Actuator for semiconductor device

Abstract

The utility model provides an execution mechanism used for semiconductor equipment. The execution mechanism comprises a substrate, an execution member, a screw rod transmission mechanism installed on the substrate, a driving motor installed on the substrate and a locking device installed on the substrate. The lead screw transmission mechanism comprises a lead screw and an inner threaded pipe in threaded connection with the lead screw, the driving motor is connected with the lead screw through a transmission belt to drive the lead screw to rotate, and the inner threaded pipe is connected with the execution piece. The execution part is used for grabbing semiconductor equipment; the locking device is used for limiting rotation of the lead screw. The executing mechanism for the semiconductor equipment can lock the position of the executing piece when the moving furnace tube encounters belt breakage, so that the executing piece and the semiconductor equipment are prevented from falling off, the executing mechanism and the semiconductor equipment are prevented from being damaged, potential safety hazards are reduced, and safety accidents are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to an actuator for semiconductor equipment. Background Art

[0002] Semiconductor furnace tubes are a type of equipment used in the semiconductor manufacturing process, mainly used to provide a high-temperature environment for various semiconductor manufacturing processes, such as oxidation, diffusion, annealing, etc. Semiconductor furnace tubes are usually made of quartz, ceramics or other high-temperature resistant materials, and have the characteristics of high purity, high temperature resistance and high stability. In the semiconductor manufacturing process, the furnace tube needs to accurately control the temperature and atmosphere to ensure that the manufactured semiconductor devices have excellent performance and stability. Because the semiconductor furnace tube is often required to be raised and lowered and reset after being raised during use. In the prior art, the height of the semiconductor furnace tube is mainly raised or lowered by electric lifting, that is, the motor drive is mainly used to drive the furnace tube to move in the vertical direction. This lifting method has the advantages of high precision, high speed and good stability.

[0003] However, in the existing electric lifting method of the furnace tube, there is no emergency locking structure in case of belt breakage. In this way, when the belt breaks, the actuator for grabbing the furnace tube will fall. On the one hand, it will cause damage to the actuator and the furnace tube when they fall. On the other hand, there will be certain safety risks, which may easily cause safety accidents.

[0004] Therefore, it is necessary to provide a new type of actuator for semiconductor equipment to solve the above problems existing in the prior art. Utility Model Content

[0005] The purpose of the utility model is to provide an actuator for semiconductor equipment to solve at least one defect existing in the above-mentioned prior art, to prevent the actuator for grabbing semiconductor equipment from falling when encountering a broken belt, to avoid damage to the actuator and the semiconductor equipment, and to reduce safety hazards and avoid the occurrence of safety accidents.

[0006] To achieve the above-mentioned purpose, the actuator for semiconductor equipment of the utility model includes a substrate, an actuator, a screw transmission mechanism installed on the substrate, a drive motor installed on the substrate and a locking device installed on the substrate; the screw transmission mechanism includes a screw and an internal threaded tube threadedly connected to the screw, the drive motor is connected to the screw through a transmission belt to drive the screw to rotate, and the internal threaded tube is connected to the actuator; the actuator is used to grasp the semiconductor equipment; the locking device is used to limit the rotation of the screw.

[0007] Furthermore, the actuator for semiconductor equipment also includes a belt-break monitoring device, which is connected to the substrate and is used to monitor, collect and feedback the state of the transmission belt in real time. The beneficial effect is that the belt-break monitoring device monitors, collects and feedbacks the state of the transmission belt in real time, and sends a signal in time when the transmission belt breaks, thereby improving safety.

[0008] Furthermore, the broken belt monitoring device includes a light emitter and a light receiver, wherein the light emitter is connected to the substrate and is located inside the transmission belt; the light receiver is connected to the substrate and is located outside the substrate; the light receiver is used to receive the light emitted by the light emitter and output a signal. The beneficial effect is that the light emitted by the light emitter is blocked by the transmission belt, the light receiver cannot receive the light signal and does not output a signal; when the transmission belt is broken, the light receiver receives the light emitted by the light emitter, and the light receiver outputs a signal to explain or warn the status of the transmission belt.

[0009] Furthermore, a connecting piece is provided on the substrate, an end of the connecting piece is connected to the substrate, and a side wall of the connecting piece is connected to the light emitter and the light receiver.

