Gas inlet structure for tail gas treatment

Abstract

The utility model discloses a gas inlet structure for tail gas treatment, which comprises an inner cavity, a middle cavity and an outer cavity which are sleeved with each other, the inner cavity is used for accommodating first gas, the middle cavity is communicated with the inner cavity through a plurality of first gas passing holes, the outer cavity is communicated with the middle cavity through a plurality of second gas passing holes, a plurality of gas supply ports are arranged on the outer wall surface of the outer cavity, and the gas supply ports are communicated with the middle cavity through a plurality of second gas passing holes. And second gas is introduced. The device is reasonable in structure and good in air inlet uniformity, and tail gas is uniformly mixed with air and oxygen.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to an air intake structure for tail gas treatment. Background Art

[0002] The tail gas generated during the semiconductor production process contains a variety of harmful substances, which mainly include acidic / alkaline waste gas, organic waste gas and some special gases. In order to reduce environmental pollution and comply with environmental regulations, semiconductor factories will use special tail gas treatment technology to purify and dispose of these waste gases. The combustion treatment method usually refers to the conversion of organic pollutants in the tail gas into harmless substances through oxidation reactions under high temperature conditions. The main methods include direct combustion and catalytic combustion. Regardless of the combustion method, the uniformity of the mixture of tail gas and air or oxygen is an important factor affecting sufficient combustion. In practice, the tail gas with combustion treatment often travels in the pipeline under the action of the air compressor and has a high flow rate. There are often technical problems such as poor combustion due to uneven airflow. Utility Model Content

[0003] The utility model discloses an air intake structure for exhaust gas treatment, which solves the technical problem of uneven exhaust gas intake and poor mixing with air or oxygen in the prior art, and has the technical effects of reasonable structure, good air intake uniformity, and uniform mixing of exhaust gas with air and oxygen. The technical scheme adopted is as follows:

[0004] An air intake structure for exhaust gas treatment comprises an inner cavity, an intermediate cavity and an outer cavity which are nested with each other, wherein the inner cavity is used to accommodate a first gas, the intermediate cavity and the inner cavity are connected through a plurality of first air holes, the outer cavity and the intermediate cavity are connected through a plurality of second air holes, and the outer wall surface of the outer cavity is provided with a plurality of air supply ports for introducing a second gas.

[0005] Based on the above technical solution, there are multiple intermediate chambers which are arranged in a sleeve manner, and two adjacent intermediate chambers are connected through a third air hole.

[0006] Based on the above technical solution, the third air holes on two adjacent middle cavities are staggered.

[0007] Based on the above technical solution, the apertures of the air supply port, the second air holes and the first air holes decrease in sequence and their numbers increase in sequence.

[0008] On the basis of the above technical solution, the gas supply port is a stepped hole and gradually increases from the outside to the inside, so as to reduce the flow rate of the second gas entering the outer cavity.

[0009] Based on the above technical solution, some of the air supply ports are staggered with the second air holes, and the second air holes are staggered with the first air holes.

[0010] Based on the above technical solution, the gas flow rates of the plurality of gas supply ports per unit time, the gas flow rates of the plurality of second gas holes per unit time, and the gas flow rates of the plurality of first gas holes per unit time are consistent.

[0011] Based on the above technical solution, the inner cavity is cylindrical, the middle cavity and the outer cavity are annular, the air supply port and the second air hole extend radially, the first air hole extends vertically, and a plurality of diversion holes are provided on the inner wall forming the inner cavity.

[0012] Based on the above technical solution, the air supply port extends along the tangent direction of the outer cavity.

[0013] Beneficial Effects

[0014] The utility model has a reasonable structure, including an inner cavity, an intermediate cavity and an outer cavity arranged in a multi-layer sleeve. The air supply port, the second air hole and the first air hole are not only arranged in a staggered manner, but also the apertures decrease successively and the number increases successively. In the process of the first gas passing through successively, not only the flow velocity is greatly slowed down, but also it is repeatedly turned back and meanders forward, so that the first gas evenly enters the combustion chamber and mixes with the second gas, which is beneficial to improving the mixing effect and improving the completeness of combustion.

[0015] The intermediate cavity in the utility model can be provided with multiple layers, and can be used flexibly to meet different exhaust gas intake requirements. In addition, the intake uniformity can be further improved by adjusting the air supply direction of the air supply port, the second air hole and the first air hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0017] Figure 1 : A schematic diagram of the three-dimensional structure of the utility model;

[0018] Figure 2 : A schematic diagram of the structure of the utility model in top view;

[0019] Figure 3 : Figure 2 Schematic diagram of the cross-sectional structure along the AA direction; DETAILED DESCRIPTION

[0020] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0021] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0022] As used herein, the term "plurality" means two or more than two, unless otherwise specified.

