Quartz supporting tube and gallium arsenide synthesis device
By designing the trumpet-like structured quartz support tube and annular part, the problem of uneven contact between the quartz support tube and the ampoule bottle is solved, the synthesis yield of gallium arsenide is improved, and more uniform heat conduction and gap uniformity are achieved.
Patent Information
- Application Number
- CN202420514978.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-15
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-03-15
AI Technical Summary
The existing quartz support tubes are unevenly in contact with the ampoule, resulting in uneven heat conduction, which easily leads to supercooling, affecting the synthesis yield of gallium arsenide crystals.
Design a quartz support tube with a trumpet-like structure. The mouth of the tube is matched with the connection part of the ampoule to ensure that the inner wall and the outer wall are in contact as much as possible, thereby avoiding gaps, improving contact uniformity, and adding annular part to the support tube To uniformize the gap between the insulation sleeve and the support tube.
Through the trumpet-like structure and annular design, the contact uniformity between the ampoule and the quartz support tube and the gap uniformity between the insulation sleeve and the support tube are improved, and the synthesis yield of gallium arsenide is significantly improved.
Smart Images
Figure CN222182531U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of gallium arsenide synthesis, in particular to a quartz support tube and a gallium arsenide synthesis device. Background Art
[0002] Gallium arsenide is a compound synthesized from the elements gallium and arsenic. It is also an important compound semiconductor material. Gallium arsenide is used to make components such as microwave integrated circuits, infrared light-emitting diodes, semiconductor lasers and solar cells.
[0003] The natural reserves of gallium arsenide are scarce, and the direct combination of gallium and arsenic is usually used. Among them, the vertical gradient solidification method (VGF method) is currently the most commonly used method for synthesizing gallium arsenide single crystals. When using the VGF method to synthesize gallium arsenide single crystals, the material needs to be sealed into ampoules, and then the sealed ampoules are placed vertically in the single crystal synthesis furnace. A very important point here is that there is a supporting component at the lower end of the ampoule perpendicular to the ground plane, so that the ampoule can be located in the appropriate temperature zone of the synthesis furnace. The supporting components include quartz support tubes and insulation sleeves. The uniformity of the contact between the quartz support tube and the ampoule, as well as the uniformity of the gap between the quartz support tube and the insulation sleeve, play a vital role in the formation of gallium arsenide crystal defects, because uniformity is the key point for uniform heat conduction. Uneven heat conduction is prone to supercooling, which can easily form crystal defects.
[0004] Existing quartz support tubes are generally quartz round tubes with consistent inner and outer diameters. A gap is easily formed between the bottom of the ampoule bottle and the contact end of the quartz tube mouth, making it difficult for the quartz round tube and the ampoule bottle to achieve uniform contact, affecting the contact uniformity between the ampoule bottle and the quartz support tube, and reducing the synthesis yield of gallium arsenide. Utility Model Content
[0005] The utility model aims to solve at least one of the technical problems existing in the prior art. The utility model provides a quartz support tube and a gallium arsenide synthesis device having the quartz support tube. The quartz support tube can improve the synthesis yield of gallium arsenide.
[0006] In order to achieve the above-mentioned purpose, the utility model provides a quartz support tube for supporting an ampoule bottle, wherein the ampoule bottle comprises a bottle body and a connecting portion, wherein the connecting portion is connected to the lower end of the bottle body, and the connecting portion is a trumpet-shaped structure that is larger at the top and smaller at the bottom. The quartz support tube comprises a tube body and a tube mouth; the tube mouth is connected to the upper end of the tube body and is used to accommodate the connecting portion, and the tube mouth is a trumpet-shaped structure that is larger at the top and smaller at the bottom, and the shape and size of the inner side wall of the tube mouth matches the shape and size of the outer side wall of the connecting portion.
[0007] In some embodiments, the height of the nozzle is a, satisfying: 1mm≤a≤5mm.
[0008] In some embodiments, the height of the bottle body is b, satisfying: 400 mm ≤ b ≤ 460 mm.
[0009] In some embodiments, the nozzle portion is integrally formed at the upper end of the tube body portion.
[0010] In some embodiments, an annular portion is further included, wherein the annular portion is sleeved on the outer side wall of the tube body portion and is located below the tube mouth portion.
[0011] In some embodiments, the upper end of the annular portion is connected to the lower end of the nozzle portion.
[0012] In some embodiments, the thickness of the annular portion is c, satisfying: 1 mm ≤ c ≤ 5 mm.