[0010] Furthermore, the actuator for semiconductor equipment further comprises a processor, the processor is in communication connection with the light receiver and the locking device; the processor is connected with the substrate. The beneficial effect is that after receiving the signal from the light receiver, the processor sends an instruction to the locking device, and after receiving the instruction, the locking device locks the rotation of the screw rod.

[0011] Furthermore, a fixing plate is provided on the base plate, a bearing is provided on the screw rod, a mounting hole for mounting the bearing is provided on the fixing plate, and the bearing is connected to the base plate through the fixing plate. The beneficial effect is that the screw rod is connected to the base plate through the bearing and the fixing plate, ensuring that the screw rod will not fall due to its own gravity and will not affect the rotation of the screw rod.

[0012] Furthermore, the locking device is a brake.

[0013] Furthermore, a first pulley is sleeved on the upper portion of the screw rod, a second pulley is sleeved on the driving shaft of the driving motor, and the transmission belt is sleeved on the first pulley and the second pulley.

[0014] Furthermore, the locking device is arranged corresponding to the end of the screw rod; when the locking device is in a working state, the locking device locks the end of the screw rod to stop the screw rod from rotating.

[0015] Furthermore, a slide rail is provided on the base plate, and a slider is provided on the actuator corresponding to the slide rail, and the slider is slidably connected to the slide rail. The beneficial effect is that the actuator moves along the axis of the screw rod driven by the inner spiral tube, driving the slider to also move linearly on the slide rail, ensuring that the actuator moves along the axis of the screw rod, while saving the force of the inner threaded tube to drive the actuator to move.

[0016] Furthermore, the semiconductor device is a furnace tube.

[0017] The beneficial effects of the actuator for semiconductor equipment described in the utility model are:

[0018] In the actuator for semiconductor equipment described in the utility model, the driving motor drives the lead screw to rotate through the transmission belt, the internal threaded tube is connected to the actuator, and the internal threaded tube drives the actuator to move along the axis of the lead screw under the rotation of the lead screw, and the actuator drives the grasped semiconductor equipment to move along the axis of the lead screw, and the locking device is provided on the lead screw, and the locking device can limit the rotation of the lead screw, thereby locking the position of the lead screw, stopping the lead screw from moving, thereby locking the position of the actuator, preventing the semiconductor equipment from encountering a broken belt and the actuator from falling, avoiding damage to the actuator for semiconductor equipment and the semiconductor equipment described in the utility model, reducing safety hazards, and avoiding the occurrence of safety accidents. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the overall structure of an actuator for semiconductor equipment in some embodiments provided by the utility model;

[0020] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0021] Figure 3 for Figure 1 Another magnified view of point A in the middle;

[0022] Figure 4 for Figure 1 Enlarged view of point B in the middle. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0024] In view of the problems existing in the prior art, an embodiment of the present utility model provides an actuator for a semiconductor device. The specific implementation of the present utility model is further described in detail below in conjunction with the accompanying drawings.

[0025] Figure 1 This is a schematic diagram of the overall structure of an actuator for semiconductor equipment in some embodiments provided by the utility model.

[0026] Reference Figure 1As shown, in some embodiments of the present invention, the actuator for semiconductor equipment of the present invention includes a substrate 1, a driving motor 2 mounted on the substrate 1, a locking device 3 mounted on the substrate 1, a transmission belt 4, a screw transmission mechanism mounted on the substrate 1, and an actuator 6 for grabbing semiconductor equipment. The screw transmission mechanism includes a screw 51 and an internal threaded tube 52, wherein the internal threaded tube 52 is sleeved on the screw 51 and threadedly connected with the screw 51. The driving shaft of the driving motor 2 is connected to the transmission belt 4, and the end of the transmission belt away from the driving motor 2 is connected to the end of the screw 51. The driving motor 2 rotates the driving shaft and drives the screw 51 to rotate through the transmission belt 4. The outer side of the internal threaded tube 52 is connected to the actuator 6. When the screw 51 rotates under the action of the transmission belt 4, the internal threaded tube 52 does not rotate with the screw 51 under the action of the actuator 6, so that the internal threaded tube 52 moves linearly on the screw 51 along the axis of the screw 51, thereby driving the actuator 6 to move linearly. The end of the actuator 6 away from the internal threaded tube 52 is used to grab the semiconductor device, and the actuator 6 drives the semiconductor device to move linearly under the action of the internal threaded tube 52. The locking device 3 is in active contact with the screw rod 51. When the locking device 3 is in a non-working state, the locking device 3 does not contact the screw rod 51. When the locking device 3 is in a working state, the locking device 3 locks the screw rod 51, restricts the rotation of the screw rod 51, and then locks the position of the actuator 6, so as to prevent the moving semiconductor device from encountering a broken belt and the actuator 6 from falling, and to prevent the actuator 6 from being damaged in the semiconductor device and the semiconductor device of the utility model, thereby reducing safety hazards and avoiding the occurrence of safety accidents.

