Oil drainage structure of spark machine special for semiconductor

Abstract

The utility model discloses an oil drainage structure of a spark machine special for a semiconductor, which belongs to the technical field of oil drainage structures of spark machines, and is characterized by comprising an oil drainage tank, the top of the oil drainage tank is communicated with a guide frame, the top of the guide frame is communicated with a liquid groove frame, and two sides of the oil drainage tank are communicated with guide pipes. By arranging an oil drainage tank, a guide frame, a liquid tank frame, a guide pipe, an oil liquid pump, an outlet pipe, an oil drainage hole pipe, an electric door, an oil filtering assembly, a cleaning assembly, a discharging hole and a slag discharging assembly, the started oil liquid pump is matched with the guide pipe to pump out oil liquid in the oil drainage tank, and then the oil liquid is discharged to the oil drainage hole pipe in the liquid tank frame on the top of the guide frame through the outlet pipe; and then the oil liquid is uniformly discharged into the liquid groove frame through a hole groove of the oil discharging hole pipe so as to be conveniently used for electric spark machining of a semiconductor workpiece subsequently, and then the electric door in the guide frame is opened subsequently, so that the oil liquid is filtered and used through the oil filtering assembly in the guide frame.

Description

Technical Field

[0001] The utility model relates to the technical field of oil discharge structures of spark machines, in particular to an oil discharge structure of a semiconductor-specific spark machine. Background Art

[0002] When a semiconductor workpiece is subjected to electrospark machining, the tool electrode and the workpiece are respectively connected to the two poles of a pulse power supply and immersed in the working fluid, or the working fluid is filled into the discharge gap, and the tool electrode is fed to the workpiece through the gap automatic control system. When the gap between the two electrodes reaches a certain distance, the pulse voltage applied to the two electrodes breaks down the working fluid, generating spark discharge, and instantly concentrating a large amount of heat energy in the discharge microchannel, the temperature can be as high as 10,000°C or more, and the pressure also changes dramatically, so that the local trace amount of metal material on the working surface is immediately melted and vaporized, and explosively splashed into the working fluid, rapidly condensed to form solid metal particles, which are carried away by the working fluid, and the spark machine oil discharge structure is used to supply oil in the spark machine, which is convenient for the oil to be put in and used.

[0003] At present, a Chinese utility model with the announcement number of CN219818299U discloses an oil drain mechanism for a spark machine, and the utility model discloses an oil drain mechanism for a spark machine, including an oil-immersed box body, an oil drain box and a spark machine body, a guide groove is provided in the middle of the top end of the guide rail plate, a screw is provided in the middle of the guide groove, a gear box is provided on one side of the top end of the guide rail plate, a motor is provided on one side of the gear box, a gear transmission mechanism is provided inside the gear box, and the motor output shaft is connected to the screw through the gear transmission mechanism. A detachable oil drain hole tube is provided inside the oil-immersed box body of the utility model, and the oil drain hole tube can be connected to the oil drain box through an oil guide pipe, an oil pump is provided on the oil guide pipe, the oil supply is convenient through the oil guide pipe, and the oil is evenly discharged into the oil-immersed box body through the oil drain hole tube, so as to facilitate oil draining; a filter element is provided on the top of the oil drain box, the oil can be filtered through the filter element, and an electric door is provided on the top of the filter element, and the oil supply is convenient through the electric door.

[0004] According to the above patent, the oil draining structure of the existing semiconductor dedicated spark machine has the following problems: the structure used to filter and recover the oil is inconvenient to clean impurities in the subsequent use, and after long-term use, the structure for filtering and recovering the oil is clogged, thereby affecting the efficiency of the subsequent oil draining operation. Therefore, the above patent is improved based on the problems raised. Utility Model Content

[0005] The utility model provides an oil discharge structure for a semiconductor-specific spark machine, aiming to solve the following problems of the existing oil discharge structure for semiconductor-specific spark machines: the structure for filtering and recovering the oil is inconvenient to clean impurities subsequently, and after long-term use, the structure for filtering and recovering the oil is clogged, thereby affecting the efficiency of subsequent oil discharge operations.

