Valve body

Abstract

The utility model relates to the technical field of semiconductor processing, and discloses a valve body. The valve body comprises a mounting seat, a driving piece, a piston head and a protective piece, the driving piece is connected with the mounting seat; the driving piece comprises a driving part and a telescopic part; the piston head is connected with the telescopic part; the protection piece comprises a first connecting block, a second connecting block and a corrugated pipe connected with the first connecting block and the second connecting block. The first connecting block is connected with the piston head, the second connecting block is connected with the driving part, the corrugated pipe is arranged between the first connecting block and the second connecting block, and the corrugated pipe is arranged on the outer side of the telescopic part in a sleeving mode. The telescopic part is sleeved with the corrugated pipe, the first connecting block is connected with the piston head, and the second connecting block is connected with the driving part, so that the protection part protects the connecting position of the piston head and the driving part, special gas is prevented from permeating into parts through the joint position, the valve body is prevented from being corroded by the special gas, the use reliability of the valve body is improved, and the service life of the valve body is prolonged. And the condition of air leakage caused by corrosion of the valve body is prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a valve body. Background Art

[0002] The semiconductor industry is one of the industries with great prospects and development potential in the modern industrial field, and vacuum coating technology is an indispensable part of the semiconductor production process. Vacuum coating technology refers to the deposition of substances on semiconductor substrates or devices to form a thin film. In the process of vacuum coating of semiconductors, special gases will be introduced into the coating chamber to ensure normal operation. After the work is completed, the special gases in the coating chamber will be extracted by vacuum negative pressure to form a vacuum environment.

[0003] In the prior art, the opening and closing state of the coating chamber is controlled by the valve body, thereby controlling the extraction of special gases. However, special gases are highly corrosive gases. During the process of extracting special gases from the coating chamber, the valve body will come into contact with the special gases. Long-term use will cause the valve body to be corroded, and gas leakage will occur, and the reliability of the valve body is poor. Utility Model Content

[0004] The technical problems to be solved by the utility model are:

[0005] The valve body is susceptible to corrosion, which can lead to gas leakage.

[0006] In order to solve the above technical problems, the utility model provides a valve body for controlling the connection state of the exhaust port in the cavity, thereby controlling the discharge of the gas in the cavity, and the valve body comprises:

[0007] A mounting seat, the mounting seat is used to be fixed on the cavity;

[0008] A driving member connected to the mounting seat; the driving member includes a driving portion and a telescopic portion, and the driving portion drives the telescopic portion to move;

[0009] A piston head connected to the telescopic portion, the piston head being used to block the exhaust port; and

[0010] A protective member, the protective member includes a first connecting block, a second connecting block and a bellows connecting the first connecting block and the second connecting block; the first connecting block is connected to the piston head, the second connecting block is connected to the driving part, the bellows is arranged between the first connecting block and the second connecting block, and the bellows is sleeved on the outside of the telescopic part.

[0011] In one of the embodiments, the telescopic portion is provided with a curved surface; the curved surface is provided at an end of the telescopic portion away from the driving portion, and the curved surface presses against the piston head.

[0012] In one embodiment, the piston head is cylindrical, and the curved surface is pressed against the center of the end of the piston head.

[0013] In one of the embodiments, a clamping ring is provided on the telescopic part; the clamping ring is provided in a convex shape around the outer side of the telescopic part, the clamping ring is provided on a side of the first connecting block close to the piston head, and the clamping ring is clamped with the first connecting block.

[0014] In one embodiment, the mounting seat includes a fixing portion, an extending portion and a connecting portion; the fixing portion is used to connect to the cavity; the extending portion is connected to the fixing portion, the connecting portion is arranged at one end of the extending portion away from the fixing portion, and the connecting portion is connected to the driving member.

[0015] In one embodiment, the extension portion is a hollow cylindrical structure, the telescopic portion passes through the extension portion, and the bellows is arranged between the telescopic portion and the extension portion.

[0016] In one embodiment, the telescopic portion is cylindrical, and a central axis of the telescopic portion is colinear with a central axis of the extending portion.

[0017] In one embodiment, the second connection block is disposed between the connecting portion and the driving portion, and the connecting portion, the second connection block and the driving portion are fixed together by bolts.

