Cleaning device

Abstract

The utility model relates to the technical field of plasma cleaning, and provides a cleaning device which comprises an upper cover, a lower cavity, a plurality of sealing assemblies, an upper electrode plate, a lower electrode plate and at least one transmission assembly. The upper cover and the lower cavity form a vacuum cavity, the sealing assemblies are arranged at the inlet end and the outlet end of the vacuum cavity and used for sealing the vacuum cavity, the transmission assembly is arranged in the vacuum cavity, the upper electrode plate is arranged on the lower portion of the upper cover, and the lower electrode plate is arranged on the lower portion of the transmission assembly. And the lower cavity is provided with the lower electrode plate. And through conveying of the conveying belt and the supporting metal wires, the two faces of the workpiece can be cleaned, and the cleaning efficiency is improved. The lead screw is driven through the first drive, adjustment can be conducted according to the width of the workpiece, and the device is suitable for workpieces of various widths.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma cleaning, in particular to a cleaning device. Background Art

[0002] Plasma cleaning machine is a cleaning device that uses plasma to clean products. The existing cleaning device includes a cavity for placing electrode plates, and the electrode plates and brackets arranged in the cavity. The electrode plates release plasma through ionization to clean the products in the cavity. The existing plasma cleaning cannot meet the purpose of cleaning workpieces of various widths and both sides. Summary of the invention

[0003] The utility model provides a cleaning device, which is used to solve the problem in the prior art that plasma cleaning cannot adapt to the purpose of cleaning workpieces of various widths and both sides.

[0004] A cleaning device comprises an upper cover, a lower cavity, a plurality of sealing components, an upper electrode plate, a lower electrode plate and at least one transmission component; the upper cover and the lower cavity form a vacuum cavity, the sealing components are arranged at the inlet and outlet ends of the vacuum cavity, the sealing components are used to seal the vacuum cavity, the transmission component is arranged inside the vacuum cavity, the upper electrode plate is arranged at the lower part of the upper cover, and the lower cavity is arranged at the lower electrode plate.

[0005] According to the cleaning device of the utility model, the sealing assembly includes a sealing plate, a sealing cylinder connecting rod and at least one guide mechanism; the sealing cylinder connecting rod is fixed to the lower side of the sealing plate, the guide mechanism is symmetrically arranged on both sides of the sealing cylinder connecting rod, and oblique grooves are arranged on the left and right sides of the sealing plate.

[0006] According to the cleaning device of the utility model, the transmission assembly includes a driving assembly and an adjusting assembly; the adjusting assembly is arranged on both sides of the driving assembly.

[0007] According to the cleaning device of the utility model, the driving assembly includes a second drive, a transmission belt, a driving wheel and a driving shaft; the second drive drives the driving shaft, the driving shaft drives the driving wheel, and the driving wheel drives the transmission belt.

[0008] According to the cleaning device of the utility model, the adjustment component includes a first drive, at least one lead screw and at least one guide light axis; the first drive drives the lead screw to adjust, the lead screw and the guide light axis are arranged on the adjustment support seat, and the guide light axis has a guiding function.

[0009] According to the cleaning device of the utility model, it also includes an electrode and a gas pipe, and the electrode and the gas pipe are arranged on the upper part of the upper cover.

[0010] According to the cleaning device of the utility model, it also includes an upper cover cooling water channel. The upper cover cooling water channel is arranged on the upper part of the upper cover, and the upper cover cooling water channel is concave.

[0011] According to the cleaning device of the utility model, it also includes an inlet material detection sensor mounting seat and an outlet material detection sensor mounting seat; an inlet material detection sensor mounting seat is arranged above the inlet of the lower cavity, and an outlet material detection sensor mounting seat is arranged above the outlet of the lower cavity.

[0012] According to the cleaning device of the utility model, it also includes a support assembly, and the support assembly is symmetrically arranged in the transmission direction inside the lower cavity.

[0013] According to the cleaning device of the utility model, the support assembly includes a support wheel, a support wire, a porous fixing seat and a support seat, the support wheel is arranged on the support seat, the support wire is arranged on the upper part of the support seat, the lower part of the support seat is arranged on the porous fixing seat, and the lower part of the support seat is T-shaped.

