Adjustable uniform flow plate electrolytic polishing hanging jig

Abstract

The utility model relates to the technical field of surface treatment electrolytic polishing, in particular to an adjustable uniform flow plate electrolytic polishing hanging jig which comprises an anode elbow, an anode hanging rod, a connecting rod, a titanium clamp and a supporting block. One end of the anode elbow is provided with a U-shaped back bend which is connected with the fly handle, and a through hole A of the anode elbow is fixed at a proper position on a U-shaped groove of the anode hanging rod through a screw; the connecting rod is fixed at a proper position on the U-shaped groove of the anode hanging rod through a screw; the titanium clamps are installed on the two anode hanging rods and clamp the two sides of the flow uniformizing plate, and the supporting blocks are installed on the U-shaped grooves of the connecting rods and support the bottom of the flow uniformizing plate. The hanging jig disclosed by the utility model is good in conductivity and uniform in current distribution, and the electrolytic polishing quality of parts is ensured. The titanium clamps and the supporting blocks can be adjusted and clamp the two end faces of the part according to the actual size of the part, interference or part deformation is avoided, the frame structure ensures that the side wall and the bottom face of the part are transparent, and flowing of tank liquid is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of surface treatment electrolytic polishing, in particular to an adjustable flow equalizer plate electrolytic polishing upper hanging fixture. Background Art

[0002] In the semiconductor field, the processing of wafers requires the use of a combination of multiple processes. Among them, the use of vapor deposition equipment is becoming more and more widespread. With the promotion of vapor deposition equipment, the requirements for the uniformity of gas transmission in the equipment are becoming higher and higher. The uniformity of gas transmission will directly affect the quality and stability of wafer product processing. The current mainstream design is to choose a porous flow plate to evenly disperse the process gas. There are thousands of small holes on its surface with a small diameter. It needs to be electropolished to remove the burrs of the small holes. Therefore, the hanging problem of the electrolytic polishing of the flow plate is also a key issue in the actual use of the overall performance. Utility Model Content

[0003] In order to solve the above technical problems, the utility model discloses an adjustable flow-distributing plate electrolytic polishing upper hanging fixture.

[0004] The specific technical solutions are as follows:

[0005] An adjustable electrolytic polishing upper hanging fixture for a flow equalizer plate comprises a pair of anode elbows, a pair of anode hanging rods, a connecting rod, a pair of titanium clamps and a pair of support blocks; one end of the anode elbow has a U-shaped return bend for connecting with a flying handle, and the other end has a through hole A; the anode hanging rod is vertically arranged and has a U-shaped groove in the vertical direction, and the through hole A of the anode elbow is fixed to an appropriate position on the U-shaped groove of the anode hanging rod by screws; the connecting rod is horizontally arranged at the lower part of a pair of anode hanging rods and has a U-shaped groove in the horizontal direction, and the connecting rod is fixed to an appropriate position on the U-shaped groove of the anode hanging rod by screws; the titanium clamps are respectively installed on two anode hanging rods to clamp the two sides of the flow equalizer plate, and the support block is installed on the U-shaped groove of the connecting rod by screws to support the bottom of the flow equalizer plate.

[0006] The titanium clamp comprises a body and a connecting block. The body is an integrally formed U-shaped structure, comprising a closed end and an open end. The open end comprises a fixed end and a bite end, and a waist-shaped hole is provided on one of the bite ends. The connecting block is welded to the fixed end of the body, threaded holes are provided at both ends of the connecting block, and a through hole B is provided in the middle. The connecting block is fixed to the U-shaped groove of the anode hanging rod by screws passing through the threaded holes. The screws pass through the waist-shaped holes and the through hole B and cooperate with the nuts to achieve contact, fixation and conduction between the titanium clamp and the uniform flow plate.

[0007] The main body is formed by bending 1.5 mm sheet metal.

[0008] The upper corner of the support block is beveled to form a support part, and a groove is provided in the support part. The width of the groove corresponds to the thickness of the flow equalizer plate, and supports the bottom of the flow equalizer plate; a through hole C is provided at the bottom of the support block, and a slide groove is provided upward to form a mounting beam. The width of the slide groove corresponds to the thickness of the connecting rod. After the mounting beam of the support block straddles the connecting rod, it is fixed to an appropriate position on the U-shaped groove of the connecting rod by screws passing through the through hole C.

[0009] The supporting parts of the two supporting blocks face each other inwardly and jointly support the bottom of the flow equalizer plate.

[0010] The anode hanging rod, titanium clip, connecting block, connecting rod and supporting block are all made of pure titanium, and all edges are chamfered with R angles for smooth transition.

[0011] The anode elbows are all made of red copper.

