Top heat preservation structure and single crystal thermal field device
By designing a new top insulation structure in a single crystal silicon growth environment, the "big-shaped" structure and thickening design of the deflector cylinder ring felt, top fixing felt and isolation rings, the problem of poor top insulation performance is solved. It significantly reduces heat loss and improves the efficiency and economic benefits of single crystal silicon pulling.
Patent Information
- Application Number
- CN202420903811.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-28
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-04-28
AI Technical Summary
The existing top insulation structure causes serious heat loss in the single crystal silicon growth environment, affecting the success rate and quality of the single crystal silicon rod.
A new top insulation structure was designed, including the deflector cylinder ring felt, the top solid felt and the isolation ring. By increasing the gap length and twists, combined with the "big-shaped" structure and thickening design, a compact insulation structure is formed to reduce heat Loss.
It effectively improves the top insulation performance, reduces the power and cost of single crystal silicon pulling, and improves economic benefits.
Smart Images
Figure CN222182537U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a top heat-insulating structure and a single crystal thermal field device. Background Art
[0002] At present, in the growth environment of CZ silicon, the temperature in the single crystal furnace needs to be maintained above 1400℃. The main heating system of the single crystal furnace used is the main heater and the bottom heater. According to the difference in power of the main and bottom heaters, a power difference is formed in the entire thermal field, and then a temperature difference is formed, ensuring that the single crystal furnace can pull out high-quality single crystal silicon rods.
[0003] Thermal insulation is closely related to temperature difference. Among the five positions, top insulation, upper insulation, middle insulation, lower insulation and bottom insulation, the most important one is top insulation.
[0004] The existing top insulation structure I is mainly composed of the guide tube flange, guide tube ring felt I, top fixed felt I and isolation ring I. Figure 6 and Figure 7 As shown. Since the outer guide tube needs to move with the water cooling screen, the guide tube flange and the guide tube ring felt Ⅰ need to be fixed to the upper part of the outer guide tube, the top fixed felt Ⅰ is placed on the upper insulation tube, and the guide tube ring felt Ⅰ is isolated from the top fixed felt Ⅰ by the isolation ring Ⅰ. However, the existing top insulation structure Ⅰ causes a large gap in the upper part, and the gap cannot be insulated, resulting in a large amount of heat loss, which is not conducive to the pulling of single crystals. Utility Model Content
[0005] In view of this, one purpose of the utility model is to provide a top insulation structure for a single crystal thermal field device, which can basically solve the existing problems of poor top insulation performance and serious heat leakage, block the loss of heat, reduce the power used in pulling single crystals, and reduce costs. Another purpose of the utility model is to provide a single crystal thermal field device.
[0006] The utility model adopts the following technical solutions to achieve the above-mentioned purpose.
[0007] On the one hand, the utility model provides a top heat preservation structure for a single crystal thermal field device, comprising a guide tube ring felt, a top fixed felt and an isolation ring;
[0008] The isolation ring is configured as a circular ring structure;
[0009] The top fixed felt is configured as a cylindrical structure, which has a first opening and a second opening which are arranged overlapping each other, both of which are circular; the diameter of the first opening is larger than the diameter of the second opening, so that a step is formed between the first opening and the second opening;
[0010] The end of the guide tube ring felt is provided with an annular groove with an opening facing downward; the isolation ring is arranged in the annular groove;
[0011] The annular slot has an inner slot wall, an outer slot wall and a slot top wall; the distance between the bottom end of the inner slot wall and the slot top wall is greater than the distance between the bottom end of the outer slot wall and the slot top wall;
[0012] The outer wall of the slot and the outer end surface of the guide tube ring felt near it form an outer part; the bottom surface of the outer part is closely arranged with the top surface of the step, and the two are matched. This is conducive to forming a compact top insulation structure, blocking heat loss, and improving insulation performance.
[0013] In the utility model, the guide tube annular felt is basically located in the first opening and the second opening.
[0014] The top insulation structure of the utility model is different from the existing top insulation structure I. Figure 6 and Figure 7 As shown in the figure, the existing isolation ring I is formed by a cylindrical body and an extension portion, and the guide tube ring felt I is not provided with an annular groove similar to the "J" shape of the present invention. The isolation ring I is located in the gap between the top fixed felt I and the guide tube ring felt I.
[0015] The inventor designed a new guide tube ring felt, increased the gap length and the tortuosity of the gap, designed a "J"-shaped structure at the joint, and increased the total thickness of the guide tube ring felt, so that the overall thermal insulation performance is significantly improved. The isolation ring structure is simplified to match the guide tube ring felt structure, and the top fixed felt structure is modified to make the three match and improve the thermal insulation performance.
[0016] According to the top insulation structure described in the utility model, preferably, the guide tube ring felt has a third opening and a fourth opening which are overlapped with each other, both of which are circular; the diameter of the third opening is smaller than the diameter of the fourth opening; the height of the third opening is greater than the height of the fourth opening.
[0017] In the utility model, a through hole for installing a hanging piece can be provided on the guide tube ring felt.
[0018] According to the top heat-insulating structure of the utility model, preferably, the gap between the isolation ring and the inner wall of the slot or the outer wall of the slot is 1 to 2 mm.
[0019] According to the top heat-insulating structure of the utility model, preferably, the gap between the isolation ring and the top solid felt is 1 to 2 mm.
[0020] According to the top insulation structure of the utility model, preferably, the maximum thickness of the guide tube ring felt is greater than the maximum thickness of the top solid felt, so that it is convenient to set the guide tube flange on the guide tube ring felt.
