Silicon crystal bar measuring device

Abstract

The utility model discloses a silicon crystal bar measuring device which comprises an industrial control computer and an electric control box, a transmission mechanism is arranged above the electric control box, a measuring mechanism is arranged behind the transmission mechanism, a rack assembly is arranged below the transmission mechanism, a guide rail is arranged below the measuring mechanism, and the guide rail is connected with the electric control box. A transport vehicle is arranged on the guide rail in a sliding manner, and a crystal bar rod is fixedly arranged on the transport vehicle; the conveying mechanism comprises a fixing plate, a servo motor, a gear, a rack, a linear sliding rail, a buffer and an outer cover, and the servo motor is fixedly connected to the top of the fixing plate. The transmission mechanism, the measuring mechanism, the rack assembly, the transport vehicle, the guide rail and the crystal bar are arranged, the crystal bar is placed on the transport vehicle, the transmission mechanism drives the measuring mechanism to move above the crystal bar, a laser sensor in the measuring mechanism scans and measures the crystal bar, the measuring precision is high, intelligent operation is achieved in the whole process, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon crystal rod production, in particular to a silicon crystal rod measuring device. Background Art

[0002] Silicon ingots, usually single crystal silicon ingots, are long strips of high-purity silicon material with a highly ordered crystal structure. Due to their excellent electrical and optical properties, silicon ingots are ideal materials for making semiconductor devices. After the silicon ingots are produced, the size of the silicon ingots needs to be measured.

[0003] In existing silicon ingot measuring devices, measurements are generally performed manually, which not only results in low work efficiency but also poor measurement accuracy. Utility Model Content

[0004] The utility model aims to provide a silicon crystal rod measuring device, which places the crystal rod rod on a transport vehicle, uses a transmission mechanism to drive a measuring mechanism to move above the crystal rod rod, and a laser sensor in the measuring mechanism scans and measures the crystal rod rod. Not only is the measurement accuracy high, but the whole process is intelligently operated, thereby improving work efficiency.

[0005] To achieve the above object, a silicon crystal rod measuring device is provided, comprising: an industrial control computer and an electric control box, a transmission mechanism is arranged above the electric control box, a measuring mechanism is arranged behind the transmission mechanism, a frame assembly is arranged below the transmission mechanism, a guide rail is arranged below the measuring mechanism, a transport vehicle is slidably arranged on the guide rail, and a crystal rod is fixedly arranged on the transport vehicle;

[0006] The transmission mechanism includes a fixed plate, a servo motor, a gear, a rack, a linear slide rail, a buffer and an outer cover, the top of the fixed plate is fixedly connected to the servo motor, the bottom of the fixed plate is rotatably connected to the gear, the output end of the servo motor is fixedly connected to the gear, the rear of the gear is meshed with a rack, the bottom of the fixed plate is symmetrically slidably arranged with two linear slide rails, the left side wall of the fixed plate is fixedly connected to the buffer, the bottom of the fixed plate is fixedly connected to the outer cover, the gear is located inside the outer cover, and a tank chain is arranged on the front side wall of the fixed plate;

[0007] The measuring mechanism includes an upper cover, a lower cover, a lifting module, a laser sensor and a measuring plate. The upper cover is fixedly connected to the top of the fixed plate, the lower cover is fixedly connected to the bottom of the fixed plate, the lifting module is fixedly connected to the inside of the fixed plate from top to bottom, the lifting module is provided with a laser sensor, the laser sensor is located below the fixed plate, and the bottom of the laser sensor is fixedly connected to the measuring plate.

[0008] According to the silicon crystal rod measuring device, the frame assembly includes a main frame, a transmission frame, adjustment bolts and ground pins. The transmission frame is arranged on the top of the main frame, and a plurality of adjustment bolts are evenly arranged on the transmission frame. The bottom of the main frame is fixedly connected with ground pins. There are a plurality of ground pins, which are evenly distributed on the bottom of the main frame.

[0009] According to the silicon crystal rod measuring device, the linear slide rail is located above the transmission rack.

[0010] According to the silicon crystal rod measuring device, the rack is fixedly connected to the transmission frame.

