Monocrystalline silicon wafer degumming material frame carrying device

Abstract

The utility model belongs to the technical field of degumming material frame carrying, and particularly relates to a monocrystalline silicon wafer degumming material frame carrying device which comprises a base and a carrying table, a control device is arranged in the base, and the control device comprises a first motor, a rotating rod, a driving bevel gear, a driven bevel gear, two rotating rods and four swing rods. According to the monocrystalline silicon wafer degumming material frame carrying device, when a material frame is carried, a first motor is started firstly, a swing rod is controlled to swing, a carrying table is driven to move until the swing rod extrudes a stop switch, a forward and reverse rotation switch and a starting switch on an inclined seat, at the moment, the first motor is stopped, a second motor is started, and the material frame is pushed to a conveying belt through a pushing rod; after the material frame completely falls on the conveying belt, the forward and reverse rotation switch controls the first motor rotating shaft to rotate reversely, the swing rod drives the carrying table to return till the swing rod extrudes the control switch, the first motor is controlled to stop, the second motor rotating shaft rotates reversely, and the material pushing rod returns.

Description

Technical Field

[0001] The utility model relates to the technical field of debonding material frame transportation, in particular to a single crystal silicon wafer debonding material frame transportation device. Background Art

[0002] For example, in the single crystal silicon wafer degumming material frame transporting device (application number: 202223457960.X) disclosed on the Chinese Patent Network, it is necessary to control multiple swing arm mechanisms to move the material frame when transporting the material frame. In this way, during the operation process, the machine needs to be operated in an accurate order. Once the operation sequence is wrong, the material frame transportation rhythm will be wrong, causing the material frame to be stuck on the production line, causing trouble for the transportation work. Utility Model Content

[0003] Based on the technical problem that the existing material frame conveying mechanism is inconvenient to operate and causes troubles in conveying, the utility model proposes a single crystal silicon wafer debonding material frame conveying device.

[0004] The utility model proposes a single crystal silicon wafer debonding material frame transport device, comprising a base and a transport platform, wherein a control device is arranged inside the base, and the control device comprises a first motor, a rotating rod, an active bevel gear, a driven bevel gear, two rotating rods and four swinging rods, when the first motor is started, the rotating shaft drives the rotating rod to rotate, the rotating rod drives the active bevel gear to rotate, the active bevel gear drives the driven bevel gear and the rotating rod to rotate, and the rotating rod drives the swinging rod to perform a circular motion with the rotating rod as the center.

[0005] Preferably, the first motor is fixedly mounted inside the base, the rotating rod is fixedly connected to the rotating shaft of the first motor, the active bevel gear is fixedly mounted on the outer surface of the rotating rod, and both rotating rods are rotatably connected inside the base.

[0006] Through the above technical solution, when the first motor is started, the rotating shaft drives the rotating rod to rotate, and the rotating rod drives the active bevel gear to rotate.

[0007] Preferably, the driven bevel gear is fixedly mounted on the end surface of the rotating rod, the outer surface of the driven bevel gear meshes with the outer surface of the driving bevel gear, a rotating circular plate is fixedly mounted on the outer surface of the rotating rod, and the outer surface of the rotating circular plate is rotatably connected to the inside of the base.

[0008] Through the above technical solution, the active bevel gear drives the driven bevel gear to rotate, so that the rotating rod rotates, and the rotating circular plate is clamped in the base and rotates, ensuring that the rotating rod keeps rotating stably.

[0009] Preferably, the swing arm is fixedly mounted on the outer surface of the rotating rod, the upper end of the swing arm is internally rotatably connected to a connecting rod, the base is internally rotatably connected to a rotating part, and the other two swing arms are respectively fixedly mounted on the outer surfaces of the two rotating parts, and the outer surface of the conveying platform is fixedly connected to the outer surface of the connecting rod.

[0010] Through the above technical solution, the rotation of the rotating rod drives the swing rod to swing, thereby driving the transport platform to move.

[0011] Preferably, the four connecting rods are distributed in a rectangular array with the axis of the conveying platform as the center of the array, a second motor is fixedly installed inside the conveying platform, a threaded rod is fixedly installed on the rotating shaft of the second motor, a sliding plate is slidably inserted inside the conveying platform, the interior of the sliding plate is threadedly connected to the outer surface of the threaded rod, a pushing rod is fixedly installed on the upper surface of the sliding plate, and the lower surface of the pushing rod is slidably connected to the upper surface of the conveying platform.

[0012] Through the above technical solution, when the second motor is started, the rotating shaft drives the threaded rod to rotate, controls the sliding plate to move horizontally in the transfer platform, and the sliding plate drives the pushing rod to move.

