Wafer pickup jig

Abstract

The utility model discloses a wafer pickup jig, which comprises a jig bottom plate and a jig outer cover fixedly sleeved on the jig bottom plate, a quick-change disc is fixedly arranged on the jig bottom plate, the quick-change disc is in butt joint with upper automation equipment, material pressing shafts are arranged at four corners of the jig bottom plate in a penetrating and sliding manner, photoelectric sensors are arranged at diagonal positions of the upper surface of the jig bottom plate, and the photoelectric sensors are connected with the quick-change disc. The first electromagnetic chuck shafts are vertically and elastically arranged at the diagonal positions, corresponding to the photoelectric sensors, of the upper surface of the jig bottom plate, the chuck type electromagnets are fixedly installed at the lower ends of the first electromagnetic chuck shafts, the second electromagnetic chuck shafts are elastically arranged on the upper surface of the jig bottom plate, and the reflective photoelectric sensors are fixedly installed on the lower surface of the jig bottom plate. According to the utility model, signals are transmitted between the miniature terminal block and the upper control system, and the photoelectric sensor, the reflective photoelectric sensor and the sucker type electromagnet are matched to realize automatic picking of wafers, so that the wafers are prevented from falling or being polluted, and the wafer picking and placing efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor wafer manufacturing, in particular to a wafer picking fixture. Background Art

[0002] During the semiconductor wafer transportation process, the wafers are usually loaded into a wafer cassette. During the wafer cleaning or cutting process, the operator needs to manually take the wafer out of the wafer cassette and place it in a wafer cleaning machine for cleaning, or place it in a wafer cutting machine for cutting. After cleaning or cutting is completed, the wafer is manually placed in the wafer cassette.

[0003] Manually placing and taking of wafers may cause the wafers to fall or become contaminated, increase the operator's workload, and fail to achieve full automation of the production line, resulting in low production efficiency.

[0004] Therefore, we propose a wafer picking fixture to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to provide a wafer picking fixture to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a wafer picking fixture, comprising: a fixture bottom plate and a fixture cover fixedly sleeved thereon, a quick-change plate fixedly mounted on the fixture bottom plate, and the quick-change plate is docked with an upper automation device;

[0007] A press shaft is slidably arranged at the four corners of the jig bottom plate, and a first press spring is sleeved on the part of the press shaft located at the lower side of the jig bottom plate;

[0008] A photoelectric sensor is arranged at the diagonal position of the upper surface of the fixture bottom plate;

[0009] A first electromagnetic chuck shaft is elastically arranged above and below the upper surface of the fixture bottom plate at a position corresponding to the photoelectric sensor at a diagonal angle, and a chuck-type electromagnet is fixedly installed at the lower end of the first electromagnetic chuck shaft;

[0010] A second electromagnetic chuck shaft is elastically installed on the upper surface of the fixture bottom plate, the second electromagnetic chuck shaft and the first electromagnetic chuck shaft are symmetrically arranged about the left and right midlines of the fixture bottom plate, and the second electromagnetic chuck shaft has the same structure as the first electromagnetic chuck shaft;

[0011] A reflective photoelectric sensor is fixedly installed on the lower surface of the fixture bottom plate.

[0012] Preferably, the quick-change plate is fixedly connected to the jig base plate via a jig table and four jig columns.

[0013] Preferably, two equal-height columns are provided on the upper surface of the jig bottom plate at the four sides of the jig table, and the equal-height columns support the jig cover.

[0014] Preferably, positioning blocks and positioning sleeves are symmetrically arranged on left and right sides of the upper surface of the fixture bottom plate.

[0015] Preferably, bearing fixing blocks are fixedly installed at the four corners of the lower surface of the jig base plate, and the bearing fixing blocks are fixedly installed with linear bearings. The linear bearings pass through the upper and lower parts of the jig base plate, and a pressing shaft is slidably arranged in the linear bearing. The part of the pressing shaft located at the lower side of the linear bearing is sleeved with a first pressing spring.

[0016] Preferably, the first electromagnetic chuck shaft is slidably connected to the fixture bottom plate up and down through a sliding bearing, and a second pressing spring is sleeved on the portion of the first electromagnetic chuck shaft located between the chuck electromagnet and the sliding bearing.

[0017] Preferably, the photoelectric sensor is fixed to the fixture bottom plate via a second sensor bracket.

[0018] Preferably, the reflective photoelectric sensor is fixedly mounted on the lower surface of the fixture bottom plate through a first sensor bracket.