[0014] The utility model has the following advantages:

[0015] Through the transmission of the conveyor belt and the supporting metal wire, the workpiece can be cleaned on both sides, thereby improving the cleaning efficiency.

[0016] 2. The lead screw is driven by the first drive and can be adjusted according to the width of the workpiece, so it is suitable for workpieces of various widths. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the cleaning device;

[0019] Figure 2 is a schematic diagram of the three-dimensional structure of the lower cavity;

[0020] Figure 3 It is a structural schematic diagram of an enlarged view of local A;

[0021] Figure 4 It is a structural schematic diagram of an enlarged view of local B;

[0022] Figure 5 It is a schematic diagram of the three-dimensional structure of the support assembly;

[0023] : 1. upper cover; 11. electrode; 12. gas pipe; 13. upper cover cooling water circuit; 2. lower cavity; 21. first drive; 22. second drive; 23. support assembly; 24. support wire; 25. clamping cylinder; 26. limit plate; 27. sealing cylinder connecting rod; 28. guide mechanism; 29. ​​material outlet detection sensor mounting seat; 30. material inlet detection sensor mounting seat; 31. lower electrode plate; 32. sealing plate; 211. lead screw; 212. guide optical axis; 213. adjustment support seat; 221. transmission belt; 222. driving wheel; 223. driving shaft; 231. support wheel; 232. support seat. DETAILED DESCRIPTION

[0024] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0025] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0026] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0027] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0028] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0029] Combine the following Figure 1-5 A cleaning device according to an embodiment of the utility model is described, comprising an upper cover 1, a lower cavity 2, a plurality of sealing components, an upper electrode plate, a lower electrode plate 31 and at least one transmission component; the upper cover 1 and the lower cavity 2 form a vacuum cavity, the sealing components are arranged at the inlet and outlet ends of the vacuum cavity, the sealing components are used to seal the vacuum cavity, the transmission component is arranged inside the vacuum cavity, the lower part of the upper cover 1 is provided with an upper electrode plate, and the lower cavity 2 is provided with a lower electrode plate 31. The transmission component is adjusted according to the width of the workpiece. The vacuum cavity is also provided with a vacuum pumping interface, and a vacuum pump is connected to the vacuum pumping interface to evacuate the vacuum cavity.

[0030] In some embodiments, the sealing assembly includes a sealing plate 32, a sealing cylinder connecting rod 27 and at least one guide mechanism 28; the sealing cylinder connecting rod 27 is fixed to the lower side of the sealing plate 32, the guide mechanism 28 is symmetrically arranged on both sides of the sealing cylinder connecting rod 27, and oblique grooves are arranged on the left and right sides of the sealing plate 32. A limit plate 26 is arranged at a corresponding position of the oblique groove, and the pressing cylinder 25 drives the roller to press on the oblique groove for pressing and sealing.

[0031] In some embodiments, the transmission assembly includes a drive assembly and an adjustment assembly; the adjustment assembly is arranged on both sides of the drive assembly. There are preferably two adjustment assemblies. The drive assembly includes a second drive 22, a transmission belt 221, a drive wheel 222 and a drive shaft 223; the second drive 22 drives the drive shaft 223, the drive shaft 223 drives the drive wheel 222, and the drive wheel 222 drives the transmission belt 221. The drive wheel 222 is preferably a combination of a main drive wheel and a slave drive wheel, and the slave drive wheels are symmetrically arranged on both sides of the main drive wheel. The slave drive wheels are preferably 3 on one side, one each at the inlet and outlet of the vacuum chamber. The adjustment assembly includes a first drive 21, at least one lead screw 211 and at least one guide light shaft 212; the first drive 21 drives the lead screw 211 to adjust, the lead screw 211 and the guide light shaft 212 are arranged on the adjustment support seat 213, and the guide light shaft 212 has a guiding role.

[0032] In some embodiments, the upper cover 1 further includes an electrode 11 and a gas pipe 12. The upper part of the upper cover 1 is provided with the electrode 11 and the gas pipe 12. The gas pipe 12 is filled with mixed gas. The electrode 11 is electrically connected to the upper electrode plate. The gas pipe 12 is connected to a flow meter.

