Crystal pulling furnace

By designing rotating and lifting components in the crystal lifting furnace, the corrugated tube is avoided from being compressed and the insulation components are used to reduce heat loss, the temperature problems caused by corrugated tube compression are solved and the crystal forming quality and efficiency are improved.

CN222160463UActive Publication Date: 2024-12-13宁波翌波光电科技有限公司
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Patent Information

Application Number
CN202420514346.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-18
Publication Date
2024-12-13
Estimated Expiration
2034-03-18

AI Technical Summary

Technical Problem

In existing crystal lifting furnaces, the corrugated tube is compressed due to pulling during the crystal extraction stage, causing gases with lower temperatures to enter the furnace chamber, affecting the heat field distribution and crystal forming quality.

Method used

A crystal lifting furnace including a rotating assembly, a lifting assembly and a guide limiting assembly is designed to control the rotation and lifting of the lifting rod by the first and second driving motors to avoid the compression of the corrugated pipe and reduce the heating of the crucible through the insulation assembly. Heat loss during the process.

Benefits of technology

The normal rotation and lifting of the lift rod in the furnace chamber is achieved, which prevents the entry of gas with lower temperatures, improves the crystal molding quality and molding efficiency, and ensures the thermal field stability in the furnace chamber.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of crystal production, in particular to a crystal pulling furnace. Comprising a lifting furnace body and an L-shaped mounting plate, the L-shaped mounting plate is fixedly arranged at the top end of the lifting furnace body, an observation window facilitating observation of the lifting state of a crystal is arranged outside the lifting furnace body, a containing cavity is formed in the lifting furnace body, and a containing disc facilitating crystal machining is movably arranged in the containing cavity. A placing disc is arranged on the lifting furnace body, a heating coil for heating raw materials is fixedly arranged on the placing disc, a crucible for containing the raw materials is arranged in the heating coil, a crystal traction mechanism for lifting crystals is arranged at the top end of the lifting furnace body, and a heat preservation assembly for reducing heat loss in the crucible heating process is arranged outside the heating coil. According to the crystal pulling furnace provided by the utility model, due to the design of the crystal traction mechanism, the corrugated pipe is prevented from being compressed, meanwhile, the seed crystal rod can rotationally pull the crystal in the crucible, and the forming quality of the crystal is improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of crystal growth, in particular to a crystal pulling furnace. Background Art

[0002] The Czochralski method is a method of growing high-quality single crystals from a melt. In the 1960s, the Czochralski method was further developed into a more advanced method of shaped crystal growth - the melt-guided mold method, which is a growth technology that directly pulls crystals with various cross-sectional shapes from the melt.

[0003] Most of the crystal pulling furnaces in the prior art are equipped with bellows to protect the pulling rods, so as to prevent dust from adhering to the exposed parts of the lifting rods and entering the interior of the crystal pulling furnace during the up and down movement of the lifting rods, thereby ensuring the molding quality of the produced crystals. However, the temperature inside the bellows is lower than the temperature in the furnace chamber. During the crystal seeding stage, because the lifting rods need to carry the seed crystal rods downward, the bellows mounted on the lifting rods will be pulled by the lifting rods and compressed, which will cause the gas with lower temperature in the bellows to enter the furnace chamber and affect the heat field distribution in the furnace chamber, which will have an adverse effect on the growth of the crystals.

[0004] To this end, we designed a crystal pulling furnace to provide another technical solution to the above technical problems. Utility Model Content

[0005] Based on this, it is necessary to provide a crystal pulling furnace that can achieve normal crystal seeding while avoiding compression of the bellows in order to solve the above technical problems.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] A crystal pulling furnace comprises a pulling furnace body and an L-shaped mounting plate, wherein the L-shaped mounting plate is fixedly arranged at the top of the pulling furnace body, an observation window is arranged on the outside of the pulling furnace body for observing the pulling state of the crystal, a placement cavity is arranged on the inside of the pulling furnace body, a placement disk is movably arranged in the placement cavity for facilitating crystal processing, a heating coil for heating raw materials is fixedly arranged on the placement disk, a crucible for holding raw materials is arranged inside the heating coil, a crystal traction mechanism for pulling the crystal is arranged on the top of the pulling furnace body, and an insulation component is arranged on the outside of the heating coil for reducing heat loss during the heating of the crucible.