[0019] Preferably, a micro terminal block is installed on the upper surface of the fixture base plate, the micro terminal block is electrically connected to the suction cup electromagnet, the photoelectric sensor and the reflective photoelectric sensor are signal-connected to the micro terminal block, and the micro terminal block is signal-controlled connected to the upper control system.

[0020] Compared with the prior art, the beneficial effects of the utility model are:

[0021] The signal is transmitted between the micro terminal block and the upper control system, and the photoelectric sensor, reflective photoelectric sensor and suction cup electromagnet are used to realize the automatic picking of the wafer, so as to avoid the wafer from falling or being contaminated and improve the efficiency of wafer picking and placing. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of the utility model;

[0023] Figure 2 This is a schematic diagram of the structure inside the outer cover of the fixture in the utility model;

[0024] Figure 3 It is a side view of the bottom plate of the jig in the utility model.

[0025] In the figure: 1. fixture cover; 3. fixture bottom plate; 31. bearing fixing block; 32. first sensor bracket; 33. reflective photoelectric sensor; 4. positioning block; 5. quick change plate; 6. equal height column; 7. second sensor bracket; 8. pressing shaft; 81. first pressing spring; 82. linear bearing; 10. photoelectric sensor; 11. suction cup electromagnet; 12. positioning sleeve; 13. miniature terminal block; 14. fixture column; 15. fixture table; 16. first electromagnetic suction cup shaft; 17. second pressing spring; 18. second electromagnetic suction cup shaft. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] See also Figure 1-3 The utility model provides a technical solution: a wafer picking fixture, comprising: a fixture bottom plate 3 and a fixture cover 1 fixedly sleeved thereon, four fixture columns 14 are fixedly arranged in the middle of the upper surface of the fixture bottom plate 3, a fixture table 15 is fixedly installed on the upper end of the fixture column 14, a quick-change plate 5 is fixedly arranged on the fixture table 15, and the quick-change plate 5 is used to dock with the upper automation equipment;

[0028] The upper surface of the jig bottom plate 3 is provided with two equal height columns 6 at the four sides of the jig table 15, and the equal height columns 6 are used to support the jig cover 1;

[0029] Positioning blocks 4 and positioning sleeves 12 are symmetrically arranged on the left and right sides of the upper surface of the fixture bottom plate 3. The positioning blocks 4 and positioning sleeves 12 are used for positioning when the wafer picking fixture is placed;

[0030] The bearing fixing blocks 31 are fixedly installed at the four corners of the lower surface of the fixture bottom plate 3, and the linear bearings 82 are fixedly installed on the bearing fixing blocks 31. The linear bearings 82 penetrate the upper and lower surfaces of the fixture bottom plate 3, and the press shaft 8 is slidably arranged in the linear bearings 82. The first press spring 81 is sleeved on the part of the press shaft 8 located at the lower side of the linear bearings 82;

[0031] A second sensor bracket 7 is fixedly installed at a diagonal position on the upper surface of the fixture bottom plate 3, and a photoelectric sensor 10 is fixedly installed on the second sensor bracket 7;

[0032] A first electromagnetic chuck shaft 16 is disposed at a position diagonally opposite to the upper surface of the fixture bottom plate 3 at a position corresponding to the photoelectric sensor 10. The first electromagnetic chuck shaft 16 is also connected to the fixture bottom plate 3 by sliding up and down. A chuck-type electromagnet 11 is fixedly installed at the lower end of the first electromagnetic chuck shaft 16. A second pressing spring 17 is sleeved on the portion of the first electromagnetic chuck shaft 16 between the chuck-type electromagnet 11 and the sliding bearing.

[0033] A second electromagnetic chuck shaft 18 is installed on the upper surface of the fixture bottom plate 3, and the second electromagnetic chuck shaft 18 and the first electromagnetic chuck shaft 16 are symmetrically arranged about the left and right midlines of the fixture bottom plate 3;

[0034] The second electromagnetic chuck shaft 18 has the same structure as the first electromagnetic chuck shaft 16;

[0035] A first sensor bracket 32 ​​is fixedly mounted on the lower surface of the fixture bottom plate 3, and a reflective photoelectric sensor 33 is mounted on the first sensor bracket 32;

[0036] A micro terminal block 13 is installed on the upper surface of the fixture base plate 3, the micro terminal block 13 is electrically connected to the suction cup electromagnet 11, the photoelectric sensor 10 and the reflective photoelectric sensor 33 are signal-connected to the micro terminal block 13, and the micro terminal block 13 is signal-controlled to the upper control system.

