Thermal purging device of three-way valve for semiconductor factory

By designing a thermal purge device in a semiconductor factory, using a pumping and blowing device combined with high-pressure tank and filter technology, the problem of easy condensation of the flowing medium is solved, extending the maintenance cycle of the equipment and improving operating stability.

CN222175203UActive Publication Date: 2024-12-17WUXI CAPITES SEMICON TECH CO LTD
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Patent Information

Application Number
CN202420815376.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-19
Publication Date
2024-12-17
Estimated Expiration
2034-04-19

AI Technical Summary

Technical Problem

In semiconductor processes, the flowing medium is prone to condense, causing products to adhere to the valve chamber or inner wall of the discharge pipe, affecting the flow of the medium, and in severe cases it will cause blockage and affect the operation of the equipment.

Method used

A thermal purge device for a three-way valve for semiconductor factories is designed. The nitrogen is filtered and compressed through the air extraction device. After storage using a high-pressure tank, the hot nitrogen is purged through the air blow device to prevent the medium from condensing. The device includes a pumping device, a blowing device, a heating box, an electric valve and an L-shaped fixing frame. It uses an air compressor and a filter to perform nitrogen filtration and pressurization to ensure efficient use of nitrogen.

Benefits of technology

Effectively prevent flow media from condensing, extending maintenance cycle, and improving the operating stability and maintenance cycle of the equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of semiconductor processing, and discloses a thermal purging device of a three-way valve for a semiconductor factory, which comprises a base, an air extractor arranged on the right side of the top of the base, two mounting racks fixedly mounted on the top of the base and on the left side of the air extractor, and a high-pressure tank fixedly mounted on the tops of the mounting racks, a blowing device is arranged at the top of the base and on the left side of the high-pressure tank; the air blowing device comprises a three-way valve arranged on the left side of the base, a heating box fixedly installed at the top of the base, a connecting port communicating with the left side of the high-pressure tank, two electric valves communicating with the left side of the connecting port and an electric push rod fixedly installed at the top of the three-way valve. Nitrogen filtered and compressed by the air extractor is stored through the arrangement of the high-pressure tank, hot nitrogen is blown to the valve cavity through the arrangement of the air blowing device, the valve cavity is continuously blown, a flowing medium is not prone to condensation, and the maintenance period is prolonged.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a thermal purge device of a three-way valve used in semiconductor factories. Background Art

[0002] Semiconductor refers to materials with electrical conductivity between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. Whether from the perspective of science and technology or economic development, the importance of semiconductors is enormous. Most electronic products, such as computers, mobile phones or digital recorders, have a very close relationship with semiconductors in their core units. Common semiconductor materials include silicon, germanium, gallium arsenide, etc. Silicon is the most influential semiconductor material application.

[0003] In the semiconductor process, the flowing medium is generally corrosive and easy to condense. Long-term operation will cause the products to adhere to the inner wall of the valve chamber or the drain pipe. If the blockage is serious, it will affect the flow of the medium. Utility Model Content

[0004] The utility model aims to provide a thermal purge device for a three-way valve used in a semiconductor factory. External nitrogen is filtered and compressed by setting an air extraction device, and the nitrogen filtered and compressed by the air extraction device is stored by setting a high-pressure tank. The hot nitrogen is blown into the valve cavity by setting an air blowing device, and the valve cavity is continuously purged, so that the flowing medium is not easy to condense, thereby extending the maintenance cycle.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A thermal purge device for a three-way valve used in a semiconductor factory comprises a base, a vacuum device is arranged on the right side of the top of the base, two mounting racks are fixedly installed on the top of the base and on the left side of the vacuum device, a high-pressure tank is fixedly installed on the top of the mounting rack, and a blowing device is arranged on the top of the base and on the left side of the high-pressure tank;

[0007] The blowing device includes a three-way valve arranged on the left side of the base, a heating box fixedly installed on the top of the base, a connecting port connected to the left side of the high-pressure tank, two electric valves connected to the left side of the connecting port, and an electric push rod fixedly installed on the top of the three-way valve, wherein the output end of the electric push rod penetrates into the interior of the three-way valve and is fixedly connected to the top of the valve core of the three-way valve;

[0008] One side of the two electric valves is connected to a third conduit and a fourth conduit respectively, one side of the third conduit is connected to an air inlet on one side of the three-way valve, and one side of the fourth conduit is connected to one side of the heating box;

[0009] One side of the heating box is connected to a second conduit, and one side of the second conduit is connected to an air inlet on the other side of the three-way valve.

