Vacuum cavity for storing parylene coating

Abstract

The utility model discloses a vacuum cavity for storing a parylene coating, which belongs to the field of parylene coating storage and comprises a storage tank, a mounting hole and observation windows, the mounting hole is formed in one end of the storage tank, and the observation windows are symmetrically arranged at one end of the storage tank. The vacuum cavity for storing the parylene coating is simple in structure and convenient to use, the parylene coating material is allowed to be stored in the vacuum cavity through the design of the threaded sleeve, the protective cover and the storage tank, safe storage of the coating material is ensured, explosion in the storage tank can be effectively avoided due to the existence of the anti-explosion valve, important safety guarantee is provided, and the service life of the vacuum cavity is prolonged. The monitoring probe can monitor the condition in the storage tank in real time, any possible abnormal condition can be found and treated in time, the monitoring and safety of the coating material storage process are improved, the monitoring probe is protected through the protective cover, the surface is prevented from being contaminated by foreign matter, the service life of monitoring equipment can be prolonged, and the working efficiency is improved. And the accuracy of normal operation is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of parylene coating storage, in particular to a vacuum cavity for storing parylene coating. Background Art

[0002] Parylene coating is a unique conformal polymer thin film coating produced by vacuum vapor deposition. This coating is "grown" from reactive small molecules on the substrate surface, so it can cover surfaces of all shapes, including sharp edges, cracks and internal surfaces.

[0003] The vacuum chamber for storing parylene coating is a special container that needs to maintain a high vacuum environment inside to exclude oxygen, moisture and other external factors that may affect the parylene coating. It must also have good sealing properties to ensure that the vacuum degree does not decrease during long-term storage.

[0004] However, in order to ensure the long-term stability and reliability of the parylene coating in the current existing technology, the vacuum chamber may need to be equipped with monitoring equipment to record changes in key parameters such as vacuum degree and temperature. The monitoring equipment is usually directly installed inside the chamber. If the outside of the monitoring equipment is wrapped with a parylene layer, it will have a certain impact on its monitoring accuracy, and the staff will need to clean it in time.

[0005] Therefore, the utility model provides a vacuum chamber for storing a parylene coating to solve the above problems. Utility Model Content

[0006] 1. Technical issues to be solved

[0007] The utility model provides a vacuum cavity for storing a parylene coating, aiming to solve the problem that the accuracy of existing monitoring equipment is easily affected, etc., which is mentioned in the background technology.

[0008] (II) Technical solution

[0009] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a vacuum chamber for storing a parylene coating, comprising a storage tank, a mounting hole opened at one end of the storage tank, and an observation window symmetrically arranged at one end of the storage tank, wherein mounting mechanisms are symmetrically arranged on the storage tank, and an explosion-proof valve is arranged at one end of the storage tank away from the mounting hole.

[0010] In order to solve the protection problem of the monitoring probe, a sealing cylinder is arranged in the mounting hole, a mounting plate is arranged at one end of the sealing cylinder, a monitoring probe is fixedly mounted on the mounting plate, a protective cover adapted to the monitoring probe is symmetrically arranged at one end of the sealing cylinder, and the protective cover is rotatably connected to the sealing cylinder. The protective cover can protect the monitoring probe when it is not in use.

[0011] Preferably, in order to solve the problem of driving the protective cover, an electric push rod is fixedly installed in the sealing cylinder, the telescopic end of the electric push rod is fixedly connected to the mounting plate, one end of the mounting plate is symmetrically provided with a transmission rod, and the two ends of the transmission rod are rotatably connected to the mounting plate and the protective cover respectively. The protective cover can be driven by the cooperation of the electric push rod and the transmission rod.

[0012] Preferably, in order to solve the installation problem of the sealing cylinder, a threaded sleeve coaxially arranged with the installation hole is fixedly installed at one end of the storage tank, and a fastening cap is threadedly installed on the threaded sleeve. The sealing cylinder can be installed and fixed by the fastening cap and the threaded sleeve.

