided on the inner wall of the housing (321), and a housing cover is integrally provided around the rectangular groove. An air inlet pipe is installed on the side end of the housing cover, and the air inlet pipe is connected to the corresponding hose.

4. The online detection device for multiple parameters of dry film photoresist according to claim 2, characterized in that, The cleaning mechanism (34) includes a base component (341), an auxiliary plate (342), a wiping component (343), and an air blowing component (344). The base component (341) includes side bars (3411) arranged symmetrically on the left and right. A crossbeam (3412) and an electric slide rail (3413) are connected between the two side bars (3411) by bolts. The crossbeam (3412) is located behind the electric slide rail (3413), and both the crossbeam (3412) and the electric slide rail (3413) are provided with sliding sleeves. The auxiliary plate (342) is fixedly connected to the two side bars (3411) by bolts, and the auxiliary plate (342) is located above the electric slide rail (3413). The wiping assembly (343) is set on the two sliding sleeves. The air blowing assembly (344) is set between the crossbeam (3412) and the electric slide rail (3413), and the air blowing assembly (344) is also connected to the corresponding hose.

5. The online multi-parameter detection device for dry film photoresist according to claim 4, characterized in that, The wiping assembly (343) includes a hollow shaft (3431), and a carrier cylinder (3432) is integrally provided on the outer ring of the hollow shaft (3431). Both sides of the carrier cylinder (3432) are rotatably connected to the fixing frame located on the hollow shaft (3431) through bearings. The two fixing frames are respectively fixedly connected to the corresponding sliding sleeves by bolts. Multiple grooves for loading wiping cotton strips are opened along the circumferential direction on the outer ring peripheral wall of the carrier cylinder (3432). Multiple liquid permeable holes are opened laterally on the bottom shell wall of each groove. The liquid permeable holes are connected to the inner cavity of the hollow shaft (3431). A collection shell (3433) for loading waste is also provided below the carrier cylinder (3432). Both sides of the collection shell (3433) are respectively fixedly connected to the corresponding fixing frame by screws. Both fixed frames have side end pieces (3434) for pressing against the wiping cotton strip on their inner sides. The two fixed frames have friction sleeves and gears (3435) on the hollow shaft (3431) on their outer sides. A switching piece (3436) is provided below the gear (3435), and a limiting piece (3437) for limiting and locking is provided below the friction sleeve. The hollow shaft (3431) also has a spray pipe (3438) in its inner cavity. Multiple liquid outlet holes are linearly opened on the top of the peripheral wall of the spray pipe (3438). Each liquid outlet hole corresponds to a corresponding liquid permeation hole. A sub-frame is also fixedly connected to the spray pipe (3438). The sub-frame is fixed to the corresponding sliding sleeve by bolts. The outer end of the spray pipe (3438) is connected to the corresponding hose.

6. The online multi-parameter detection device for dry film photoresist according to claim 5, characterized in that, The side end piece (3434) includes a side ring (34341), with notches at the top and bottom. A filling plate (34342) is provided in the upper notch, and a filling plate (34343) is provided in the lower notch. An electric push rod (34344) is provided on the outer wall of both the filling plate (34342) and the filling plate (34343). The electric push rod (34344) is connected to a corresponding fixing frame. Two cylinders are fixedly connected to the outer wall of the side ring (34341), and the other ends of the two cylinders are connected to the corresponding fixing frames by screws. The switching component (3436) includes a base plate (34361), an electric push rod two (34362), and a rack (34363). The electric push rod two (34362) is fixedly connected to the top of the base plate (34361), the rack (34363) is disposed at the output end of the electric push rod two (34362) and meshes with the gear (3435), and the base plate (34361) is fixedly connected to the corresponding side bar (3411) by bolts.

7. The online multi-parameter detection device for dry film photoresist according to claim 5, characterized in that, The limiting component (3437) includes a fixed plate, a U-shaped plate (34371) and a movable rod (34372). The fixed plate is fixedly connected to the corresponding fixed frame by bolts. The U-shaped plate (34371) is located above the fixed plate. The movable rod (34372) is welded to the bottom of the U-shaped plate (34371), and the bottom end of the movable rod (34372) passes through the fixed plate and is connected to a ball bearing. The ball bearing is in rolling contact with the auxiliary plate (342). A positioning ring is integrally provided on the outer shell wall of the movable rod (34372). A return spring located on the movable rod (34372) is sleeved between the positioning ring and the fixed plate.

8. The online multi-parameter detection device for dry film photoresist according to claim 7, characterized in that, The air blowing assembly (344) includes an air jet pipe (3441), an adjusting component (3442), and a hanger. There are two hangers, both of which are mounted on the air jet pipe (3441), and the two hangers are respectively fixedly connected to the corresponding crossbeam (3412) and the electric slide rail (3413) by bolts. The adjusting component (3442) includes a sleeve (34421) fitted onto the air inlet port of the jet pipe (3441). An adjusting rod (34422) is provided inside the sleeve (34421). A sealing plug (34423) is installed at the bottom end of the adjusting rod (34422). The top end of the adjusting rod (34422) extends to the top of the sleeve (34421) and is integrally provided with a contact plate. A compression spring located on the adjusting rod (34422) is fitted between the contact plate and the sleeve (34421). An air inlet pipe for air intake is provided on the peripheral wall of the sleeve (34421), and the air inlet pipe is connected to a corresponding hose.

9. The online multi-parameter detection device for dry film photoresist according to claim 4, characterized in that, The lifting assembly (35) includes a lifting component (351) and an electric push rod (352). The lifting component (351) includes a base frame (3511) that is fixedly connected to the outer wall of the left and right sides of the housing (321) by bolts. Two round rods (3512) are movably connected to each base frame (3511). A retainer is installed at the bottom end of each round rod (3512), and the retainer is connected to the corresponding (34311). An integrated plate (3513) is installed at the top of the multiple round rods (3512). A shield (3514) is provided above the wiping assembly (343) on the housing (32). The shield (3514) is used to cover the wiping assembly (343).

10. The online detection device for multiple parameters of dry film photoresist according to claim 9, characterized in that, The electric push rod three (352) is disposed on the outer wall of the housing (32) and located above the lifting component (351), and the output end of the electric push rod three (352) is connected to the integrated plate (3513).

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