Wafer automatic feeding equipment

Abstract

The utility model relates to the field of wafer processing, in particular to automatic wafer feeding equipment, which comprises a flower basket conveying device, a wafer conveying device and a material box conveying device, the flower basket transportation device comprises a flower basket frame and a flower basket gripper mechanism, and the flower basket gripper mechanism grabs or places flower baskets on the flower basket frame; the wafer conveying device comprises a wafer taking mechanism, a positioning recognition mechanism and a wafer conveying mechanism which are arranged in sequence, the wafer taking mechanism comprises a taking driving assembly and a taking tooth fork in driving connection with the taking driving assembly, the positioning recognition mechanism comprises a visual recognition station, and a clamping recognition assembly and a recognition camera are fixed to the visual recognition station; the wafer conveying mechanism comprises a carrying disc rotating frame, a sliding driving assembly and a lifting conveying air cylinder fixed to the sliding driving assembly, a conveying tooth fork is fixed to the lifting conveying air cylinder, an identification camera carries out shooting identification on the carved number of the wafer, whether the wafer is in a reset state or a feeding state is judged, and feeding and resetting of the wafer are achieved.

Description

Technical Field

[0001] The utility model relates to the field of wafer processing, in particular to automatic wafer feeding equipment. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits, and its original material is silicon. After high-purity polycrystalline silicon is dissolved, silicon crystal seeds are added, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. The processing process of the wafer mainly includes deoxidation purification, treatment process, and needle testing process. Among them, the basic steps of the treatment process are to first clean the wafer properly, then oxidize and chemically vapor deposit on its surface, and then repeat the steps of coating, exposure, development, etching, ion implantation, metal sputtering, etc., and finally complete the processing and production of several layers of circuits and components on the wafer. During the processing process, the wafer needs to be transported and placed in a specific carrier for subsequent processing. For example, before IPC etching processing, the wafer needs to be transported to a specific tray, and the entire tray carrying the wafer is placed in a plasma etcher for etching processing. After the etching process is completed, the wafer needs to be reset.

[0003] Among them, the application number is CN202010740786.6, and the name is an invention patent for an automatic wafer loading device for a wafer loader, which includes a flipping mechanism for taking and flipping wafers and a material rack for placing flower baskets. The flipping mechanism takes out and flips the wafers in the flower basket, and positions the wafers through the positioning mechanism. This mechanism can only realize the removal of wafers, and cannot meet the requirements of wafer identification, transportation and resetting. Utility Model Content

[0004] The utility model aims to provide an automatic wafer loading device, aiming to improve the problem that conventional loading devices cannot meet the requirements of wafer identification, transportation and resetting.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] An automatic wafer loading device comprises a flower basket transport device, a wafer transport device and a material box transport device which are sequentially arranged at intervals;

[0007] The flower basket transport device comprises a flower basket rack and a flower basket gripper mechanism, wherein the flower basket gripper mechanism is slidably arranged on one side of the flower basket material rack and is used to grab or place the flower basket on the flower basket rack;

[0008] The wafer transport device comprises a wafer picking mechanism, a positioning identification mechanism and a wafer transport mechanism which are arranged in sequence, wherein the wafer picking mechanism comprises a picking drive assembly and a picking tooth fork which is drivingly connected to the picking drive assembly, and the picking drive assembly drives the picking tooth fork to transport the wafer between the flower basket gripper mechanism and the positioning identification mechanism;

[0009] The positioning and identification mechanism includes a visual identification station, on which a clamping and identification component and an identification camera are fixed. The clamping and identification component clamps and limits the wafer, and the identification camera is located above the clamping and identification component to photograph and identify the wafer.

[0010] The wafer transport mechanism includes a carrier tray transfer frame, a sliding drive assembly, and a lifting transport cylinder fixed on the sliding drive assembly, a transport fork is fixed on the lifting transport cylinder, and the sliding drive assembly and the lifting transport cylinder drive the transport fork to transport the wafer between the visual recognition station and the carrier tray transfer frame;

[0011] The material box transport device includes a material box rack and a tray transport mechanism. A plurality of trays are placed in the material box rack through the material boxes, and the trays carry the wafers.

[0012] The tray transport mechanism is slidably arranged between the material box rack and the tray transfer rack, and the tray transport mechanism includes a transport lifting component and a tray transport component movably arranged on the transport lifting component, and the tray transport component transports the tray between the material box rack and the tray transfer rack.

[0013] Furthermore, the flower basket gripper mechanism includes a horizontal slide rail, a grabbing and lifting assembly, and a flower basket gripper assembly drivingly connected to the grabbing and lifting assembly.

