Evaporation device

Abstract

The utility model discloses an evaporation device, which relates to the field of vacuum evaporation equipment, and comprises an evaporation device shell, two crucibles for containing evaporation materials are arranged at the bottom of the inner side of the evaporation device shell, a concave arc jacking block is arranged between the two crucibles, and the concave arc jacking block is fixedly connected with the evaporation device shell. The upper portion of the evaporation device shell is in an arc top shape, a partition assembly is arranged in the evaporation device shell, the interior of the evaporation device shell is divided into the two independent evaporation cavities through the partition assembly, the hanging unit and the driving unit are matched, and after one face of a base plate in the two independent evaporation cavities is evaporated, the two faces of the base plate in the two independent evaporation cavities are separated from each other through the partition assembly. The position of the base plate in the hanging unit can be directly changed between the two independent evaporation chambers, namely, the other side of the base plate can be evaporated, and due to the fact that plating materials in the crucibles in the two independent evaporation chambers are different, evaporation treatment of different materials can be conducted on the double mirror faces of the base plate in the same evaporation process.

Description

Technical Field

[0001] The utility model relates to the field of vacuum evaporation equipment, in particular to an evaporation device. Background Art

[0002] Vacuum evaporation is to heat the plating material to an evaporation state under a vacuum environment. The vapor formed by the plating material is irradiated onto the surface of the substrate and condensed to form a solid film. The commonly used vacuum evaporation method is resistance heating evaporation. The solid plating material is placed in a crucible and the crucible is heated by a resistance wire to liquefy the solid plating material and then evaporate. The evaporation of the substrate can only be completed on one side of the substrate before the other side is evaporated. In order to ensure the speed of the substrate evaporation process, a structure that can rotate and suspend the substrate is usually designed inside the evaporation device. That is, after the evaporation of one side of the substrate is completed, the substrate is directly driven to flip inside the evaporation device, and the other side of the substrate can be evaporated.

[0003] However, the existing evaporation devices can only perform evaporation processing on the same material of the substrate during the evaporation operation. If the two end surfaces of the substrate (such as wafers, lenses, nylon plates, resin plates, metal plates, etc.) need to be evaporated with coatings of different materials, the existing evaporation devices cannot evaporate different material coatings on the two end surfaces of the substrate in the same evaporation process. After the evaporation on one end surface of the substrate is completed, the substrate can only be turned over, and then the evaporation device can be opened to replace the coating material in the crucible before the other end surface of the substrate can be evaporated with a different material. Utility Model Content

[0004] The utility model aims to provide a vapor deposition device to solve the problem that the existing vapor deposition device mentioned in the background art cannot perform vapor deposition of different materials on two mirror surfaces of a substrate in one vapor deposition process.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vapor deposition device, comprising a vapor deposition device shell, two crucibles for containing vapor deposition materials are arranged at the inner bottom of the vapor deposition device shell, a concave arc top support block is arranged between the two crucibles, and the concave arc top support block is fixedly connected to the vapor deposition device shell, the upper part of the vapor deposition device shell is in the shape of a circular arc top, and a partition assembly is arranged inside the vapor deposition device shell, and the partition assembly is used to separate the evaporated materials of the two crucibles.

[0006] Preferably, it further comprises a suspension unit for suspending the two groups of substrates above the two crucibles respectively, and the suspension unit is arranged on the partition assembly;

[0007] The driving unit is used to drive the partition assembly to adjust the position of the suspension unit, and the driving unit is arranged between the evaporation device housing and the partition assembly.

[0008] Preferably, the partition assembly includes a first partition plate and a second partition plate, and the first partition plate and the second partition plate are distributed so that their mid-perpendicular lines intersect each other, the first partition plate and the second partition plate are fixedly connected, and the two form a cross structure, the front and rear end surfaces of the cross structure are fixedly installed with extension cylinders, and the extension cylinders rotate and penetrate the shell of the evaporation device, the front, rear, upper, lower, left and right end surfaces of the cross structure are covered with a silicone wrapping layer, and the intersection of the extension cylinder and the shell of the evaporation device is the arc top of the shell of the evaporation device The center of the circle is the same as that of the circle, and the upper end arc surface of the concave arc top support block is co-centered with the arc top of the shell of the evaporation device, wherein the first partition plate is placed horizontally and the second partition plate is placed vertically. Since there are no holes on the surface of the second partition plate, when the end face of the cross structure contacts the inner wall of the shell of the evaporation device and the concave arc top support block through the silica gel wrapping layer, the second partition plate can divide the interior of the shell of the evaporation device into two left and right chambers, and the two crucibles are respectively located inside the two chambers, and the back of each chamber is also equipped with a vacuum and inflation docking sleeve for vacuuming and inflation.