[0011] According to the silicon crystal rod measuring device, the crystal rod is located on the right side of the measuring plate.

[0012] According to the silicon crystal rod measuring device, the electric control box is located on the left side of the main frame.

[0013] The above scheme has the beneficial effects of: by setting up a transmission mechanism, a measuring mechanism, a frame assembly, a transport vehicle, a guide rail and a crystal rod, the crystal rod is placed on the transport vehicle, and the transmission mechanism is used to drive the measuring mechanism to move above the crystal rod. The laser sensor in the measuring mechanism scans and measures the crystal rod, which not only has high measurement accuracy but also has intelligent operation throughout the process, thereby improving work efficiency.

[0014] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0016] Figure 1 This is a front view of a silicon crystal rod measuring device of the utility model;

[0017] Figure 2 This is a cross-sectional view of the transmission mechanism structure of a silicon crystal rod measuring device of the utility model;

[0018] Figure 3 This is a cross-sectional view of the measuring mechanism structure of a silicon crystal rod measuring device of the utility model;

[0019] Figure 4 The utility model is a structural diagram of a rack assembly of a silicon crystal rod measuring device.

[0020] Legend:

[0021] 1. Industrial computer; 2. Electric control box; 3. Transmission mechanism; 4. Measuring mechanism; 5. Rack assembly; 6. Transport vehicle; 7. Guide rail; 8. Crystal rod;

[0022] 301, fixed plate; 302, servo motor; 303, gear; 304, rack; 305, linear guide rail; 306, buffer; 307, outer cover; 308, tank chain;

[0023] 401, upper cover; 402, lower cover; 403, lifting module; 404, laser sensor; 405, measuring board;

[0024] 501, main frame; 502, transmission frame; 503, adjusting bolts; 504, anchors. DETAILED DESCRIPTION

[0025] This section will describe in detail the specific embodiments of the utility model. The preferred embodiments of the utility model are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.

[0026] Reference Figure 1-4 The utility model embodiment is a silicon crystal rod measuring device, which includes: an industrial control computer 1 and an electric control box 2, which is a prior art and is used to control the operation of a transmission mechanism 3 and a measuring mechanism 4. The transmission mechanism 3 is arranged above the electric control box 2, and the measuring mechanism 4 is arranged behind the transmission mechanism 3. A frame assembly 5 is arranged below the transmission mechanism 3, and a guide rail 7 is arranged below the measuring mechanism 4. A transport vehicle 6 is slidably arranged on the guide rail 7, and a crystal rod rod 8 is fixedly arranged on the transport vehicle 6.

[0027] The transmission mechanism 3 includes a fixed plate 301, a servo motor 302, a gear 303, a rack 304, a linear slide rail 305, a buffer 306 and an outer cover 307. The top of the fixed plate 301 is fixedly connected to the servo motor 302, the bottom of the fixed plate 301 is rotatably connected to the gear 303, the output end of the servo motor 302 is fixedly connected to the gear 303, the rear of the gear 303 is meshed with the rack 304, and two linear slide rails 305 are symmetrically slidably arranged at the bottom of the fixed plate 301. When the servo motor 302 is working, the gear 303 is meshed with the rack 304 to make the fixed plate 301 slide on the linear slide rail 305. The buffer 306 is fixedly connected to the left side wall of the fixed plate 301, the bottom of the fixed plate 301 is fixedly connected to the outer cover 307, the gear 303 is located inside the outer cover 307, and a tank chain 308 is arranged on the front side wall of the fixed plate 301.

[0028] The measuring mechanism 4 includes an upper cover 401, a lower cover 402, a lifting module 403, a laser sensor 404 and a measuring plate 405. The upper cover 401 is fixedly connected to the top of the fixed plate 301, the lower cover 402 is fixedly connected to the bottom of the fixed plate 301, the lifting module 403 is fixedly connected to the inside of the fixed plate 301 from top to bottom, the laser sensor 404 is arranged on the lifting module 403, the laser sensor 404 is located below the fixed plate 301, the bottom of the laser sensor 404 is fixedly connected to the measuring plate 405, and the crystal rod 8 is located on the right side of the measuring plate 405.