[0014] The extension direction of the horizontal slide rail is the same as the length direction of the flower basket frame.

[0015] The grabbing and lifting assembly is movably arranged in the horizontal slide rail, and the grabbing and lifting assembly performs reciprocating linear motion on the horizontal slide rail.

[0016] The flower basket gripper assembly comprises a fixed part and a rotating gripper arranged on the fixed part, the gripper lifting assembly is drivingly connected to the fixed part, and the rotating gripper performs a horizontal 180° rotation on the fixed part.

[0017] Furthermore, one side of the flower basket is provided with an opening, and both sides of the opening are provided with grabbing protrusions.

[0018] A flower basket rotating frame is arranged on one side of the wafer picking mechanism, and a rotation driving component is arranged at the bottom of the flower basket rotating frame, and the rotation driving component drives the flower basket rotating frame to rotate.

[0019] Furthermore, the fixing part comprises a horizontal grabbing slide rail, and the horizontal grabbing slide rail is movably arranged on the grabbing lifting assembly.

[0020] The rotating grabbing part includes a grabbing fixed plate, a grabbing rotating cylinder and a grabbing arm. The grabbing fixed plate is movably arranged on a horizontal grabbing slide rail. The grabbing rotating cylinder is vertically fixed on the grabbing fixed plate. The driving end of the grabbing rotating cylinder faces upward and is fixedly connected to one end of the grabbing arm. A clamping claw is fixed on the free end of the grabbing arm.

[0021] Furthermore, the material picking drive assembly includes a lifting base, a rotating base is fixed on the lifting base, a material picking slide rail is fixed on the rotating base, and the material picking fork is movably arranged on the material picking slide rail.

[0022] Furthermore, the positioning and identification mechanism also includes a visual positioning station and a feeding component, wherein the feeding component is located between the visual positioning station and the visual identification station, and both ends of the feeding component are respectively located on the visual positioning station and the visual identification station, and a clamping positioning component and a positioning camera are fixed on the visual positioning station, and the positioning camera is located above the clamping positioning component.

[0023] The clamping and positioning assembly comprises two positioning slide rails arranged opposite to each other and arc clamping blocks slidably arranged on the positioning slide rails, and the arc clamping blocks clamp the arc surfaces on both sides of the wafer.

[0024] Furthermore, the feed assembly includes a rotating lifting base and a feed plate fixed on the rotating lifting base, and the rotating lifting base drives both ends of the feed plate to rotate.

[0025] Furthermore, there are multiple transfer racks in the carrier plate, and the multiple transfer racks in the carrier plate are arranged in parallel on one side of the positioning and identification mechanism.

[0026] Furthermore, the carrier is provided with a plurality of wafer placement positions.

[0027] The sliding drive assembly includes an x-axis sliding track and a y-axis sliding track slidably arranged on the x-axis sliding track, the extension direction of the x-axis sliding track is parallel to the arrangement direction of the plurality of carrier trays, and the x-axis sliding track is located on one side of the plurality of carrier trays.

[0028] The lifting and transporting cylinder is slidably arranged on a y-axis sliding track.

[0029] Furthermore, the tray transport assembly includes a horizontal transport rail and a transport member movably arranged on the horizontal transport rail, and the transport member includes a transport fixing plate, a transport rotating cylinder and a transport arm.

[0030] The transport fixing plate is movably arranged on the horizontal transport slide rail, the transport rotating cylinder is vertically fixed on the transport fixing plate, the driving end of the transport rotating cylinder faces upward and is fixedly connected to one end of the transport arm, and a supporting plate protruding outward is arranged at the bottom of the free end of the transport arm.

[0031] After adopting the above technical solution, the utility model has the following advantages compared with the background technology:

[0032] The flower basket gripper mechanism directly grabs the flower basket, and the wafer picking mechanism picks up the wafer in the flower basket on the flower basket gripper mechanism and places it on the visual recognition station. The visual recognition station uses the recognition camera to shoot and recognize the wafer's engraving mark, judges that the wafer is in the loading process, and determines the wafer loading position. The transport fork places the wafer in the carrier for the carrier transport mechanism to transport it to the material box rack to complete the loading. Similarly, the visual recognition station can identify the wafer in the resetting process and determine the wafer resetting position for the flower basket gripper mechanism to accurately reset it. It meets the requirements for wafer identification, transportation and resetting. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 This is a schematic diagram of the structure of the automatic wafer loading equipment of the utility model;

[0034] Figure 2 This is an enlarged structural diagram of part A of the automatic wafer loading equipment of the utility model;

[0035] Figure 3 This is a top view of the automatic wafer loading device of the utility model;

[0036] Figure 4 This is a schematic diagram of the structure of the basket gripper assembly of the automatic wafer feeding equipment of the utility model;