[0013] Preferably, in order to solve the sealing problem of the sealing cylinder installation, a limiting ring adapted to the threaded sleeve is fixedly installed on the sealing cylinder, and a compression rubber ring adapted to the limiting ring is fixedly installed in the fastening cover. The sealing of the sealing cylinder can be achieved by the coordinated use of the limiting ring and the compression rubber ring.

[0014] Preferably, in order to solve the installation problem of the storage tank, the installation mechanism includes a mounting frame fixedly mounted on the storage tank and mounting bolts symmetrically arranged on the mounting frame. The storage tank can be installed by using the mounting frame and the mounting bolts in coordination.

[0015] Preferably, in order to solve the problem of using the protective cover, the connection ends of the two protective covers are fixedly installed with sealing strips. The use of the sealing strips can further ensure the protective performance of the protective cover.

[0016] (III) Beneficial effects

[0017] The vacuum chamber for storing parylene coating has a simple structure and is easy to use. By arranging a threaded sleeve and a protective cover, the design of the storage tank allows the parylene coating material to be stored therein, ensuring the safe storage of the coating material. The presence of an explosion-proof valve can effectively avoid explosions inside the storage tank, providing important safety guarantees. The monitoring probe can monitor the situation inside the storage tank in real time, which helps to promptly discover and deal with any possible abnormal situations, thereby improving the monitoring and safety of the coating material storage process. The monitoring probe is protected by a protective cover to prevent foreign matter from being contaminated on the surface, thereby extending the service life of the monitoring equipment and ensuring its accuracy during normal operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the overall structure of a vacuum chamber for storing a parylene coating;

[0019] Figure 2 A schematic diagram of the overall partial decomposition structure of a vacuum chamber for storing a parylene coating;

[0020] Figure 3 for Figure 2 A schematic diagram of the structure at A;

[0021] Figure 4 The figure is a schematic diagram of the sealing tube structure of a vacuum chamber for storing a parylene coating.

[0022] In the figure: 1. Storage tank; 11. Mounting hole; 12. Observation window; 13. Mounting mechanism; 131. Mounting frame; 132. Mounting bolt; 14. Explosion-proof valve; 2. Threaded sleeve; 21. Fastening cover; 211. Compression rubber ring; 3. Sealing cylinder; 31. Electric push rod; 32. Mounting plate; 33. Protective cover; 331. Transmission rod; 34. Limiting ring; 4. Monitoring probe. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] The utility model provides a vacuum cavity for storing a parylene coating, such as Figure 1-4 As shown, the vacuum chamber comprises a storage tank 1, a mounting hole 11 opened at one end of the storage tank 1, and an observation window 12 symmetrically arranged at one end of the storage tank 1, a mounting mechanism 13 is symmetrically arranged on the storage tank 1, and an explosion-proof valve 14 is arranged at one end of the storage tank 1 away from the mounting hole 11;

[0025] A sealing cylinder 3 is arranged in the mounting hole 11, a mounting plate 32 is arranged at one end of the sealing cylinder 3, a monitoring probe 4 is fixedly mounted on the mounting plate 32, a protective cover 33 adapted to the monitoring probe 4 is symmetrically arranged at one end of the sealing cylinder 3, the protective cover 33 is rotatably connected to the sealing cylinder 3, and sealing strips are fixedly mounted at the connecting ends of the two protective covers 33.

[0026] When in use, the parylene coating material can be stored in the storage tank 1, and the observation window 12 can be used to observe the internal situation, the explosion-proof valve 14 can prevent the storage tank 1 from exploding, the monitoring probe 4 can monitor the internal situation of the storage tank 1, and when not in use, it can be protected by the protective cover 33 to prevent foreign matter from being contaminated on the surface.