[0013] Preferably, a material frame is placed on the upper surface of the conveying platform, an inclined seat is fixedly installed on the outer surface of the base, a stop switch, a forward and reverse switch and a start switch are fixedly installed inside the inclined seat, the forward and reverse switch and the stop switch are electrically connected to the first motor through wires, the start switch is electrically connected to the second motor through wires, a control switch is fixedly installed on the outer surface of the base on the left side of the swing rod, the control switch is electrically connected to the first motor and the second motor through wires, and a conveying mechanism is fixedly installed on the right upper surface of the base.

[0014] Through the above technical solution, the stop switch controls the first motor to stop, the forward and reverse switch controls the first motor shaft to reverse, the start switch controls the second motor to start, and two small switches are arranged inside the control switch, which respectively control the first motor to stop and the second motor shaft to reverse.

[0015] The beneficial effects of the present invention are:

[0016] By setting a control device, when the material frame is transported, the first motor is started first, and the rotating shaft drives the rotating rod to rotate, the rotating rod drives the active bevel gear to rotate, and the active bevel gear drives the driven bevel gear to rotate, so that the rotating rod rotates, and the rotating rod rotation drives the swing rod to swing, and drives the transport platform to move until the swing rod squeezes the stop switch, the forward and reverse switch and the start switch on the inclined seat. At this time, the stop switch controls the first motor to stop, and the start switch controls the second motor to start, so that the rotating shaft drives the threaded rod to rotate, and the sliding plate is controlled to move horizontally in the transport platform. The sliding plate drives the push rod to move, and the material frame is pushed onto the conveyor belt. The forward and reverse switch is provided with a delay system, which delays for a short time until the material frame completely falls onto the conveyor belt, and then controls the first motor shaft to reverse, so that the swing rod drives the transport platform to return, until the swing rod squeezes the control switch, controls the first motor to stop and the second motor shaft to reverse, and returns the push rod, and then automatically controls the entire mechanism, which is very convenient and achieves the effect of convenient operation and saving the trouble of transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of a single crystal silicon wafer debonding material frame transport device proposed by the utility model;

[0018] Figure 2 A three-dimensional diagram of the structure of a transport platform of a single crystal silicon wafer debonding material frame transport device proposed by the utility model;

[0019] Figure 3 This is a three-dimensional diagram of the base structure of a single crystal silicon wafer debonding material frame transport device proposed by the utility model.

[0020] In the figure: 1. base; 11. rotating part; 12. inclined seat; 13. stop switch; 14. forward and reverse switch; 15. start switch; 16. control switch; 17. transmission mechanism; 2. transport platform; 21. second motor; 22. threaded rod; 23. sliding plate; 24. pushing rod; 25. material frame; 3. first motor; 4. rotating rod; 5. driving bevel gear; 6. driven bevel gear; 7. rotating rod; 71. rotating circular plate; 8. swing rod; 81. connecting rod. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0022] Reference Figure 1-Figure 3A single crystal silicon wafer debonding material frame transport device comprises a base 1 and a transport platform 2. In order to facilitate the control of the transport mechanism, a control device is arranged inside the base 1. The control device comprises a first motor 3, a rotating rod 4, an active bevel gear 5, a driven bevel gear 6, two rotating rods 7 and four swinging rods 8. When the first motor 3 is started, the rotating shaft drives the rotating rod 4 to rotate, the rotating rod 4 drives the active bevel gear 5 to rotate, the active bevel gear 5 drives the driven bevel gear 6 and the rotating rod 7 to rotate, and the rotating rod 7 drives the swinging rod 8 to make a circular motion with the rotating rod 7 as the center.

[0023] In order to facilitate the control of the rotation of the active bevel gear 5, the first motor 3 is fixedly installed inside the base 1, the rotating rod 4 is fixedly connected to the rotating shaft of the first motor 3, the active bevel gear 5 is fixedly installed on the outer surface of the rotating rod 4, and the two rotating rods 7 are both rotatably connected to the inside of the base 1. When the first motor 3 is started, the rotating shaft drives the rotating rod 4 to rotate, and the rotating rod 4 drives the active bevel gear 5 to rotate.

[0024] In order to facilitate the control of the rotation of the driven bevel gear 6, the driven bevel gear 6 is fixedly mounted on the end surface of the rotating rod 7, the outer surface of the driven bevel gear 6 is meshed with the outer surface of the driving bevel gear 5, and a rotating circular plate 71 is fixedly mounted on the outer surface of the rotating rod 7. The outer surface of the rotating circular plate 71 is rotatably connected to the inside of the base 1. The driving bevel gear 5 drives the driven bevel gear 6 to rotate, so that the rotating rod 7 rotates, and the rotating circular plate 71 is stuck in the base 1 and rotates, ensuring that the rotating rod 7 keeps stable rotation.

