High-precision probe frame

Abstract

The utility model belongs to a high precision probe frame, relates to the semiconductor test technology field, is matched with a semiconductor chip to be tested for use, and comprises a probe frame pedestal, a horizontal X-direction module, a horizontal Y-direction module, a vertical Z-direction module and a probe arm, the horizontal Y-direction module is arranged above the probe frame pedestal, the horizontal X-direction module is arranged above the horizontal Y-direction module, the vertical Z-direction module is arranged above the horizontal Y-direction module, the vertical Z-direction module is arranged above the vertical Z-direction module, and the probe arm is arranged above the vertical Z-direction module. The vertical Z-direction module is arranged on the lateral side of the horizontal X-direction module and fixedly connected with the horizontal X-direction module, and the probe arm is arranged below the vertical Z-direction module. Compared with the prior art, the probe frame has the advantages that the lower probe precision of the probe frame is greatly improved and can reach 1 micron; the problems that in the prior art, a test probe is extremely prone to being damaged when testing a semiconductor chip to be tested and errors are prone to being generated when the probe pressure value is calculated are solved, the rapid testing function is achieved, operation is easy, the device cost is low, and working efficiency is high.

Description

Technical Field

[0001] The utility model relates to a high-precision probe frame, belonging to the technical field of semiconductor testing. Background Art

[0002] With the rapid development of the optical communication industry, semiconductor chips play an extremely important role as core components. From data centers, mobile broadband, the Internet, national defense and military industries, the application of optical devices is ubiquitous. In order to meet people's different application needs and adapt to different working environments, the performance reliability of semiconductor chips directly affects the quality, stability and timeliness of signal transmission. How to more effectively screen and test high-performance and more reliable semiconductor chips has become an indispensable task. When performing tests on semiconductor devices, a probe test logic circuit is used to perform probe tests to detect defective units. The test probe is usually slender, and the distance adjustment accuracy between the probe and the semiconductor chip is not enough. If the operation is improper, the test probe is easily damaged when testing the semiconductor chip under test. At the same time, the needle pressure value of the probe inserted into the semiconductor chip is prone to errors, affecting the accuracy of the measured value. Utility Model Content

[0003] The purpose of the utility model is to provide a high-precision probe holder. The utility model has a simple structure and is easy to use. By rotating the vertical adjustment knob, the height of the probe is adjusted and the distance indication is read through the vertical adjustment display dial to solve the problems raised in the above-mentioned background technology. It should be understood that this overview is not an exhaustive overview of the utility model. It is not intended to determine the key or important parts of the utility model, nor is it intended to limit the scope of the utility model. In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions:

[0004] A high-precision probe frame comprises: a probe frame base, a horizontal X-axis module, a horizontal Y-axis module, a connecting block, a vertical Z-axis module and a probe module, wherein the probe frame base maintains a horizontal state, the horizontal Y-axis module is arranged above the probe frame base, the horizontal X-axis module is arranged above the horizontal Y-axis module, the connecting block is fixedly connected to the horizontal X-axis module, the vertical Z-axis module is arranged on the side of the connecting block and fixedly connected thereto, the vertical Z-axis module comprises: a vertical adjustment knob, a vertical adjustment display dial, a ruler rod, a ruler base, a push rod, a vertical Z-axis moving slider and a ruler adjustment slider, the probe module is fixedly connected below the ruler adjustment slider, and the probe module comprises: a cantilever, a probe arm, a fixing screw and a probe.

[0005] Further, the horizontal X-direction module includes a horizontal X-direction adjustment slider and a horizontal X-direction adjustment knob, and the horizontal Y-direction module includes a horizontal Y-direction adjustment slider and a horizontal Y-direction adjustment knob.

[0006] Furthermore, the front end of the ruler base is a vertical circular hole structure and a fastening screw is provided on one side of the circular hole, and the rear end of the ruler base is a downward curved arc structure. The rear end of the ruler base is fixedly connected to the horizontal X-axis adjustment slider through two connecting nuts, and the vertical circular hole at the front end of the ruler base is kept vertical to the base of the probe holder.