[0012] Compared with the prior art, the utility model has the following beneficial technical effects:

[0013] The anode hanging rod, titanium clamp, connecting block, connecting rod and supporting block of the utility model are all made of pure titanium. The tooling and fixtures have good conductivity and even current distribution, which ensures the quality of electrolytic polishing of parts. The titanium clamp and supporting block used to fix the flow plate parts of the utility model can be adjusted according to the actual size of the parts, and the two end faces of the parts can be clamped according to the use requirements, without interfering with the key positions of the parts or causing deformation of the parts. The utility model forms a frame structure by connecting the anode elbow, the anode hanging rod and the connecting rod. The side walls and bottom surfaces of the parts are transparent, which is conducive to the flow of the tank liquid. The overall weight is light, which ensures the reliability and stability of the clamping of the electrolytic polishing parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the structure of the upper hanging fixture of the utility model;

[0015] Figure 2 This is a schematic diagram of the structure of the titanium clip of the utility model;

[0016] Figure 3 It is a structural schematic diagram of the support block of the utility model.

[0017] In the figure, 1. flow equalizer; 2. anode elbow; 3. anode hanging rod; 4. connecting rod; 5. connecting block; 6. titanium clamp; 7. supporting block; 8. return bend; 9. through hole A; 10. U-shaped groove; 11. screw; 12. threaded hole; 13. waist-shaped hole; 14. through hole B; 15. fixed end; 16. bite end; 17. closed end; 18. slide groove; 19. through hole C; 20. supporting part; 21. groove; 22. mounting beam. DETAILED DESCRIPTION

[0018] The present invention will be further described below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the accompanying drawings.

[0019] Figure 1 It is a structural schematic diagram of the upper hanging fixture of the utility model. As shown in the figure, the utility model adjustable electrolytic polishing upper hanging fixture of the uniform flow plate includes a pair of anode elbows 2, a pair of anode hanging rods 3, a connecting rod 4, a pair of titanium clamps 6 and a pair of support blocks 7; one end of the anode elbow 2 has a U-shaped return bend 8 for connecting with the handle of the electrolytic polishing treatment device, and the other end has a through hole A9; the anode hanging rod 3 is vertically arranged and a U-shaped groove 10 is provided in the vertical direction, and the through hole A9 of the anode elbow 2 is fixed to the appropriate position on the U-shaped groove 10 of the anode hanging rod 3 by screws; the connecting rod 4 is horizontally arranged at the lower part of a pair of anode hanging rods 3 and a U-shaped groove 10 is provided in the horizontal direction, and the connecting rod 4 is fixed to the appropriate position on the U-shaped groove 10 of the anode hanging rod 3 by screws 11; the titanium clamps 6 are respectively installed on the two anode hanging rods 3 to clamp the two sides of the uniform flow plate 1, and the support block 7 is installed on the U-shaped groove 10 of the connecting rod 4 by screws 11 to support the bottom of the uniform flow plate 1.

[0020] Figure 2 This is a schematic diagram of the structure of the titanium clamp of the utility model. As shown in the figure, the titanium clamp 6 includes a main body and a connecting block 5. The main body is a U-shaped structure formed by bending a 1.5 mm sheet metal, including a closed end 17 and an open end. The open end includes a fixed end 15 and a bite end 16. A waist-shaped hole 13 is provided on one end of the bite end 16; the connecting block 5 is welded to the fixed end 15 of the main body, threaded holes 12 are provided at both ends of the connecting block 5, and a through hole B14 is provided in the middle. The connecting block 5 is fixed to the U-shaped groove 10 of the anode hanging rod 3 by means of screws 11 passing through the threaded holes 12; the screws 11 pass through the waist-shaped holes 13 and the through holes B14 and cooperate with the nuts to achieve contact, fixation and conduction between the titanium clamp 6 and the uniform flow plate 1.

[0021] Figure 3 This is a schematic diagram of the structure of the support block of the utility model. As shown in the figure, the support parts 20 of the two support blocks 7 face each other inwardly and jointly support the bottom of the flow equalizer plate 1. The upper corner of the support block 7 is beveled to form the support part 20. A groove 21 is provided in the support part 20. The width of the groove 21 corresponds to the thickness of the flow equalizer plate 1 to support the bottom of the flow equalizer plate 1. A through hole C19 is provided at the bottom of the support block 7, and a slide groove 18 is provided upward to form a mounting beam 22. The width of the slide groove 18 corresponds to the thickness of the connecting rod 4. The mounting beam 22 of the support block 7 is straddled on the connecting rod 4 and is fixed to an appropriate position on the U-shaped groove 10 of the connecting rod 4 by screws 11 passing through the through hole C19.