[0025] In order to facilitate the control of the swing rod 8 to drive the transport platform 2 to move, the swing rod 8 is fixedly installed on the outer surface of the rotating rod 7, the upper end of the swing rod 8 is internally rotatably connected with the connecting rod 81, the base 1 is internally rotatably connected with the rotating member 11, and the other two swing rods 8 are respectively fixedly installed on the outer surfaces of the two rotating members 11, the outer surface of the transport platform 2 is fixedly connected to the outer surface of the connecting rod 81, and the rotation of the rotating rod 7 drives the swing rod 8 to swing, thereby driving the transport platform 2 to move.

[0026] In order to facilitate the control of the sliding plate 23 to drive the pushing rod 24 to move, the four connecting rods 81 are distributed in a rectangular array with the axis of the conveying platform 2 as the array center. The second motor 21 is fixedly installed inside the conveying platform 2, and the threaded rod 22 is fixedly installed on the rotating shaft of the second motor 21. The sliding plate 23 is slidably inserted inside the conveying platform 2. The interior of the sliding plate 23 is threadedly connected to the outer surface of the threaded rod 22. The upper surface of the sliding plate 23 is fixedly installed with a pushing rod 24, and the lower surface of the pushing rod 24 is slidably connected to the upper surface of the conveying platform 2. When the second motor 21 is started, the rotating shaft drives the threaded rod 22 to rotate, and the sliding plate 23 is controlled to be stuck in the conveying platform 2 for horizontal movement, and the sliding plate 23 drives the pushing rod 24 to move.

[0027] In order to facilitate the control of the first motor 3 and the second motor 21, a material frame 25 is placed on the upper surface of the conveying platform 2, and an inclined seat 12 is fixedly installed on the outer surface of the base 1, and a stop switch 13, a forward and reverse switch 14 and a start switch 15 are fixedly installed inside the inclined seat 12, respectively. The forward and reverse switch 14 and the stop switch 13 are electrically connected to the first motor 3 through wires, and the start switch 15 is electrically connected to the second motor 21 through wires. A control switch 16 is fixedly installed on the outer surface of the base 1 on the left side of the swing rod 8, and the control switch 16 is electrically connected to the first motor 3 and the second motor 21 through wires. A conveying mechanism 17 is fixedly installed on the upper surface of the right part of the base 1, the stop switch 13 controls the first motor 3 to stop, the forward and reverse switch 14 controls the reversal of the shaft of the first motor 3, and the start switch 15 controls the start of the second motor 21. Two small switches are arranged inside the control switch 16, which respectively control the first motor 3 to stop and the second motor 21 to reverse the shaft.

[0028] By setting a control device, when the material frame 25 is transported, the first motor 3 is started first, the rotating shaft drives the rotating rod 4 to rotate, the rotating rod 4 drives the active bevel gear 5 to rotate, the active bevel gear 5 drives the driven bevel gear 6 to rotate, so that the rotating rod 7 rotates, the rotating rod 7 rotates to drive the swing rod 8 to swing, and drives the transport platform 2 to move until the swing rod 8 squeezes the stop switch 13, the forward and reverse switch 14 and the start switch 15 on the inclined seat 12. At this time, the stop switch 13 controls the first motor 3 to stop, and the start switch 15 controls the second motor 21 to start, so that the rotating shaft drives the threaded rod 22 to rotate, and the control The control sliding plate 23 is stuck in the conveying platform 2 for horizontal movement, and the sliding plate 23 drives the pushing rod 24 to move, pushing the material frame 25 onto the conveyor belt, and a delay system is arranged inside the forward and reverse switch 14. After a short delay, the first motor 3 will be controlled to reverse the rotating shaft after the material frame 25 completely falls onto the conveyor belt, so that the swing rod 8 drives the conveying platform 2 to return, until the swing rod 8 squeezes the control switch 16, controls the first motor 3 to stop and the second motor 21 to reverse the rotating shaft, so that the pushing rod returns, and then automatically controls the entire mechanism, which is very convenient and achieves the effect of convenient operation and saving the trouble of transportation.