[0037] Figure 5 This is a schematic diagram of the structure of the transfer rack in the basket of the automatic wafer loading equipment of the utility model;

[0038] Figure 6 This is a schematic diagram of the structure of the wafer fetching mechanism of the automatic wafer loading equipment of the utility model;

[0039] Figure 7 This is a schematic diagram of the structure of the material taking tooth fork of the automatic wafer loading device of the utility model;

[0040] Figure 8 This is a schematic diagram of the structure of the positioning identification mechanism of the automatic wafer loading equipment of the utility model;

[0041] Fig. 9 This is a partial structural schematic diagram of the wafer transport mechanism of the automatic wafer loading device of the utility model;

[0042] Fig.10 This is a schematic diagram of the structure of the transfer rack in the tray of the automatic wafer loading equipment of the utility model;

[0043] Fig.11 This is a schematic diagram of the structure of the transport and lifting components of the automatic wafer loading equipment of the utility model;

[0044] Fig.12 This is a schematic diagram of the structure of the tray transport component of the automatic wafer loading equipment of the utility model;

[0045] Fig.13 This is a schematic diagram of the material box rack structure of the automatic wafer loading equipment described in the utility model.

[0046] Description of reference numerals:

[0047] 1. Flower basket transport device; 11. Flower basket frame; 111. Flower basket; 1111. Opening; 1112. Grasping protrusion; 1113. Accommodating groove; 12. Flower basket gripper mechanism; 121. Horizontal slide rail; 122. Grasping lifting assembly; 123. Flower basket gripper assembly; 1231. Horizontal grabbing slide rail; 1232. Grasping fixing plate; 1233. Grasping rotating cylinder; 1234. Grasping arm; 1235. Clamping claw;

[0048] 2. Wafer transport device; 21. Flower basket transfer rack; 211. Rotary drive assembly; 212. Flower basket placement position; 213. Compressing cylinder; 22. Wafer material taking mechanism; 221. Lifting base; 222. Rotating base; 223. Material taking slide rail; 224. Material taking fork; 23. Positioning and identification mechanism; 231. Visual recognition station; 2311. Clamping and identification assembly; 2312. Identification camera; 232. Visual positioning station; 2321. Positioning camera; 2322. Positioning slide rail; 2323. Arc clamp block; 233. Feeding assembly; 2331. Rotating lifting base; 2332. Feeding plate; 2333. Suction cup; 24. Wafer transport mechanism; 241. Carrier tray transfer rack; 242. X-axis sliding rail; 243. Y-axis sliding rail; 244. Lifting and transporting cylinder; 245. Transport fork;

[0049] 3. Material box transport device; 31. Material box rack; 32. Material box; 33. Carrier; 331. Wafer placement position; 34. Carrier transport slide rail; 35. Carrier transport mechanism; 351. Transport lifting assembly; 352. Carrier transport assembly; 3521. Horizontal transport slide rail; 3522. Transport fixing plate; 3523. Transport rotating cylinder; 3524. Transport arm; 3525. Loading plate;

[0050] 4. Wafer. DETAILED DESCRIPTION

[0051] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0052] In addition, it should be noted that the terms "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element of the present invention must have a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0053] When an element is referred to as being “fixed to” or “disposed on” or “provided on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0054] Unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the utility model can be understood according to specific circumstances.

[0055] Example

[0056] Please refer to Figure 1-13 As shown, this embodiment provides an automatic wafer loading device, including a flower basket transport device 1, a wafer transport device 2 and a material box transport device 3 which are arranged in sequence and at intervals; the wafer 4 in the flower basket transport device 1 is transferred to the material box transport device 3 for processing by the wafer transport device 2, or the processed wafer 4 in the material box transport device 3 is reset to the flower basket transport device 1 by the wafer transport device 2, and the wafer transport device 2 identifies the unprocessed wafer 4 and the processed wafer 4 to accurately control the direction of the wafer 4.

[0057] The flower basket transport device 1 comprises a flower basket frame 11 and a flower basket gripping mechanism 12 . The flower basket 111 gripping mechanism 12 is slidably arranged on one side of the flower basket 111 material frame and is used to grip or place the flower basket 111 on the flower basket frame 11 .

[0058] In this embodiment, a plurality of placement positions are arranged in an array on the flower basket stand 11, and the flower basket 111 is placed on the placement position. In this embodiment, an opening 1111 is provided on one side of the flower basket 111, and grabbing protrusions 1112 are provided on both sides of the opening 1111. When placed on the placement position, the opening 1111 of the flower basket 111 faces outward. In addition, a plurality of receiving grooves 1113 are arranged horizontally spaced from top to bottom inside the flower basket 111, and the wafer 4 is embedded in the receiving groove 1113.

