Wandering star wheel assembly for double-sided processing of square quartz substrate

Abstract

The utility model belongs to the technical field of ultra-precision machining, and particularly relates to a wandering star wheel assembly for double-sided machining of a square quartz substrate. The wandering star wheel body is matched with the wandering star wheel lantern ring, so that a substrate product can be irregularly and freely rotated, ground and polished in the disc surface of equipment, and the requirement for high flatness of the surface of a quartz substrate is met; the wandering star wheel assembly is subjected to material selection, and an epoxy resin plate and a polytetrafluoroethylene plate are matched, so that the risk of abnormal collision and scratch of the contact area of the wandering star wheel and the outline of the quartz substrate can be effectively reduced; the arc-shaped notches are formed in the four edges of the square inner cavity of the wandering star wheel lantern ring, and the escape holes are formed in the four corners of the square inner cavity; the contact area of the outline of the quartz substrate and the wandering star wheel lantern ring can be reduced as much as possible, products can be conveniently taken and placed, the frequency of loading and unloading the wandering star wheel on the disc surface is reduced, the risk of introducing other pollutants is reduced, and defects such as polishing scratches are reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of ultra-precision machining, and in particular relates to a planetary wheel assembly for double-sided machining of a square quartz substrate. Background Art

[0002] With the rapid development of the semiconductor industry, the size of electronic devices is getting smaller and smaller, and the requirements for surface accuracy indicators such as chip surface roughness, TTV (total thickness deviation), and flatness are getting higher and higher.

[0003] When polishing wafers, a double-sided polishing machine is required. Planetary wheels serve as processing carriers in the working process of double-sided grinding and polishing equipment. They are widely used in piezoelectric crystals, optical glass processing, sapphire processing, ceramic processing and other industries. They are indispensable production consumables in modern industrial production activities.

[0004] During use, the double-sided polishing machine of the prior art Figure 1 As shown, the planetary wheel 1 is placed on a grinding and polishing disk and meshes with the outer gear ring 2 and the center shaft sun gear 3. In order to pursue output, most of the existing manufacturers usually distribute the products as much as possible in the product installation area 4 of the planetary wheel according to the disk size of the double-sided grinding and polishing equipment. The grinding and polishing trajectory of the product is fixed and single within a certain period of time, resulting in it not being consistent with the ideal grinding and polishing trajectory, which in turn makes the thickness distribution of the product uneven after double-sided processing and the surface flatness of the product poor, thereby failing to obtain a high-flatness product. Utility Model Content

[0005] The technical problem to be solved by the utility model is: in view of the deficiencies in the prior art, a planetary wheel assembly for double-sided processing of a square quartz substrate is provided, which can be suitable for the production of a quartz substrate with high flatness, can effectively reduce the substrate thickness deviation, and improve the product processing yield.

[0006] The technical solution adopted by the utility model to solve the above technical problems is:

[0007] A planetary wheel assembly for double-sided processing of a square quartz substrate, the planetary wheel assembly is arranged on the disk surface of a double-sided grinding and polishing device, and meshes between the center axis sun gear and the outer gear ring of the device, and mainly comprises: a planetary wheel body 5 and a planetary wheel collar 8, the planetary wheel body 5 is provided with a cavity hole 6 matched with the size of the planetary wheel collar 8, and the planetary wheel body 5 is provided with a plurality of liquid distribution holes 7 around the outer ring of the cavity hole 6; the planetary wheel collar 8 is provided with a square inner cavity 9 for mounting a square quartz substrate 12 to be processed in the middle part; the planetary wheel collar 8 is freely rotatably installed in the cavity hole 6, the planetary wheel body 5 can both revolve around the center axis sun gear and rotate on its own driven by the center axis sun gear and the outer gear ring.

[0008] Furthermore, the planetary wheel body 5 is made of epoxy resin plate or polytetrafluoroethylene plate material, and the planetary wheel ring 8 is made of polytetrafluoroethylene plate material, so as to reduce the risk of collision and scratch between the substrate product and the ring.

[0009] Furthermore, the size of the square inner cavity 9 is adapted to the square quartz substrate 12 to be processed, and arc-shaped notches 10 are provided in the middle of the four sides of the square inner cavity 9 , and escape holes 11 are provided at the four corners of the square inner cavity 9 .

[0010] Furthermore, the plurality of liquid distribution holes 7 are evenly arranged around the outer circle of the cavity hole 6 , and the diameter of the liquid distribution holes far away from the cavity hole 6 is greater than the diameter of the liquid distribution holes close to the cavity hole 6 .

