Gluing and developing equipment

Abstract

The utility model relates to the field of semiconductor manufacturing, and provides gluing and developing equipment which comprises a film magazine storage unit, a film magazine loading unit, an interlayer manipulator and a film magazine robot, and the film magazine robot comprises an X-axis sliding rail arranged along the X-axis direction; the X-axis moving part is connected to the X-axis sliding rail in a sliding mode and is configured to move in the X-axis direction; the X-axis moving part is arranged on the X-axis sliding rail, the X-axis sliding rail is arranged on the X-axis sliding rail, the X-axis moving part is arranged on the X-axis sliding rail, the X-axis sliding rail is arranged on the X-axis sliding rail, the X-axis moving part is arranged on the X-axis sliding rail, the X-axis sliding rail is arranged on the X-axis sliding rail, the X-axis sliding rail is matched with the X-axis moving part, the X-axis sliding rail can move between the X-axis storage unit and the Y-axis loading unit, and the film box grabbing finger is connected to the X-axis moving part through a rotating shaft. And meanwhile, the wafer box robot can also grab the wafer box and then rotate by 90 degrees through the rotating shaft to enable the wafer box to face the interlayer manipulator, so that the interlayer manipulator can directly pick and place the wafer in the wafer box, and the wafer box robot is simple in overall structure and practical.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a glue coating and developing device. Background Art

[0002] In the existing semiconductor photolithography process, the coating equipment, photolithography equipment and development equipment respectively complete the photoresist coating process, photolithography process and development process. With the improvement of semiconductor processing technology, the mainstream market integrates the coating and development process on the same equipment, and at the same time requires the production capacity of the coating and development equipment to be greater than that of the photolithography equipment.

[0003] In the glue coating and developing equipment, the film box storage unit, the film box loading unit and the interlayer robot are arranged in the length direction of the glue coating and developing equipment. The film box on the film box storage unit is also facing the length direction of the glue coating and developing equipment. It is grabbed by the film box robot and moved to the film box loading unit. After opening the film box door, the interlayer robot takes away the wafer for processing. Now, in order to improve the space utilization rate of the overall equipment, the film box loading unit and the interlayer robot are arranged side by side in the width direction of the glue coating and developing equipment, which greatly reduces the space occupied in the length direction. However, the film box is still oriented in the length direction of the glue coating and developing equipment. The interlayer robot arranged in the width direction can no longer directly take and place the wafer in the film box on the film box loading unit. Utility Model Content

[0004] The utility model mainly provides a glue coating and developing device, which is used to solve the technical problems proposed in the above background technology that the interlayer robot cannot directly take and place the wafer in the film box on the film box loading unit.

[0005] The technical solution adopted by the utility model to solve the above technical problems is:

[0006] A glue coating and developing device comprises: a film box storage unit, which is used to store film boxes and the film boxes face the X-axis direction, wherein the film boxes are used to carry wafers, and the X-axis direction is the length direction of the glue coating and developing device; a film box loading unit, which is arranged in the X-axis direction of the film box storage unit and is configured to place the film box, and the film box faces the Y-axis direction, wherein the Y-axis direction is the width direction of the glue coating and developing device; an interlayer manipulator, which is arranged in the Y-axis direction of the film box loading unit and is configured to move the wafer on the film box loading unit, and a film box robot, which is used to move the film box between the film box storage unit and the film box loading unit, and the film box robot comprises: an X-axis slide rail, which is arranged along the X-axis direction; an X-axis moving part, which is slidably connected to the X-axis slide rail and is configured to move along the X-axis direction; and a film box grabbing finger, which is connected to the X-axis moving part through a rotating shaft and is configured to grab the film box and rotate between the X-axis direction and the Y-axis direction.

[0007] Preferably, the film box robot also includes: a first arm rotating part, which is connected to the bottom of the X-axis moving part through a first rotating axis and is configured to be able to rotate around the first rotating axis; and a second arm rotating part, which is connected to the bottom of the first arm rotating part through a second rotating axis and is configured to be able to rotate around the second rotating axis, and the film box grabbing finger is connected to the bottom of the second arm rotating part through a third rotating axis and is configured to be able to rotate around the third rotating axis.

[0008] Preferably, there are four film box loading units, and the four film box loading units are respectively arranged at four end points of a rectangle in a vertical plane, and the rectangle is parallel to the Y-axis direction.

[0009] Preferably, the two film box loading units on the same side, one is used for feeding films, and the other is used for unloading films.

[0010] Preferably, the film box robot also includes: a Z-axis slide rail, connected to the X-axis moving part and arranged in the vertical direction; and a Z-axis moving part, slidably connected to the Z-axis slide rail and configured to move in the vertical direction, and the first arm rotating part is connected to the bottom of the Z-axis moving part through a first rotating axis.

