Splash-proof structure of spin coater and spin coater

Abstract

The utility model discloses an anti-splashing structure of a spin coater. The anti-splashing structure comprises a tray box, a sleeve and a tray, the tray box is provided with a working cavity and comprises a first cavity and a second cavity which are arranged up and down and communicated, and the sections of the first cavity and the second cavity are in a circular truncated cone shape and a cylinder shape respectively; the sleeve is arranged in the working cavity and comprises a second sleeve body arranged in the second cavity and a first sleeve body which is connected to the second sleeve body and extends towards the first cavity, and the first sleeve body is in a circular truncated cone shape; the tray is arranged in the first cavity and located above the first barrel, and the tray can rotate in the axial direction of the tray. The splash-proof structure can prevent thrown glue liquid from being splashed back to the substrate, so that the whole spin-coating process is more controllable, and the yield is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of spin coating equipment, and in particular relates to a structure on a spin coating machine for preventing glue liquid from splashing back, and a spin coating machine adopting the structure. Background Art

[0002] A spin coater is a device that uses high-speed rotation to generate centrifugal force to evenly coat liquid. In a spin coater, a substrate (peel or metal sheet, etc.) is fixed on a turntable, which is driven by a motor to rotate at high speed. During the rotation, the liquid dripped on the substrate is evenly coated on the substrate under the action of centrifugal force to form a thin film. It is often used in fields where surfaces need to be coated, such as microelectronics, semiconductors, platemaking, new energy, biomaterials, optics, etc.

[0003] During the operation of the spin coater, liquid splashback often occurs, that is, during the rotation process, part of the liquid is thrown off the turntable and splashed onto the surface of the equipment. When the liquid contacts the surface of the spin coater, the impact force generated will cause the liquid to splash back, resulting in liquid waste and affecting the working environment. For some processes that require high liquid control, such as coating and painting, the impact of splashback is more important.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0005] The utility model aims to provide a structure for preventing back-splashing on a spin coater, which is used for solving the problem of liquid back-splashing.

[0006] In order to achieve the above-mentioned purpose, a specific embodiment of the utility model provides a splash-proof structure for a spin coater, including a tray box, a sleeve and a tray. The tray box is provided with a working chamber, including a first chamber and a second chamber arranged up and down and connected, and the cross-sections of the first chamber and the second chamber are respectively truncated cone-shaped and cylindrical; the sleeve is arranged in the working chamber, including a second cylinder arranged in the second chamber and a first cylinder connected to the second cylinder and extending to the first chamber, and the first cylinder is truncated cone-shaped; the tray is arranged in the first chamber and located above the first cylinder, and the tray can rotate around its own axis.

[0007] In one or more embodiments of the present invention, the distance between the first cylinder and the inner wall of the first chamber gradually decreases in the downward direction.

[0008] In one or more embodiments of the present invention, the tray is located on the plane where the opening of the first cylinder is located.

[0009] In one or more embodiments of the present invention, the diameter of the tray is greater than or equal to the diameter of the opening of the first cylinder.

[0010] In one or more embodiments of the present invention, foam is provided on the outer wall of the cylinder.

[0011] In one or more embodiments of the present invention, foam is provided on the inner wall of the working chamber.

[0012] In one or more embodiments of the present invention, a plane where the first chamber and the second chamber are connected is higher than a plane where the first cylinder and the second cylinder are connected.

[0013] In one or more embodiments of the present invention, an opening communicating with the working chamber is formed on the top of the pallet box.

[0014] In one or more embodiments of the present invention, the sleeve is detachably fixed to the pallet box.

[0015] The utility model also provides a spin coater, comprising the above-mentioned anti-splash structure of the spin coater.

[0016] Compared with the prior art, the top of the tray box of the spin coater in the utility model is arranged in a frustum shape, and a sleeve with a frustum shape on the top is arranged in the box. After the flying liquid contacts the inner wall of the box, due to the angle, the splashed liquid goes downward into the space between the sleeve and the inner wall of the box, and will not splash onto the tray body or above the tray, thereby improving work efficiency and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 It is a cross-sectional view of the anti-splash structure of the spin coater in one embodiment of the utility model.