[0008] Preferably, the crystal pulling mechanism includes a rotating assembly for controlling the rotation of the lifting rod and a lifting assembly for controlling the lifting of the lifting rod, the rotating assembly includes a first driving motor fixedly mounted on the top of the L-shaped mounting plate, the output end of the first driving motor passes through the L-shaped mounting plate and is connected to a lifting rod for pulling the crystal, one end of the lifting rod is fixedly connected to the output end of the first driving motor, and the other end of the lifting rod passes through the main body of the pulling furnace and is threadedly connected to a seed crystal rod for pulling the crystal;

[0009] The outer sleeve of the lifting rod is provided with a bellows for protecting the lifting rod, one end of the bellows is fixedly connected to the L-shaped mounting plate, the other end of the bellows is fixedly connected to an annular rotating block, the top of the pulling furnace body is provided with a rotating disk matching the annular rotating block, the annular rotating block and the rotating disk are rotatably connected to a side of the pulling furnace body close to a plurality of ball bearings 1, the rotating disk and the pulling furnace body are respectively provided with an annular slide groove 1 and annular slide groove 2 matching the ball bearing 1.

[0010] Preferably, the lifting rod is divided into a lifting rod 1 connected to the output end of the first driving motor and a lifting rod 2 connected to the seed crystal rod. The lifting rod 2 is slidably arranged inside the lifting rod 1, and a plurality of ball bearings 2 are rotatably connected to the longitudinal sides of the lifting rod 2, and racks are fixedly connected to the lateral sides of the lifting rod 2. A cavity matching the lifting rod 2 is provided inside the lifting rod 1.

[0011] Preferably, the lifting assembly comprises L-shaped mounting blocks symmetrically arranged on the rotating disc, the rotating disc is provided with mounting grooves for facilitating the installation of the lifting assembly, a second driving motor is fixedly arranged on one of the L-shaped mounting blocks, an output end of the second driving motor passes through the L-shaped mounting block and is fixedly connected with a driving gear 1, and a driven gear 1 cooperating with the driving gear 1 is rotatably connected on the other L-shaped mounting block, and a toothed belt 1 for transmission is sleeved on the outside of the driving gear 1 and the driven gear 1;

[0012] A rotating shaft 1 is fixedly arranged on the side of the driving gear 1 and the driven gear 1 close to the rotating disk, and the rotating shaft 1 is rotatably arranged in the mounting groove, and a driving gear 2 is fixedly arranged on the outside of the rotating shaft 1, and a driven gear 2 matching with the driving gear 2 is rotatably connected in the mounting groove, and a toothed belt 2 for transmission is sleeved on the outside of the driving gear 2 and the driven gear 2, and a rotating shaft 2 is fixedly connected on the side of the driven gear 2 close to the pulling furnace body, and a driving bevel gear is fixedly connected on the end of the rotating shaft 2 away from the driven gear 2, and a driven bevel gear is meshed on the driving bevel gear, and a rotating shaft 3 is fixedly arranged in the middle of the driven bevel gear, and the two ends of the rotating shaft 3 are rotatably connected to the inner wall of the mounting groove respectively, and a spur gear meshing with a rack is provided on the side of the rotating shaft 3 away from the driven bevel gear.

[0013] Preferably, the crystal pulling mechanism also includes a guide limit assembly for limiting the lifting and lowering position of the lifting rod 2, the guide limit assembly includes a ball 3 arranged at the top end of a plurality of ball 2s, the ball 3 is rotatably arranged on the lifting rod 2, the lifting rod 1 is provided with a limit groove matching the ball 3, and the top inner wall of the crystal furnace body is provided with a conical limit ring for limiting the position of the lifting rod 2.

[0014] Preferably, the insulation component includes an insulation cylinder arranged outside the heating coil, the insulation cylinder is divided into two parts, a cylinder cover and a cylinder body, the movable cover of the cylinder cover is arranged at the top of the cylinder body, the top of the cylinder cover is provided with a handle for easy picking, and the middle part of the cylinder cover is fixedly provided with an annular block that cooperates with the lifting rod.