[0011] Preferably, two interlayer manipulators are provided, which are respectively arranged on opposite sides of two film box loading units.

[0012] Preferably, the coating and developing device further comprises a wafer carrier module, which is disposed between the two interlayer robots and configured to place the wafer.

[0013] Preferably, the coating and developing equipment further comprises a process module, and the process module is arranged in the X-axis direction of the wafer carrier module and is configured to perform process treatment on the wafer.

[0014] Preferably, the first rotating axis and the second rotating axis are arranged at two opposite ends of the first arm rotating part.

[0015] Preferably, the second rotating axis and the third rotating axis are arranged at opposite ends of the second arm rotating part.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] The utility model is provided with a film box robot, which can move between a film box storage unit and a film box loading unit and transfer the film box through an X-axis slide rail cooperating with an X-axis moving part. At the same time, the film box robot can also grasp the film box and rotate it 90 degrees through the rotating axis so that the film box faces the interlayer manipulator, so that the interlayer manipulator can directly take and place the wafers in the film box. The overall structure is simple and suitable for practical use.

[0018] The present invention will be explained in detail below with reference to the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 : A three-dimensional diagram of the structure of the film box robot of some embodiments of the utility model;

[0020] Figure 2 : Front view of the film box robot structure of some embodiments of the utility model;

[0021] Figure 3 : Schematic diagram of the coating and developing equipment of some embodiments of the utility model.

[0022] Description of reference numerals:

[0023] D1X axis direction;

[0024] D2Y axis direction;

[0025] 100-piece box storage unit;

[0026] 200-piece cassette loading unit;

[0027] 300 inter-layer manipulator;

[0028] 400-piece box robot;

[0029] 401 X-axis slide rail; 402 X-axis moving part; 403 film box grabbing finger; 404 first arm rotating part; 405 first rotating axis; 406 second arm rotating part; 407 second rotating axis; 408 third rotating axis; 409 Z-axis slide rail; 410 Z-axis moving part;

[0030] 500 slide module;

[0031] 600 process modules. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0033] In the prior art, the film box loading unit and the interlayer robot are arranged side by side in the width direction of the glue coating and developing equipment, which reduces the space occupied in the length direction. However, the film box is still oriented in the length direction of the glue coating and developing equipment. The interlayer robot arranged in the width direction can no longer directly take and place the wafers in the film box on the film box loading unit.

[0034] In view of the above technical problems, the present utility model provides a coating and developing device, please refer to the attached Figure 1 , 2 and 3, including a film box storage unit 100, a film box loading unit 200, an interlayer manipulator 300 and a film box robot 400, wherein the film box storage unit 100 is used to store film boxes and the film boxes face the X-axis direction D1, the film boxes are used to carry wafers, the X-axis direction D1 is the length direction of the glue coating and developing equipment, the film box loading unit 200 is arranged on the X-axis direction D1 of the film box storage unit 100 and is configured to place the film box, the film box faces the Y-axis direction D2, the Y-axis direction D2 is the width direction of the glue coating and developing equipment, the interlayer manipulator 300 is arranged on the Y-axis direction D2 of the film box loading unit 200 and is equipped The wafer is placed on the mobile cassette loading unit 200, and the cassette robot 400 is used to move the cassette between the cassette storage unit 100 and the cassette loading unit 200. Further, the cassette robot 400 includes an X-axis slide rail 401, an X-axis moving part 402, and a cassette grabbing finger 403. The X-axis slide rail 401 is arranged along the X-axis direction D1, the X-axis moving part 402 is slidably connected to the X-axis slide rail 401 and is configured to move along the X-axis direction D1, and the cassette grabbing finger 403 is connected to the X-axis moving part 402 through a rotating axis and is configured to grab the cassette and rotate between the X-axis direction D1 and the Y-axis direction D2.

[0035] Specifically, when a glue coating and developing device provided by an embodiment of the utility model starts to work, the film box is stored in the film box storage unit 100. At this time, the film box is facing the X-axis direction D1, that is, the length direction of the glue coating and developing device. The film box robot 400 grabs the film box on the film box storage unit 100 and moves it along the X-axis direction D1 to the film box loading unit 200, rotates 90 degrees and puts it down. At this time, the film box is facing the Y-axis direction D2, that is, the width direction of the glue coating and developing device, which is convenient for the interlayer robot 300 to take the wafer out of the film box and place it on the carrier module 500 for temporary storage. Later, according to processing requirements, the wafer on the carrier module 500 is moved to the process module 600 for processing.