[0007] Furthermore, a groove is provided on the left side of the vertical Z-direction movable slider, a spring is provided in the groove, and a slideway is provided on the inner side of the groove, the rear side of the vertical Z-direction movable slider is fixedly connected to the connecting block, the scale adjustment slider is arranged under the top rod, and a protrusion is provided on the right side of the scale adjustment slider, which corresponds to the shape of the groove of the vertical Z-direction movable slider and the length of the protrusion is one third of the length of the groove, the vertical Z-direction movable slider is slidably connected to the scale adjustment slider through the slideway, the top end of the spring is fixedly connected to the vertical Z-direction movable slider, and the bottom end of the spring is fixedly connected to the top end of the protrusion, the spring is in a stretched state during installation, and the bottom end of the scale adjustment slider is on the same horizontal plane as the bottom end of the probe frame base.

[0008] Furthermore, the cantilever is fixedly connected to the side of the scale adjustment slider, the front end of the cantilever is provided with a vertical through hole and a longitudinal threaded hole, and the vertical through hole is connected to the longitudinal threaded hole, the tail end of the probe arm passes through the vertical through hole, and the fixing screw squeezes and fixes the probe arm through the longitudinal threaded hole.

[0009] The beneficial effects of the utility model are:

[0010] The utility model arranges a vertical Z-direction adjustment base and a connecting block so that a vertical Z-direction module and a horizontal X-direction module form an integral whole. The probe is adjusted and moved in the horizontal X-direction and the horizontal Y-direction, and the probe is adjusted and moved in the vertical Z-direction. The probe is moved up and down by rotating a vertical adjustment knob, and the movement accuracy reaches 1 micron, and the adjustment range interval is 25 millimeters. The distance adjustment accuracy between the probe and the semiconductor chip is greatly improved, the accuracy of the measured value is improved, the damage rate of the probe when testing the semiconductor chip to be tested is reduced, the production cost is reduced, the detection effect is improved, and the production efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a left view of the structure of the utility model;

[0012] Figure 2 It is a right side view of the structure of the utility model;

[0013] Figure 3 It is the structural front view of the utility model;

[0014] Figure 4 This is the front view of the groove structure of the utility model;

[0015] Figure 5 This is a front view of the bump structure of the utility model;

[0016] Numbers in the figure: 1. probe holder base, 2. horizontal Y-adjustment slider, 3. horizontal Y-adjustment knob, 4. horizontal X-adjustment slider, 5. horizontal X-adjustment knob, 6. vertical adjustment knob, 7. vertical adjustment display dial, 8. ruler base, 9. ruler rod, 10. push rod, 11. vertical Z-moving slider, 12. ruler adjustment slider, 13. cantilever, 14. probe arm, 15. fixing screw, 16. probe, 17. fastening screw, 18. connecting nut, 19. connecting block, 20. groove, 21. spring, 22. bump. DETAILED DESCRIPTION

[0017] The utility model is a high-precision probe holder. The technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] A high-precision probe frame comprises: a probe frame base 1, a horizontal X-direction module, a horizontal Y-direction module, a connecting block 19, a vertical Z-direction module and a probe module. The probe frame base 1 maintains a horizontal state to ensure the horizontal stability of the entire probe frame. The horizontal Y-direction module is arranged above the probe frame base 1, and is used for the probe frame to move forward and backward in the horizontal Y direction. The horizontal X-direction module is arranged above the horizontal Y-direction module, and is used for the probe frame to move left and right in the horizontal X direction. The connecting block 19 is fixedly connected to the horizontal X-direction module. The vertical Z-direction module is arranged on the side of the connecting block 19 and is fixedly connected thereto, and is used for the probe frame to move up and down in the vertical Z direction. The vertical Z-direction module comprises: a vertical adjustment knob 6, a vertical adjustment display dial 7, a ruler base 8, a push rod 10, a vertical Z-direction moving slider 11 and a ruler adjustment slider 12. The probe module is fixedly connected below the ruler adjustment slider 12. The probe module comprises: a cantilever 13, a probe arm 14, a fixing screw 15 and a probe 16.