[0006] The utility model is implemented as follows: an oil drain structure for a semiconductor dedicated spark machine comprises an oil drain box, the top of the oil drain box is connected to a guide frame, the top of the guide frame is connected to a liquid tank frame, both sides of the oil drain box are connected to conduits, both sides of the liquid tank frame are bolted with oil pumps, the absorption end of the oil pump is connected to the top of the conduit, the discharge end of the oil pump is connected to an outlet pipe, the inner side of the outlet pipe passes through the outer side of the liquid tank frame, the interior of the outlet pipe is connected to an oil drain hole pipe, the oil drain hole pipe is located inside the liquid tank frame, the front side and the rear side of the top side of the guide frame are both provided with electric doors, the bottom side of the guide frame is provided with an oil filter assembly, the inner side of the oil filter assembly is provided with a cleaning assembly, the right side of the guide frame is provided with a discharge hole, and the right side of the discharge hole is provided with a slag discharge assembly;

[0007] The cleaning assembly includes a motor, a shaft and a spiral blade. The motor is bolted to the left side of the guide frame, the output end of the motor passes through the left side of the guide frame, the left side of the shaft is bolted to the output end of the motor, the spiral blade is welded to the outside of the shaft, the spiral blade is located on the inside of the oil filter assembly, and the right side of the spiral blade is located inside the drainage hole.

[0008] In order to achieve the effect of filtering, recovering and recycling the oil, the oil drain structure of a semiconductor-specific spark machine is preferably selected as the utility model. The oil filter assembly includes an angled plate and an oil filter screen. The angled plate is bolted to the front and rear sides of the bottom side of the inner side of the guide frame, and the oil filter screen is welded to the inner side of the angled plate. The bottom side of the inner side of the oil filter screen contacts the surface of the spiral blade.

[0009] In order to facilitate the discharge of impurities generated by the oil, the oil discharge structure of a semiconductor-specific spark machine of the utility model is preferably such that the slag discharge component includes a discharge pipe and a solenoid valve, the discharge pipe is connected to the right side of the discharge hole, and the solenoid valve is connected to the right side of the discharge pipe.

[0010] In order to support the oil drain tank to facilitate installation and use, as a preferred oil drain structure of a semiconductor-specific spark machine of the utility model, the bottom of the oil drain tank is bolted with a base plate, and the four corners of the base plate are all concave.

[0011] In order to achieve the effect of supporting and reinforcing the conduit, as a preferred oil drain structure of a semiconductor-specific spark machine of the utility model, both sides of the oil drain tank are bolted with support rods, and one end of the support rod away from the oil drain tank is sleeved on the outside of the conduit.

[0012] In order to protect the motor to avoid contamination during use, as a preferred oil drain structure of a semiconductor-specific spark machine of the utility model, a protective sleeve is provided on the outer side of the motor, and the right side of the protective sleeve is bolted to the left side of the guide frame.

[0013] In order to further improve the heat dissipation effect of the motor inside the protective cover, as a preferred oil discharge structure of a semiconductor-specific spark machine of the utility model, heat dissipation holes are opened on the top and bottom of the protective cover, and the heat dissipation holes are in the shape of circular hole grooves.

[0014] In order to further improve the effect of using the solenoid valve to discharge impurities, as a preferred oil discharge structure of a semiconductor-specific spark machine of the utility model, the right side of the solenoid valve is connected to a downflow pipe, and the downflow pipe is in the shape of a curved pipe.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] The oil drain structure of the semiconductor dedicated spark machine is provided with an oil drain tank, a guide frame, a liquid tank frame, a conduit, an oil pump, an outlet pipe, an oil drain hole pipe, an electric door, an oil filter assembly, a cleaning assembly, a discharge hole and a slag discharge assembly. After being started, the oil pump cooperates with the conduit to extract the oil in the oil drain tank, and then discharges it to the oil drain hole pipe inside the liquid tank frame at the top of the guide frame through the outlet pipe. Then, the oil is evenly discharged to the liquid tank frame through the hole groove of the oil drain hole pipe, so as to facilitate the subsequent use of the semiconductor workpiece electrospark machining. Then, the electric door inside the guide frame is opened, so that the oil passes through the oil filter assembly inside the guide frame to filter the oil, and then the filtered oil is recovered to the inside of the oil drain tank. At the same time, the impurities generated on the inner surface of the oil filter assembly are spirally transferred through the starting motor drive shaft and spiral blades, so that the impurities are discharged to the position of the discharge hole. After the oil is not filtered subsequently, it is only necessary to open the slag discharge assembly on the right side of the discharge hole to discharge the impurities, so as to ensure the efficiency of the subsequent cyclic oil draining operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The utility model is an overall structural diagram of the oil discharge structure of the semiconductor dedicated spark machine;