[0019] Description of main reference numerals:

[0020] 10-tray box, 101-inner wall, 11-first chamber, 12-second chamber, 13-opening, 20-sleeve, 201-outer wall, 21-first cylinder, 22-second cylinder, 30-tray. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0022] like Figure 1 As shown, the anti-splash structure of the spin coater in one embodiment of the utility model comprises a tray box 10, a sleeve 20 and a tray 30. A working chamber is arranged in the tray box 10, and the working chamber is a two-stage structure, which is divided into an upper truncated cone-shaped first chamber 11 and a lower cylindrical second chamber 12. The sleeve 20 is fixed in the working chamber, which is also a two-stage structure, which is divided into a lower cylindrical second cylinder 22 and an upper truncated cone-shaped first cylinder 21. The tray 30 is used to support and fix the substrate to be coated with glue, which is supported above the first cylinder 21 and can rotate around its own axis.

[0023] The spin coater in the prior art usually adopts a bowl-shaped container with the substrate fixed in the middle. The liquid droplets thrown off during the rotation are easily splashed back to the substrate or outside the container after contacting the inner wall of the container, which is very disadvantageous in the production of products requiring liquid control and may lead to reduced yield.

[0024] To avoid the above situation, in this embodiment, the inner wall above the working chamber of the spin coater and the part near the top of the sleeve 20 are designed to be truncated into a cone shape, forming a truncated cone groove area between the two. When the substrate is rotated, the glue supported on the tray 30 will throw off some droplets. After the thrown droplets are ejected from the inner wall of the tray box 10, they are blocked by the outer wall of the sleeve 20 when moving to the side of the tray 30. Therefore, the droplets are ejected back and forth between the inner wall of the working chamber and the outer wall of the sleeve 20. At the same time, the droplets continue to descend under the effect of gravity. Therefore, most of the droplets cannot return to the tray 30 after being thrown off, and the backsplash effect is greatly improved. The operation of the entire spin coater is more controllable, especially in the production of products with high requirements for liquid control, the yield rate is guaranteed.

[0025] Specifically, the second barrel 22 is located in the second chamber 12, and the first barrel 21 extends upward into the first chamber 11. Since the first chamber 11 and the first barrel 21 are both truncated cone-shaped, the first chamber 11 has an inclined inner wall 101, and the first barrel 21 has an inclined outer wall 201, and the inner wall 101 and the outer wall 201 have the same inclination direction. The tray 30 is located above the first barrel 21, so when the tray 30 rotates, the flying liquid first splashes onto the inner wall 101 of the first chamber 11, and due to the influence of gravity and the impact angle, most of the splashed liquid moves obliquely downward toward the outer wall 201 of the first barrel 21. Since the first barrel 21 is also truncated cone-shaped, when the liquid moves to the surface of the outer wall 201 of the first barrel 21, under the influence of gravity and the impact angle, the droplets move downward to the other side. Therefore, the splashed droplets move back and forth between the inner wall 101 of the first chamber 11 and the outer wall 201 of the first cylinder 21 while moving downward, or enter between the second chamber 12 and the second cylinder 22, until the kinetic energy is completely lost.

[0026] Preferably, the distance between the outer wall 201 of the first cylinder 21 and the inner wall 101 of the first chamber 11 gradually decreases in the downward direction. The gradually decreasing distance can increase the number of sputtering times of droplets in the first chamber 11, accelerate the consumption of kinetic energy of droplets, increase the amount of droplets remaining in the first chamber 11, and reduce the amount of droplets moving into the second chamber 12 accordingly, or even no droplets enter the second chamber 12 area, which facilitates the later collection of the flying liquid and reduces production costs.

[0027] Furthermore, the opening of the first cylinder 21 is located in the first chamber 11, and the tray 30 is located in the plane where the opening of the first cylinder 21 is located. Since the drive shaft (not shown) that drives the tray 30 to rotate is located in the sleeve 20, arranging the tray 30 at the opening of the first cylinder 21 can shorten the distance between the tray 30 and the opening, or even close the opening, so that the back-splashing droplets cannot enter the interior of the sleeve 20, prevent the internal drive shaft from being affected, and facilitate the later cleaning and collection of liquid.