[0013] In some embodiments, the height of the bottle body is b, and the height of the annular portion is d, satisfying: 0.05b≤d≤0.2b.
[0014] In some embodiments, the annular portion is integrally formed on the outer wall of the tube body portion.
[0015] The utility model also provides a gallium arsenide synthesis device, comprising the quartz support tube described in any one of the above items, and also comprising a synthesis furnace, an ampoule bottle and an insulation sleeve, the synthesis furnace has a furnace cavity, the quartz support tube is arranged in the furnace cavity, and the lower end of the quartz support tube is connected to the inner wall of the furnace cavity, the ampoule bottle comprises a bottle body and a connecting part, the connecting part is connected to the lower end of the bottle body, the connecting part is accommodated in the pipe mouth part, and the outer side wall of the connecting part is in contact with the inner side wall of the pipe mouth part, and the insulation sleeve is sleeved on the quartz support tube.
[0016] Compared with the prior art, the quartz support tube provided by the embodiment of the utility model has the beneficial effect that: by setting the tube mouth portion to a trumpet-shaped structure, it can adapt to the trumpet-shaped structure of the connecting portion of the ampoule bottle, so that when the connecting portion of the ampoule bottle is accommodated in the tube mouth portion, the inner side wall of the tube mouth portion can contact the outer side wall of the connecting portion as much as possible, thereby avoiding the generation of a gap between the inner side wall of the tube mouth portion and the outer side wall of the ampoule bottle, improving the contact uniformity between the ampoule bottle and the quartz support tube, and further improving the synthesis yield of gallium arsenide. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 This is a schematic diagram of the structure of a quartz support tube provided by an embodiment of the utility model;
[0018] Figure 2 It is a front view of a quartz support tube provided by an embodiment of the utility model;
[0019] Figure 3 It is a schematic diagram of a gallium arsenide synthesis device provided by an embodiment of the utility model;
[0020] Figure 4 It is a structural schematic diagram of an ampoule bottle provided in an embodiment of the utility model.
[0021] In the figure, 1, quartz support tube; 11, tube body; 12, tube mouth; 13, annular portion;
[0022] 2. ampoule bottle; 21. bottle body; 22. connecting part;
[0023] 3. Insulation cover;
[0024] 4. Synthesis furnace; 41. Furnace chamber;
[0025] Z, first direction. DETAILED DESCRIPTION
[0026] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0027] In the description of the present invention, it should be understood that the terms "center", "length", "width", "thickness", "up", "down", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0028] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0029] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0030] like Figure 1-4 As shown, a preferred quartz support tube of an embodiment of the utility model is used to support an ampoule bottle 2, the ampoule bottle 2 includes a bottle body portion 21 and a connecting portion 22, the connecting portion 22 is connected to the lower end of the bottle body portion 21, and the connecting portion 22 is a trumpet-shaped structure that is larger at the top and smaller at the bottom, the quartz support tube 1 includes a tube body portion 11 and a pipe mouth portion 12; the pipe mouth portion 12 is connected to the upper end of the tube body portion 11 and is used to accommodate the connecting portion 22, the pipe mouth portion 12 is a trumpet-shaped structure that is larger at the top and smaller at the bottom, and the shape and size of the inner side wall of the pipe mouth portion 12 matches the shape and size of the outer side wall of the connecting portion 22.
[0031] Based on this technical solution, by setting the nozzle portion 12 to a trumpet-shaped structure, it can adapt to the trumpet-shaped structure of the connecting portion 22 of the ampoule bottle 2, so that when the connecting portion 22 of the ampoule bottle 2 is accommodated in the nozzle portion 12, the inner wall of the nozzle portion 12 can contact the outer wall of the connecting portion 22 as much as possible, thereby avoiding the generation of a gap between the inner wall of the nozzle portion 12 and the outer wall of the ampoule bottle 2, improving the contact uniformity between the ampoule bottle 2 and the quartz support tube 1, and further improving the synthesis yield of gallium arsenide.
[0032] It can be understood that the nozzle portion 12 is used to accommodate the connecting portion 22 , and the nozzle portion 12 may be used to accommodate all of the connecting portions 22 , or the nozzle portion 12 may be used to accommodate part of the connecting portions 22 .
[0033] It can be understood that the shape and size of the inner wall of the nozzle portion 12 matches the shape and size of the outer wall of the connecting portion 22, which means that the shape and size of the outer wall of the connecting portion 22 located in the nozzle is basically consistent with the shape and size of the inner wall of the nozzle portion 12, that is, when the connecting portion 22 is accommodated in the nozzle portion 12, all the outer walls of the connecting portion 22 located in the nozzle portion 12 can basically contact the inner wall of the nozzle portion 12.