[0029] Working principle: When the material frame 25 is transported, the first motor 3 is started first, the rotating shaft drives the rotating rod 4 to rotate, the rotating rod 4 drives the active bevel gear 5 to rotate, the active bevel gear 5 drives the driven bevel gear 6 to rotate, the rotating rod 7 rotates, the rotating rod 7 rotates to drive the swing rod 8 to swing, and the transport platform 2 moves until the swing rod 8 squeezes the stop switch 13, the forward and reverse switch 14 and the start switch 15 on the inclined seat 12. At this time, the stop switch 13 controls the first motor 3 to stop, and the start switch 15 controls the second motor 2 1 is started, the shaft drives the threaded rod 22 to rotate, the sliding plate 23 is controlled to be stuck in the conveying platform 2 for horizontal movement, the sliding plate 23 drives the push rod 24 to move, and the material frame 25 is pushed onto the conveyor belt, and a delay system is arranged inside the forward and reverse switch 14, which delays for a short time until the material frame 25 completely falls onto the conveyor belt, and then controls the shaft of the first motor 3 to reverse, and allows the swing rod 8 to drive the conveying platform 2 to return, until the swing rod 8 squeezes the control switch 16, controls the first motor 3 to stop and the shaft of the second motor 21 to reverse, and allows the push rod to return.

[0030] The above are only preferred specific implementation methods of the utility model, but the protection scope of the utility model is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the utility model, who makes equivalent replacements or changes based on the technical scheme and utility model concept of the utility model, should be covered by the protection scope of the utility model.

Claims

1. A single crystal silicon wafer debonding material frame transport device, comprising a base (1) and a transport platform (2), Features: A control device is arranged inside the base (1), and the control device comprises a first motor (3), a rotating rod (4), a driving bevel gear (5), a driven bevel gear (6), two rotating rods (7) and four swinging rods (8); when the first motor (3) is started, the rotating shaft drives the rotating rod (4) to rotate, the rotating rod (4) drives the driving bevel gear (5) to rotate, the driving bevel gear (5) drives the driven bevel gear (6) and the rotating rod (7) to rotate, and the rotating rod (7) drives the swinging rod (8) to perform a circular motion with the rotating rod (7) as the center.

2. A single crystal silicon wafer debonding material frame transport device according to claim 1, Features: The first motor (3) is fixedly mounted inside the base (1), the rotating rod (4) is fixedly connected to the rotating shaft of the first motor (3), the active bevel gear (5) is fixedly mounted on the outer surface of the rotating rod (4), and the two rotating rods (7) are both rotatably connected inside the base (1).

3. The single crystal silicon wafer debonding material frame transport device according to claim 1, Features: The driven bevel gear (6) is fixedly mounted on the end surface of the rotating rod (7), the outer surface of the driven bevel gear (6) is meshed with the outer surface of the driving bevel gear (5), a rotating circular plate (71) is fixedly mounted on the outer surface of the rotating rod (7), and the outer surface of the rotating circular plate (71) is rotatably connected to the inside of the base (1).

4. The single crystal silicon wafer debonding material frame transporting device according to claim 1, Features: The swing rod (8) is fixedly mounted on the outer surface of the rotating rod (7); the upper end of the swing rod (8) is internally rotatably connected to a connecting rod (81); the interior of the base (1) is internally rotatably connected to a rotating member (11); the other two swing rods (8) are respectively fixedly mounted on the outer surfaces of two rotating members (11); and the outer surface of the transport platform (2) is fixedly connected to the outer surface of the connecting rod (81).

5. A single crystal silicon wafer debonding material frame transporting device according to claim 4, Features: The four connecting rods (81) are distributed in a rectangular array with the axis of the conveying platform (2) as the array center. A second motor (21) is fixedly installed inside the conveying platform (2), and a threaded rod (22) is fixedly installed on the rotating shaft of the second motor (21). A sliding plate (23) is slidably inserted inside the conveying platform (2), and the interior of the sliding plate (23) is threadedly connected to the outer surface of the threaded rod (22). A pushing rod (24) is fixedly installed on the upper surface of the sliding plate (23), and the lower surface of the pushing rod (24) is slidably connected to the upper surface of the conveying platform (2).

6. A single crystal silicon wafer debonding material frame transporting device according to claim 5, Features: A material frame (25) is placed on the upper surface of the conveying platform (2); an inclined seat (12) is fixedly installed on the outer surface of the base (1); a stop switch (13), a forward and reverse switch (14) and a start switch (15) are fixedly installed inside the inclined seat (12); the forward and reverse switch (14) and the stop switch (13) are electrically connected to the first motor (3) through a wire; the start switch (15) is electrically connected to the second motor (21) through a wire; a control switch (16) is fixedly installed on the outer surface of the base (1) on the left side of the swing rod (8); the control switch (16) is electrically connected to the first motor (3) and the second motor (21) through a wire; and a conveying mechanism (17) is fixedly installed on the upper surface of the right part of the base (1).

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