[0059] Please refer to Figure 1 and Figure 2 As shown, the flower basket gripper mechanism 12 includes a horizontal slide rail 121, a grabbing and lifting assembly 122, and a flower basket gripper assembly 123 drivingly connected to the grabbing and lifting assembly 122. The extension direction of the horizontal slide rail 121 is the same as the length direction of the flower basket stand 11, and the grabbing and lifting assembly 122 is movably arranged in the horizontal slide rail 121. The grabbing and lifting assembly 122 performs reciprocating linear motion on the horizontal slide rail 121, and the motion range covers the entire flower basket stand 11, ensuring that the flower baskets 111 at various positions in the flower basket stand 11 can be grabbed.

[0060] Please refer to Figure 4 As shown, the flower basket gripper assembly 123 includes a fixed portion and a rotating gripper disposed on the fixed portion, the gripper lifting assembly 122 is drivingly connected to the fixed portion, and the gripper lifting assembly 122 drives the fixed portion to move in the vertical direction, ensuring that the flower basket gripper assembly 123 can grip flower baskets 111 of different heights in the same row. The rotating gripper rotates 180° horizontally on the fixed portion, and after gripping the flower basket 111, the rotating gripper rotates 180° horizontally to remove the flower basket 111 from the flower basket stand 11.

[0061] In this embodiment, the fixed part includes a horizontal grabbing slide rail 1231, and the horizontal grabbing slide rail 1231 is movably arranged on the grabbing lifting assembly 122. The rotating grabbing part includes a grabbing fixed plate 1232, a grabbing rotating cylinder 1233 and a grabbing arm 1234. The grabbing fixed plate 1232 is movably arranged on the horizontal grabbing slide rail 1231. In this embodiment, the grabbing fixed plate 1232 is an "L"-shaped plate, and the vertical side of the grabbing fixed plate 1232 is movably arranged on the horizontal grabbing slide rail 1231. The grabbing rotating cylinder 1233 is vertically fixed on the grabbing fixed plate 1232. In this embodiment, the grabbing rotating cylinder 1233 is fixed to the bottom of the horizontal side of the grabbing fixed plate 1232, and the driving end of the grabbing rotating cylinder 1233 faces upward and is fixedly connected to one end of the grabbing arm 1234. The horizontal side of the grabbing fixed plate 1232 fixes the grabbing rotating cylinder 1233, effectively increasing the contact area between the grabbing fixed plate 1232 and the grabbing rotating cylinder 1233, ensuring that the grabbing rotating cylinder 1233 can be more stable. A clamping claw 1235 is fixed on the free end of the grabbing arm 1234, and the clamping claw 1235 grabs the grabbing protrusions 1112 on both sides of the opening 1111 of the flower basket 111. The horizontal grabbing slide rail 1231 drives the clamping claw 1235 to move in the horizontal direction, so that it can get closer to the flower basket rack 11 or the wafer picking mechanism 22, which is convenient for the transportation of the flower basket 111 and the wafer 4.

[0062] Please refer to Figure 1 and Figure 2 As shown, the wafer transport device 2 includes a wafer picking mechanism 22, a positioning and identification mechanism 23, and a wafer transport mechanism 24 arranged in sequence. The wafer picking mechanism 22 includes a picking drive assembly and a picking tooth fork 224 drivingly connected to the picking drive assembly. The picking drive assembly drives the picking tooth fork 224 to transport the wafer 4 between the flower basket gripper mechanism 12 and the positioning and identification mechanism 23. The wafer picking mechanism 22 extracts the wafer 4 in the flower basket 111 grasped by the flower basket gripper mechanism 12 through the picking tooth fork 224, and places it on the positioning and identification mechanism 23 for positioning and identification, or the wafer picking mechanism 22 transports the processed wafer 4 on the positioning and identification mechanism 23 to the flower basket 111 grasped by the flower basket gripper mechanism 12 through the picking tooth fork 224, and the flower basket gripper mechanism 12 completes the resetting of the flower basket 111.