[0028] In one embodiment, the diameter of the tray 30 is larger than the opening diameter of the first cylinder 21, so the tray 30 can cover the opening of the first cylinder 21 to prevent droplets from entering the interior of the sleeve 20 or splashing onto the drive shaft, which is convenient for later cleaning.

[0029] In one embodiment, foam is laid on the inner wall of the working chamber (not shown). Since pores are formed on the surface of the foam, some liquid droplets enter the pores after touching the foam, and their kinetic energy gradually weakens and is trapped during the movement into the pores, thereby further reducing the amount of liquid splashback.

[0030] It is easy to imagine that foam can also be provided on the outer wall of the sleeve 20 to reduce the amount of liquid splashing back, and most of the liquid is trapped in the space where the first chamber 11 is located, so as to facilitate later cleaning.

[0031] Furthermore, in one embodiment, since foam is respectively arranged on the outer wall of the sleeve 20 and the inner wall of the working chamber, in order to match the design, the plane where the communication position of the first chamber 11 and the second chamber 12 (i.e. the corner position in the working chamber) is located is designed to be higher than the plane where the connection position of the first cylinder 21 and the second cylinder 22 is located. By the above arrangement, the length of the outer wall of the first cylinder 21 is extended, and the contact distance with the droplets is increased, and the droplets can be further trapped on the inner wall 101 of the first chamber 11 or the outer wall 201 of the first cylinder 21, preventing the droplets from entering the straight cylinder space below, and reducing the later cleaning area.

[0032] In this embodiment, the sleeve 20 is detachably fixed in the working chamber. When it is necessary to clean and collect the flying liquid, the sleeve 20 can be removed and processed separately. At the same time, the operable space of the working chamber is increased, and the usability is improved.

[0033] Since the cooperation between the working chamber and the sleeve 20 can intercept most of the flying droplets, in one embodiment, the tray box 10 is of open design, and an opening 13 connected to the internal working chamber is provided on the top thereof, through which the internal tray, substrate, etc. can be operated without opening the top cover.

[0034] The utility model also provides a spin coater, which, by setting the above-mentioned anti-splashing structure, can retain most of the glue liquid thrown off during rotation on the inner wall 101 of the first chamber 11 and the outer wall 201 of the first cylinder 21, so as to prevent the glue liquid from splashing back to the surface of the substrate or being thrown out of the spin coater, thereby improving the yield of products with high liquid control requirements during production, and facilitating the subsequent glue liquid recovery and processing.

[0035] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0036] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A splash-proof structure for a spin coater, characterized in that: include: A pallet box, wherein the pallet box is provided with a working chamber, including a first chamber and a second chamber which are arranged vertically and connected to each other, wherein the cross sections of the first chamber and the second chamber are truncated cone-shaped and cylindrical-shaped, respectively; A sleeve, arranged in the working chamber, comprising a second cylinder arranged in the second chamber and a first cylinder connected to the second cylinder and extending into the first chamber, wherein the first cylinder is in a truncated cone shape; The tray is arranged in the first chamber and located above the first cylinder, and the tray can rotate around its own axis.

2. The anti-splash structure of the spin coater according to claim 1, characterized in that: The distance between the first cylinder and the inner wall of the first chamber gradually decreases in the downward direction.

3. The anti-splash structure of the spin coater according to claim 2, characterized in that: The tray is located on the plane where the opening of the first cylinder is located.

4. The anti-splash structure of the spin coater according to claim 2, characterized in that: The tray diameter is greater than or equal to the first cylinder opening diameter.

5. The anti-splash structure of the spin coater according to claim 2, characterized in that: Foam is arranged on the outer wall of the cylinder.

6. The anti-splash structure of the spin coater according to claim 5, characterized in that: Foam is arranged on the inner wall of the working chamber.

7. The anti-splash structure of the spin coater according to claim 6, characterized in that: The plane where the communication position between the first chamber and the second chamber is located is higher than the plane where the communication position between the first cylinder and the second cylinder is located.

8. The anti-splash structure of a spin coater according to claim 1, characterized in that: The top of the pallet box is provided with an opening communicating with the working chamber.

9. The anti-splash structure of a spin coater according to claim 1, characterized in that: The sleeve and the pallet box are detachably fixed.

10. A spin coater, characterized in that: It comprises a spin coater splash protection structure as described in any one of claims 1-9.

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