[0029] The frame assembly 5 includes a main frame 501, a transmission frame 502, adjustment bolts 503 and feet 504. The transmission frame 502 is arranged on the top of the main frame 501, the linear slide rail 305 is located above the transmission frame 502, the rack 304 is fixedly connected to the transmission frame 502, and a plurality of adjustment bolts 503 are evenly arranged on the transmission frame 502. The bottom of the main frame 501 is fixedly connected with feet 504. There are a plurality of feet 504, which are evenly distributed at the bottom of the main frame 501. The electric control box 2 is located on the left side of the main frame 501.

[0030] Working principle: Place the crystal rod 8 on the transport vehicle 6, push the transport vehicle 6 to slide in the guide rail 7 to the front of the main frame 501 and below the measuring mechanism 4, and start the servo motor 302 by operating the industrial computer 1 and the electric control box 2, so that the lower gear 303 engages with the rack 304, so that the fixed plate 301 moves left and right on the main frame 501. During the movement, the laser sensor 404 scans and measures the lower crystal rod 8, so as to accurately obtain the diameter, length and other dimensions of the crystal rod 8.

[0031] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A silicon ingot measuring device, comprising: An industrial computer (1) and an electric control box (2), characterized in that a transmission mechanism (3) is arranged above the electric control box (2), a measuring mechanism (4) is arranged behind the transmission mechanism (3), a frame assembly (5) is arranged below the transmission mechanism (3), a guide rail (7) is arranged below the measuring mechanism (4), a transport vehicle (6) is slidably arranged on the guide rail (7), and a crystal rod (8) is fixedly arranged on the transport vehicle (6); The transmission mechanism (3) comprises a fixed plate (301), a servo motor (302), a gear (303), a rack (304), a linear slide rail (305), a buffer (306) and an outer cover (307); the top of the fixed plate (301) is fixedly connected to the servo motor (302); the bottom of the fixed plate (301) is rotatably connected to the gear (303); the output end of the servo motor (302) is fixedly connected to the gear (303); the rear of the gear (303) is meshed with a rack (304); two linear slide rails (305) are symmetrically slidably arranged at the bottom of the fixed plate (301) in a front-rear manner; the left side wall of the fixed plate (301) is fixedly connected to the buffer (306); the bottom of the fixed plate (301) is fixedly connected to the outer cover (307); the gear (303) is located inside the outer cover (307); and a tank chain (308) is arranged on the front side wall of the fixed plate (301); The measuring mechanism (4) comprises an upper cover (401), a lower cover (402), a lifting module (403), a laser sensor (404) and a measuring plate (405); the upper cover (401) is fixedly connected to the top of the fixed plate (301); the lower cover (402) is fixedly connected to the bottom of the fixed plate (301); the lifting module (403) is fixedly connected to the interior of the fixed plate (301) from top to bottom; the laser sensor (404) is arranged on the lifting module (403); the laser sensor (404) is located below the fixed plate (301); and the measuring plate (405) is fixedly connected to the bottom of the laser sensor (404).

2. A silicon crystal rod measuring device according to claim 1, characterized in that: The frame assembly (5) comprises a main frame (501), a transmission frame (502), adjustment bolts (503) and feet (504); the transmission frame (502) is arranged on the top of the main frame (501); a plurality of adjustment bolts (503) are evenly arranged on the transmission frame (502); the bottom of the main frame (501) is fixedly connected with feet (504); a plurality of feet (504) are arranged and evenly distributed on the bottom of the main frame (501).

3. A silicon crystal rod measuring device according to claim 2, characterized in that: The linear slide rail (305) is located above the transmission frame (502).

4. A silicon crystal rod measuring device according to claim 2, characterized in that: The rack (304) is fixedly connected to the transmission frame (502).

5. The silicon crystal rod measuring device according to claim 1, characterized in that: The crystal rod (8) is located on the right side of the measuring plate (405).

6. A silicon crystal rod measuring device according to claim 2, characterized in that: The electric control box (2) is located on the left side of the main frame (501).

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