Production for aluminium-material X-ray assembled lens

Abstract

A method for manufacturing an X-ray composite lens made of aluminum material, comprising the following steps: coating a coating on the surface of a silicon substrate, baking and curing; growing an electroformed cathode film on the surface of a sample; coating photoresist on the surface of the electroformed cathode film, Carry out photolithography, development, hard mold; grow metal thin film on photoresist pattern structure; remove photoresist and electroform cathode film; backside photolithography and corrode silicon substrate to form window, as X-ray lithography mask; preparation Titanium sheets were used as substrates for X-ray lithography, and NaOH / H 2 o 2 Surface treatment; apply X-ray photoresist on the surface, bake and cure the above-mentioned photoresist to form an X-ray lithography substrate; perform X-ray lithography and development on the X-ray lithography substrate, and use X-ray photoresist Engraving the mask; filling the silicone rubber into the sample structure and curing; filling the removed silicone rubber mold with aluminum material, and separating the mold after curing. The retained structure includes the scale chassis, lens body, and air gap.

Description

(1) Technical field

[0001] The invention relates to an X-ray microstructure optical device, in particular to a manufacturing process of an X-ray combined lens, which is suitable for the production of an aluminum material parabolic X-ray combined lens. (2) Background technology

[0002] X-ray combined lens is a new type of X-ray microstructure optical element suitable for high-energy X-ray band (that is, X-ray radiation energy exceeding 5keV) proposed by A. Snigirev in 1996. The X-ray combination lens has many advantages, such as no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. In particular, it is suitable for occasions where the energy of X-ray radiation exceeds 5keV, so the element has broad application prospects in scientific and technical research. In recent years, research on various X-ray diagnostic techniques based on X-ray combined lenses is ve...

Examples

Embodiment 1

[0029] Refer to attached figure 1 , a kind of manufacture method of aluminum material parabolic X-ray compound lens, comprises the preparation of X-ray lithography mask, the preparation of X-ray lithography substrate and the formation of final aluminum material lens; (1) X-ray lithography mask The preparation includes the following steps:

[0030] (A) Spin-coating a layer of polyimide coating on the surface of the silicon substrate through conventional cleaning treatment, baking and curing;

[0031] (B) growing an electroformed cathode film of a copper material on the surface of the solidified sample sheet;

[0032] (C) Coating a layer of AZP4000 photoresist on the surface of the electroformed cathode film, carrying out photoetching, development, and hardening of the above photoresist to form a photoresist pattern structure;

[0033] (D) growing one deck metal thin film on photoresist pattern structure, described metal thin film material is gold, and its thickness is less th...

Embodiment 2

[0045] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a titanium material, and the thickness of the PMMA coating on the surface of the titanium sheet is 1000 microns in the step (1), and all the other steps are the same as in Example 1.

Embodiment 3

[0047] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a nickel material, and the thickness of the PMMA coating on the surface of the titanium sheet is 2000 microns in the step (1), and all the other steps are the same as in Example 1.

[0048] Process tests have been carried out on the above three embodiments, and it can be seen from the test results that they all meet the requirements of the structural shape and size of the X-ray combined lens, and the process test effect of embodiment 2 is the best.

(1) Technical field

[0001] The invention relates to an X-ray microstructure optical device, in particular to a manufacturing process of an X-ray combined lens, which is suitable for the production of an aluminum material parabolic X-ray combined lens. (2) Background technology

[0002] X-ray combined lens is a new type of X-ray microstructure optical element suitable for high-energy X-ray band (that is, X-ray radiation energy exceeding 5keV) proposed by A. Snigirev in 1996. The X-ray combination lens has many advantages, such as no need to bend the optical path, good high temperature stability and easy cooling, simple and compact structure, and low requirements on the surface roughness of the lens. In particular, it is suitable for occasions where the energy of X-ray radiation exceeds 5keV, so the element has broad application prospects in scientific and technical research. In recent years, research on various X-ray diagnostic techniques based on X-ray combined lenses is ve...

Examples

Embodiment 1

[0029] Refer to attached figure 1 , a kind of manufacture method of aluminum material parabolic X-ray compound lens, comprises the preparation of X-ray lithography mask, the preparation of X-ray lithography substrate and the formation of final aluminum material lens; (1) X-ray lithography mask The preparation includes the following steps:

[0030] (A) Spin-coating a layer of polyimide coating on the surface of the silicon substrate through conventional cleaning treatment, baking and curing;

[0031] (B) growing an electroformed cathode film of a copper material on the surface of the solidified sample sheet;

[0032] (C) Coating a layer of AZP4000 photoresist on the surface of the electroformed cathode film, carrying out photoetching, development, and hardening of the above photoresist to form a photoresist pattern structure;

[0033] (D) growing one deck metal thin film on photoresist pattern structure, described metal thin film material is gold, and its thickness is less th...

Embodiment 2

[0045] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a titanium material, and the thickness of the PMMA coating on the surface of the titanium sheet is 1000 microns in the step (1), and all the other steps are the same as in Example 1.

Embodiment 3

[0047] In the technical scheme of the present embodiment, the metal material electroforming cathode film described in the step (B) is a nickel material, and the thickness of the PMMA coating on the surface of the titanium sheet is 2000 microns in the step (1), and all the other steps are the same as in Example 1.

[0048] Process tests have been carried out on the above three embodiments, and it can be seen from the test results that they all meet the requirements of the structural shape and size of the X-ray combined lens, and the process test effect of embodiment 2 is the best.

Images