[0034] In this embodiment, the first direction Z is the height direction of the quartz support tube 1 .
[0035] The height of the nozzle portion 12 is a, which satisfies: 1 mm ≤ a ≤ 5 mm.
[0036] Optionally, a can be 1mm, 2mm, 3mm, 4mm, 5mm, or any other value satisfying 1mm≤a≤5mm, and is not limited here.
[0037] The tube mouth portion 12 can better support the ampoule bottle 2 and better and more evenly contact with the outer side wall of the connecting portion 22 , so as to further improve the contact uniformity between the ampoule bottle 2 and the quartz support tube 1 .
[0038] The outer diameter of the bottle body 21 is between 68 mm and 153 mm, the inner diameter is between 65 mm and 150 mm, the thickness of the bottle body 21 is between 1 mm and 5 mm, and the thickness of the bottle body 21 is preferably 3 mm.
[0039] The height of the bottle body 21 is b, which satisfies: 400 mm ≤ b ≤ 460 mm. The ampoule bottle 2 can be placed at a suitable temperature zone in the synthesis furnace 4 by the support of the quartz support tube 1, which is beneficial to improving the synthesis yield of gallium arsenide.
[0040] Optionally, b can be any value satisfying 400mm≤b≤460mm, such as 400mm, 410mm, 420mm, 430mm, 440mm, 450mm and 460mm, and is not limited here.
[0041] The pipe mouth portion 12 is integrally formed at the upper end of the pipe body portion 11 .
[0042] The quartz support tube 1 further comprises an annular portion 13 , which is sleeved on the outer wall of the tube body 11 and is located below the tube mouth.
[0043] The gap between the existing quartz support tube in the shape of a quartz round tube and the insulation sleeve needs to be observed with the naked eye and adjusted manually, and the uniformity of the gap between the quartz support tube and the insulation sleeve is not guaranteed; thus, the defects of the produced gallium arsenide crystals remain high, affecting the synthesis yield of gallium arsenide. The quartz support tube 1 provided in the embodiment of the utility model can provide a fixed gap (the fixed gap is the thickness of the ring part 13) between the inner wall of the insulation sleeve 3 and the outer wall of the tube body 11, thereby improving the uniformity of the gap between the quartz support tube 1 and the insulation sleeve 3, which is beneficial to improving the synthesis yield of gallium arsenide.
[0044] The tube body 11 , the tube mouth 12 and the annular portion are all made of quartz.
[0045] The upper end of the annular portion 13 is connected to the lower end of the nozzle portion 12 .
[0046] It can not only enable the insulation sleeve 3 to be better sleeved on the bottle body 21 through the annular portion 13, but also enable the gap between the insulation sleeve 3 and the bottle body 21 to be continuous (the gap refers to the space between the inner wall of the insulation sleeve 3 and the outer wall of the bottle body 21 where the annular portion 13 does not exist), which is beneficial to improving the uniformity of the gap between the quartz support tube 1 and the insulation sleeve 3, and is beneficial to improving the synthesis yield of gallium arsenide.
[0047] The thickness of the annular portion 13 is c, which satisfies: 1 mm ≤ c ≤ 5 mm.
[0048] The gap between the insulation sleeve 3 and the bottle body 21 is generally between 1 mm and 5 mm. Using 1mm≤c≤5mm can match the gap between the insulation sleeve 3 and the bottle body 21, and well solve the problem of gap uniformity after the quartz support tube 1 and the insulation sleeve 3 are assembled, thereby improving the gap uniformity between the quartz support tube 1 and the insulation sleeve 3.
[0049] Optionally, c can be 1mm, 2mm, 3mm, 4mm, 5mm, or any other value satisfying 1mm≤c≤5mm, and is not limited here.
[0050] The height of the bottle body 21 is b, and the height of the annular portion 13 is d, which satisfies: 0.05b≤d≤0.2b. Using 05b≤d can ensure that the annular portion 13 and the protective sleeve have a sufficient connection height, and using d≤0.2b can prevent the annular portion 13 from occupying too much length of the tube body 11.
[0051] Optionally, it can be 0.05b=d, 0.06b=d, 0.07b=d, 0.08b=d, 0.09b=d, 0.1b=d, 0.11b=d, 0.12b=d, 0.15b=d, 0.18b=d and 0.2b=d, etc., any value satisfying 0.05b≤d≤0.2b, which is not limited here.