[0015] It can be seen without a doubt that the above-mentioned technical solution of the present application can definitely solve the technical problem to be solved by the present application.

[0016] At the same time, through the above technical scheme, the utility model has at least the following beneficial effects:.

[0017] 1. The utility model provides a crystal pulling furnace, which realizes the normal rotation of the pulling rod in the furnace chamber while avoiding the compression of the bellows through the design of the rotating assembly, thereby ensuring the normal operation of the crystal seeding stage.

[0018] 2. The utility model provides a crystal pulling furnace, which, through the design of the lifting assembly, can achieve normal traction of the crystal by the pulling rod while avoiding the compression of the bellows, thereby preventing the low-temperature gas in the bellows from entering the furnace chamber, affecting the heat field distribution in the furnace chamber, and improving the molding quality of the crystal.

[0019] 3. The crystal pulling furnace provided by the utility model limits the lifting and lowering position of the pulling rod through the design of the guide limit assembly, thereby ensuring the stability of the pulling rod in the process of pulling the seed crystal rod and improving the practical performance of the device.

[0020] 4. The crystal pulling furnace provided by the utility model reduces the heat loss during the crucible heating process through the design of the heat preservation component, thereby shortening the time for heating the crucible to the crystal growth temperature and improving the crystal forming efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 This is a schematic diagram of the axial structure of the utility model;

[0023] Figure 2 It is a structural schematic diagram of the main body of the pulling furnace of the utility model in an open state;

[0024] Figure 3 This is a schematic diagram of the matching structure of the heat preservation tube and the heating coil of the utility model;

[0025] Figure 4 It is a schematic diagram of the matching structure of the annular rotating block, the rotating disc and the main body of the pulling furnace of the utility model;

[0026] Figure 5 It is a schematic diagram of the matching structure of the lifting rod 1 and the lifting rod 2 of the utility model;

[0027] Figure 6 It is a structural schematic diagram of the lifting assembly of the utility model;

[0028] Figure 7 It is a structural schematic diagram of the guide and limit assembly of the utility model;

[0029] Figure 8 It is a structural schematic diagram of the closed state of the annular block of the utility model;

[0030] Fig. 9 It is a structural schematic diagram of the annular block of the utility model in the open state.

[0031] In the figure: 1. main body of the lifting furnace; 2. L-shaped mounting plate; 3. observation window; 4. placement cavity; 5. placement disc; 6. heating coil; 7. crucible; 8. first drive motor; 9. lifting rod; 10. seed crystal rod; 11. bellows; 12. annular rotating block; 13. rotating disc; 14. ball bearing 1; 15. annular chute 1; 16. annular chute 2; 17. lifting rod 1; 18. lifting rod 2; 19. ball bearing 2; 20. rack; 21. cavity; 22. L-shaped mounting plate block; 23, second drive motor; 24, driving gear one; 25, driven gear one; 26, toothed belt one; 27, rotating shaft one; 28, driving gear two; 29, driven gear two; 30, toothed belt two; 31, rotating shaft two; 32, driving bevel gear; 33, driven bevel gear; 34, rotating shaft three; 35, spur gear; 36, ball bearing three; 37, limiting groove; 38, conical limiting ring; 39, insulation cylinder; 40, cylinder cover; 41, cylinder body; 42, handle; 43, annular block. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0033] Embodiment 1

[0034] Reference Figure 1-9 A crystal pulling furnace comprises a pulling furnace body 1 and an L-shaped mounting plate 2, the L-shaped mounting plate 2 is fixedly arranged on the top of the pulling furnace body 1, an observation window 3 is arranged on the outside of the pulling furnace body 1 for observing the pulling state of the crystal, a placing cavity 4 is arranged inside the pulling furnace body 1, a placing disc 5 is movably arranged in the placing cavity 4 for facilitating crystal processing, a heating coil 6 for heating raw materials is fixedly arranged on the placing disc 5, a crucible 7 for holding raw materials is arranged inside the heating coil 6, a crystal traction mechanism for pulling the crystal is arranged on the top of the pulling furnace body 1, and an insulation component is arranged on the outside of the heating coil 6 for reducing heat loss during the heating process of the crucible 7.