[0018] In one of the embodiments, a sealing ring is provided on the piston head, the sealing ring is extended along the periphery of the piston head, the sealing ring is arranged around the outer side of the exhaust port, and the sealing ring is used to seal the joint position between the piston head and the cavity.

[0019] In one of the embodiments, first rubber strips are provided at both ends of the mounting seat; and second rubber strips are provided at both ends of the protective member.

[0020] Compared with the prior art, the above valve body has the following beneficial effects:

[0021] By arranging a bellows sleeve on the outside of the telescopic part, connecting the first connecting block with the piston head, and connecting the second connecting block with the driving part, the protective part can protect the connecting position of the piston head and the driving part, thereby preventing special gases from penetrating into the components through the joint position, thereby preventing the valve body from being corroded by the special gases, improving the reliability of the valve body, and preventing the valve body from leaking due to corrosion. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a cross-sectional schematic diagram of a valve body according to one embodiment of the utility model;

[0023] Figure 2 for Figure 1 An enlarged schematic diagram of the middle circle A portion;

[0024] Figure 3 for Figure 1 Schematic diagram of the structure of the valve body.

[0025] The meanings of the numbers in the accompanying drawings are:

[0026] 100. Valve body;

[0027] 10. mounting seat; 11. fixing portion; 12. extending portion; 13. connecting portion; 15. first rubber strip;

[0028] 20. driving member; 21. driving portion; 22. telescopic portion; 25. curved surface; 26. snap ring;

[0029] 30. Piston head; 35. Sealing ring;

[0030] 40. Protective element; 41. First connecting block; 42. Second connecting block; 43. Bellows; 45. Second rubber strip;

[0031] 90. Cavity; 91. Coating chamber; 92. Airway; 95. Exhaust port. DETAILED DESCRIPTION

[0032] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0035] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0037] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0038] See also Figure 1 and Figure 3, is a valve body 100 of an embodiment of the utility model, which is used to control the connection state of the exhaust port 95 in the cavity 90, and then control the discharge of the gas in the cavity 90. The cavity 90 is provided with a coating chamber 91 and an airway 92. The coating chamber 91 is a working space for semiconductor coating. The airway 92 is connected to the external vacuum exhaust equipment. The coating chamber 91 and the airway 92 are connected through the exhaust port 95. The valve body 100 can control the connection state of the coating chamber 91 and the airway 92 by blocking the exhaust port 95, thereby realizing the function of extracting the special gas in the coating chamber 91 and forming a vacuum environment. The valve body 100 includes a mounting seat 10, a driving member 20, a piston head 30 and a protective member 40. The mounting seat 10 is used to be fixed on the cavity 90 to connect and fix the valve body 100 with the cavity 90. The driving member 20 is connected to the mounting seat 10; the driving member 20 includes a driving part 21 and a telescopic part 22. The driving part 21 drives the telescopic part 22 to move, and the driving member 20 provides the power required to control the opening and closing of the exhaust port 95. The piston head 30 is connected to the telescopic part 22. The piston head 30 is used to block the exhaust port 95. The piston head 30 moves together with the telescopic part 22. When the piston head 30 is pressed against the exhaust port 95 of the cavity 90, the exhaust port 95 is closed, and the special gas is sealed in the coating chamber 91 to work. When the piston head 30 is separated from the exhaust port 95 of the cavity 90, the coating chamber 91 is connected to the airway 92, and then the special gas can be extracted from the coating chamber 91 through the external vacuum exhaust equipment. The protective member 40 includes a first connecting block 41, a second connecting block 42 and a bellows 43 connecting the first connecting block 41 and the second connecting block 42; the first connecting block 41 is connected to the piston head 30, the second connecting block 42 is connected to the driving part 21, the bellows 43 is arranged between the first connecting block 41 and the second connecting block 42, and the bellows 43 is sleeved on the outside of the telescopic part 22. The bellows 43 is used to wrap the connecting position between the driving part 20 and the piston head 30 to prevent special gas from entering the connecting position between the driving part 20 and the piston head 30, thereby avoiding corrosion of the components and improving the reliability of the valve body 100.