[0063] Please refer to Figure 5As shown, in this embodiment, a flower basket intermediate rotating frame 21 is provided on one side of the wafer picking mechanism 22, and the flower basket intermediate rotating frame 21 is used to carry the flower basket 111. The clamping claw 1235 clamps the flower basket 111 to the flower basket intermediate rotating frame 21 for placement. A rotating driving assembly 211 is provided at the bottom of the flower basket intermediate rotating frame 21, and the rotating driving assembly 211 drives the flower basket intermediate rotating frame 21 to rotate, so that the opening 1111 of the flower basket 111 located on the flower basket intermediate rotating frame 21 faces the wafer picking mechanism 22, so that the wafer picking mechanism 22 can pick up or place the wafer 4 in the flower basket 111. In this embodiment, a plurality of flower basket placement positions 212 are vertically arranged on the flower basket transfer rack 21, and the specific number of flower basket placement positions 212 is two. When the wafer picking mechanism 22 is picking up or placing the wafer 4 from the flower basket 111 in one of the flower basket placement positions 212, the flower basket gripper assembly 123 simultaneously transfers or places the flower basket 111 in another flower basket placement position 212, effectively improving the overall work efficiency. In addition, a pressing cylinder 213 is fixed above the flower basket placement position 212 of the flower basket rack 11, and the pressing cylinder 213 presses the flower basket 111 to ensure the stability of the flower basket 111 in the flower basket placement position 212, so as to facilitate the wafer picking mechanism 22 to pick up or place the wafer 4.

[0064] Please refer to Figure 6 and Figure 7 As shown, the material picking drive assembly includes a lifting base 221, a rotating base 222 is fixed on the lifting base 221, a material picking slide rail 223 is fixed on the rotating base 222, and a material picking fork 224 is movably arranged on the material picking slide rail 223. The lifting base 221 raises or lowers the height of the rotating base 222 to adapt to the flower baskets 111 in the flower basket placement positions 212 of different heights; the rotating base 222 drives the material picking slide rail 223 to rotate, so that the material picking fork 224 can be switched between the flower basket rotating rack 21 and the positioning identification mechanism 23; the material picking slide rail 223 drives the material picking fork 224 to move toward the flower basket rotating rack 21 or toward the positioning identification mechanism 23, so that the material picking fork 224 can pick up or place the wafer 4.

[0065] Please refer to Figure 8 As shown, the positioning and identification mechanism 23 includes a visual recognition station 231, on which a clamping and identification component 2311 and an identification camera 2312 are fixed, and the clamping and identification component 2311 clamps and limits the wafer 4. The identification camera 2312 is located above the clamping and identification component 2311, and takes pictures and identifies the wafer 4. The clamping and identification component 2311 ensures that the position of the wafer 4 is more accurate, and ensures that the identification camera 2312 can accurately identify the wafer 4. The identification camera 2312 identifies the engraving mark of the wafer 4, determines whether the wafer 4 has been processed, cooperates with the wafer picking mechanism 22 to reset the wafer 4, or cooperates with the wafer transportation mechanism 24 to load and transport the wafer 4.

[0066] In this embodiment, the positioning and identification mechanism 23 also includes a visual positioning station 232 and a feeding assembly 233. The feeding assembly 233 is located between the visual positioning station 232 and the visual identification station 231, and the two ends of the feeding assembly 233 are respectively located on the visual positioning station 232 and the visual identification station 231. The material picking fork 224 places the wafer 4 at one end of the feeding assembly 233, and the positioning and identification mechanism 23 locates and centers the wafer 4 on one end of the feeding assembly 233 to ensure the accuracy of the position of the wafer 4 on the feeding assembly 233; the positioned wafer 4 enters the visual identification station 231 through the feeding assembly 233, and the visual identification station 231 identifies the engraving mark of the wafer 4 to determine whether the wafer 4 has been processed, and cooperates with the wafer transportation mechanism 24 to transport the wafer 4.

[0067] A clamping and positioning assembly and a positioning camera 2321 are fixed on the visual positioning station 232, and the positioning camera 2321 is located above the clamping and positioning assembly. The clamping and positioning assembly includes two relatively arranged positioning rails 2322 and arc clamps 2323 slidably arranged on the positioning rails 2322, and the arc clamps 2323 clamp the arc surfaces on both sides of the wafer 4. The arc clamps 2323 are close to each other to limit the position of the wafer 4, and the positioning camera 2321 determines the center offset distance of the wafer 4, and controls the arc clamps 2323 to move on the positioning rails 2322 until the circle of the wafer 4 is located directly below the positioning camera 2321, so as to ensure the accuracy of the position of the wafer 4.

[0068] The feed assembly 233 includes a rotating lifting base 2331 and a feed plate 2332 fixed on the rotating lifting base 2331, and the rotating lifting base 2331 drives the two ends of the feed plate 2332 to rotate. In this embodiment, the rotating lifting assembly is fixedly connected to the center of the bottom surface of the feed plate 2332, and suction cups 2333 are provided on the top surfaces of both ends of the rotating lifting assembly, and the suction cups 2333 limit the position of the wafer 4. The rotating lifting assembly lifts the feed plate 2332 and then rotates it, so that one end of the feed plate 2332 located on the visual positioning station 232 rotates to the visual recognition station 231, so that the visual recognition station 231 can recognize the wafer 4, thereby achieving the effect of transporting the wafer 4 between the two stations.