[0010] As a further solution of the utility model: an L-shaped fixing frame is fixedly installed on one side of the three-way valve, and two through cavities are provided on the top and side of the L-shaped fixing frame.

[0011] As a further solution of the utility model: the air extraction device includes a base plate fixedly installed on the top of the base, an installation box fixedly installed on the front side of the base plate, a mounting plate arranged on the top of the installation box, and an air compressor fixedly installed on the top of the base plate and located on the right side of the high-pressure tank, and the air inlet port of the air compressor is connected to the rear side of the installation box.

[0012] As a further solution of the utility model: the front side of the installation box is connected with an exhaust pipe, which passes through the installation box and extends to the interior of the installation box; the bottom of the installation plate is fixedly installed with evenly distributed filter screens, and the outer edges of the filter screens are in contact with the inner cavity of the installation box; the bottom of the installation plate is fixedly installed with a rubber pad, and the bottom of the rubber pad is in contact with the top of the installation box; the interior of the installation plate is interspersed with bolts, and the bottom of the bolts passes through the interior of the installation box and is rotatably connected to the installation box by threads.

[0013] As a further solution of the utility model: the air outlet port of the air compressor is connected to a first conduit, and the left side of the first conduit is connected to the top of the high-pressure tank.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The external nitrogen is filtered and compressed by the vacuum device, and the nitrogen filtered and compressed by the vacuum device is stored by the high-pressure tank. The hot nitrogen is blown into the valve cavity by the blowing device, and the valve cavity is continuously purged, so that the flowing medium is not easy to condense and the maintenance cycle is extended.

[0016] 2. Through the cooperation between the installation box, the air compressor and the filter, the external nitrogen is filtered and pressurized for subsequent use. The external nitrogen is sent to the inside of the installation box through the setting of the exhaust pipe. The outer side of the filter is in contact with the inner cavity of the installation box to increase the sealing performance, so that the nitrogen can flow through the inside of the filter to facilitate filtering. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the left structure in the utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the air blowing device in the utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the filter screen in the utility model when viewed from above;

[0021] Figure 5 It is a schematic diagram of the top view structure of the filter screen in the utility model.

[0022] In the figure:

[0023] 1. Base;

[0024] 2. Mounting frame;

[0025] 3. High pressure tank;

[0026] 4. exhaust device; 401. bottom plate; 402. mounting plate; 403. mounting box; 404. exhaust pipe; 405. air compressor; 406. rubber pad; 407. bolt; 408. filter screen; 409. first conduit;

[0027] 5. Air blowing device; 501. Heating box; 502. Connection port; 503. Electric valve; 504. Three-way valve; 505. Electric push rod; 506. L-shaped fixing frame; 507. Through cavity; 508. Second conduit; 509. Third conduit; 510. Fourth conduit. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the implementation mode of the utility model clearer, the technical solution in the implementation mode of the utility model will be clearly and completely described below in conjunction with the drawings in the implementation mode of the utility model. Obviously, the implementation mode described is a part of the implementation mode of the utility model, not all the implementation modes. Based on the implementation mode of the utility model, all other implementation modes obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] Example

[0030] See also Figure 1 , 2 and 3, a thermal purge device for a three-way valve used in a semiconductor factory, comprising a base 1, a vacuum device 4 is arranged on the right side of the top of the base 1, two mounting frames 2 are fixedly installed on the top of the base 1 and on the left side of the vacuum device 4, a high-pressure tank 3 is fixedly installed on the top of the mounting frame 2, and a blowing device 5 is arranged on the top of the base 1 and on the left side of the high-pressure tank 3;