[0052] The annular portion 13 is integrally formed on the outer wall of the tube body 11 .
[0053] See also Figure 3 and Figure 4 As shown, the utility model also provides a gallium arsenide synthesis device, including a quartz support tube according to any of the above items, and also including a synthesis furnace 4, an ampoule bottle 2 and an insulation sleeve 3, the synthesis furnace 4 has a furnace chamber 41, the quartz support tube 1 is arranged in the furnace chamber 41, and the lower end of the quartz support tube 1 is connected to the inner wall of the furnace chamber 41, the ampoule bottle 2 includes a bottle body 21 and a connecting portion 22, the connecting portion 22 is connected to the lower end of the bottle body 21, the connecting portion 22 is accommodated in the pipe mouth portion 12, the outer side wall of the connecting portion 22 is in contact with the inner side wall of the pipe mouth portion 12, and the insulation sleeve 3 is sleeved on the quartz support tube 1.
[0054] The ampoule bottle 2 further includes a circular tube portion 23 , which is connected to the lower end of the connecting portion 22 , and the shape and size of the outer wall of the circular tube portion 23 match the shape and size of the inner wall of the tube body portion 11 .
[0055] The connecting portion 22 is integrally formed at the lower end of the bottle body 21 , and the circular tube portion 23 is integrally formed at the lower end of the connecting portion 22 .
[0056] The existing quartz circular tube-shaped quartz support tube accommodates the circular tube portion 23 of the ampoule bottle 2 and forms contact with the circular tube portion 23. Since the connecting portion 22 is a trumpet-shaped structure with a larger upper portion and a smaller lower portion, a gap is easily generated between the contact end of the quartz circular tube and the connecting portion 22, affecting the contact uniformity between the quartz support tube and the ampoule bottle 2. The quartz support tube 1 provided in the embodiment of the utility model can avoid the generation of a gap between the contact end of the quartz support tube 1 and the ampoule bottle 2 by providing a tube mouth portion 12 that matches the shape and size of the connecting portion 22, thereby improving the contact uniformity between the quartz support tube 1 and the ampoule bottle 2.
[0057] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.
Claims
1. A quartz support tube for supporting an ampoule, wherein the ampoule comprises a body and a connecting portion, wherein the connecting portion is connected to the lower end of the body, and the connecting portion is a trumpet-shaped structure with a larger upper portion and a smaller lower portion. It is characterized in that The quartz support tube comprises: body part of tube; The pipe mouth portion is connected to the upper end of the tube body portion and is used to accommodate the connecting portion. The pipe mouth portion is a trumpet-shaped structure that is larger at the top and smaller at the bottom, and the shape and size of the inner wall of the pipe mouth portion matches the shape and size of the outer wall of the connecting portion.
2. The quartz support tube according to claim 1, It is characterized in that The height of the pipe mouth is a, which satisfies: 1mm≤a≤5mm.
3. The quartz support tube according to claim 2, It is characterized in that The height of the bottle body is b, which satisfies: 400mm≤b≤460mm.
4. The quartz support tube according to claim 1, It is characterized in that The pipe mouth is integrally formed at the upper end of the pipe body.
5. The quartz support tube according to any one of claims 1 to 4, It is characterized in that It also includes an annular portion, which is sleeved on the outer side wall of the tube body and located below the tube mouth.
6. The quartz support tube according to claim 5, It is characterized in that The upper end of the annular portion is connected to the lower end of the nozzle portion.
7. The quartz support tube according to claim 5, It is characterized in that The thickness of the annular portion is c, which satisfies: 1mm≤c≤5mm.
8. The quartz support tube according to claim 5, It is characterized in that The height of the bottle body is b, and the height of the annular portion is d, which satisfies: 0.05b≤d≤0.2b.
9. The quartz support tube according to claim 5, It is characterized in that The annular portion is integrally formed on the outer wall of the tube body portion.
10. A gallium arsenide synthesis device, It is characterized in that It includes the quartz support tube according to any one of claims 1 to 9, and also includes a synthesis furnace, an ampoule bottle and an insulation sleeve, the synthesis furnace has a furnace chamber, the quartz support tube is arranged in the furnace chamber, and the lower end of the quartz support tube is connected to the inner wall of the furnace chamber, the ampoule bottle includes a bottle body and a connecting part, the connecting part is connected to the lower end of the bottle body, the connecting part is accommodated in the pipe mouth part, and the outer side wall of the connecting part is in contact with the inner side wall of the pipe mouth part, and the insulation sleeve is sleeved on the quartz support tube.