Wafer cleaning flower basket

Abstract

The utility model relates to the technical field of wafer cleaning flower basket production, and discloses a wafer cleaning flower basket which adopts the specification of 4 inches and comprises a shell base, a placement bin is sleeved with the shell base, an expansion groove is formed in the back of the shell base, positioning pins are arranged on the two sides of the top of the shell base, and the positioning pins are connected with the placement bin. A plurality of lower mounting grooves are formed in the two sides of the placement bin, sliding grooves are formed in the two sides of the top of the placement bin, and adjusting and fixing devices are slidably connected into the sliding grooves; the movable fixing device comprises a sliding block, a connecting frame is installed at the top of the sliding block, a movable groove is formed in the middle of the connecting frame, and a movable rod is slidably connected into the movable groove. According to the wafer cleaning flower basket, the wafer can be prevented from sliding off through the movable fixing device, the wafer can be effectively fixed to the top of the flower basket through the movable fixing device, the wafer is prevented from sliding off or rolling in the cleaning process, and therefore the wafer is protected, and the cleaning effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of round crystal cleaning basket production, in particular to a round crystal cleaning basket. Background Art

[0002] Wafer cleaning basket plays the role of carrying and transporting wafers in the semiconductor manufacturing process and is an important tool in the cleaning process. It is usually made of PFA (polytetrafluoroethylene) material and is also called PFA cleaning basket. This basket is acid-resistant, alkali-resistant and corrosion-resistant, so it can withstand corrosion from various chemical cleaning solutions. At the same time, it can also withstand high temperature and high pressure cleaning conditions.

[0003] However, since there is no fixing device on the top of the common flower basket on the market, the wafer may slide or roll, which may affect the cleaning effect and even damage the wafer. Utility Model Content

[0004] 1. Technical issues to be resolved

[0005] In view of the deficiencies in the prior art, the utility model provides a round wafer cleaning basket, which has the advantages of top reinforcement and the like, and solves the problem of falling off caused by a non-fixed top.

[0006] (II) Technical solution

[0007] In order to achieve the purpose of the above-mentioned top reinforcement, the utility model provides the following technical solutions:

[0008] A round wafer cleaning basket, which adopts a 4-inch specification, comprises a shell base, a placement bin is sleeved inside the shell base, an expansion slot is provided on the back of the shell base, positioning pins are provided on both sides of the top of the shell base, a plurality of lower installation slots are provided on both sides of the placement bin, a slide slot is provided on both sides of the top of the placement bin, and an adjustment fixing device is slidably connected inside the slide slot;

[0009] The movable fixing device includes a slider, a connecting frame is installed on the top of the slider, a movable groove is opened in the middle of the connecting frame, a movable rod is slidably connected inside the movable groove, an adjustment knob is installed on the back of the movable rod, a mounting block is fixedly installed on the bottom of the movable rod, a plurality of upper mounting grooves are opened at equal intervals at the bottom of the mounting block, and a handle is installed on the top of the movable rod.

[0010] As a preferred technical solution of the utility model, there are two movable rods, which are designed to be cylindrical, and the outer side of which is polished. Limit blocks are installed on both sides of the movable rod, and an adjustment knob is installed at the limit block at the bottom of the movable rod.

[0011] As a preferred technical solution of the utility model, the slide groove is embedded in both sides of the top of the placement bin, and a slider is installed on the inner side of the slide groove in a sliding connection manner. The slider is made of stainless steel and its top is chamfered.

[0012] As a preferred technical solution of the utility model, the middle part of the shell base adopts a through-type design, a friction pad is installed at the bottom of the shell base, and the shell base is made of polyethylene material.

[0013] As a preferred technical solution of the utility model, the connecting frame is designed to be arched, a movable groove is opened in the middle of the connecting frame by a milling cutter, and both sides of the top of the connecting frame are chamfered.