[0031] The blowing device 5 includes a three-way valve 504 arranged on the left side of the base 1, a heating box 501 fixedly installed on the top of the base 1, a connection port 502 connected to the left side of the high-pressure tank 3, two electric valves 503 connected to the left side of the connection port 502, and an electric push rod 505 fixedly installed on the top of the three-way valve 504. The output end of the electric push rod 505 penetrates into the interior of the three-way valve 504 and is fixedly connected to the top of the valve core of the three-way valve 504. The external nitrogen is filtered and compressed by the setting of the exhaust device 4. The setting of the high-pressure tank 3 realizes the storage of the nitrogen filtered and compressed by the exhaust device 4. The setting of the blowing device 5 blows the hot nitrogen into the valve cavity, so that the flowing medium is not easy to condense, thereby extending the maintenance cycle.

[0032] One side of the two electric valves 503 is connected to the third conduit 509 and the fourth conduit 510 respectively. One side of the third conduit 509 is connected to the air inlet on one side of the three-way valve 504, and one side of the fourth conduit 510 is connected to one side of the heating box 501. The setting of the electric valve 503 is used to control the outlet of nitrogen, thereby meeting the nitrogen heating requirement.

[0033] One side of the heating box 501 is connected to a second conduit 508, and one side of the second conduit 508 is connected to the air inlet on the other side of the three-way valve 504. The second conduit 508 is provided to realize the connection between the heating box 501 and the three-way valve 504, and then the heated nitrogen is sent to the inside of the three-way valve 504 and blown out to meet the use needs of the purge valve cavity. An L-shaped fixing frame 506 is fixedly installed on one side of the three-way valve 504, and two through cavities 507 are provided on the top and side of the L-shaped fixing frame 506. The three-way valve 504 can be installed and used conveniently through the cooperation between the L-shaped fixing frame 506 and the through cavity 507.

[0034] See also Figure 1 , 2 , 4 and 5, a thermal purge device of a three-way valve for use in a semiconductor factory, the exhaust device 4 includes a base plate 401 fixedly mounted on the top of the base 1, a mounting box 403 fixedly mounted on the front side of the base plate 401, a mounting plate 402 arranged on the top of the mounting box 403 and an air compressor 405 fixedly mounted on the top of the base plate 401 and located on the right side of the high-pressure tank 3, the air inlet port of the air compressor 405 is connected to the rear side of the mounting box 403, and the external nitrogen is filtered and pressurized through the cooperation between the mounting box 403, the air compressor 405 and the filter 408 for subsequent use.

[0035] The front side of the installation box 403 is connected to an exhaust pipe 404, which penetrates the installation box 403 and extends to the interior of the installation box 403. The bottom of the installation plate 402 is fixedly installed with evenly distributed filter screens 408, and the outer edge of the filter screen 408 is in contact with the inner cavity of the installation box 403. The external nitrogen is delivered to the interior of the installation box 403 through the setting of the exhaust pipe 404. The outer side of the filter screen 408 is in contact with the inner cavity of the installation box 403 to increase the sealing performance, so that the nitrogen can flow through the interior of the filter screen 408 for easy filtration.

[0036] A rubber pad 406 is fixedly installed at the bottom of the mounting plate 402, and the bottom of the rubber pad 406 contacts the top of the mounting box 403. Bolts 407 are inserted into the interior of the mounting plate 402, and the bottom of the bolts 407 penetrates into the interior of the mounting box 403 and is connected to the mounting box 403 by threaded rotation. The rubber pad 406 is provided to increase the sealing between the mounting plate 402 and the mounting box 403, and the bolts 407 are provided to achieve the connection between the mounting plate 402 and the mounting box 403, and at the same time, the mounting plate 402 is conveniently removed to replace the filter 408. The air outlet port of the air compressor 405 is connected to the first conduit 409, and the left side of the first conduit 409 is connected to the top of the high-pressure tank 3. The compressed and filtered nitrogen is sent to the interior of the high-pressure tank 3 for storage through the provision of the first conduit 409.