[0036] On the contrary, when the wafer processing is completed, the wafer is moved to the wafer carrier module 500 for temporary storage, and the interlayer robot 300 moves the wafer from the wafer carrier module 500 to the wafer box on the wafer box loading unit 200. When the wafer box is full, the wafer box robot 400 grabs the wafer box, rotates it 90 degrees, and moves it to the wafer box storage unit 100 to put it down, completing a complete process flow of the wafer.

[0037] The utility model is provided with a film box robot 400, which can move between the film box storage unit 100 and the film box loading unit 200 and transfer the film box through the X-axis slide rail 401 and the X-axis moving part 402. At the same time, the film box robot 400 can also grasp the film box and rotate it 90 degrees through the rotating axis so that the film box faces the interlayer robot 300, so that the interlayer robot 300 can directly take and place the wafers in the film box. The overall structure is simple and suitable for practical use.

[0038] It is worth noting that the cassettes stored on the cassette storage unit 100 may be cassettes loaded with wafers or empty cassettes.

[0039] In some specific embodiments of the present invention, please refer to the attached Figure 1 and 2 The film box robot 400 also includes a first arm rotating part 404 and a second arm rotating part 406, wherein the first arm rotating part 404 is connected to the bottom of the X-axis moving part 402 through a first rotating axis 405 and is configured to be able to rotate around the first rotating axis 405, the second arm rotating part 406 is connected to the bottom of the first arm rotating part 404 through a second rotating axis 407 and is configured to be able to rotate around the second rotating axis 407, and the film box grabbing finger 403 is connected to the bottom of the second arm rotating part 406 through a third rotating axis 408 and is configured to be able to rotate around the third rotating axis 408.

[0040] Specifically, the utility model grasps the film box and rotates 90 degrees through the first arm rotating part 404, the second arm rotating part 406 and the film box grasping finger 403. The first arm rotating part 404, the second arm rotating part 406 and the film box grasping finger 403 can all rotate through their respective rotation axes to achieve multi-angle grasping freedom and long-distance grasping length, making the film box robot 400 more flexible.

[0041] Furthermore, in some specific embodiments of the present invention, the first rotating axis 405 and the second rotating axis 407 are arranged at opposite ends of the first arm rotating part 404. Such a design can fully utilize the length of the first arm rotating part 404 to facilitate long-distance grasping of film boxes at different positions.

[0042] Similarly, in some specific embodiments of the present invention, the second rotating axis 407 and the third rotating axis 408 are arranged at opposite ends of the second arm rotating part 406, so that the length of the second arm rotating part 406 can be fully utilized, which is also conducive to long-distance grasping of film boxes in different positions.

[0043] In some specific embodiments of the present invention, four film box loading units 200 are provided, and the four film box loading units 200 are respectively arranged at the four end points of a rectangle in a vertical plane, and the rectangle is parallel to the Y-axis direction D2, that is, two film box loading units 200 are respectively arranged at both ends in the width direction of the coating and developing device, and the two film box loading units 200 on the same side are arranged on the same plumb line. Such a design makes full use of the space in width and height of the overall equipment, and greatly improves the production capacity.

[0044] Furthermore, in some specific embodiments of the present invention, the four film box loading units 200 can be flexibly adjusted to feed or discharge films according to the actual film running situation, that is, the four film box loading units 200 can discharge films at the same time, can feed films at the same time, or two can be used for discharging films and two for feeding films.

[0045] Considering that the two cassette loading units 200 are arranged on the same plumb line, in some specific embodiments of the present invention, please refer to the attached Figure 1 and 2 The film box robot 400 also includes a Z-axis slide rail 409 and a Z-axis moving part 410, wherein the Z-axis slide rail 409 is connected to the X-axis moving part 402 and is arranged in the vertical direction, the Z-axis moving part 410 is slidably connected to the Z-axis slide rail 409 and is configured to move in the vertical direction, and the first arm rotating part 404 is connected to the bottom of the Z-axis moving part 410 through the first rotating axis 405.

[0046] Specifically, the Z-axis moving part 410 can move in the vertical direction, thereby driving the film box grabbing finger 403 to move in the vertical direction, grabbing the film boxes on the film box loading unit 200 at different heights and driving the film boxes to move in the vertical direction.

[0047] Furthermore, in some specific embodiments of the present invention, the driving source of the film box robot 400 includes but is not limited to electric drive, pneumatic drive and hydraulic drive, that is, the film box robot 400 can be driven by electricity, pneumatic drive, hydraulic drive, or a combination of the above.

[0048] In some specific embodiments of the present invention, please refer to the attached Figure 3 There are two interlayer robots 300, which are respectively arranged on the opposite sides of the two film box loading units 200, that is, on the side of the film box loading unit 200 facing the inside of the glue coating and developing device. The two interlayer robots 300 can more efficiently transfer the wafers on the film box loading units 200 on both sides.