[0014] As a preferred technical solution of the utility model, eleven upper mounting grooves are equidistantly provided at the bottom of the mounting block, a layer of rubber material is laid inside the upper mounting grooves, and the upper mounting grooves are fixedly connected to the bottom of the movable rod.

[0015] As a preferred technical solution of the utility model, the top of the movable rod is connected with a handle by bolts, the handle is made of soft plastic material, and both sides of the handle are connecting blocks.

[0016] (III) Beneficial effects

[0017] Compared with the prior art, the utility model provides a round wafer cleaning basket, which has the following beneficial effects:

[0018] 1. The wafer cleaning basket can prevent the wafer from slipping through a movable fixing device. The movable fixing device can effectively fix the wafer on the top of the basket to prevent the wafer from slipping or rolling during the cleaning process, thereby protecting the wafer and improving the cleaning effect.

[0019] 2. The wafer cleaning basket can ensure uniform cleaning through a movable fixing device. The movable fixing device can keep the wafer in a stable posture during the cleaning process to avoid rotation or vibration, thereby ensuring uniform cleaning of the wafer surface and improving the cleaning effect.

[0020] 3. The round wafer cleaning basket adopts a 4-inch specification. The 2-inch cleaning basket is rarely used on the market. It is easy to cause waste if a 2-inch cleaning basket is used, so a 4-inch one can be used to clean both 2-inch and 4-inch wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the front structure of the cleaning flower basket of the utility model;

[0022] Figure 2 This is a schematic diagram of the back structure of the cleaning flower basket of the utility model;

[0023] Figure 3 This is a schematic diagram of the side structure of the cleaning flower basket of the utility model.

[0024] In the figure: 1. movable rod; 2. movable slot; 3. slider; 4. connecting frame; 5. storage compartment; 6. shell base; 7. adjustment knob; 8. positioning pin; 9. expansion slot; 10. installation block; 11. handle; 12. upper installation slot; 13. lower installation slot; 14. slide slot. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] See also Figure 1-3 A round wafer cleaning basket, the round wafer cleaning basket adopts a 4-inch specification, including an outer shell base 6, a placement bin 5 is sleeved inside the outer shell base 6, an expansion groove 9 is opened on the back of the outer shell base 6, positioning pins 8 are arranged on both sides of the top of the outer shell base 6, a plurality of lower mounting grooves 13 are opened on both sides of the placement bin 5, and a slide groove 14 is opened on both sides of the top of the placement bin 5, and an adjustment fixing device is slidably connected inside the slide groove 14;

[0029] The movable fixing device includes a slider 3, a connecting frame 4 is installed on the top of the slider 3, a movable groove 2 is opened in the middle of the connecting frame 4, a movable rod 1 is slidably connected inside the movable groove 2, a handle 11 is connected to the top of the movable rod 1 by bolts, the handle 11 is made of soft plastic material, and the two sides of the handle 11 are connecting blocks, an adjusting knob 7 is installed on the back of the movable rod 1, a mounting block 10 is fixedly installed on the bottom of the movable rod 1, eleven upper mounting grooves 12 are equidistantly opened at the bottom of the mounting block 10, a layer of rubber material is laid inside the upper mounting groove 12, the upper mounting groove 12 is fixedly connected to the bottom of the movable rod 1, a plurality of upper mounting grooves 12 are equidistantly opened at the bottom of the mounting block 10, and a handle 11 is installed on the top of the movable rod 1.

[0030] Furthermore, there are two movable rods 1, which are cylindrical in shape and polished on the outside. Limit blocks are installed on both sides of the movable rod 1, and an adjustment knob 7 is installed at the limit block at the bottom of the movable rod 1.

[0031] Furthermore, the slide groove 14 is embedded in both sides of the top of the storage bin 5, and the inner side of the slide groove 14 is slidably connected with a slider 3, which is made of stainless steel and has a chamfered top.

[0032] Furthermore, the middle part of the shell base 6 adopts a through-type design, a friction pad is installed at the bottom of the shell base 6, and the shell base 6 is made of polyethylene material.