[0037] The working process of this utility model is:

[0038] The three-way valve 504 is connected to the production equipment, the second conduit 508 is connected to one side of the heating box 501, and the third conduit 509 is connected to the electric valve 503. After the connection is completed, the air compressor 405 is turned on, and the external nitrogen is sucked into the interior of the installation box 403 through the exhaust pipe 404 through the air compressor 405 and passes through the interior of the filter 408 to filter the impurities inside the nitrogen. The filtered nitrogen enters the interior of the installation box 403 for compression and is sent to the interior of the high-pressure tank 3 through the first conduit 409 for storage. When it is needed, the electric valve 503 is connected to allow the nitrogen to enter the interior of the heating box 501 for heating and then enter the interior of the three-way valve 504 through the second conduit 508 to be ejected to meet the use needs of purging the valve cavity.

[0039] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A thermal purge device for a three-way valve used in a semiconductor factory, comprising a base (1), characterized in that: An air extraction device (4) is provided on the right side of the top of the base (1); two mounting frames (2) are fixedly installed on the top of the base (1) and on the left side of the air extraction device (4); a high-pressure tank (3) is fixedly installed on the top of the mounting frames (2); and an air blowing device (5) is provided on the top of the base (1) and on the left side of the high-pressure tank (3); The blowing device (5) comprises a three-way valve (504) arranged on the left side of the base (1), a heating box (501) fixedly mounted on the top of the base (1), a connection port (502) connected to the left side of the high-pressure tank (3), two electric valves (503) connected to the left side of the connection port (502), and an electric push rod (505) fixedly mounted on the top of the three-way valve (504), wherein the output end of the electric push rod (505) penetrates into the interior of the three-way valve (504) and is fixedly connected to the top of the valve core of the three-way valve (504); One side of the two electric valves (503) is connected to a third conduit (509) and a fourth conduit (510), respectively; one side of the third conduit (509) is connected to an air inlet on one side of the three-way valve (504); and one side of the fourth conduit (510) is connected to one side of the heating box (501); One side of the heating box (501) is connected to a second conduit (508), and one side of the second conduit (508) is connected to an air inlet on the other side of the three-way valve (504).

2. A thermal purge device for a three-way valve used in a semiconductor factory according to claim 1, characterized in that: An L-shaped fixing frame (506) is fixedly mounted on one side of the three-way valve (504), and two through cavities (507) are provided on the top and side of the L-shaped fixing frame (506).

3. A thermal purge device for a three-way valve used in a semiconductor factory according to claim 1, characterized in that: The air extraction device (4) comprises a bottom plate (401) fixedly mounted on the top of the base (1), a mounting box (403) fixedly mounted on the front side of the bottom plate (401), a mounting plate (402) arranged on the top of the mounting box (403), and an air compressor (405) fixedly mounted on the top of the bottom plate (401) and located on the right side of the high-pressure tank (3), wherein an air inlet port of the air compressor (405) is connected to the rear side of the mounting box (403).

4. A thermal purge device for a three-way valve used in a semiconductor factory according to claim 3, characterized in that: The front side of the installation box (403) is connected to an exhaust pipe (404), and the exhaust pipe (404) passes through the installation box (403) and extends to the interior of the installation box (403). The bottom of the installation plate (402) is fixedly installed with uniformly distributed filter screens (408), and the outer edge of the filter screen (408) is in contact with the inner cavity of the installation box (403); the bottom of the installation plate (402) is fixedly installed with a rubber pad (406), and the bottom of the rubber pad (406) is in contact with the top of the installation box (403). Bolts (407) are interspersed inside the installation plate (402), and the bottom of the bolts (407) passes through the interior of the installation box (403) and is rotatably connected to the installation box (403) by a thread.

5. The thermal purge device of a three-way valve for use in a semiconductor factory according to claim 3, characterized in that: The air outlet port of the air compressor (405) is connected to a first conduit (409), and the left side of the first conduit (409) is connected to the top of the high-pressure tank (3).