[0011] Furthermore, the inner wall of the cavity hole 6 and the outer wall of the planetary wheel ring 8 are both sliding surfaces, and the cavity hole 6 and the planetary wheel ring 8 form a rotational fit.

[0012] Furthermore, the diameter of the cavity hole 6 is greater than the diameter of the plurality of liquid distribution holes 7 .

[0013] Furthermore, the length of the arc-shaped notch 10 is half of the side length of the square inner cavity 9 .

[0014] Furthermore, the size of the escape hole 11 is adapted to the chamfer size of the edge corners of the square quartz substrate 12 to be processed.

[0015] Compared with the prior art, the utility model has the following main advantages:

[0016] 1. The utility model designs the structure of the planetary wheel assembly, and adopts the planetary wheel body and the planetary wheel ring to cooperate, so that the planetary wheel not only revolves around the central axis of the equipment in the polishing disk surface of the equipment, but also rotates on its own under the drive of the central axis teeth and the outer gear ring, and the square quartz substrate can also rotate freely in the planetary wheel, thereby realizing the irregular free rotation grinding and polishing of the square substrate product in the working disk surface of the equipment, avoiding a fixed single grinding and polishing trajectory, meeting the high flatness requirements of the quartz substrate surface, and can be used for high-precision square substrate double-sided grinding and polishing;

[0017] 2. The utility model selects materials for the planetary wheel assembly, and uses a combination of epoxy resin plates and polytetrafluoroethylene plates, which can effectively reduce the risk of abnormal collisions and scratches in the contact area between the planetary wheel and the outer contour of the quartz substrate. In addition, arc-shaped notches are provided on the four sides of the square inner cavity of the planetary wheel ring, and escape holes are provided at the four corners, which can reduce the contact area between the outer contour of the quartz substrate and the planetary wheel as much as possible and facilitate product placement;

[0018] 3. The utility model is conducive to the upper and lower loading of products. The planetary wheel body does not need to be taken out from the disk surface. The product can be put in and taken out from the arc-shaped notch in the ring. This can reduce the frequency of the planetary wheel going up and down the disk surface, reduce the risk of introducing other pollutants, and reduce the occurrence of defects such as polishing scratches. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of a planetary wheel assembly in the prior art of the background technology;

[0020] Figure 2 It is a schematic diagram of the planetary wheel body of the utility model;

[0021] Figure 3 It is a schematic diagram of the planetary wheel ring of the utility model;

[0022] Figure 4 for Figure 3 A partial enlarged schematic diagram of the middle area A;

[0023] Figure 5 It is a schematic diagram of the planetary wheel body in the third embodiment of the present utility model.

[0024] In the figure: 1-planetary wheel; 2-external gear ring; 3-sun gear; 4-product installation area; 5-planetary wheel body; 6-cavity hole; 7-liquid distribution hole; 8-planetary wheel ring; 9-square inner cavity; 10-arc-shaped notch; 11-escape hole; 12-square quartz substrate to be processed. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model. In addition, the technical features involved in each embodiment of the utility model described below can be combined with each other as long as they do not conflict with each other.

[0026] It should be pointed out that, according to the needs of implementation, the various steps / components described in this application can be split into more steps / components, and two or more steps / components or partial operations of steps / components can be combined into new steps / components to achieve the purpose of the present utility model.

[0027] Embodiment 1: This embodiment provides a planetary wheel assembly for double-sided processing of a square quartz substrate, such as Figures 2 to 4 As shown, it mainly includes: a planetary wheel body 5 and a planetary wheel ring 8.

[0028] Among them, the planetary wheel body 5 is provided with a cavity hole 6 which is adapted to the size of the planetary wheel ring 8, and the planetary wheel body 5 is provided with a plurality of liquid distribution holes 7 on the outer ring around the cavity hole 6; the middle part of the planetary wheel ring 8 is provided with a square inner cavity 9 for installing the square quartz substrate 12 to be processed; the planetary wheel ring 8 can be freely rotatably installed in the cavity hole 6, and the planetary wheel body 5 can both revolve around the central axis sun gear and rotate on its own driven by the central axis sun gear and the outer gear ring.

[0029] Furthermore, the planetary wheel body 5 is made of epoxy resin plate or polytetrafluoroethylene plate material, and the planetary wheel ring 8 is made of polytetrafluoroethylene plate material, so as to reduce the risk of collision and scratch between the substrate product and the ring.