[0037] Working principle: After the quick-change plate 5 is connected to the upper automation equipment, the photoelectric sensor 10, the reflective photoelectric sensor 33, and the suction cup electromagnet 11 are energized, and the signal is transmitted between the micro terminal block 13 and the upper control system;

[0038] When the upper automation equipment drives the fixture base plate 3 to move above the wafer, and the suction cup electromagnet 11 and the pressing shaft 8 are both attached to the wafer, the suction cup electromagnet 11 adsorbs the wafer through the control of the upper controller system, and the pressing shaft 8 and the first electromagnetic suction cup shaft 16 are acted upon by the first pressing spring 81 and the second pressing spring 17, so that the head of the first electromagnetic suction cup connecting shaft 16 triggers the photoelectric sensor 10. When the signals of the two groups of photoelectric sensors 10 are triggered at the same time, it indicates that the wafer is horizontal relative to the wafer picking fixture. After the suction cup electromagnet 11 adsorbs the wafer, the signal of the reflective photoelectric sensor 33 is triggered, indicating that there is a wafer on the wafer picking fixture.

[0039] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0040] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wafer picking fixture, comprising: A jig base plate (3) and a jig cover (1) fixedly mounted thereon, characterized in that a quick-change plate (5) is fixedly mounted on the jig base plate (3), and the quick-change plate (5) is docked with an upper automation device; A material pressing shaft (8) is slidably arranged through the four corners of the jig bottom plate (3), and a first material pressing spring (81) is sleeved on the part of the material pressing shaft (8) located on the lower side of the jig bottom plate (3); A photoelectric sensor (10) is provided at a diagonal position on the upper surface of the fixture bottom plate (3); A first electromagnetic chuck shaft (16) is elastically arranged above and below the upper surface of the fixture bottom plate (3) at a position diagonally corresponding to the photoelectric sensor (10), and a chuck-type electromagnet (11) is fixedly installed at the lower end of the first electromagnetic chuck shaft (16); A second electromagnetic chuck shaft (18) is elastically mounted on the upper surface of the jig bottom plate (3), the second electromagnetic chuck shaft (18) and the first electromagnetic chuck shaft (16) are symmetrically arranged about the left and right midlines of the jig bottom plate (3), and the second electromagnetic chuck shaft (18) and the first electromagnetic chuck shaft (16) have the same structure; A reflective photoelectric sensor (33) is fixedly mounted on the lower surface of the fixture bottom plate (3).

2. A wafer picking fixture according to claim 1, characterized in that: The quick-change plate (5) is fixedly connected to the jig base plate (3) via a jig table (15) and four jig columns (14).

3. The wafer picking fixture according to claim 1, characterized in that: The upper surface of the jig bottom plate (3) is provided with two equal-height columns (6) at four sides of the jig table (15), and the equal-height columns (6) support the jig outer cover (1).

4. A wafer picking fixture according to claim 3, characterized in that: Positioning blocks (4) and positioning sleeves (12) are symmetrically arranged on left and right sides of the upper surface of the jig bottom plate (3).

5. A wafer picking fixture according to claim 4, characterized in that: The four corners of the lower surface of the jig base plate (3) are fixedly mounted with bearing fixing blocks (31), and the bearing fixing blocks (31) are fixedly mounted with linear bearings (82). The linear bearings (82) penetrate the upper and lower surfaces of the jig base plate (3), and a pressing shaft (8) is slidably arranged in the linear bearings (82). The portion of the pressing shaft (8) located below the linear bearings (82) is sleeved with a first pressing spring (81).

6. The wafer picking fixture according to claim 1, characterized in that: The first electromagnetic suction cup shaft (16) is slidably connected to the fixture bottom plate (3) via a sliding bearing, and a second pressing spring (17) is sleeved on the portion of the first electromagnetic suction cup shaft (16) located between the suction cup electromagnet (11) and the sliding bearing.

7. The wafer picking fixture according to claim 1, characterized in that: The photoelectric sensor (10) is fixedly arranged on the fixture bottom plate (3) via a second sensor bracket (7).

8. The wafer picking fixture according to claim 1, characterized in that: The reflective photoelectric sensor (33) is fixedly mounted on the lower surface of the fixture bottom plate (3) via a first sensor bracket (32).

9. The wafer picking fixture according to claim 1, characterized in that: A micro terminal block (13) is installed on the upper surface of the fixture base plate (3); the micro terminal block (13) is electrically connected to the suction cup type electromagnet (11); the photoelectric sensor (10) and the reflective photoelectric sensor (33) are signal-connected to the micro terminal block (13); and the micro terminal block (13) is signal-connected to the upper control system.

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