[0009] Preferably, the suspension unit includes two cavities opened in the first partition plate and distributed in an alternating manner. A turntable is rotatably embedded in each of the cavities, and both end surfaces of the turntable extend out of the first partition plate. An umbrella-shaped holder is provided inside the turntable, and a plurality of rotating sleeves equidistantly distributed in a circle are rotatably assembled inside the umbrella-shaped holder. A placement slot is also provided inside the turntable, and the number of the placement slots is consistent with the number of the rotating sleeves, and each of the placement slots is concentric with a plurality of the rotating sleeves, respectively. A plurality of arc-shaped slots equidistantly distributed in a circle are opened inside the rotating sleeve, and a straight slot equal to the number of the arc-shaped slots is opened around each of the placement slots. A clamping mechanism is provided between the rotating sleeve and the straight slot, that is, the turntable can rotate inside the first partition plate, and the rotating sleeve can rotate inside the turntable, and the center of the rotating sleeve is hollow and concentric with the straight slot.

[0010] Preferably, the clamping mechanism includes a positioning rod slidably inserted into each of the arc-shaped grooves, and both ends of the positioning rod are correspondingly slidably embedded in the straight grooves, a positioning hole is opened at the end of each positioning rod, and a limiting rod engaged with the positioning hole is fixedly arranged inside each straight groove, a sleeve is fixedly installed at one end of the positioning rod close to the center of the rotating sleeve, and a push rod is assembled on the inside of the sleeve for transverse sliding, a second spring is fixedly arranged between the end of the push rod extending into the sleeve and the sleeve, and a clamping column is fixedly arranged on the other end of the push rod, an elastic pressure component is arranged between each rotating sleeve and the umbrella-shaped retaining frame, when the rotating sleeve rotates, the positioning rod is limited by the arc-shaped groove and the straight groove at the same time, and the positioning hole is limited by the limiting rod, so that the positioning rod can move toward the center of the rotating sleeve with the clamping column.

[0011] Preferably, the elastic pressure component includes a right-angled shift block fixedly mounted on the outer wall of each of the rotating sleeves, and one end of the right-angled shift block away from the rotating sleeve movably passes through the first partition plate, an arc-shaped sliding rod is fixedly mounted on the side wall of the right-angled shift block, and the arc center of the arc-shaped sliding rod coincides with the center of the rotating sleeve, and one end of the arc-shaped sliding rod away from the right-angled shift block is slidably inserted into the interior of the umbrella-shaped retaining frame, and a first spring is also mounted on the outer surface of the arc-shaped sliding rod, and both ends of the first spring are respectively fixed to the right-angled shift block and the umbrella-shaped retaining frame, that is, under the action of the first spring, a plurality of clamping columns are in an extended state, and when the position of the rotating sleeve is deflected by the right-angled shift block, the plurality of clamping columns can be opened.

[0012] Preferably, the driving unit comprises a driving motor fixedly mounted on the outer wall of the housing of the evaporation device, and a second gear is fixedly mounted on the output end of the driving motor, a third gear movably meshed with the second gear is sleeved on the outer wall of one of the extension cylinders, a convex block is fixedly arranged on the outer surface of the extension cylinder, and two blocks for limiting the deflection angle of the convex block are fixedly mounted on the outer wall of the housing of the evaporation device;

[0013] The deflection angle of the extension column is a, and the restriction range of the two blocks on the extension column and the protrusion is 0≤a≤180 degrees. Limiting the deflection angle of the extension column is limiting the deflection angle of the cross structure. If the deflection angle exceeds 180 degrees, the airflows of the two chambers are interconnected.

[0014] The third gear is rotatably sleeved on the outside of the extension column, and a transmission mechanism is arranged between the third gear and the two rotating disks.

[0015] Preferably, the transmission mechanism includes a worm that rotates and passes through the two cavities and the two extended cylinders, the worm has two worm grooves, and the two worm grooves are respectively located on the inner sides of the two cavities, a worm wheel is rotatably arranged inside each cavity, and the worm wheel is meshed with the worm, a gear ring is fixedly sleeved on the outer surface of each rotating sleeve, two mutually meshing first gears are arranged between the worm wheel and the gear ring, one of the first gears is concentrically fixedly mounted on the top of the worm wheel, and the other first gear is movably meshed with the gear ring, the first gear that is not fixed to the worm wheel is rotatably assembled with the cavity, a fixing frame is fixedly arranged between the end of the worm and the third gear, and a clamping component is arranged between the third gear and the extended cylinder, the two cavities are separated, and the worm groove of the worm is also located inside the cavity, that is, under the obstruction of the second partition plate, the airflow of the two chambers will not circulate during the evaporation operation.