[0018] Figure 2 This is a schematic diagram of the internal structure of the guide frame of the utility model;

[0019] Figure 3This is a schematic diagram of the structure of the oil filter assembly in the utility model;

[0020] Figure 4 It is a structural schematic diagram of the cleaning component in the utility model;

[0021] Figure 5 It is a structural schematic diagram of the slag discharge component in the utility model.

[0022] In the figure, 1. oil drain tank; 2. guide frame; 3. liquid tank frame; 4. conduit; 5. oil pump; 6. outlet pipe; 7. oil drain hole pipe; 8. electric door; 9. oil filter assembly; 901. bevel plate; 902. oil filter net; 10. cleaning assembly; 1001. motor; 1002. shaft rod; 1003. spiral blade; 11. discharge hole; 12. slag discharge assembly; 1201. discharge pipe; 1202. solenoid valve; 13. base plate; 14. support rod; 15. protective cover; 16. heat dissipation hole; 17. downflow pipe. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0024] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, in the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0025] See also Figure 1-5The utility model provides a technical solution: an oil drain structure for a semiconductor spark machine, comprising an oil drain tank 1, the top of the oil drain tank 1 is connected to a guide frame 2, the top of the guide frame 2 is connected to a liquid tank frame 3, both sides of the oil drain tank 1 are connected to a conduit 4, both sides of the liquid tank frame 3 are bolted with an oil pump 5, the absorption end of the oil pump 5 is connected to the top of the conduit 4, the discharge end of the oil pump 5 is connected to an outlet pipe 6, the inner side of the outlet pipe 6 passes through the outer side of the liquid tank frame 3, the inside of the outlet pipe 6 is connected to an oil drain hole pipe 7, the oil drain hole pipe 7 is located inside the liquid tank frame 3, the front and rear sides of the top side of the guide frame 2 are both provided with an electric door 8, the bottom side of the guide frame 2 is provided with an oil filter assembly 9, the inner side of the oil filter assembly 9 is provided with a cleaning assembly 10, a discharge hole 11 is opened on the right side of the guide frame 2, and a slag discharge assembly 12 is provided on the right side of the discharge hole 11;

[0026] The cleaning assembly 10 includes a motor 1001, a shaft 1002 and a spiral blade 1003. The motor 1001 is bolted to the left side of the guide frame 2. The output end of the motor 1001 passes through the left side of the guide frame 2. The left side of the shaft 1002 is bolted to the output end of the motor 1001. The spiral blade 1003 is welded to the outside of the shaft 1002. The spiral blade 1003 is located on the inside of the oil filter assembly 9. The right side of the spiral blade 1003 is located inside the drain hole 11.

[0027] In this embodiment, by setting the oil drain tank 1, the guide frame 2, the liquid tank frame 3, the conduit 4, the oil pump 5, the outlet pipe 6, the oil drain hole pipe 7, the electric door 8, the oil filter assembly 9, the cleaning assembly 10, the discharge hole 11 and the slag discharge assembly 12, the oil pump 5 after starting cooperates with the conduit 4 to extract the oil inside the oil drain tank 1, and then discharges it to the oil drain hole pipe 7 inside the liquid tank frame 3 at the top of the guide frame 2 through the outlet pipe 6, and then the oil is evenly discharged to the inside of the liquid tank frame 3 through the hole groove of the oil drain hole pipe 7, so as to facilitate the subsequent use of the semiconductor workpiece electrospark machining, and then the subsequent opening The electric door 8 inside the guide frame 2 allows the oil to pass through the oil filter assembly 9 inside the guide frame 2 to be filtered and used, and then the filtered oil is recovered to the inside of the oil drain tank 1, thereby simultaneously starting the motor 1001 to drive the shaft 1002 and the spiral blade 1003 to spirally transfer the impurities generated on the inner surface of the oil filter assembly 9, so that the impurities are discharged to the position of the discharge hole 11. After the oil is no longer filtered, it is only necessary to open the slag discharge assembly 12 on the right side of the discharge hole 11 to discharge the impurities, thereby ensuring the efficiency of the subsequent circulating oil discharge operation.