[0069] Please refer to Figure 1 , Figure 2 , Fig. 9 and Fig.10As shown, the wafer transport mechanism 24 includes a turntable 241 on the carrier, a sliding drive assembly and a lifting transport cylinder 244 fixed on the sliding drive assembly, a transport fork 245 is fixed on the lifting transport cylinder 244, and the sliding drive assembly and the lifting transport cylinder 244 drive the transport fork 245 to transport the wafer 4 between the visual recognition station 231 and the turntable 241 on the carrier; the sliding drive assembly adjusts the horizontal position of the transport fork 245, drives the transport fork 245 to move between the visual recognition station 231 and the turntable 241 on the carrier, and the lifting transport cylinder 244 adjusts the vertical height of the transport fork 245, so that the transport fork 245 can better extract and transport the wafers 4 at different heights, thereby ensuring the integrity of the action.

[0070] There are multiple carrier tray turntables 241, and multiple carrier tray turntables 241 are arranged in parallel on one side of the positioning and identification mechanism 23. In this embodiment, there are two carrier tray turntables 241, and two carrier tray turntables 241 are arranged in parallel on one side of the positioning and identification station. Providing two carrier tray turntables 241 can effectively improve the loading efficiency of the wafer 4.

[0071] Please refer to Fig. 9 As shown, the sliding drive assembly includes an x-axis sliding rail 242 and a y-axis sliding rail 243 slidably arranged on the x-axis sliding rail 242. The extension direction of the x-axis sliding rail 242 is parallel to the arrangement direction of the multiple carrier tray turntables 241, and the x-axis sliding rail 242 is located on one side of the multiple carrier tray turntables 241. The x-axis sliding rail 242 drives the y-axis sliding rail 243 to move above the carrier tray turntable 241, and the lifting and transporting cylinder 244 is slidably arranged on the y-axis sliding rail 243. The movement range of the transport fork 245 on the lifting and transporting cylinder 244 covers the multiple carrier tray turntables 241, ensuring that the transport fork 245 can load the wafers 4 at various positions on the carrier tray turntable 241 or reset the wafers 4 at various positions on the carrier tray turntable 241.

[0072] Please refer to Figure 1 , Figure 2 and Figure 11-13 As shown, the material box transport device 3 includes a material box rack 31 and a carrier transport mechanism 35. A plurality of carriers 33 are placed in the material box rack 31 through the material box 32. The carriers 33 carry the wafers 4. In this embodiment, the carriers 33 are arranged in sequence from top to bottom in the material box 32, and the carriers 33 are provided with a plurality of wafer placement positions 331, so as to realize the simultaneous carrying of a plurality of wafers 4 and improve the loading efficiency of the wafers 4.

[0073] The tray transport mechanism 35 is slidably set between the material box rack 31 and the tray transfer rack 241. In this embodiment, a tray transport slide rail 34 is set between the material box rack 31 and the tray transfer rack 241. The extension direction of the tray transport slide rail 34 is the same as the length direction of the material box rack 31, and the tray transport mechanism 35 is slidably set on the tray transport slide rail 34.

[0074] The tray transport mechanism 35 includes a transport lifting assembly 351 and a tray transport assembly 352 movably arranged on the transport lifting assembly 351. The transport lifting assembly 351 is slidably arranged on the tray transport slide rail 34. The tray transport assembly 352 transports the tray 33 between the magazine rack 31 and the tray intermediate rotating rack 241. The tray transport assembly 352 grabs and transports the tray 33, transports the tray 33 carrying the unprocessed wafer 4 to the magazine 32 in the tray intermediate rotating rack 241 to complete the loading; and transports the tray 33 carrying the processed wafer 4 in the magazine 32 of the tray intermediate rotating rack 241 to the tray intermediate rotating rack 241 for unloading by the transport fork 245.