[0016] Preferably, the clamping component includes a plurality of circumferentially equidistantly distributed concave arc grooves opened on the outer surface of the extension cylinder, a plurality of circumferentially equidistantly distributed positioning pins are slidably embedded in the interior of the third gear, and the dome portion of the positioning pin movably extends out of the third gear, a third spring is fixedly arranged between one end of the positioning pin away from the extension cylinder and the third gear, and the positioning pin is movably engaged with the concave arc groove, and when the extension cylinder is stuck and motionless, the second gear can drive the third gear and the worm gear to idle inside and outside the extension cylinder.

[0017] Preferably, two heat conduction frames are fixedly installed inside the shell of the evaporation device, and the two heat conduction frames are respectively mounted on the outer surfaces of the two crucibles, and a liquid storage cylinder is fixedly installed inside each of the heat conduction frames, the interior of the extension column is hollow, and infusion channels are evenly distributed inside the silica gel wrapping layer, and both ends of the infusion channels are connected to the interior of the extension column, and a delivery pipe is provided between each of the liquid storage cylinders and the end of one of the extension columns.

[0018] Compared with the prior art, the beneficial effects of the utility model are:

[0019] The utility model divides the interior of the shell of the evaporation device into two independent evaporation chambers through a partition component, and cooperates with the functions of the suspension unit and the driving unit. After one side of the substrate in the two independent evaporation chambers is evaporated, the substrate in the suspension unit can be directly replaced between the two independent evaporation chambers. The replaced substrate is also flipped compared to before, that is, the other side of the substrate can be directly evaporated. Since the plating materials in the crucibles in the two independent evaporation chambers are different, different materials can be evaporated on the double mirror surfaces of the substrate in the same evaporation process, thereby improving the double-sided evaporation efficiency of different materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 This is a schematic diagram of the structure of the drive motor of the utility model;

[0022] Figure 3 This is a schematic diagram of the internal structure of the cavity of the utility model;

[0023] Figure 4 This is a schematic diagram of the internal structure of the turntable of the utility model;

[0024] Figure 5 This is a schematic diagram of the structure of the sleeve and the clamping column of the utility model;

[0025] Figure 6 This is a schematic diagram of the structure of the worm gear of the utility model distributed in two cavities;

[0026] Figure 7 For this utility model Figure 6 Enlarged view of point A in the middle;

[0027] Figure 8 This is a schematic diagram of the structure of the protrusion and the clamping block of the utility model;

[0028] Fig. 9 This is a schematic diagram of the concave arc groove and positioning pin structure of the utility model;

[0029] Fig.10 This is a schematic diagram of the structure of the heat conduction frame, liquid storage cylinder and delivery pipe of the utility model.

[0030] In the figure: 1, evaporation device housing; 2, first partition plate; 3, second partition plate; 4, concave arc top support block; 5, crucible; 6, pumping and inflating docking tube; 7, silicone wrapping layer; 8, worm; 9, cavity; 10, turntable; 11, umbrella-shaped retaining frame; 12, rotating sleeve; 13, arc-shaped notch; 14, straight notch; 15, right-angled shift block; 16, arc-shaped slide rod; 17, first spring; 18, positioning rod; 19, sleeve; 2 0. Push rod; 21. Second spring; 22. Clamping column; 23. Positioning hole; 24. Gear ring; 25. Worm gear; 26. First gear; 27. Extension column; 28. Bump; 29. ​​Block; 30. Drive motor; 31. Second gear; 32. Third gear; 33. Fixing frame; 34. Concave arc groove; 35. Positioning pin; 36. Third spring; 37. Heat conduction frame; 38. Liquid storage cylinder; 39. Delivery pipe. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] Example 1: Please refer to Figure 1-Figure 5 , a vapor deposition device shown in the figure comprises a vapor deposition device housing 1, two crucibles 5 for containing vapor deposition materials are arranged at the inner bottom of the vapor deposition device housing 1, a concave arc top support block 4 is arranged between the two crucibles 5, and the concave arc top support block 4 is fixedly connected to the vapor deposition device housing 1, the upper part of the vapor deposition device housing 1 is in the shape of a circular arc top, and a partition component is arranged inside the vapor deposition device housing 1, and the partition component is used to separate the evaporated materials of the two crucibles 5;

[0033] It also includes a suspension unit, which is used to suspend the two groups of substrates above the two crucibles 5 respectively, and the suspension unit is arranged on the partition assembly;

[0034] The driving unit is used to drive the partition assembly to adjust the position of the suspension unit, and the driving unit is arranged between the evaporation device housing 1 and the partition assembly.