[0027] In some specific embodiments of the present invention, the base plate 1 is a vertical plate.

[0028] In some specific embodiments of the present invention, the semiconductor device is a furnace tube.

[0029] In some specific embodiments of the present invention, the locking device 3 is a holding brake. In some specific embodiments of the present invention, the holding brake includes any one of an electrical holding brake, a mechanical holding brake, and an electromagnetic holding brake.

[0030] Figure 2 for Figure 1 Enlarged view of point A in the middle.

[0031] Reference Figure 1 and Figure 2As shown, in some embodiments of the utility model, the upper end of the screw rod 51 is sleeved with a first pulley 71, and the upper end of the screw rod 51 passes through the through hole in the middle of the first pulley 71 and is fixedly connected to the first pulley 71. A second pulley 72 is sleeved on the driving shaft of the driving motor 2, and the driving shaft passes through the through hole in the middle of the second pulley 72 and is fixedly connected to the second pulley 72. The first pulley 71 and the second pulley 72 are located in the same plane, and the axes of the first pulley 71 and the second pulley 72 are parallel to each other. The transmission belt 4 is sleeved on the first pulley 71 and the second pulley 72, and the first pulley 71 and the second pulley 72 are both located on the inner side of the transmission belt 4, and the inner side of the transmission belt 4 abuts against the rotatable outer sides of the first pulley 71 and the second pulley 72, so that the transmission belt 4 drives the first pulley 71 to rotate under the drive of the second pulley 72.

[0032] Reference Figure 2 As shown, in some embodiments of the present invention, the actuator for semiconductor equipment of the present invention further includes a belt break monitoring device 8. The belt break monitoring device 8 is connected to the substrate 1, and is used to monitor, collect and feedback the state of the transmission belt 4 in real time, and send a signal in time when the transmission belt 4 breaks, so as to automatically enable the locking device 3 to lock the rotation of the screw rod 51, thereby improving safety.

[0033] In some embodiments of the utility model, the actuator for semiconductor equipment of the utility model further includes a processor, which is in communication connection with the broken belt monitoring device 8 and the locking device 3. When the broken belt monitoring device 8 detects that the transmission belt 4 is broken, it sends a broken belt signal to the processor. After receiving the signal from the broken belt monitoring device 8, the processor sends an instruction to the locking device 3. After receiving the instruction, the locking device 3 locks the rotation of the screw rod 51, so that the screw rod 51 is automatically locked when the transmission belt 4 is broken, and the response is rapid. In some specific embodiments of the utility model, the processor is a programmable logic controller.

[0034] In some specific embodiments of the present invention, the processor is an external controller, and the belt breakage monitoring device 8 and the locking device 3 are connected to the external controller via wires.

[0035] Figure 3 for Figure 1 Another magnified view of point A in the middle.

[0036] Reference Figure 3As shown, in some embodiments of the utility model, the broken belt monitoring device 8 includes a light emitter 81 and a light receiver 82. The light emitter 81 is located on the inner side of the transmission belt 4, and between the first pulley 71 and the second pulley 72. The light receiver 82 is located on the outer side of the transmission belt 4. A connecting member 11 is provided on the substrate 1, and the connecting member 11 includes a straight rod 111 and a U-shaped plate 112, one end of the straight rod 111 is connected to the substrate, and the side wall of the straight rod 111 is connected to the U-shaped plate 112. Part of the transmission belt 4 is located in the opening of the U-shaped plate 112. The light emitter 81 and the light receiver 82 are fixed on the U-shaped plate 112 in parallel, and the light emitter 81 and the light receiver 82 are connected to the substrate through the U-shaped plate 112 and the straight rod 111. The light receiver 82 is used to receive light emitted from the light emitter 81 and output a signal. When the transmission belt 4 is in normal operation, the light emitted by the light emitter 81 is blocked by the transmission belt 4, and the light receiver 82 cannot receive the light emitted by the light emitter 81 and cannot send a signal; when the transmission belt 4 is broken, the light emitted by the light emitter 81 is no longer blocked by the transmission belt 4, and the light receiver 82 outputs a signal after receiving the light emitted by the light emitter 81. The detection is fast and simple, and can quickly warn the state of the transmission belt 4, which is convenient for subsequent operations and the process is convenient. The signal sent by the light receiver 82 can be an electrical signal that can be accepted by the processor, or it can be converted into an optical signal or a sound signal.