[0033] In some embodiments, an upper cover cooling water channel 13 is further included. The upper cover cooling water channel 13 is disposed on the upper portion of the upper cover 1 and is concave in shape. The electrode 11 is preferably disposed at the center of the concave shape.

[0034] In some embodiments, it also includes an inlet material detection sensor mounting seat 30 and an outlet material detection sensor mounting seat 29; an inlet material detection sensor mounting seat 30 is arranged above the inlet of the lower cavity 2, and an outlet material detection sensor mounting seat 30 is arranged above the outlet of the lower cavity 2.

[0035] In some embodiments, a support assembly 23 is further included, and the support assembly 23 is symmetrically arranged in the transmission direction inside the lower cavity 2. The support assembly 23 includes a support wheel 231, a support wire 24, a porous fixing seat and a support seat 231, the support wheel 231 is arranged on the support seat 232, the support wire 24 is arranged on the upper part of the support seat 232, the lower part of the support seat 232 is arranged on the porous fixing seat, and the lower part of the support seat 232 is T-shaped. The porous fixing seat is provided with a connection matching the T-shape. The support wire 24 is preferably a steel wire. The projections of the steel wire and the drive shaft 223 are perpendicular to each other.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A cleaning device, characterized in that: It includes an upper cover, a lower cavity, multiple sealing components, an upper electrode plate, a lower electrode plate and at least one transmission component; the upper cover and the lower cavity form a vacuum cavity, the sealing components are arranged at the inlet and outlet ends of the vacuum cavity, the sealing components are used to seal the vacuum cavity, the transmission component is arranged inside the vacuum cavity, the upper electrode plate is arranged at the lower part of the upper cover, and the lower cavity is arranged at the lower electrode plate.

2. The cleaning device according to claim 1, characterized in that: The sealing assembly includes a sealing plate, a sealing cylinder connecting rod and at least one guide mechanism; the sealing cylinder connecting rod is fixed to the lower side of the sealing plate, the guide mechanism is symmetrically arranged on both sides of the sealing cylinder connecting rod, and oblique grooves are arranged on the left and right sides of the sealing plate.

3. The cleaning device according to claim 1, characterized in that: The transmission assembly includes a driving assembly and an adjusting assembly; the adjusting assembly is arranged on both sides of the driving assembly.

4. The cleaning device according to claim 3, characterized in that: The driving assembly includes a second drive, a transmission belt, a driving wheel and a driving shaft; the second drive drives the driving shaft, the driving shaft drives the driving wheel, and the driving wheel drives the transmission belt.

5. The cleaning device according to claim 3, characterized in that: The adjustment assembly includes a first drive, an adjustment support seat, at least one lead screw and at least one guide light axis; the first drive drives the lead screw to adjust, the lead screw and the guide light axis are penetrated and arranged on the adjustment support seat, and the guide light axis has a guiding function.

6. The cleaning device according to claim 1, characterized in that: It also includes electrodes and a gas pipe, and the electrodes and the gas pipe are arranged on the upper part of the upper cover.

7. The cleaning device according to claim 1, characterized in that: It also includes an upper cover cooling water channel. The upper cover cooling water channel is arranged on the upper part of the upper cover, and the upper cover cooling water channel is concave.

8. The cleaning device according to claim 1, characterized in that: It also includes a material inlet detection sensor mounting seat and a material outlet detection sensor mounting seat; the material inlet detection sensor mounting seat is arranged above the material inlet of the lower cavity, and the material outlet detection sensor mounting seat is arranged above the material outlet of the lower cavity.

9. The cleaning device according to claim 1, characterized in that: It also includes a support component, and the support component is symmetrically arranged in the transmission direction inside the lower cavity.

10. The cleaning device according to claim 9, characterized in that: The support assembly includes a support wheel, a support wire, a porous fixing seat and a support seat, the support wheel is arranged on the support seat, the support wire is arranged on the upper part of the support seat, the lower part of the support seat is arranged on the porous fixing seat, and the lower part of the support seat is T-shaped.

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