[0023] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0024] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0025] like Figures 1 to 3The exhaust gas treatment air intake structure shown in the figure includes an inner cavity 1, an intermediate cavity 2 and an outer cavity 3 which are arranged in a nested manner. In this embodiment, there is one intermediate cavity 2. In other embodiments of the utility model, there are multiple intermediate cavities 2 which are arranged in a nested manner, and two adjacent intermediate cavities 2 are connected through a third air hole. The third air holes on the two adjacent intermediate cavities 2 are arranged in a staggered manner to meet different exhaust gas intake requirements.

[0026] Among them, the inner cavity 1 is cylindrical, the middle cavity 2 and the outer cavity 3 are annular, and the inner cavity 1 is used to accommodate the first gas, and the first gas can enter the inner cavity 1 evenly through the gas supply port 4, the second gas inlet 5 and the first gas inlet 6.

[0027] like Figure 3 As shown, the middle cavity 2 and the inner cavity 1 are connected through a plurality of first air holes 6, and the plurality of first air holes 6 are arranged circumferentially. The outer cavity 3 and the middle cavity 2 are connected through a plurality of second air holes 5, and the plurality of second air holes 5 are arranged circumferentially, so that three air supply ports 4 are provided on the outer wall surface of the outer cavity 3 for introducing the second gas. When the second gas is a flammable gas, such as high-purity hydrogen, the first gas may be heated air or oxygen. When the second gas is a flammable organic gas, the first gas may be ignited natural gas.

[0028] like Figure 3 As shown, the air supply port 4 is a stepped hole and gradually increases from the outside to the inside to reduce the flow rate of the second gas entering the outer cavity 3. In addition, the apertures of the air supply port 4, the second air holes 5 and the first air holes 6 decrease in sequence and their numbers increase in sequence, and the air supply port 4 and the second air holes 5 are arranged in a staggered manner, and the second air holes 5 and the first air holes 6 are arranged in a staggered manner. Among them, the gas flow rates per unit time of several air supply ports 4, the gas flow rates per unit time of several second air holes 5, and the gas flow rates per unit time of several first air holes 6 are consistent, so as to avoid reducing the intake volume of the first gas and reducing the combustion efficiency.

[0029] In this embodiment, the air supply port 4, the second air hole 5, and the first air hole 6 all extend radially. In other embodiments of the utility model, it can be designed that the air supply port 4 and the second air hole 5 extend radially, and the first air hole 6 extends vertically, and in this case, a plurality of diversion holes are formed on the inner wall of the inner cavity 1. Alternatively, the air supply port 4 extends along the tangent direction of the outer cavity 3, so that the residence time of the first gas in the outer cavity 3 can be prolonged, which is conducive to improving the uniformity of air intake.

[0030] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. An air intake structure for exhaust gas treatment, characterized in that: The invention comprises an inner cavity (1), an intermediate cavity (2) and an outer cavity (3) which are nested with each other. The inner cavity (1) is used to contain a first gas. The intermediate cavity (2) and the inner cavity are connected via a plurality of first gas holes (6). The outer cavity (3) and the intermediate cavity (2) are connected via a plurality of second gas holes (5). The outer wall surface of the outer cavity (3) is provided with a plurality of gas supply ports (4) for introducing a second gas.

2. The exhaust gas treatment air intake structure according to claim 1, characterized in that: The intermediate chambers (2) are multiple in number and are arranged in a sleeve arrangement, and two adjacent intermediate chambers (2) are connected via a third air hole.

3. The exhaust gas treatment air intake structure according to claim 2, characterized in that: The third air holes on two adjacent intermediate chambers (2) are arranged in a staggered manner.

4. The exhaust gas treatment air intake structure according to claim 1 or 2, characterized in that: The apertures of the air supply port (4), the second air holes (5) and the first air holes (6) decrease in sequence and their numbers increase in sequence.

5. The exhaust gas treatment air intake structure according to claim 3, characterized in that: The gas supply port (4) is a stepped hole and gradually increases in size from the outside to the inside, so as to reduce the flow rate of the second gas entering the outer cavity (3).

6. The exhaust gas treatment air intake structure according to claim 5, characterized in that: The plurality of air supply ports (4) are arranged in a staggered manner with the second air holes (5), and the second air holes (5) and the first air holes (6) are arranged in a staggered manner.

7. The exhaust gas treatment air intake structure according to claim 6, characterized in that: The gas flow rates of the plurality of gas supply ports (4) per unit time, the gas flow rates of the plurality of second gas holes (5) per unit time, and the gas flow rates of the plurality of first gas holes (6) per unit time are consistent.

8. The exhaust gas treatment air intake structure according to claim 3, characterized in that: The inner cavity (1) is cylindrical, the middle cavity (2) and the outer cavity (3) are annular, the air supply port (4) and the second air hole (5) extend radially, the first air hole (6) extends vertically, and a plurality of diversion holes are provided on the inner wall of the inner cavity (1).

9. The exhaust gas treatment air intake structure according to claim 3, characterized in that: The air supply port (4) extends along the tangent direction of the outer cavity (3).

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