[0037] Reference Figure 1 As shown, in some specific embodiments of the present invention, the locking device 3 and the belt breakage monitoring device 8 are located on the same side of the screw rod 51 .

[0038] Reference Figure 1 , Figure 2 and Figure 3 As shown, in some specific embodiments of the utility model, a bearing plate 12 is provided on the base plate 1 for receiving and fixing the locking device 3. When the locking device 3 and the broken belt monitoring device 8 are located on the same side of the screw rod 51, the bearing plate 12 is connected to the end of the straight rod 111 away from the U-shaped plate 112, so that the bearing plate 12 is fixedly connected to the base plate 1. The upper surface of the bearing plate 12 is fixedly connected to the bottom end of the locking device 3, so that the locking device 3 is connected to the base plate 1 through the bearing plate 12. A movable hole is opened on the bearing plate 12 corresponding to the screw rod 51, and the end of the screw rod 51 passes through the movable hole and contacts with the locking device 3. The locking device 3 is adjacent to the first pulley 71, and the bearing plate 12 is located between the first pulley 71 and the locking device 3.

[0039] In other embodiments of the present invention, when the locking device 3 and the broken belt monitoring device 8 are located on different sides of the screw rod 51, the carrier plate 12 is directly connected to the base plate 1, and the lower surface of the carrier plate 12 is fixedly connected to the bottom end of the locking device 3, so that the locking device 3 is connected to the base plate 1 through the carrier plate 12. The locking device 3 is fixed to the other end of the screw rod 51 and is arranged opposite to the first pulley 71.

[0040] In some other embodiments of the present invention, the number of the locking devices 3 is two, and the two locking devices 3 are respectively disposed at two ends of the screw rod 51 .

[0041] Figure 4 for Figure 1 Enlarged view of point B in the middle.

[0042] Reference Figure 4 As shown, in some embodiments of the utility model, a bearing 53 is provided on the screw rod 51, and a fixing plate 13 is also provided on the base plate 1, the fixing plate 13 extends outward from the base plate 1, and a fixing hole is provided on the fixing plate 13, the bearing 53 is located in the fixing hole, the hole wall of the fixing hole is fixedly connected to the outer ring of the bearing 53, the screw rod 51 passes through the hole in the middle of the inner ring of the bearing 53, and the outer wall of the screw rod 51 is fixedly connected to the inner wall of the inner ring of the bearing 53. In this way, the screw rod 51 is fixedly connected to the base plate 1 through the bearing 53 and the fixing plate 13, ensuring that the screw rod 51 will not fall due to its own gravity, and will not affect the rotation of the screw rod 51.

[0043] In some other embodiments of the utility model, the number of bearings 53 is 2, and the two bearings 53 are respectively distributed at both ends of the screw rod 51. Each bearing 53 is correspondingly provided with a fixing plate 13, and is connected to the base plate 1 through the fixing plate 13, so that the screw rod 51 is connected to the base plate 1 to achieve the purpose of fixing the screw rod 51.

[0044] Reference Figure 1 As shown, in some embodiments of the utility model, a slide rail 14 parallel to the axis of the screw rod 51 is provided on the substrate 1, and a slider is provided on the side of the actuator 6 facing the substrate 1, and the sliding portion of the slider is located in the slide rail 14 and is slidably connected to the slide rail 14. The actuator 6 moves along the axis of the screw rod 51 driven by the inner spiral tube, driving the slider to also make linear motion on the slide rail 14, and the slider and the slide rail 14 ensure that the actuator 6 moves in the vertical direction, while saving the force of the inner threaded tube 52 to drive the actuator 6 to move.

[0045] In some embodiments of the present invention, the axial direction of the screw rod 51 and the length direction and vertical direction of the slide rail 14 are in the same direction.