[0035] The partition assembly includes a first partition plate 2 and a second partition plate 3, and the first partition plate 2 and the second partition plate 3 are intersecting with each other at perpendicular midlines, the first partition plate 2 and the second partition plate 3 are fixedly connected, and the two form a cross structure, the front and rear end surfaces of the cross structure are fixedly installed with extension cylinders 27, and the extension cylinder 27 rotates and penetrates the evaporation device shell 1, the front, rear, upper, lower, left and right end surfaces of the cross structure are covered with a silicone wrapping layer 7, the intersection of the extension cylinder 27 and the evaporation device shell 1 is the center of the arc top of the evaporation device shell 1, and the concave arc top support block The upper end arc surface of 4 is cocentric with the arc top of the evaporation device shell 1, wherein the first partition plate 2 is placed horizontally and the second partition plate 3 is placed vertically. Since there are no holes on the surface of the second partition plate 3, when the end face of the cross structure contacts the inner wall of the evaporation device shell 1 and the concave arc top support block 4 through the silica gel wrapping layer 7, the second partition plate 3 can divide the interior of the evaporation device shell 1 into two left and right chambers, and the two crucibles 5 are respectively located in the two chambers, and the back of each chamber is also equipped with a vacuum and inflation docking tube 6 for vacuuming and inflation.

[0036] The suspension unit includes two cavities 9 opened inside the first partition plate 2 and distributed in an alternating manner. A turntable 10 is rotatably embedded inside each cavity 9, and both end surfaces of the turntable 10 extend out of the first partition plate 2. An umbrella-shaped retaining frame 11 is provided on the internal fixing frame of the turntable 10, and a plurality of rotating sleeves 12 equidistantly distributed around the circumference are rotatably assembled inside the umbrella-shaped retaining frame 11. A placement slot is also provided inside the turntable 10, and the number of the placement slots is consistent with the number of the rotating sleeves 12, and each placement slot is concentric with a plurality of rotating sleeves 12, respectively. A plurality of arc-shaped slots 13 equidistantly distributed around the circumference are opened inside the rotating sleeve 12, and a number of straight slots 14 equal to the number of the arc-shaped slots 13 are opened around each placement slot, and a clamping mechanism is provided between the rotating sleeve 12 and the straight slots 14, that is, the turntable 10 can rotate inside the first partition plate 2, and the rotating sleeve 12 can rotate inside the turntable 10, and the center of the rotating sleeve 12 is hollow and concentric with the straight slots 14.

[0037] The clamping mechanism includes a positioning rod 18 slidably inserted into each arc-shaped groove 13, and the two ends of the positioning rod 18 are also correspondingly slidably embedded in the straight groove 14. A positioning hole 23 is opened at the end of each positioning rod 18, and a limiting rod engaged with the positioning hole 23 is fixedly arranged inside each straight groove 14. A sleeve 19 is fixedly installed at one end of the positioning rod 18 close to the center of the rotating sleeve 12, and a push rod 20 is installed in the sleeve 19 for transverse sliding. A second spring 21 is fixedly arranged between the end of the push rod 20 extending into the sleeve 19 and the sleeve 19, and a clamping column 22 is fixedly arranged at the other end of the push rod 20. An elastic pressure component is arranged between each rotating sleeve 12 and the umbrella-shaped retaining frame 11. When the rotating sleeve 12 rotates, the positioning rod 18 is limited simultaneously by the arc-shaped groove 13 and the straight groove 14, and the positioning hole 23 is limited by the limiting rod, so that the positioning rod 18 can move toward the center of the rotating sleeve 12 with the clamping column 22.

[0038] The elastic pressure-applying component includes a right-angled shift block 15 fixedly mounted on the outer wall of each rotating sleeve 12, and the end of the right-angled shift block 15 away from the rotating sleeve 12 is movable and passes through the first partition plate 2, an arc-shaped slide bar 16 is fixedly mounted on the side wall of the right-angled shift block 15, and the arc center of the arc-shaped slide bar 16 coincides with the center of the circle of the rotating sleeve 12, and the end of the arc-shaped slide bar 16 away from the right-angled shift block 15 is slidably inserted into the interior of the umbrella-shaped retaining frame 11, and the outer surface of the arc-shaped slide bar 16 is also covered with a first spring 17, and the two ends of the first spring 17 are respectively fixed to the right-angled shift block 15 and the umbrella-shaped retaining frame 11, that is, under the action of the first spring 17, a plurality of clamping columns 22 are in an extended state, and when the position of the rotating sleeve 12 is deflected by the right-angled shift block 15, a plurality of clamping columns 22 can be opened.