[0030] Furthermore, the size of the square inner cavity 9 is adapted to the square quartz substrate 12 to be processed, and arc-shaped notches 10 are provided in the middle of the four sides of the square inner cavity 9 , and escape holes 11 are provided at the four corners of the square inner cavity 9 .

[0031] Furthermore, the plurality of liquid distribution holes 7 are evenly arranged around the outer circle of the cavity hole 6 , and the diameter of the liquid distribution holes far away from the cavity hole 6 is greater than the diameter of the liquid distribution holes close to the cavity hole 6 .

[0032] Furthermore, the inner wall of the cavity hole 6 and the outer wall of the planetary wheel ring 8 are both sliding surfaces, and the cavity hole 6 and the planetary wheel ring 8 form a rotational fit.

[0033] Furthermore, the diameter of the cavity hole 6 is greater than the diameter of the plurality of liquid distribution holes 7 .

[0034] Furthermore, the length of the arc-shaped notch 10 is half of the side length of the square inner cavity 9 .

[0035] Furthermore, the size of the escape hole 11 is adapted to the size of the four chamfers (R) of the square quartz substrate 12 to be processed.

[0036] Embodiment 2: This embodiment provides a planetary wheel assembly for double-sided processing of a square quartz substrate, which is particularly suitable for the production of a photomask quartz substrate used in semiconductor-related electronic materials;

[0037] By designing the structure of the planetary wheel assembly, the planetary wheel can revolve around the central axis of the equipment within the polishing disc surface of the equipment, and can also rotate on its own driven by the central axis teeth and the outer gear ring, and the square substrate can also rotate on its own within the planetary wheel; thereby satisfying the irregular trajectory of double-sided grinding and polishing, and under the process matching of each process of the double-sided equipment (including grinding and polishing discs, grinding powder liquid, polishing pads, polishing powder liquid, etc.), the product can have a high flatness, reduce the thickness difference of the product, avoid reciprocating rework of the product, and improve the yield and processing efficiency.

[0038] Furthermore, by selecting the material of the planetary wheel, the planetary wheel body is made of epoxy resin plate (FR4, etc.), the planetary wheel ring is made of polytetrafluoroethylene plate (PTFE), or both are made of polytetrafluoroethylene plate; thereby ensuring that the contact area between the planetary wheel and the outer contour of the quartz substrate will not produce abnormal bumps and scratches.

[0039] Furthermore, the largest cavity hole in the planetary wheel body forms a rotational fit with the outer diameter of the planetary wheel collar, and the planetary wheel collar can rotate freely in the cavity hole of the planetary wheel body;

[0040] Furthermore, the other five holes in the planetary wheel body are used as liquid distribution holes, which are used to evenly distribute the grinding and polishing liquid transmitted from the upper plate liquid distribution pipe to the product surface on the upper and lower plates of the double-sided polishing equipment;

[0041] Furthermore, arc-shaped notches are provided in the middle of the four sides of the square inner cavity of the planetary wheel ring, which are used to reduce the contact range between the ring and the outline of the square substrate, and are beneficial to the placement and removal of products, reduce other pollution introduced during the placement and removal process of the planetary wheel, and reduce the occurrence of defects such as scratches during polishing; the escape holes at the four corners are used to safely place the square substrate into the cavity of the planetary wheel ring, thereby reducing the risk of bumps and scratches on the corners of the substrate.

[0042] Embodiment 3: The principle and technical solution of this embodiment are basically the same as those of Embodiment 1 and Embodiment 2, except that: Figure 5 As shown, the planetary wheel body 5 is provided with a plurality of cavity holes 6, and a planetary wheel collar 8 of a matching size can be installed in each cavity hole 6, thereby achieving a plurality of square quartz substrates 12 to be processed in one planetary wheel assembly, so as to improve production efficiency;

[0043] Furthermore, a plurality of liquid distribution holes 7 are evenly arranged at intervals between the plurality of cavity holes 6 .

[0044] Furthermore, all parts involved in this application that are not described in detail are the same as the prior art or are implemented using the prior art.