[0027] Furthermore, an electric push rod 31 is fixedly installed in the sealing tube 3, and the telescopic end of the electric push rod 31 is fixedly connected to the mounting plate 32. A transmission rod 331 is symmetrically arranged at one end of the mounting plate 32, and the two ends of the transmission rod 331 are rotatably connected to the mounting plate 32 and the protective cover 33 respectively; when the monitoring probe 4 is not in use, the two protective covers 33 are located outside the monitoring probe 4 to protect it. When it needs to be used, the electric push rod 31 can be opened to move the monitoring probe 4. During the movement of the mounting plate 32, the protective cover 33 can be driven to rotate by the transmission rod 331, so that the monitoring probe 4 is exposed for use.

[0028] Furthermore, a threaded sleeve 2 coaxially arranged with the mounting hole 11 is fixedly installed at one end of the storage tank 1, a fastening cover 21 is threadedly installed on the threaded sleeve 2, a limiting ring 34 adapted to the threaded sleeve 2 is fixedly installed on the sealing cylinder 3, and a compression rubber ring 211 adapted to the limiting ring 34 is fixedly installed in the fastening cover 21; when installing the sealing cylinder 3, the limiting ring 34 on the sealing cylinder 3 can be engaged in the threaded sleeve 2, and at this time the sealing cylinder 3 can pass through the mounting hole 11, and then the fastening cover 21 can be screwed onto the threaded sleeve 2, and at this time the compression rubber ring 211 in the fastening cover 21 can support and fix the limiting ring 34, ensuring better installation sealing and firmness of the sealing cylinder 3.

[0029] Specifically, the mounting mechanism 13 includes a mounting frame 131 fixedly mounted on the storage tank 1 and mounting bolts 132 symmetrically arranged on the mounting frame 131; the storage tank 1 can be fixed to the use position through the mounting frame 131 and the mounting bolts 132 thereon.

[0030] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A vacuum chamber for storing a parylene coating, comprising a storage tank (1), a mounting hole (11) provided at one end of the storage tank (1), and an observation window (12) symmetrically arranged at one end of the storage tank (1), a mounting mechanism (13) being symmetrically arranged on the storage tank (1), and an explosion-proof valve (14) being arranged at one end of the storage tank (1) away from the mounting hole (11); Features: A sealing cylinder (3) is arranged in the mounting hole (11), a mounting plate (32) is arranged at one end of the sealing cylinder (3), a monitoring probe (4) is fixedly mounted on the mounting plate (32), a protective cover (33) adapted to the monitoring probe (4) is symmetrically arranged at one end of the sealing cylinder (3), and the protective cover (33) is rotatably connected to the sealing cylinder (3).

2. The vacuum chamber for storing the parylene coating according to claim 1, Features: An electric push rod (31) is fixedly installed in the sealing cylinder (3), the telescopic end of the electric push rod (31) is fixedly connected to the mounting plate (32), a transmission rod (331) is symmetrically arranged at one end of the mounting plate (32), and two ends of the transmission rod (331) are rotatably connected to the mounting plate (32) and the protective cover (33) respectively.

3. The vacuum chamber for storing the parylene coating according to claim 1, Features: A threaded sleeve (2) coaxially arranged with the mounting hole (11) is fixedly mounted on one end of the storage tank (1), and a fastening cover (21) is threadedly mounted on the threaded sleeve (2).

4. The vacuum chamber for storing the parylene coating according to claim 3, Features: A limiting ring (34) adapted to the threaded sleeve (2) is fixedly mounted on the sealing cylinder (3), and a compression rubber ring (211) adapted to the limiting ring (34) is fixedly mounted in the fastening cover (21).

5. The vacuum chamber for storing the parylene coating according to claim 1, Features: The mounting mechanism (13) comprises a mounting frame (131) fixedly mounted on the storage tank (1) and mounting bolts (132) symmetrically arranged on the mounting frame (131).

6. The vacuum chamber for storing the parylene coating according to claim 1, Features: The connection ends of the two protective covers (33) are both fixedly mounted with sealing strips.

Images