[0035] Through the design of the crystal pulling mechanism, the seed crystal rod 10 can rotate and pull the crystal in the crucible 7 while avoiding the bellows 11 from being compressed, thereby preventing the low-temperature gas in the bellows 11 from entering the furnace chamber, affecting the thermal field distribution in the furnace chamber, and improving the molding quality of the crystal.

[0036] Reference Figure 2-4 The crystal pulling mechanism includes a rotating assembly for controlling the rotation of the lifting rod 9 and a lifting assembly for controlling the lifting rod 9 to rise and fall. The rotating assembly includes a first driving motor 8 fixedly mounted on the top of the L-shaped mounting plate 2. The output end of the first driving motor 8 passes through the L-shaped mounting plate 2 and is connected to the lifting rod 9 for pulling the crystal. One end of the lifting rod 9 is fixedly connected to the output end of the first driving motor 8. The other end of the lifting rod 9 passes through the pulling furnace body 1 and is threadedly connected to a seed crystal rod 10 for pulling the crystal.

[0037] The outer sleeve of the lifting rod 9 is provided with a bellows 11 for protecting the lifting rod 9, one end of the bellows 11 is fixedly connected to the L-shaped mounting plate 2, and the other end of the bellows 11 is fixedly connected to an annular rotating block 12. The top of the pulling furnace body 1 is provided with a rotating disk 13 that matches the annular rotating block 12. The annular rotating block 12 and the rotating disk 13 are rotatably connected to a side of the pulling furnace body 1 close to a plurality of ball bearings 14. The rotating disk 13 and the pulling furnace body 1 are respectively provided with an annular chute 15 and an annular chute 2 16 that match the ball bearing 14. Specifically, in the utility model, the lifting rod is realized by the design of the first drive motor 8. 9 rotates inside the pulling furnace body 1 to ensure the normal progress of the crystal seeding stage; the lifting rod 9 is protected by the design of the bellows 11, thereby preventing external dust from adhering to the lifting rod 9 and entering the inside of the pulling furnace body 1, thereby ensuring the molding quality of the crystal; through the design of the annular rotating block 12, the rotating disk 13, the ball one 14, the annular slide groove one 15 and the annular slide groove two 16, the relative sliding between the annular rotating block 12, the rotating disk 13 and the pulling furnace body 1 is achieved, so that the lifting rod 9 can be lifted and lowered normally in coordination with the lifting component, while avoiding the squeezing of the bellows 11, thereby improving the practical performance of the device.

[0038] Reference Figure 3 and Figure 5 The lifting rod 9 is divided into a lifting rod 17 connected to the output end of the first driving motor 8 and a lifting rod 18 connected to the seed crystal rod 10. The lifting rod 18 is slidably arranged inside the lifting rod 17. A plurality of ball bearings 19 are rotatably connected to the longitudinal sides of the lifting rod 18. A rack 20 is fixedly connected to the lateral sides of the lifting rod 18. A cavity 21 matching the lifting rod 18 is provided inside the lifting rod 17. Specifically, in the utility model, through the design of the ball bearings 19 and the rack 20, and in coordination with the lifting assembly, the lifting rod 18 can be lifted and lowered inside the pulling furnace body 1 without compressing the bellows 11, thereby effectively avoiding the squeezing of the air inside the bellows 11 and ensuring the stability of the internal thermal field during crystal growth.

[0039] Reference Figure 5-6 The lifting assembly includes an L-shaped mounting block 22 symmetrically arranged on the rotating disc 13. The rotating disc 13 is provided with a mounting groove for facilitating the installation of the lifting assembly. A second driving motor 23 is fixedly arranged on one of the L-shaped mounting blocks 22. The output end of the second driving motor 23 passes through the L-shaped mounting block 22 and is fixedly connected to a driving gear 24. A driven gear 25 matching the driving gear 24 is rotatably connected to the other L-shaped mounting block 22. The driving gear 24 and the driven gear 25 are externally sleeved with a toothed belt 26 for transmission.