[0039] The driving unit includes a driving motor 30 fixedly mounted on the outer wall of the evaporation device housing 1, and a second gear 31 is fixedly mounted on the output end of the driving motor 30, a third gear 32 movably meshed with the second gear 31 is sleeved on the outer wall of one of the extension cylinders 27, a protrusion 28 is fixedly arranged on the outer surface of the extension cylinder 27, and two blocks 29 for limiting the deflection angle of the protrusion 28 are fixedly mounted on the outer wall of the evaporation device housing 1;

[0040] The deflection angle of the extension column 27 is a, and the two blocks 29 limit the extension column 27 and the protrusion 28 in the range of 0≤a≤180 degrees. Limiting the deflection angle of the extension column 27 is to limit the deflection angle of the cross structure. If the deflection angle exceeds 180 degrees, the airflows of the two chambers are interconnected.

[0041] The working principle of being able to evaporate different materials on the two mirror surfaces of the substrate in the evaporation device:

[0042] First, assemble the substrate to be coated. The staff can push the right-angle block 15 to deflect the rotating sleeve 12. During the deflection process, the arc-shaped notch 13 and the straight notch 14 limit the positioning rod 18, so that several positioning rods 18 can be unfolded with several clamping columns 22. At this time, place the substrate in the central hole of the rotating sleeve 12, and then slowly release the right-angle block 15. Under the action of the first spring 17, the rotating sleeve 12 can be elastically reset. During the reset process, the clamping columns 22 can contact and clamp multiple parts of the outer wall of the substrate. Considering that the substrate may be square or elliptical, the clamping columns 22 clamp During the process, the extension of the clamping column 22 can be adjusted by the different compression degrees of the second spring 21 to ensure stable clamping of the substrate. After the substrates to be coated are assembled in the two turntables 10, the staff can add two different plating materials to be evaporated into the two crucibles 5 respectively, and then the evaporation device shell 1 can be closed, and the two independent evaporation chambers can be vacuumed by the air pumping connection tube 6. After the negative pressure inside the independent evaporation chamber reaches the specified value, the crucible 5 is heated by the resistance wire to melt the plating material in the crucible 5 and evaporate it, and the lower end surface of the substrate inside the independent evaporation chamber is coated.

[0043] After the evaporation is completed on the lower end surface of the substrate in the two independent evaporation chambers, the staff inflates the interior through the air pumping and inflation connection tube 6. After inflation, the high temperature caused by the evaporation of the coating material in the independent evaporation chamber can be alleviated. After the temperature in the independent evaporation chamber drops, the steam flow that was previously scattered in the independent evaporation chamber will quickly condense. At this time, the cross structure can be rotated 180 degrees by the driving motor 30. After the rotation, the positions of the two first partition plates 2 are replaced. After the position replacement, the substrate is equivalent to being flipped once, and the surface that has not been coated before faces downward. At this time, the interior of the two independent evaporation chambers is evacuated again and the crucible 5 is heated. Different coating layers can be evaporated on the other end surface of the substrate, thereby realizing another substrate installation and evaporation process. Different materials are evaporated on the two mirror surfaces of the substrate at the same time. In the evaporation process, since the two independent evaporation chambers are relatively closed, there will be no confusion in the evaporation materials.

[0044] Example 2: Please refer to Figure 6-9 This embodiment is a further description of the first embodiment. The third gear 32 is rotatably sleeved on the outside of the extension cylinder 27 , and a transmission mechanism is provided between the third gear 32 and the two turntables 10 .

[0045] The transmission mechanism includes a worm 8 that rotates and passes through two cavities 9 and two extension cylinders 27. The worm 8 has two worm grooves, and the two worm grooves are located on the inner sides of the two cavities 9. A worm wheel 25 is rotatably arranged inside each cavity 9, and the worm wheel 25 is in transmission engagement with the worm 8. A toothed ring 24 is fixedly sleeved on the outer surface of each rotating sleeve 12. Two mutually meshing first gears 26 are installed between the worm wheel 25 and the toothed ring 24, and one of the first gears 26 is fixedly installed concentrically. At the top of the worm wheel 25, another first gear 26 is movably engaged with the gear ring 24, the first gear 26 not fixed to the worm wheel 25 is rotatably assembled with the cavity 9, a fixing frame 33 is fixed between the end of the worm 8 and the third gear 32, and a clamping component is provided between the third gear 32 and the extension column 27, the two cavities 9 are separated, and the worm groove of the worm 8 is also located inside the cavity 9, that is, under the obstruction of the second partition plate 3, the airflow of the two chambers will not circulate during the evaporation operation.