[0075] Please refer to Fig.12 As shown, in this embodiment, the carrier transport assembly 352 includes a horizontal transport rail 3521 and a transport part movably arranged on the horizontal transport rail 3521, the transport part includes a transport fixed plate 3522, a transport rotating cylinder 3523 and a transport arm 3524, the transport fixed plate 3522 is movably arranged on the horizontal transport rail 3521, the transport rotating cylinder 3523 is vertically fixed on the transport fixed plate 3522, the driving end of the transport rotating cylinder 3523 faces upward and is fixedly connected to one end of the transport arm 3524, and the bottom of the free end of the transport arm 3524 is provided with a carrying plate 3525 protruding outward, and the carrying plate 3525 carries and transports the carrier 33. Similarly, in this embodiment, the transport fixing plate 3522 is an "L"-shaped fixing plate, the vertical side of the transport fixing plate 3522 is slidably arranged on the horizontal transport slide rail 3521, the top surface of the transport rotating cylinder 3523 is fixed on the bottom surface of the horizontal part of the transport fixing plate 3522, and the driving end of the transport rotating cylinder 3523 passes through the horizontal part of the transport fixing plate 3522 and is fixedly connected to one end of the transport arm 3524. The horizontal transport slide rail 3521 drives the carrier plate 3525 to approach the material box rack 31 or the carrier plate intermediate rotating rack 241, and transports the carrier plate 33 on the material tray rack or the carrier plate intermediate rotating rack 241. The transport rotating cylinder 3523 drives the carrier plate 3525 to rotate 180 degrees in the horizontal direction, and transports the carrier plate 33 from the material box rack 31 to the carrier plate intermediate rotating rack 241 or from the carrier plate intermediate rotating rack 241 to the material box rack 31.

[0076] The use includes a wafer 4 loading process and a wafer 4 resetting process;

[0077] During the loading process of wafer 4, the grabbing and lifting assembly 122 moves on the horizontal slide rail 121 to the row where the flower basket 111 to be picked up is located, and the grabbing and lifting assembly 122 drives the flower basket gripper assembly 123 to rise or fall to the height where the flower basket 111 to be picked up is located. The horizontal grabbing slide rail 1231 drives the clamping claw 1235 to move toward the flower basket 111 to be picked up, until the clamping claw 1235 clamps the flower basket 111, and then the grabbing rotating cylinder 1233 drives the grabbing arm 1234 to rotate 180° in the horizontal direction, and at the same time, the grabbing and lifting assembly 122 moves to the side of the flower basket transfer rack 21 through the horizontal slide rail 121. The horizontal grabbing slide rail 1231 drives the clamping claw 1235 to move toward the flower basket transfer rack 21, and places the flower basket 111 on the flower basket placement position 212 of the flower basket transfer rack 21.

[0078] The pressing cylinder 213 on the flower basket placement position 212 moves downward to press the flower basket 111. At the same time, the rotating drive assembly 211 at the bottom of the flower basket middle rotating frame 21 drives the flower basket middle rotating frame 21 to rotate until the opening 1111 of the flower basket 111 faces the wafer picking mechanism 22. The picking tooth fork 224 of the wafer picking mechanism 22 picks the wafer 4 in the flower basket 111 and places it on the visual positioning station 232. After the visual positioning station 232 finds the circular position of the wafer 4, the rotating lifting base 2331 of the feeding assembly 233 lifts the feeding plate 2332 and drives the feeding plate 2332 to rotate, and transports the wafer 4 to the visual recognition station 231. The recognition visual station reads the number of the wafer 4 and determines the loading position of the wafer 4.

[0079] The transport fork 245 places the wafer 4 in the carrier 33 on the carrier middle rotating frame 241 through the x-axis sliding track 242 and the y-axis sliding track 243. The carrier plate 3525 of the carrier transport assembly 352 transports the carrier 33 to the specified position of the magazine rack 31.

[0080] The steps of the wafer 4 resetting process are opposite to those of the wafer 4 loading process. The visual recognition station 231 reads the mark of the wafer 4 and determines the resetting position of the wafer 4 for the subsequent accurate resetting of the flower basket gripper mechanism 12.

[0081] The above is only a preferred specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed by the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A wafer automatic loading device, It is characterized in that It includes a flower basket transport device, a wafer transport device and a material box transport device which are arranged in sequence and at intervals; The flower basket transport device comprises a flower basket rack and a flower basket gripper mechanism, wherein the flower basket gripper mechanism is slidably arranged on one side of the flower basket material rack and is used to grab or place the flower basket on the flower basket rack; The wafer transport device comprises a wafer picking mechanism, a positioning identification mechanism and a wafer transport mechanism which are arranged in sequence, wherein the wafer picking mechanism comprises a picking drive assembly and a picking tooth fork which is drivingly connected to the picking drive assembly, and the picking drive assembly drives the picking tooth fork to transport the wafer between the flower basket gripper mechanism and the positioning identification mechanism; The positioning and identification mechanism includes a visual identification station, on which a clamping and identification component and an identification camera are fixed. The clamping and identification component clamps and limits the wafer, and the identification camera is located above the clamping and identification component to photograph and identify the wafer. The wafer transport mechanism includes a carrier tray transfer frame, a sliding drive assembly, and a lifting transport cylinder fixed on the sliding drive assembly, a transport fork is fixed on the lifting transport cylinder, and the sliding drive assembly and the lifting transport cylinder drive the transport fork to transport the wafer between the visual recognition station and the carrier tray transfer frame; The material box transport device includes a material box rack and a tray transport mechanism. A plurality of trays are placed in the material box rack through the material boxes, and the trays carry the wafers. The tray transport mechanism is slidably arranged between the material box rack and the tray transfer rack, and the tray transport mechanism includes a transport lifting component and a tray transport component movably arranged on the transport lifting component, and the tray transport component transports the tray between the material box rack and the tray transfer rack.