[0022] The anode hanging rod 3, titanium clip 6, connecting block 5, connecting rod 4 and supporting block 7 are all made of pure titanium, and all edges are chamfered with R angles for smooth transition. The anode elbow is made of red copper to ensure the conductivity of the fixture as a whole during the electrolytic polishing process.

[0023] When in use, first install the flow plate 1 and the upper hanging fixture, wherein the installation position of the anode elbow 2 on the U-shaped groove 10 of the anode hanging rod 3, the installation position of the connecting block 5 on the U-shaped groove 10 of the anode hanging rod 3, the installation position of the connecting rod 4 on the U-shaped groove 10 of the anode hanging rod 3, and the installation position of the supporting block 7 on the U-shaped groove 10 of the connecting rod 4 can be adjusted according to the shape and size of the flow plate 1. Then select the appropriate hanging direction (can be adjusted using the L rod), connect it with the flying handle, confirm that the connection is firm, slowly put the fixture and parts into the tank liquid, and start production.

Claims

1. An adjustable flow plate electrolytic polishing upper hanging fixture, characterized by: The invention comprises a pair of anode elbows (2), a pair of anode hanging rods (3), a connecting rod (4), a pair of titanium clamps (6) and a pair of supporting blocks (7); one end of the anode elbow (2) is provided with a U-shaped return bend (8) for connecting with a flying handle, and the other end is provided with a through hole A (9); the anode hanging rod (3) is vertically arranged and has a U-shaped groove (10) in the vertical direction, and the through hole A (9) of the anode elbow (2) is fixed on the U-shaped groove (10) of the anode hanging rod (3) by means of a screw (11). When in position; the connecting rod (4) is horizontally arranged at the lower part of a pair of anode hanging rods (3) and has a U-shaped groove (10) in the horizontal direction, and the connecting rod (4) is fixed to an appropriate position on the U-shaped groove (10) of the anode hanging rod (3) by means of screws (11); the titanium clamp (6) is respectively installed on the two anode hanging rods (3) to clamp the two sides of the flow equalizer (1), and the support block (7) is installed on the U-shaped groove (10) of the connecting rod (4) by means of screws (11) to support the bottom of the flow equalizer (1).

2. The adjustable flow plate electrolytic polishing upper hanging fixture according to claim 1 is characterized in that: The titanium clamp (6) comprises a body and a connecting block (5); the body is an integrally formed U-shaped structure, comprising a closed end (17) and an open end; the open end comprises a fixed end (15) and a bite end (16); a waist-shaped hole (13) is provided on one end of the bite end (16); the connecting block (5) is welded to the fixed end (15) of the body; threaded holes (12) are provided at both ends of the connecting block (5); a through hole B (14) is provided in the middle; the connecting block (5) is fixed to the U-shaped groove (10) of the anode hanging rod (3) by means of screws (11) passing through the threaded holes (12); the screws (11) pass through the waist-shaped holes (13) and the through holes B (14) and cooperate with nuts to achieve contact, fixation and electrical conduction between the titanium clamp (6) and the flow equalizer (1).

3. The adjustable flow plate electrolytic polishing upper hanging fixture according to claim 2 is characterized in that: The main body is formed by bending 1.5 mm sheet metal.

4. The adjustable flow plate electrolytic polishing upper hanging fixture according to claim 2 is characterized in that: An upper corner of the support block (7) is beveled to form a support portion (20), a groove (21) is provided in the support portion (20), the width of the groove (21) corresponds to the thickness of the flow equalizer (1), and supports the bottom of the flow equalizer (1); a through hole C (19) is provided at the bottom of the support block (7), and a slide groove (18) is provided upward to form a mounting beam (22), the width of the slide groove (18) corresponds to the thickness of the connecting rod (4), and the mounting beam (22) of the support block (7) is straddled on the connecting rod (4) and fixed to an appropriate position on the U-shaped groove (10) of the connecting rod (4) by means of screws (11) passing through the through hole C (19).

5. The adjustable flow plate electrolytic polishing upper hanging fixture according to claim 2 is characterized in that: The supporting parts (20) of the two supporting blocks (7) face each other inwardly and jointly support the bottom of the flow equalizer plate (1).

6. The adjustable flow plate electrolytic polishing upper hanging fixture according to claim 1 is characterized in that: The anode hanging rod (3), titanium clamp (6), connecting block (5), connecting rod (4) and supporting block (7) are all made of pure titanium, and all edges are chamfered with R angles to provide a smooth transition.

7. The adjustable flow plate electrolytic polishing upper hanging fixture according to claim 1 is characterized in that: The anode elbow (2) is made of red copper.

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