[0028] As a technical optimization solution of the utility model, the oil filter assembly 9 includes an angled plate 901 and an oil filter net 902. The angled plate 901 is bolted to the front and rear sides of the bottom side of the inner side of the guide frame 2. The oil filter net 902 is welded to the inner side of the angled plate 901. The bottom side of the inner side of the oil filter net 902 contacts the surface of the spiral blade 1003.

[0029] In this embodiment: by providing an angled plate 901 and an oil filter net 902, the electric door 8 inside the guide frame 2 is opened, so that the oil passes through the oil filter net 902 on the inner side of the angled plate 901 inside the guide frame 2 to filter the oil, and then the filtered oil is recovered to the inside of the oil drain tank 1.

[0030] As a technical optimization solution of the utility model, the slag discharge assembly 12 includes a discharge pipe 1201 and a solenoid valve 1202 . The discharge pipe 1201 is connected to the right side of the discharge hole 11 , and the solenoid valve 1202 is connected to the right side of the discharge pipe 1201 .

[0031] In this embodiment: by setting the drain pipe 1201 and the solenoid valve 1202, after the impurities are discharged to the position of the drain hole 11, after the oil is no longer filtered, it is only necessary to open the solenoid valve 1202 on the right side of the drain hole 11 and cooperate with the drain pipe 1201 to discharge the impurities, thereby ensuring the efficiency of the subsequent circulating oil discharge operation.

[0032] As a technical optimization solution of the present utility model, a base plate 13 is bolted to the bottom of the oil drain tank 1, and the four corners of the base plate 13 are all concave.

[0033] In this embodiment, by providing a base plate 13, the oil drain tank 1 can be supported to facilitate installation and use.

[0034] As a technical optimization solution of the utility model, support rods 14 are bolted to both sides of the oil drain tank 1 , and one end of the support rod 14 away from the oil drain tank 1 is sleeved on the outside of the conduit 4 .

[0035] In this embodiment, by providing the support rod 14, the catheter 4 can be supported and reinforced for easy use.

[0036] As a technical optimization solution of the present invention, a protective sleeve 15 is provided on the outer side of the motor 1001 , and the right side of the protective sleeve 15 is bolted to the left side of the guide frame 2 .

[0037] In this embodiment, by providing the protective cover 15, the motor 1001 can be protected to avoid contamination during use, thereby facilitating use.

[0038] As a technical optimization solution of the present invention, heat dissipation holes 16 are provided at the top and the bottom of the protective cover 15 , and the heat dissipation holes 16 are in the shape of circular hole grooves.

[0039] In this embodiment, by providing the heat dissipation holes 16 , the heat dissipation effect of the motor 1001 inside the protective cover 15 can be further improved.

[0040] As a technical optimization solution of the present utility model, the right side of the solenoid valve 1202 is connected with a downflow pipe 17, and the downflow pipe 17 is in the shape of a curved pipe.

[0041] In this embodiment, by providing a downflow pipe 17, the effect of the solenoid valve 1202 in discharging impurities can be further improved.

[0042] Working principle: First, after being started, the oil pump 5 cooperates with the conduit 4 to extract the oil inside the oil drain tank 1, and then discharges it to the oil drain hole tube 7 inside the liquid tank frame 3 at the top of the guide frame 2 through the outlet pipe 6, and then the oil is evenly discharged to the inside of the liquid tank frame 3 through the hole groove of the oil drain hole tube 7, so as to facilitate the subsequent use of the semiconductor workpiece electrospark machining, and then the electric door 8 inside the guide frame 2 is opened, so that the oil passes through the oil filter net 902 on the inner side of the bevel plate 901 inside the guide frame 2 to filter the oil, and then the filtered oil is recovered to the inside of the oil drain tank 1, and at the same time, the starting motor 1001 drives the shaft 1002 and the spiral blade 1003 to realize the spiral transfer of impurities generated on the internal surface of the oil filter component 9, and then after the impurities are discharged to the position of the discharge hole 11, after the oil is not filtered, it is only necessary to open the solenoid valve 1202 on the right side of the discharge hole 11 and cooperate with the discharge pipe 1201 to discharge the impurities, so as to ensure the efficiency of the subsequent circulation oil discharge operation.