[0039] Further, the mounting seat 10 includes a fixing portion 11, an extension portion 12 and a connecting portion 13. The fixing portion 11 is annular, and the fixing portion 11 is used to connect with the cavity 90, and the fixing portion 11 installs the mounting seat 10 on the outer wall of the cavity 90. The extension portion 12 is connected to the fixing portion 11, and the extension portion 12 extends from the fixing portion 11 in a direction away from the cavity 90, and the extension portion 12 is a hollow tubular structure. The connecting portion 13 is arranged at one end of the extension portion 12 away from the fixing portion 11, and the connecting portion 13 is connected to the driving member 20. The fixing portion 11 and the connecting portion 13 are convexly arranged on the outside of the extension portion 12, and the mounting seat 10 is used to support and fix the valve body 100 on the cavity 90. In this embodiment, the mounting seat 10 is an integrated part to improve the bearing capacity of the mounting seat 10.

[0040] Further, the driving part 21 is connected to the connecting part 13, and the driving part 21 is fixed on the side of the connecting part 13 away from the fixed part 11, and the driving part 21 is used to drive the telescopic part 22 to move. The telescopic part 22 is cylindrical, one end of the telescopic part 22 is connected to the driving part 21, and the other end of the telescopic part 22 extends toward the inner direction of the cavity 90, and the telescopic part 22 passes through the extension part 12. In this embodiment, the central axis of the telescopic part 22 is colinear with the central axis of the extension part 12 to ensure that the load borne by the mounting seat 10 is evenly distributed, to ensure the reliability of the operation of the driving member 20, and to avoid air leakage due to the uneven force applied by the driving member 20 on the piston head 30. It can be understood that the driving member 20 is one of a screw structure, a cylinder, a hydraulic cylinder or a gear rack. The specific structure of the driving member 20 is not limited here, and it is sufficient to ensure that the driving part 21 can drive the movement of the telescopic part 22. In this embodiment, the driving member 20 is a cylinder.

[0041] Further, the piston head 30 is cylindrical, and is arranged at one end of the telescopic part 22 away from the driving part 21. The piston head 30 is arranged at the position of the exhaust port 95. The piston head 30 is driven to move by the telescopic part 22 to control the contact state between the piston head 30 and the inner wall of the cavity 90 outside the exhaust port 95, thereby controlling the connection state between the coating chamber 91 and the airway 92. In this embodiment, the telescopic part 22 is provided with a curved surface 25. The curved surface 25 is in an arc shape, and is arranged at one end of the telescopic part 22 away from the driving part 21. The curved surface 25 presses on the piston head 30, and the curved surface 25 presses at the center of the end of the piston head 30 to ensure that the telescopic part 22 is movably connected with the piston head 30, so that the force between the piston head 30 and the cavity 90 is more uniform, thereby avoiding air leakage caused by uneven force between the piston head 30 and the cavity 90.

[0042] Further, the first connection block 41 is annular, and is arranged around the outside of the telescopic part 22. The first connection block 41 fits the piston head 30, and the first connection block 41 is connected and fixed to the piston head 30. One end of the bellows 43 is connected to the first connection block 41, and the other end of the bellows 43 extends toward the driving part 21. The bellows 43 is arranged between the extension part 12 and the telescopic part 22. The cross section of the bellows 43 is serrated, so that the bellows 43 has certain elasticity and telescopic performance, which can meet the demand for sealing the moving telescopic part 22. The second connection block 42 is arranged at one end of the bellows 43 away from the first connection block 41. The second connection block 42 is annular, and the second connection block 42 is arranged between the connecting part 13 and the driving part 21. The connecting part 13, the second connection block 42 and the driving part 21 are fixed by bolts.

[0043] Further, a snap ring 26 is provided on the telescopic portion 22. The snap ring 26 is connected and fixed to the telescopic portion 22, and the snap ring 26 is arranged around the outside of the telescopic portion 22 in a convex shape. The snap ring 26 is arranged on a side of the first connecting block 41 close to the piston head 30, and the snap ring 26 is clamped with the first connecting block 41. The first connecting block 41 abuts against a side of the snap ring 26 away from the piston head 30, and the matching curved surface 25 supports the side of the piston head 30 close to the telescopic portion 22 to prevent the piston head 30 and the first connecting block 41 from falling off the telescopic portion 22.