[0049] In some specific embodiments of the present invention, please refer to the attached Figure 3 The coating and developing equipment also includes a wafer carrier module 500, which is arranged between the two interlayer robots 300 and is configured to place wafers. When the operation starts, the wafer box containing the wafers to be processed is transferred from the wafer box storage unit 100 to the wafer box loading units 200 on both sides, and the wafers to be processed are moved from the wafer box loading units 200 on both sides to the wafer carrier module 500 via the two interlayer robots 300, waiting to be transferred backward one by one for processing. After the wafer processing is completed, they are also placed on the wafer carrier module 500 first, and then the processed wafers are transferred to the wafer box loading units 200 on both sides via the two interlayer robots 300. After the wafer box is full, it finally returns to the wafer box storage unit 100.

[0050] In some specific embodiments of the present invention, please refer to the attached Figure 3 The coating and developing equipment also includes a process module 600, which is arranged on the X-axis direction D1 of the carrier module 500 and is configured to perform process treatment on the wafer. Specifically, the process module 600 includes a plurality of heat treatment and cold treatment units for performing process treatment on the wafer.

[0051] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A coating and developing device, characterized in that: include: A film box storage unit (100), used for storing film boxes and the film boxes are oriented in an X-axis direction (D1), wherein the film boxes are used for carrying wafers, and the X-axis direction (D1) is the length direction of the glue coating and developing device; A film box loading unit (200) is arranged on the X-axis direction (D1) of the film box storage unit (100) and is configured to place the film box, the film box faces the Y-axis direction (D2), wherein the Y-axis direction (D2) is the width direction of the glue coating and developing device; an interlayer robot (300) disposed in the Y-axis direction (D2) of the cassette loading unit (200) and configured to move the wafer on the cassette loading unit (200); and A film box robot (400) is used to move the film box between the film box storage unit (100) and the film box loading unit (200), and the film box robot (400) comprises: An X-axis slide rail (401) is arranged along the X-axis direction (D1); An X-axis moving part (402) is slidably connected to the X-axis slide rail (401) and is configured to move along the X-axis direction (D1); and The film box grabbing finger (403) is connected to the X-axis moving part (402) via a rotating shaft and is configured to grab the film box and rotate between the X-axis direction (D1) and the Y-axis direction (D2).

2. The coating and developing device according to claim 1, characterized in that: The film box robot also includes: A first arm rotating part (404) is connected to the bottom of the X-axis moving part (402) via a first rotating shaft (405) and is configured to be rotatable around the first rotating shaft (405); and The second arm rotating part (406) is connected to the bottom of the first arm rotating part (404) through a second rotating axis (407) and is configured to be able to rotate around the second rotating axis (407), and the film box grabbing finger (403) is connected to the bottom of the second arm rotating part (406) through a third rotating axis (408) and is configured to be able to rotate around the third rotating axis (408).

3. The coating and developing device according to claim 2, characterized in that: Four film box loading units (200) are provided, and the four film box loading units (200) are respectively arranged at four end points of a rectangle in a vertical plane, and the rectangle is parallel to the Y-axis direction (D2).

4. The gum coating and developing device according to claim 3, characterized in that: The film box robot (400) also includes: A Z-axis slide rail (409), connected to the X-axis moving part (402) and arranged along the vertical direction; and The Z-axis moving part (410) is slidably connected to the Z-axis slide rail (409) and is configured to move in the vertical direction. The first arm rotating part (404) is connected to the bottom of the Z-axis moving part (410) through a first rotating shaft (405).

5. The gum coating and developing device according to claim 4, characterized in that: The driving source of the cassette robot (400) includes but is not limited to electric drive, pneumatic drive and hydraulic drive.

6. The gum coating and developing device according to claim 3, characterized in that: Two interlayer manipulators (300) are provided, and are respectively arranged on opposite sides of the two film box loading units (200).

7. The gum coating and developing device according to claim 6, characterized in that: The glue coating and developing device also includes a wafer carrier module (500), which is arranged between the two interlayer robots (300) and configured to place the wafer.

8. The gum coating and developing device according to claim 7, characterized in that: The glue coating and developing equipment also includes a process module (600), which is arranged in the X-axis direction (D1) of the carrier module (500) and is configured to perform process treatment on the wafer.

9. The gum coating and developing device according to claim 2, characterized in that: The first rotating shaft (405) and the second rotating shaft (407) are arranged at two opposite ends of the first arm rotating part (404).

10. The gum coating and developing device according to claim 2, characterized in that: The second rotating shaft (407) and the third rotating shaft (408) are arranged at two opposite ends of the second arm rotating part (406).

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