[0046] The working process of the actuator for semiconductor equipment of the utility model is as follows: start the driving motor 2, so that the driving shaft of the driving motor 2 rotates, drives the second pulley 72 to rotate, the second pulley 72 drives the transmission belt 4 to rotate, and then makes the first pulley 71 with the transmission belt 4 rotate, the first pulley 71 drives the screw 51 to rotate, the internal threaded tube 52 on the screw 51 does not rotate synchronously with the screw 51 due to the limitation of the actuator 6, and the internal threaded tube 52 moves linearly along the axis of the screw 51 on the screw 51. The internal threaded tube 52 drives the actuator 6 to move linearly along the axis of the screw 51, and drives the slider 61 to slide on the slide rail 14. The actuator 6 drives the semiconductor equipment to move synchronously, so that the semiconductor equipment moves in the vertical direction, and the height of the semiconductor equipment is raised or lowered. During operation, the broken belt monitoring device 8 senses and monitors the state of the transmission belt 4 in real time. When the moving semiconductor device encounters a broken transmission belt 4, the broken signal is collected in real time and transmitted to the processor. After receiving the broken signal, the processor sends a control command to the locking device 3 to control the locking device 3 to lock the lead screw 51, so that the lead screw 51 stops moving, causing the internal threaded tube 52 and the actuator 6 to stop moving, locking the position of the actuator 6 and the semiconductor device, and preventing the actuator 6 and the semiconductor device from continuing to move and falling when the belt breaks, thereby preventing the actuator 6 and the semiconductor device from being damaged, reducing safety hazards, and avoiding the occurrence of safety accidents.

[0047] In some embodiments of the utility model, if the semiconductor device is in a downward moving state, the actuator for the semiconductor device of the utility model locks the rotation of the screw rod 51 when the belt breaks, thereby locking the position of the actuator 6, thereby preventing the actuator 6 that grabs the semiconductor device from continuing to move downward and falling, thereby preventing the actuator 6 and the semiconductor device from being damaged when they fall, reducing safety risks, and avoiding safety accidents.

[0048] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. An actuator for a semiconductor device, characterized in that: It includes a base plate, an actuator, a screw transmission mechanism installed on the base plate, a drive motor installed on the base plate, and a locking device installed on the base plate; The screw transmission mechanism includes a screw and an internally threaded tube threadedly connected to the screw, the drive motor is connected to the screw through a transmission belt to drive the screw to rotate, and the internally threaded tube is connected to the actuator; The actuator is used to grab the semiconductor device; The locking device is used to limit the rotation of the screw rod.

2. The actuator for semiconductor equipment according to claim 1, characterized in that: It also includes a belt break monitoring device, which is connected to the base plate and is used for real-time monitoring, collecting and feeding back the state of the transmission belt.

3. The actuator for semiconductor equipment according to claim 2, characterized in that: The broken belt monitoring device comprises a light emitter and a light receiver, wherein the light emitter is connected to the substrate and is located inside the transmission belt; The light receiver is connected to the substrate and is located outside the substrate; The light receiver is used to receive the light emitted by the light emitter and output a signal.

4. The actuator for semiconductor equipment according to claim 3, characterized in that: A connecting piece is arranged on the substrate, an end of the connecting piece is connected to the substrate, and a side wall of the connecting piece is connected to the light emitter and the light receiver.

5. The actuator for semiconductor equipment according to claim 3, characterized in that: It also includes a processor, which is communicatively connected with the light receiver and the locking device.

6. The actuator for semiconductor equipment according to claim 1, characterized in that: A fixing plate is arranged on the base plate, a bearing is arranged on the screw rod, a mounting hole for mounting the bearing is arranged on the fixing plate, and the bearing is connected to the base plate through the fixing plate.

7. The actuator for semiconductor equipment according to claim 1, characterized in that: The locking device is a holding brake.

8. The actuator for semiconductor equipment according to claim 1, characterized in that: The upper part of the screw rod is provided with a first pulley, the driving shaft of the driving motor is provided with a second pulley, and the transmission belt is provided on the first pulley and the second pulley.

9. The actuator for semiconductor equipment according to claim 1, characterized in that: The locking device is arranged corresponding to the end of the screw rod; When the locking device is in a working state, the locking device locks the end of the screw rod to stop the screw rod from rotating.

10. The actuator for semiconductor equipment according to claim 1, characterized in that: A slide rail is also arranged on the base plate, and a slider is arranged on the actuator corresponding to the slide rail, and the slider is slidably connected to the slide rail.

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