[0019] In some embodiments, the front end of the scale base 8 is a vertical circular hole structure, and a fastening screw 17 is provided on one side of the circular hole. The circular hole is used to place the scale rod 9, and the fastening screw 17 fixes the scale rod 9. The rear end of the scale base 8 is a downward curved arc structure. The rear end of the scale base 8 is fixedly connected to the horizontal X-axis adjustment slider 4 by two connecting nuts 18 to ensure that the connection is reliable and will not cause torsion. The vertical circular hole at the front end of the scale base 8 is kept vertical to the probe frame base 1 to ensure that the scale rod 9 is always in a vertical state, which is convenient for adjusting the downward distance of the probe 16.

[0020] In some embodiments, a groove 20 is provided on the left side of the vertical Z-direction moving slider 11, and the groove 20 is provided in the middle. A spring 21 is provided in the groove 20, and the length of the spring 21 is less than one-third of the length of the groove 20. The spring 21 is in a stretched state, and a slideway is provided inside the groove 20. The rear side of the vertical Z-direction moving slider 11 is fixedly connected to the connecting block 19 to ensure the stability of the connecting block 19. The scale adjustment slider 12 is provided below the top rod 10, and a protrusion 22 is provided on the right side of the scale adjustment slider 12, which corresponds to the shape of the groove 20 of the vertical Z-direction moving slider 11 and the length of the protrusion 22 is the length of the groove 20. The vertical Z-moving slider 11 is slidably connected to the scale adjustment slider 12 through a slideway, which limits the up and down movement of the push rod 10 without causing left and right shaking. The top of the spring 21 is fixedly connected to the vertical Z-moving slider 11, and the bottom of the spring 21 is fixedly connected to the top of the protrusion 22. When installed, the spring 21 is in a stretched state, and the bottom end of the scale adjustment slider 12 is on the same horizontal plane as the bottom end of the probe frame base 1. When the push rod 10 moves downward, it drives the scale adjustment slider 12 to move downward. When the push rod 10 moves upward, the tension of the spring 21 drives the scale adjustment slider 12 to reset.

[0021] In some embodiments, the cantilever 13 is fixedly connected to the side of the scale adjustment slider 12 to keep the cantilever 13 horizontal. The front section of the cantilever 13 is provided with a vertical through hole and the front end is provided with a longitudinal threaded hole. The vertical through hole is connected to the longitudinal threaded hole. The tail end of the probe arm 14 passes through the vertical through hole. The fixing screw 15 squeezes and fixes the probe arm 14 through the longitudinal threaded hole to ensure that the probe arm 14 is stable. The probe 16 is clamped under the probe arm 14.

[0022] Example

[0023] See also Figure 1-Figure 5 , the utility model provides a technical solution:

[0024] A high-precision probe stand. When in use, the probe stand base 1 is first adjusted to be horizontal and its position is fixed. The horizontal Y-direction module located on the second layer can adjust the position of the horizontal Y-direction adjustment slider 2 by rotating the horizontal Y-direction adjustment knob 3. The horizontal X-direction module located on the third layer can adjust the position of the horizontal X-direction adjustment slider 4 by rotating the horizontal X-direction adjustment knob 5. The vertical Z-direction moving module is connected to the horizontal X-direction adjustment slider 4 through a connecting block 19. The scale base 8 is fixedly connected to the horizontal X-direction adjustment slider 4 through two connecting nuts 18. The Z-moving slider 11 is fixedly connected to the connecting block 19, the scale adjustment slider 12 is slidably connected to the groove 20 of the vertical Z-moving slider 11 through the protrusion 22, and the bottom surface of the scale adjustment slider 12 is on the same horizontal plane as the bottom surface of the probe frame base 1, the scale rod 9 is placed in the circular ring of the scale base 8 and fixed, the cantilever 13 is fixedly connected to the front side of the scale adjustment slider 12, the probe arm 14 passes through the through hole at the front end of the cantilever 13 and is fixed with a fixing screw 15, the probe arm 14 is in a right-angle shape, and a probe 16 is provided at the front end of the probe arm 14.