[0040] A rotating shaft 27 is fixedly arranged on the side of the driving gear 1 24 and the driven gear 1 25 close to the rotating disc 13. The rotating shaft 27 is rotatably arranged in the mounting groove. A driving gear 28 is fixedly arranged on the outside of the rotating shaft 27. A driven gear 29 matching the driving gear 28 is rotatably connected in the mounting groove. A toothed belt 2 30 for transmission is sleeved on the outside of the driving gear 28 and the driven gear 29. A rotating shaft 21 is fixedly connected to the side of the driven gear 29 close to the pulling furnace body 1. A driving bevel gear 32 is fixedly connected to the end of the rotating shaft 31 away from the driven gear 29. A driven bevel gear 33 is meshed with the driving bevel gear 32, and a rotating shaft 34 is fixed in the middle of the driven bevel gear 33. The two ends of the rotating shaft 34 are rotatably connected to the inner walls of the mounting groove respectively, and a spur gear 35 meshing with the rack 20 is provided on the side of the rotating shaft 34 away from the driven bevel gear 33. Specifically, in the utility model, through the design of the lifting assembly, the normal traction of the crystal by the lifting rod 9 is achieved while avoiding the compression of the bellows 11, thereby preventing the low-temperature gas in the bellows 11 from entering the furnace chamber, affecting the heat field distribution in the furnace chamber, and improving the molding quality of the crystal.

[0041] When the crystal raw material in the crucible 7 is rotated and pulled, the second drive motor 23 is started. At this time, the second drive motor 23 rotates forward, driving the driving gear 1 24 to rotate, and drives the driven gear 1 25 to rotate synchronously through the toothed belt 1 26, and drives the driving gear 2 28 to rotate through the rotating shaft 1 27. At this time, the driving gear 2 28 drives the driven gear 2 29 to rotate through the toothed belt 2 30, and drives the driving bevel gear 32 to rotate through the rotating shaft 2 31. At this time, the driven bevel gear 33 meshing with the driving bevel gear 32 drives the rotating shaft 3 34 rotates, thereby causing the spur gear 35 on the rotating shaft three 34 to rotate, and drives the lifting rod two 18 to move inside the lifting rod one 17. When the seed crystal rod 10 at the end of the lifting rod two 18 moves into the crucible 7, the first driving motor 8 drives the lifting rod one 17 to rotate. At this time, the lifting rod two 18 sleeved inside the lifting rod one 17 drives the seed crystal rod 10 to rotate in the crucible 7. At the same time, the second driving motor 23 reverses, driving the seed crystal rod 10 to rotate and pull upward, thereby realizing the lifting of the crystal raw material in the crucible 7.

[0042] Reference Figure 5 and Figure 7The crystal pulling mechanism also includes a guide limit assembly for limiting the lifting position of the lifting rod 18, the guide limit assembly includes a ball 36 arranged at the top of a plurality of ball 2s 19, the ball 36 is rotatably arranged on the lifting rod 18, the lifting rod 17 is provided with a limit groove 37 matching the ball 36, and the top inner wall of the crystal furnace body is provided with a conical limit ring 38 for limiting the position of the lifting rod 18. Specifically, in the utility model, the lifting position of the lifting rod 18 in the pulling furnace is limited by the design of the guide limit assembly, so as to avoid the lifting rod 18 extending too long from the lifting rod 17, and the end thereof connected to the seed crystal rod 10 is prevented from rotating unsteadily under the action of a large centrifugal force, thereby improving the practical performance of the device;

[0043] It should be noted that, in the present embodiment, the size of ball three 36 is slightly larger than that of ball two 19. Through this design, while ensuring the normal extension and retraction of lifting rod two 18, the extension limit position of lifting rod two 18 is limited, thereby avoiding the mutual detachment between lifting rod two 18 and lifting rod one 17, thereby improving the stability of the operation of the device; on the other hand, the conical limit ring 38 is a conical design with a narrow upper part and a wide lower part. Through this design, while ensuring the stable rotation of lifting rod two 18, it is ensured that the seed crystal rod 10 can normally pull the crystal in the crucible 7 upward, thereby ensuring the normal operation of the device.