[0043] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An oil drain structure for a semiconductor spark machine, comprising an oil drain tank (1), characterized in that: The top of the oil drain tank (1) is connected to the guide frame (2), the top of the guide frame (2) is connected to the liquid tank frame (3), both sides of the oil drain tank (1) are connected to the conduit (4), both sides of the liquid tank frame (3) are bolted to the oil pump (5), the absorption end of the oil pump (5) is connected to the top of the conduit (4), the discharge end of the oil pump (5) is connected to the outlet pipe (6), the inner side of the outlet pipe (6) passes through the outer side of the liquid tank frame (3), and the outlet pipe (6) 6) is connected to an oil drain hole pipe (7), the oil drain hole pipe (7) is located inside the liquid tank frame (3), the front side and the rear side of the top side of the guide frame (2) are both provided with electric doors (8), the bottom side of the guide frame (2) is provided with an oil filter assembly (9), the inner side of the oil filter assembly (9) is provided with a cleaning assembly (10), the right side of the guide frame (2) is provided with a discharge hole (11), and the right side of the discharge hole (11) is provided with a slag discharge assembly (12); The cleaning assembly (10) comprises a motor (1001), a shaft (1002) and a spiral blade (1003); the motor (1001) is bolted to the left side of the guide frame (2); the output end of the motor (1001) passes through the left side of the guide frame (2); the left side of the shaft (1002) is bolted to the output end of the motor (1001); the spiral blade (1003) is welded to the outside of the shaft (1002); the spiral blade (1003) is located on the inside of the oil filter assembly (9); and the right side of the spiral blade (1003) is located inside the drain hole (11).

2. The oil drain structure of a semiconductor dedicated spark machine according to claim 1, characterized in that: The oil filter assembly (9) comprises an angled plate (901) and an oil filter screen (902), wherein the angled plate (901) is bolted to the front and rear sides of the bottom side of the guide frame (2), and the oil filter screen (902) is welded to the inner side of the angled plate (901), and the bottom side of the oil filter screen (902) contacts the surface of the spiral blade (1003).

3. The oil drain structure of a semiconductor dedicated spark machine according to claim 1, characterized in that: The slag discharge assembly (12) comprises a discharge pipe (1201) and a solenoid valve (1202), wherein the discharge pipe (1201) is connected to the right side of the discharge hole (11), and the solenoid valve (1202) is connected to the right side of the discharge pipe (1201).

4. The oil drain structure of a semiconductor dedicated spark machine according to claim 1, characterized in that: A base plate (13) is bolted to the bottom of the oil drain tank (1), and the four corners of the base plate (13) are all concave.

5. The oil drain structure of a semiconductor dedicated spark machine according to claim 1, characterized in that: Support rods (14) are bolted to both sides of the oil drain tank (1), and one end of the support rod (14) away from the oil drain tank (1) is sleeved on the outside of the guide tube (4).

6. The oil drain structure of a semiconductor-specific spark machine according to claim 1, characterized in that: The outer side of the motor (1001) is provided with a protective sleeve (15), and the right side of the protective sleeve (15) is bolted to the left side of the guide frame (2).

7. The oil drain structure of a semiconductor-specific spark machine according to claim 6, characterized in that: The top and the bottom of the protective sleeve (15) are both provided with heat dissipation holes (16), and the heat dissipation holes (16) are in the shape of circular hole grooves.

8. The oil drain structure of a semiconductor-specific spark machine according to claim 3, characterized in that: The right side of the solenoid valve (1202) is connected to a downflow pipe (17), and the downflow pipe (17) is in the shape of a curved pipe.

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