[0046] The clamping component includes a plurality of circumferentially equidistantly distributed concave arc grooves 34 opened on the outer surface of the extension cylinder 27, a plurality of circumferentially equidistantly distributed positioning pins 35 are slidably embedded inside the third gear 32, and the dome part of the positioning pin 35 movably extends out of the third gear 32, and a third spring 36 is fixedly arranged between one end of the positioning pin 35 away from the extension cylinder 27 and the third gear 32, and the positioning pin 35 is movably engaged with the concave arc groove 34. When the extension cylinder 27 is stuck and cannot move, the second gear 31 can drive the third gear 32 and the worm 8 to idle inside and outside the extension cylinder 27.

[0047] In this embodiment: the driving motor 30 can rotate the extension column 27 180 degrees counterclockwise or clockwise through the meshing of the second gear 31 and the third gear 32, and after each position adjustment of the extension column 27 is completed, the driving motor 30 can still continue to drive the third gear 32. Due to the jamming of the extension column 27, the rotational force formed between the third gear 32 and the extension column 27 can push the positioning pin 35 to the inside of the third gear 32. At this time, the third gear 32 can drive the worm 8 to rotate idly through the fixing frame 33. The rotation of the worm 8 can drive the turntable 10 to rotate inside the first partition plate 2 through the action of the worm wheel 25 and the first gear 26, so that the substrate will change position during the evaporation process following the rotation of the turntable 10, thereby ensuring the uniformity of the evaporation.

[0048] Example 3: Please refer to Fig.10This embodiment is a further explanation of Embodiments 1 and 2. Two heat conduction frames 37 are fixedly installed inside the evaporation device housing 1, and the two heat conduction frames 37 are respectively mounted on the outer surfaces of the two crucibles 5. A liquid storage cylinder 38 is fixedly installed inside each heat conduction frame 37. The interior of the extension column 27 is hollow. The interior of the silica gel wrapping layer 7 is evenly distributed with infusion channels, and both ends of the infusion channels are connected to the interior of the extension column 27. A delivery pipe 39 is provided between each liquid storage cylinder 38 and the end of one of the extension columns 27.

[0049] The evaporation device provided by the utility model comprises the following steps when performing evaporation:

[0050] S1, using the heat of the crucible 5 to transport the medium in the liquid storage cylinder 38 through the delivery tube 39 to the infusion channel of the silica gel coating layer 7, and recording the volume change of the silica gel coating layer 7;

[0051] S2. When the volume of the silicone coating layer 7 expands to a preset critical value, the change in the heat value Q of the heat conduction frame 37 over time is recorded and compared with the preset heat threshold value:

[0052] S3. When the calorific value Q exceeds the preset calorific value range, a pressure relief module is provided at the end of the extension column 27 away from the delivery pipe 39 to perform pressure relief treatment on the silica gel wrapping layer 7 and obtain a control strategy;

[0053] S4. Analyze the control strategy results and start the driving unit to drive the partition component to rotate and adjust the position of the suspension unit.

[0054] The regulatory strategy and its analysis process include:

[0055] Record the infusion channel pressure P through the pressure relief module i Size and expansion volume V of the silicone wrapping layer 7 i ;

[0056] By formula Calculate the balance coefficient E q , where t0 is the start time of the pressure relief module to release pressure, t is the time consumed to complete the entire pressure relief process; V0 is the standard expansion volume; α and γ are both preset weight coefficients, and α and γ are both greater than 0;

[0057] The balance factor E q With the preset balance coefficient threshold [E A , E B ] for comparison:

[0058] When E q ∈[E A , E B], it is judged that the silica gel coating layer 7 is in a balanced state and is currently in a vapor deposition state;

[0059] When E q >E B When , it is judged that the silica gel wrapping layer 7 is in an expanded state, and pressure relief treatment is performed;

[0060] When E q <E A When the silicone wrapping layer 7 is in a contracted state, the driving unit is started.