[0033] Furthermore, the connecting frame 4 is designed to be arched, a movable groove 2 is opened in the middle of the connecting frame 4 by a milling cutter, and both sides of the top of the connecting frame 4 are chamfered.

[0034] Furthermore, the lower mounting groove 13 and the upper mounting groove 12 can be clamped and matched, and the top of the upper mounting groove 12 is designed to be an angle.

[0035] Furthermore, the middle portion of the housing base 6 is designed to be arc-shaped, which facilitates observation of the cleaning status.

[0036] Beneficial effects:

[0037] 1. The wafer cleaning basket can prevent the wafer from slipping through a movable fixing device. The movable fixing device can effectively fix the wafer on the top of the basket to prevent the wafer from slipping or rolling during the cleaning process, thereby protecting the wafer and improving the cleaning effect.

[0038] 2. The wafer cleaning basket can ensure uniform cleaning through a movable fixing device. The movable fixing device can keep the wafer in a stable posture during the cleaning process to avoid rotation or vibration, thereby ensuring uniform cleaning of the wafer surface and improving the cleaning effect.

[0039] 3. The wafer cleaning basket can enhance safety through the movable fixing device. The 2-inch cleaning basket is rarely used on the market, and it is easy to cause waste, so the 4-inch one can be used to clean both 2-inch and 4-inch wafers.

[0040] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A round wafer cleaning basket, the round wafer cleaning basket adopts a 4-inch specification, includes a shell base (6), and is characterized by: The housing base (6) is sleeved with a storage bin (5) inside, an expansion slot (9) is provided on the back of the housing base (6), positioning pins (8) are provided on both sides of the top of the housing base (6), a plurality of lower mounting slots (13) are provided on both sides of the storage bin (5), a slide slot (14) is provided on both sides of the top of the storage bin (5), and an adjustment fixing device is slidably connected inside the slide slot (14); The movable fixing device comprises a slider (3), a connecting frame (4) is installed on the top of the slider (3), a movable groove (2) is opened in the middle of the connecting frame (4), a movable rod (1) is slidably connected inside the movable groove (2), an adjusting knob (7) is installed on the back of the movable rod (1), a mounting block (10) is fixedly installed on the bottom of the movable rod (1), a plurality of upper mounting grooves (12) are opened at equal intervals on the bottom of the mounting block (10), and a handle (11) is installed on the top of the movable rod (1).

2. The wafer cleaning basket according to claim 1, characterized in that: Two movable rods (1) are provided in total. The movable rods (1) are designed to be cylindrical and have their outer sides polished. Limit blocks are installed on both sides of the movable rods (1), and an adjustment knob (7) is installed at the limit block at the bottom.

3. The wafer cleaning basket according to claim 1, characterized in that: The slide groove (14) is embedded in both sides of the top of the storage bin (5), and a slider (3) is installed on the inner side of the slide groove (14) in a sliding connection manner. The slider (3) is made of stainless steel material, and its top is chamfered.

4. The wafer cleaning basket according to claim 1, characterized in that: The middle part of the shell base (6) adopts a through-type design, a friction pad is installed at the bottom of the shell base (6), and the shell base (6) is made of polyethylene material.

5. The wafer cleaning basket according to claim 1, characterized in that: The connecting frame (4) is designed to be arched, a movable groove (2) is opened in the middle of the connecting frame (4) by a milling cutter, and both sides of the top of the connecting frame (4) are chamfered.

6. The wafer cleaning basket according to claim 1, characterized in that: Eleven upper mounting grooves (12) are equidistantly provided at the bottom of the mounting block (10), a layer of rubber material is laid inside the upper mounting grooves (12), and the upper mounting grooves (12) are fixedly connected to the bottom of the movable rod (1).

7. The wafer cleaning basket according to claim 1, characterized in that: The top of the movable rod (1) is connected to a handle (11) by bolts. The handle (11) is made of soft plastic material, and both sides of the handle (11) are connecting blocks.

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