[0044] Furthermore, a sealing ring 35 is provided on the piston head 30. The sealing ring 35 is annular, extends along the periphery of the piston head 30, is arranged around the outside of the exhaust port 95, and is used to seal the joint between the piston head 30 and the cavity 90 to prevent leakage of the special gas in the coating chamber 91.

[0045] Further, the first rubber strip 15 is provided at both ends of the mounting seat 10, the first rubber strip 15 is annular, and the first rubber strip 15 is arranged between the fixing portion 11 and the cavity 90, and between the connecting portion 13 and the second connecting block 42, and the first rubber strip 15 is used to prevent the special gas from leaking into the air. The second rubber strip 45 is provided at both ends of the protective member 40, the second rubber strip 45 is annular, and the second rubber strip 45 is arranged between the first connecting block 41 and the piston head 30, and between the second connecting block 42 and the driving member 21, and the second rubber strip 45 is used to prevent the special gas from leaking into the driving member 20 and the piston head 30, thereby protecting the internal structure of the driving member 20 and the connection position between the driving member 20 and the piston head 30 to prevent corrosion by the special gas.

[0046] In summary, the embodiment of the utility model provides a valve body 100, which has the following beneficial effects:

[0047] By setting a bellows 43 to be sleeved on the outside of the telescopic part 22, and connecting the first connecting block 41 with the piston head 30, and connecting the second connecting block 42 with the driving part 21, the protective part 40 can protect the connecting position between the piston head 30 and the driving part 20, thereby preventing the special gas from penetrating into the components through the joint position, thereby preventing the valve body 100 from being corroded by the special gas, thereby improving the reliability of the valve body 100, and preventing the valve body 100 from leaking due to corrosion.

[0048] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0049] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A valve body, used to control the connection state of the exhaust port in the cavity, and then control the discharge of the gas in the cavity, characterized in that: The valve body comprises: A mounting seat, the mounting seat is used to be fixed on the cavity; A driving member connected to the mounting seat; the driving member includes a driving portion and a telescopic portion, and the driving portion drives the telescopic portion to move; A piston head connected to the telescopic portion, the piston head being used to block the exhaust port; and A protective member, the protective member includes a first connecting block, a second connecting block and a bellows connecting the first connecting block and the second connecting block; the first connecting block is connected to the piston head, the second connecting block is connected to the driving part, the bellows is arranged between the first connecting block and the second connecting block, and the bellows is sleeved on the outside of the telescopic part.

2. The valve body according to claim 1, characterized in that: The telescopic portion is provided with a curved surface; the curved surface is provided at an end of the telescopic portion away from the driving portion, and the curved surface is pressed against the piston head.

3. The valve body according to claim 2, characterized in that: The piston head is cylindrical, and the curved surface is pressed against the center of the end of the piston head.

4. The valve body according to claim 2, characterized in that: The telescopic part is provided with a clamping ring; the clamping ring is arranged around the outer side of the telescopic part in a convex shape, and the clamping ring is arranged on a side of the first connecting block close to the piston head, and the clamping ring is clamped with the first connecting block.

5. The valve body according to claim 1, characterized in that: The mounting seat includes a fixing portion, an extending portion and a connecting portion; the fixing portion is used to connect with the cavity; the extending portion is connected with the fixing portion, the connecting portion is arranged at one end of the extending portion away from the fixing portion, and the connecting portion is connected with the driving member.

6. The valve body according to claim 5, characterized in that The extension part is in a hollow tubular structure, the telescopic part passes through the extension part, and the bellows is arranged between the telescopic part and the extension part.

7. The valve body according to claim 6, characterized in that The telescopic portion is cylindrical, and a central axis of the telescopic portion is collinear with a central axis of the extending portion.

8. The valve body according to claim 5, characterized in that The second connection block is arranged between the connecting portion and the driving portion, and the connecting portion, the second connection block and the driving portion are fixed together by bolts.

9. The valve body according to claim 1, characterized in that: The piston head is provided with a sealing ring, the sealing ring is extended along the periphery of the piston head, the sealing ring is arranged around the outer side of the exhaust port, and the sealing ring is used to seal the joint position between the piston head and the cavity.

10. The valve body according to claim 1, characterized in that The two ends of the mounting seat are provided with first rubber strips; the two ends of the protective member are provided with second rubber strips.

Images