[0061] In this embodiment, when the crucible 5 is heated to melt the plating material and make it evaporate, the heat conduction frame 37 can transfer part of the heat to the liquid storage cylinder 38. Since the interior of the liquid storage cylinder 38 is in a closed state, the medium inside it will expand due to the high temperature and high pressure, and then be transported to the infusion channel of the silica gel wrapping layer 7 through the delivery pipe 39, so that the silica gel wrapping layer 7 expands and deforms. It is worth noting that when the temperature of the crucible 5 is at a temperature that melts the plating material but does not reach the temperature that evaporates the plating material, the pressure inside the silica gel wrapping layer 7 is in a balanced state. At this time, E q ∈[E A , E B ], within this value, the small expansion of the silica gel wrapping layer 7 can fill the gap between the cross structure and the evaporation device housing 1 and the concave arc top support block 4 to ensure the complete sealing of the two independent evaporation chambers and ensure that when two different materials are used for evaporation, the vapor flow of the coating materials will not be mixed;

[0062] When the temperature of the crucible 5 reaches the point where the melted plating material can be evaporated, E q >E B In order to avoid excessive expansion of the silica gel coating 7 and the occurrence of bursting, when E q >E B The pressure relief module is triggered to perform pressure relief processing to ensure that E is always maintained during the process of crucible 5 heating the plating material. q ∈[E A , E B ];

[0063] When the evaporation on one side of the substrate is completed, the temperature of the crucible 5 also begins to drop, and the steam flow in the independent evaporation chamber begins to condense. q <E A , the medium in the infusion channel of the silicone coating layer 7 begins to flow back into the liquid storage cylinder 38, and the silicone coating layer 7 becomes shriveled. At this time, there is a certain gap between the silicone coating layer 7 and the evaporation device shell 1 and the concave arc top support block 4, which makes it easier for the driving unit to adjust the position of the cross structure.

[0064] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0065] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vapor deposition device, It is characterized in that include: A evaporation device shell (1), wherein two crucibles (5) for containing evaporation materials are arranged at the inner bottom of the evaporation device shell (1), a concave arc top support block (4) is arranged between the two crucibles (5), and the concave arc top support block (4) is fixedly connected to the evaporation device shell (1), the upper part of the evaporation device shell (1) is in the shape of a circular arc top, and a partition component is arranged inside the evaporation device shell (1), and the partition component is used to separate the evaporation materials of the two crucibles (5).

2. The evaporation device according to claim 1, Features: Also includes: A suspension unit, used for suspending the two groups of substrates above the two crucibles (5) respectively, the suspension unit being arranged on the partition assembly; A driving unit is used for driving the partition component to adjust the position of the suspension unit, and the driving unit is arranged between the evaporation device housing (1) and the partition component.

3. The evaporation device according to claim 2, Features: The partition assembly comprises a first partition plate (2) and a second partition plate (3), and the first partition plate (2) and the second partition plate (3) are intersectingly distributed with perpendicular midlines to each other, the first partition plate (2) and the second partition plate (3) are fixedly connected, and the two form a cross structure, the front and rear end surfaces of the cross structure are fixedly installed with extension cylinders (27), and the extension cylinders (27) rotate and penetrate the shell of the evaporation device (1), the front, rear, upper, lower, left and right end surfaces of the cross structure are covered with a silica gel wrapping layer (7), the intersection of the extension cylinder (27) and the shell of the evaporation device (1) is the center of the arc top of the shell of the evaporation device (1), and the upper end arc surface of the concave arc top support block (4) is cocentric with the arc top of the shell of the evaporation device (1).

4. The evaporation device according to claim 3, Features: The suspension unit comprises two cavities (9) arranged in an interlaced manner and opposite to each other and opened inside the first partition plate (2), a rotating disk (10) is rotatably embedded inside each of the cavities (9), and both end surfaces of the rotating disk (10) extend out of the first partition plate (2), an internal fixing frame of the rotating disk (10) is provided with an umbrella-shaped retaining frame (11), and a plurality of rotating sleeves (12) equidistantly distributed on a circumference are rotatably mounted inside the umbrella-shaped retaining frame (11), and the rotating disk ( The interior of the rotating sleeve (10) is also provided with placement slots, the number of which is consistent with the number of the rotating sleeves (12), and each of the placement slots is concentric with a plurality of the rotating sleeves (12), the interior of the rotating sleeve (12) is provided with a plurality of arcuate slots (13) equidistantly distributed in a circumference, and the periphery of each of the placement slots is provided with straight slots (14) equal in number to the number of the arcuate slots (13), and a clamping mechanism is provided between the rotating sleeve (12) and the straight slots (14).