[0045] In summary:

[0046] 1. The utility model designs the structure of the planetary wheel assembly, and adopts the planetary wheel body and the planetary wheel ring to cooperate, so that the planetary wheel not only revolves around the central axis of the equipment in the polishing disk surface of the equipment, but also rotates on its own under the drive of the central axis teeth and the outer gear ring, and the square quartz substrate can also rotate freely in the planetary wheel, thereby realizing the irregular free rotation grinding and polishing of the square substrate product in the working disk surface of the equipment, avoiding a fixed single grinding and polishing trajectory, meeting the high flatness requirements of the quartz substrate surface, and can be used for high-precision square substrate double-sided grinding and polishing;

[0047] 2. The utility model selects materials for the planetary wheel assembly, and uses a combination of epoxy resin plates and polytetrafluoroethylene plates, which can effectively reduce the risk of abnormal collisions and scratches in the contact area between the planetary wheel and the outer contour of the quartz substrate. In addition, arc-shaped notches are provided on the four sides of the square inner cavity of the planetary wheel ring, and escape holes are provided at the four corners, which can reduce the contact area between the outer contour of the quartz substrate and the planetary wheel as much as possible and facilitate product placement;

[0048] 3. The utility model is conducive to the upper and lower loading of products. The planetary wheel body does not need to be taken out from the disk surface. The product can be put in and taken out from the arc-shaped notch in the ring. This can reduce the frequency of the planetary wheel going up and down the disk surface, reduce the risk of introducing other pollutants, and reduce the occurrence of defects such as polishing scratches.

[0049] The above embodiments are only used to illustrate the design ideas and features of the utility model, and their purpose is to enable those skilled in the art to understand the content of the utility model and implement it accordingly. The protection scope of the utility model is not limited to the above embodiments. Therefore, any equivalent changes or modifications made based on the principles and design ideas disclosed by the utility model are within the protection scope of the utility model.

Claims

1. A planetary wheel assembly for double-sided processing of a square quartz substrate, the planetary wheel assembly is arranged on the disk surface of a double-sided grinding and polishing device, and is meshed between the central axis sun wheel and the outer gear ring of the device, characterized in that: The invention comprises a planetary wheel body (5) and a planetary wheel ring (8); the planetary wheel body (5) is provided with a cavity hole (6) which is adapted to the size of the planetary wheel ring (8); and the planetary wheel body (5) is provided with a plurality of liquid distribution holes (7) around the outer ring of the cavity hole (6); a square inner cavity (9) for mounting a square quartz substrate (12) to be processed is provided in the middle of the planetary wheel ring (8); the planetary wheel ring (8) is freely rotatably mounted in the cavity hole (6); the planetary wheel body (5) can both revolve around the central axis sun gear and rotate on its own driven by the central axis sun gear and the outer gear ring.

2. The planetary wheel assembly for double-sided processing of a square quartz substrate according to claim 1, characterized in that: The planetary wheel body (5) is made of epoxy resin plate or polytetrafluoroethylene plate material, and the planetary wheel ring (8) is made of polytetrafluoroethylene plate material.

3. The planetary wheel assembly for double-sided processing of a square quartz substrate according to claim 1, characterized in that: The size of the square inner cavity (9) is adapted to the square quartz substrate (12) to be processed, and arc-shaped notches (10) are provided in the middle of the four sides of the square inner cavity (9), and escape holes (11) are provided at the four corners of the square inner cavity (9).

4. The planetary wheel assembly for double-sided processing of a square quartz substrate according to claim 1, characterized in that: The plurality of liquid distribution holes (7) are evenly arranged around the outer circle of the cavity hole (6), and the diameter of the liquid distribution holes far from the cavity hole (6) is larger than the diameter of the liquid distribution holes close to the cavity hole (6).

5. The planetary wheel assembly for double-sided processing of a square quartz substrate according to claim 1, characterized in that: The inner wall of the mold cavity hole (6) and the outer wall of the planetary wheel collar (8) are both sliding surfaces, and the mold cavity hole (6) and the planetary wheel collar (8) form a rotational fit.

6. The planetary wheel assembly for double-sided processing of a square quartz substrate according to claim 4, characterized in that: The diameter of the mold cavity hole (6) is greater than the diameter of the plurality of liquid distribution holes (7).

7. The planetary wheel assembly for double-sided processing of a square quartz substrate according to claim 3, characterized in that: The length of the arc-shaped notch (10) is half the length of the side of the square inner cavity (9).

8. The planetary wheel assembly for double-sided processing of a square quartz substrate according to claim 3, characterized in that: The size of the escape hole (11) is adapted to the size of the chamfered corners of the square quartz substrate (12) to be processed.

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