2. The automatic wafer loading equipment according to claim 1, Features: The flower basket gripper mechanism comprises a horizontal slide rail, a grabbing and lifting assembly, and a flower basket gripper assembly drivingly connected to the grabbing and lifting assembly. The extension direction of the horizontal slide rail is the same as the length direction of the flower basket frame. The grabbing and lifting assembly is movably arranged in the horizontal slide rail, and the grabbing and lifting assembly performs reciprocating linear motion on the horizontal slide rail. The flower basket gripper assembly comprises a fixed part and a rotating gripper arranged on the fixed part, the gripper lifting assembly is drivingly connected to the fixed part, and the rotating gripper performs a horizontal 180° rotation on the fixed part.

3. The automatic wafer loading equipment according to claim 2, Features: An opening is provided on one side of the flower basket, and grabbing protrusions are provided on both sides of the opening. A flower basket rotating frame is arranged on one side of the wafer picking mechanism, and a rotation driving component is arranged at the bottom of the flower basket rotating frame, and the rotation driving component drives the flower basket rotating frame to rotate.

4. The automatic wafer loading equipment according to claim 2, Features: The fixing part comprises a horizontal grabbing slide rail, and the horizontal grabbing slide rail is movably arranged on the grabbing lifting assembly. The rotating grabbing part includes a grabbing fixed plate, a grabbing rotating cylinder and a grabbing arm. The grabbing fixed plate is movably arranged on a horizontal grabbing slide rail. The grabbing rotating cylinder is vertically fixed on the grabbing fixed plate. The driving end of the grabbing rotating cylinder faces upward and is fixedly connected to one end of the grabbing arm. A clamping claw is fixed on the free end of the grabbing arm.

5. The automatic wafer loading equipment according to claim 1, Features: The material fetching driving assembly comprises a lifting base, a rotating base is fixed on the lifting base, a material fetching slide rail is fixed on the rotating base, and the material fetching fork is movably arranged on the material fetching slide rail.

6. The automatic wafer loading equipment according to claim 1, Features: The positioning and identification mechanism also includes a visual positioning station and a feeding component, wherein the feeding component is located between the visual positioning station and the visual identification station, and the two ends of the feeding component are respectively located on the visual positioning station and the visual identification station, and a clamping positioning component and a positioning camera are fixed on the visual positioning station, and the positioning camera is located above the clamping positioning component. The clamping and positioning assembly comprises two positioning slide rails arranged opposite to each other and arc clamping blocks slidably arranged on the positioning slide rails, and the arc clamping blocks clamp the arc surfaces on both sides of the wafer.

7. The automatic wafer loading equipment according to claim 6, Features: The feeding assembly comprises a rotating lifting base and a feeding plate fixed on the rotating lifting base, and the rotating lifting base drives two ends of the feeding plate to rotate.

8. The automatic wafer loading equipment according to claim 1, Features: There are multiple rotating racks in the carrier plate, and the multiple rotating racks in the carrier plate are arranged in parallel on one side of the positioning and identification mechanism.

9. The automatic wafer loading equipment according to claim 8, Features: The carrier is provided with a plurality of wafer placement positions. The sliding drive assembly includes an x-axis sliding track and a y-axis sliding track slidably arranged on the x-axis sliding track, the extension direction of the x-axis sliding track is parallel to the arrangement direction of the plurality of carrier trays, and the x-axis sliding track is located on one side of the plurality of carrier trays. The lifting and transporting cylinder is slidably arranged on a y-axis sliding track.

10. The automatic wafer loading equipment according to claim 1, Features: The tray transport assembly includes a horizontal transport rail and a transport member movably arranged on the horizontal transport rail, wherein the transport member includes a transport fixing plate, a transport rotating cylinder and a transport arm. The transport fixing plate is movably arranged on the horizontal transport slide rail, the transport rotating cylinder is vertically fixed on the transport fixing plate, the driving end of the transport rotating cylinder faces upward and is fixedly connected to one end of the transport arm, and a supporting plate protruding outward is arranged at the bottom of the free end of the transport arm.

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