[0044] Reference Figure 8-9 The heat preservation component includes a heat preservation cylinder 39 arranged outside the heating coil 6, and the heat preservation cylinder 39 is divided into a cylinder cover 40 and a cylinder body 41. The cylinder cover 40 is movable and arranged at the top of the cylinder body 41. The top of the cylinder cover 40 is provided with a handle 42 for easy taking. The middle part of the cylinder cover 40 is fixed with an annular block 43 that matches the lifting rod 9. Specifically, in the utility model, the heat loss during the heating process of the crucible 7 is reduced through the design of the heat preservation component, thereby reducing the time for the crucible 7 to be heated to the crystal growth temperature and improving the crystal forming efficiency.

[0045] It should be noted that, in the present invention, the annular block 43 is made of memory metal material. Through this design, it is possible to reduce the heat loss during the heating process of the crucible 7 and ensure the normal penetration of the seed crystal rod 10 after the temperature is stabilized. When the temperature in the insulation tube 39 reaches the deformation temperature of the memory metal, the middle part of the annular block 43 gradually expands outward to form a through hole that is much larger than the size of the seed crystal rod 10, so as to ensure that the seed crystal rod 10 pulls the crystal in the crucible 7 and realizes the normal preparation of the crystal.

[0046] The use process of a crystal pulling furnace provided by the utility model is as follows:

[0047] When the operator is pulling the crystal raw material, he opens the cavity door of the pulling furnace body 1, lifts up the cylinder cover 40 of the insulation cylinder 39, puts the crucible 7 containing the raw material into the heating coil 6, screws the top end of the seed crystal rod 10 into the pulling rod 2 18, covers the cylinder cover 40 and closes the cavity door of the pulling furnace body 1, and controls the heating coil 6 to heat the crucible 7. When the temperature in the crucible 7 reaches the suitable growth temperature of the crystal, the middle part of the annular block 43 gradually expands outward to form a through hole much larger than the size of the seed crystal rod 10. At this time, the second drive motor 23 is controlled to rotate forward, driving the lifting rod 2 18 and the seed crystal rod 10 to descend and pass through the through hole into the crucible 7, and then starts the first drive motor 8 to drive the lifting rod 2 18 and the seed crystal rod 10 to rotate. At this time, the second drive motor 23 is controlled to reverse, so that the seed crystal rod 10 drives the crystal raw material to continuously pull upward, so that the molecules inside the crystal raw material are continuously arranged and reorganized, and the pulling preparation of the crystal raw material can be realized.

[0048] The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to only specific implementation methods. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A crystal pulling furnace, comprising a pulling furnace body (1) and an L-shaped mounting plate (2), characterized in that: The L-shaped mounting plate (2) is fixedly arranged on the top of the pulling furnace body (1); an observation window (3) is arranged on the outside of the pulling furnace body (1) for observing the crystal pulling state; a placement cavity (4) is arranged inside the pulling furnace body (1); a placement disk (5) is movably arranged inside the placement cavity (4) for facilitating crystal processing; a heating coil (6) for heating the raw material is fixedly arranged on the placement disk (5); a crucible (7) for holding the raw material is arranged inside the heating coil (6); a crystal traction mechanism for pulling the crystal is arranged on the top of the pulling furnace body (1); and an insulation component is arranged outside the heating coil (6) for reducing heat loss during the heating process of the crucible (7).

2. A crystal pulling furnace according to claim 1, characterized in that: The crystal pulling mechanism comprises a rotating assembly for controlling the rotation of the lifting rod (9) and a lifting assembly for controlling the lifting rod (9) to rise and fall, the rotating assembly comprising a first driving motor (8) fixedly arranged at the top end of the L-shaped mounting plate (2), the output end of the first driving motor (8) passing through the L-shaped mounting plate (2) and connected to a lifting rod (9) for lifting the crystal, one end of the lifting rod (9) is fixedly connected to the output end of the first driving motor (8), and the other end of the lifting rod (9) passes through the pulling furnace body (1) and is threadedly connected to a seed crystal rod (10) for pulling the crystal; The outer sleeve of the lifting rod (9) is provided with a bellows (11) for protecting the lifting rod (9), one end of the bellows (11) is fixedly connected to the L-shaped mounting plate (2), and the other end of the bellows (11) is fixedly connected to an annular rotating block (12). The top of the pulling furnace body (1) is provided with a rotating disk (13) that matches the annular rotating block (12), and the annular rotating block (12) and the rotating disk (13) are rotatably connected to a plurality of ball bearings (14) on one side close to the pulling furnace body (1), and the rotating disk (13) and the pulling furnace body (1) are respectively provided with an annular groove (15) and annular groove (16) that match the ball bearings (14).