[0025] When in use, adjust the horizontal Y-axis module and the horizontal X-axis module to the predetermined position, adjust the vertical Z-axis moving module to the initial position, adjust the semiconductor chip to be tested so that it is located below the probe 16, adjust the vertical adjustment knob 6, the push rod 10 moves downward to drive the scale adjustment slider 12 to move downward, the scale adjustment slider 12 drives the probe 16 to move downward, and at the same time the spring 21 is stretched, and the vertical adjustment display dial 7 displays the distance of the push rod 10 moving downward, the moving accuracy reaches microns, and the adjustment range interval is millimeters, which greatly improves the adjustment accuracy of the distance between the probe 16 and the semiconductor chip. After the test of the probe 16 is completed, the vertical adjustment knob 6 is rotated in the direction, and the push rod 10 moves upward. At this time, the scale adjustment slider 12 moves upward due to the pulling force of the spring 21, so that the scale adjustment slider 12 drives the probe 16 to reset. The downward detection accuracy of the utility model can reach 1μm, and the adjustment range interval is 25mm.

[0026] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high-precision probe holder, characterized in that: include: A probe frame base, a horizontal X-axis module, a horizontal Y-axis module, a connecting block, a vertical Z-axis module and a probe module, wherein the probe frame base maintains a horizontal state, the horizontal Y-axis module is arranged above the probe frame base, the horizontal X-axis module is arranged above the horizontal Y-axis module, the connecting block is fixedly connected to the horizontal X-axis module, the vertical Z-axis module is arranged on the side of the connecting block and fixedly connected thereto, the vertical Z-axis module comprises: a vertical adjustment knob, a vertical adjustment display dial, a ruler rod, a ruler base, a push rod, a vertical Z-axis moving slider and a ruler adjustment slider, the probe module is fixedly connected below the ruler adjustment slider, and the probe module comprises: a cantilever, a probe arm, a fixing screw and a probe.

2. A high-precision probe holder according to claim 1, characterized in that: The horizontal X-direction module includes a horizontal X-direction adjustment slider and a horizontal X-direction adjustment knob, and the horizontal Y-direction module includes a horizontal Y-direction adjustment slider and a horizontal Y-direction adjustment knob.

3. The high-precision probe holder according to claim 1, characterized in that: The front end of the ruler base is a vertical circular hole structure and a fastening screw is provided on one side of the circular hole. The rear end of the ruler base is a downward curved arc structure. The rear end of the ruler base is fixedly connected to the horizontal X-axis adjustment slider through two connecting nuts, and the vertical circular hole at the front end of the ruler base is kept vertical to the base of the probe holder.

4. The high-precision probe holder according to claim 1, characterized in that: A groove is provided on the left side of the vertical Z-direction movable slider, a spring is provided in the groove, and a slideway is provided on the inner side of the groove; the rear side of the vertical Z-direction movable slider is fixedly connected to the connecting block, and the scale adjustment slider is arranged below the top rod; a protrusion is provided on the right side of the scale adjustment slider, which corresponds to the shape of the groove of the vertical Z-direction movable slider and the length of the protrusion is one third of the length of the groove; the vertical Z-direction movable slider is slidably connected to the scale adjustment slider through the slideway, the top end of the spring is fixedly connected to the vertical Z-direction movable slider, and the bottom end of the spring is fixedly connected to the top end of the protrusion; the spring is in a slightly stretched state during installation, and the bottom end of the scale adjustment slider is on the same horizontal plane as the bottom end of the probe frame base.

5. The high-precision probe holder according to claim 1, characterized in that: The cantilever is fixedly connected to the side of the scale adjustment slider, the front end of the cantilever is provided with a vertical through hole and a longitudinal threaded hole, and the vertical through hole is connected to the longitudinal threaded hole, the tail end of the probe arm passes through the vertical through hole, and the fixing screw squeezes and fixes the probe arm through the longitudinal threaded hole.

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