5. The evaporation device according to claim 4, Features: The clamping mechanism includes a positioning rod (18) slidably inserted into each of the arc-shaped slots (13), and the two ends of the positioning rod (18) are also correspondingly slidably embedded in the straight slots (14), each end of the positioning rod (18) is provided with a positioning hole (23), and a limiting rod engaged with the positioning hole (23) is fixedly arranged inside each of the straight slots (14), a sleeve (19) is fixedly installed at one end of the positioning rod (18) close to the center of the rotating sleeve (12), and a push rod (20) is laterally slidably assembled inside the sleeve (19), a second spring (21) is fixedly arranged between the end of the push rod (20) extending into the sleeve (19) and the sleeve (19), and a clamping column (22) is fixedly arranged at the other end of the push rod (20), and an elastic pressure component is arranged between each rotating sleeve (12) and the umbrella-shaped retaining frame (11).

6. The evaporation device according to claim 5, Features: The elastic pressure-applying component comprises a right-angled shift block (15) fixedly mounted on the outer wall of each rotating sleeve (12), and one end of the right-angled shift block (15) away from the rotating sleeve (12) movably penetrates the first partition plate (2), an arc-shaped slide rod (16) is fixedly mounted on the side wall of the right-angled shift block (15), and the arc center of the arc-shaped slide rod (16) coincides with the arc center of the rotating sleeve (12), and one end of the arc-shaped slide rod (16) away from the right-angled shift block (15) is slidably inserted into the interior of the umbrella-shaped retaining frame (11), and the outer surface of the arc-shaped slide rod (16) is also covered with a first spring (17), and the two ends of the first spring (17) are respectively fixed to the right-angled shift block (15) and the umbrella-shaped retaining frame (11).

7. The evaporation device according to claim 4, Features: The driving unit comprises a driving motor (30) fixedly mounted on the outer wall of the evaporation device housing (1), and a second gear (31) is fixedly mounted on the output end of the driving motor (30), a third gear (32) movably meshed with the second gear (31) is sleeved on the outer wall of one of the extension cylinders (27), a convex block (28) is fixedly arranged on the outer surface of the extension cylinder (27), and two clamping blocks (29) for limiting the deflection angle of the convex block (28) are fixedly mounted on the outer wall of the evaporation device housing (1); The deflection angle of the extension column (27) is a, and the restriction range of the two clamping blocks (29) on the extension column (27) and the protrusion (28) is 0≤a≤180 degrees; The third gear (32) is rotatably sleeved on the outside of the extension column (27), and a transmission mechanism is provided between the third gear (32) and the two rotating disks (10).

8. The evaporation device according to claim 7, Features: The transmission mechanism comprises a worm (8) which rotates and passes through the two cavities (9) and the two extension cylinders (27); the worm (8) has two worm grooves, and the two worm grooves are respectively located on the inner sides of the two cavities (9); a worm wheel (25) is rotatably arranged inside each cavity (9), and the worm wheel (25) is in transmission engagement with the worm (8); the outer surface of each rotating sleeve (12) is fixedly sleeved with a toothed ring (24); the worm wheel (25) and the toothed ring (24) are assembled between them. There are two first gears (26) meshing with each other, one of the first gears (26) is fixedly mounted concentrically on the top of the worm wheel (25), and the other first gear (26) is movably meshed with the gear ring (24), the first gear (26) not fixed to the worm wheel (25) and the cavity (9) are rotatably assembled, a fixing frame (33) is fixedly arranged between the end of the worm (8) and the third gear (32), and a clamping component is arranged between the third gear (32) and the extension cylinder (27).

9. The evaporation device according to claim 8, Features: The clamping component comprises a plurality of circumferentially equidistantly distributed concave arc grooves (34) opened on the outer surface of the extension cylinder (27); a plurality of circumferentially equidistantly distributed positioning pins (35) are slidably embedded inside the third gear (32); the dome portion of the positioning pin (35) movably extends out of the third gear (32); a third spring (36) is fixedly arranged between one end of the positioning pin (35) away from the extension cylinder (27) and the third gear (32); and the positioning pin (35) is movably engaged with the concave arc groove (34).

10. The evaporation device according to claim 9, Features: Two heat conduction frames (37) are fixedly installed inside the shell (1) of the evaporation device, and the two heat conduction frames (37) are respectively mounted on the outer surfaces of the two crucibles (5). A liquid storage cylinder (38) is fixedly installed inside each of the heat conduction frames (37). The interior of the extension column (27) is hollow. Infusion channels are evenly distributed inside the silica gel wrapping layer (7), and both ends of the infusion channels are connected to the interior of the extension column (27). A delivery pipe (39) is provided between each of the liquid storage cylinders (38) and the end of one of the extension columns (27).

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