3. A crystal pulling furnace according to claim 2, characterized in that: The lifting rod (9) is divided into a lifting rod 1 (17) connected to the output end of the first drive motor (8) and a lifting rod 2 (18) connected to the seed crystal rod (10). The lifting rod 2 (18) is slidably arranged inside the lifting rod 1 (17). A plurality of ball bearings 2 (19) are rotatably connected to the longitudinal sides of the lifting rod 2 (18). A rack (20) is fixedly connected to the lateral sides of the lifting rod 2 (18). A cavity (21) matching the lifting rod 2 (18) is provided inside the lifting rod 1 (17).

4. A crystal pulling furnace according to claim 2, characterized in that: The lifting assembly comprises an L-shaped mounting block (22) symmetrically arranged on the rotating disc (13), and the rotating disc (13) is provided with a mounting groove for facilitating the installation of the lifting assembly, a second driving motor (23) is fixedly arranged on one of the L-shaped mounting blocks (22), an output end of the second driving motor (23) passes through the L-shaped mounting block (22) and is fixedly connected with a driving gear 1 (24), and a driven gear 1 (25) matching with the driving gear 1 (24) is rotatably connected to the other L-shaped mounting block (22), and a toothed belt 1 (26) for transmission is sleeved on the outside of the driving gear 1 (24) and the driven gear 1 (25); A rotating shaft (27) is fixedly provided on one side of the driving gear (24) and the driven gear (25) close to the rotating disc (13); the rotating shaft (27) is rotatably arranged in the mounting groove; a driving gear (28) is fixedly provided on the outside of the rotating shaft (27); a driven gear (29) matched with the driving gear (28) is rotatably connected in the mounting groove; a toothed belt (30) for transmission is sleeved on the outside of the driving gear (28) and the driven gear (29); the driven gear (29) is close to the rotating disc (13); A rotating shaft 2 (31) is fixedly connected to one side of the pulling furnace body (1); a driving bevel gear (32) is fixedly connected to the end of the rotating shaft 2 (31) away from the driven gear 2 (29); a driven bevel gear (33) is meshed on the driving bevel gear (32); a rotating shaft 3 (34) is fixedly arranged in the middle of the driven bevel gear (33); two ends of the rotating shaft 3 (34) are respectively rotatably connected to the inner wall of the mounting groove; a spur gear (35) meshing with the rack (20) is arranged on the side of the rotating shaft 3 (34) away from the driven bevel gear (33).

5. The crystal pulling furnace according to claim 3, characterized in that: The crystal pulling mechanism also includes a guide limit assembly for limiting the lifting position of the second lifting rod (18), and the guide limit assembly includes a ball three (36) arranged at the top of a plurality of ball twos (19), and the ball three (36) is rotatably arranged on the second lifting rod (18), and the lifting rod one (17) is provided with a limit groove (37) matching the ball three (36), and the top inner wall of the crystal furnace body is provided with a conical limit ring (38) for limiting the position of the second lifting rod (18).

6. The crystal pulling furnace according to claim 2, characterized in that: The heat preservation component includes a heat preservation cylinder (39) arranged outside the heating coil (6), and the heat preservation cylinder (39) is divided into two parts: a cylinder cover (40) and a cylinder body (41). The movable cover of the cylinder cover (40) is arranged at the top of the cylinder body (41), and the top of the cylinder cover (40) is provided with a handle (42) for easy picking, and the middle part of the cylinder cover (40) is fixedly provided with an annular block (43) that cooperates with the lifting rod (9).

Citation Information

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