[0021] According to the top insulation structure of the utility model, preferably, the thickness of the guide tube ring felt and the top solid felt are 80-100 mm respectively.
[0022] According to the top insulation structure of the utility model, preferably, it also includes a guide tube flange; the guide tube flange is connected to the top of the guide tube ring felt.
[0023] In the present invention, the guide tube flange can adopt existing ones.
[0024] On the other hand, the utility model provides a single crystal thermal field device, which includes the top insulation structure, the upper insulation tube, the lower insulation tube, the crucible, the main heater and the bottom heater as described above;
[0025] The upper heat-insulating cylinder is located above the lower heat-insulating cylinder and below the top fixed felt;
[0026] The crucible is located in the lower heat-insulating cylinder; the main heater is arranged near the upper part of the crucible; and the bottom heater is arranged near the bottom of the crucible.
[0027] According to the single crystal thermal field device of the utility model, preferably, it also includes an inner guide tube and an outer guide tube;
[0028] The inner guide tube and the outer guide tube are both located above the crucible;
[0029] The inner guide tube is located on the inner side of the outer guide tube; the top of the inner guide tube is located in the third opening and the fourth opening of the guide tube ring felt;
[0030] The outer guide tube is formed by a connected outer guide tube body and an extension; the extension is obtained by extending the top of the outer guide tube body outward in a horizontal direction; the outer end surface of the extension is tightly arranged with the inner side wall of the fourth opening of the guide tube fixed felt.
[0031] In the present invention, the upper heat-insulating tube, the lower heat-insulating tube, the crucible, the main heater, the bottom heater, the inner guide tube and the outer guide tube can all adopt existing ones.
[0032] According to the single crystal thermal field device of the utility model, preferably, it also includes an outer guide support ring, which is located below the guide tube ring felt and is used to support the extension of the outer guide tube. In the utility model, the outer guide support ring can adopt existing ones.
[0033] The top insulation structure of the utility model adopts a guide tube ring felt with an annular groove with a "J-shaped" structure, an isolation ring with a cylindrical structure and a matching top solid felt to form a compact top insulation structure, which effectively reduces heat loss, improves insulation performance, reduces the power used in pulling single crystals, reduces costs, and improves economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS
[0034] Figure 1 The utility model is a structural schematic diagram of a single crystal thermal field device with a top insulation structure.
[0035] Figure 2 yes Figure 1 A partial enlarged schematic diagram of the top insulation structure.
[0036] Figure 2-2 yes Figure 1 A partial enlarged schematic diagram of the top insulation structure.
[0037] Figure 3 It is a structural schematic diagram of the top fixed felt of the utility model.
[0038] Figure 4 It is a structural schematic diagram of the guide tube ring felt of the utility model.
[0039] Figure 5 It is a structural schematic diagram of the isolation ring of the utility model.
[0040] Figure 6 It is a schematic diagram of the structure of a single crystal thermal field device in the prior art.
[0041] Figure 7 for Figure 6 A partial enlarged schematic diagram of .
[0042] The following are the descriptions of the reference numerals:
[0043] In the existing single crystal thermal field device, 1-top insulation structure I; 110'-guide tube ring felt I, 120'-top fixed felt I, 130'-isolation ring I, 140-guide tube flange, 200-upper insulation tube, 800-outer guide tube, 810-outer guide support ring, 900-water cooling screen.
[0044] In the single crystal thermal field device of the utility model, 100 is a top insulation structure, 110 is a guide tube annular felt, 111 is an annular groove, 1111 is an inner wall of the groove, 1112 is an outer wall of the groove, 112 is a third opening, 113 is a fourth opening, 120 is a top fixed felt, 121 is a first opening, 122 is a second opening, 130 is an isolation ring,
[0045] 200-upper insulation tube, 210-upper insulation tube felt, 300-lower insulation tube, 400-crucible, 500-main heater, 600-bottom heater, 700-inner guide tube, 800-outer guide tube, 810-outer guide support ring. DETAILED DESCRIPTION
[0046] The present invention will be further described below in conjunction with specific embodiments, but the protection scope of the present invention is not limited thereto.
[0047] Example 1
[0048] Figure 1 The utility model is a structural schematic diagram of a single crystal thermal field device with a top insulation structure. Figure 2 as well as Figure 2-2 They are Figure 1 A partial enlarged schematic diagram of the top insulation structure. Figure 3 It is a structural schematic diagram of the top fixed felt of the utility model. Figure 4 It is a structural schematic diagram of the guide tube ring felt of the utility model. Figure 5 It is a structural schematic diagram of the isolation ring of the utility model.
[0049] Figure 6 It is a schematic diagram of the structure of a single crystal thermal field device in the prior art. Figure 7 for Figure 6 A partial enlarged schematic diagram of .
[0050] like Figures 1 to 5 As shown, the top insulation structure 100 of the utility model includes a guide tube ring felt 110, a top fixed felt 120 and an isolation ring 130. The top insulation structure 100 of the utility model is different from the top insulation structure Ⅰ1 in the prior art. Figure 6 and Figure 7 shown.
[0051] The structures of the guide tube ring felt 110, the top fixing felt 120 and the isolation ring 130 of the utility model are all changed to make the top thermal insulation performance better and better block the heat loss.
[0052] like Figure 5 and Figure 2 As shown, the isolation ring 130 is a circular ring structure.
[0053] like Figure 3 , Figure 2 and Figure 1 As shown, the top felt 120 is a cylindrical structure having a first opening 121 and a second opening 122 which are overlapped and both are circular. The diameter of the first opening 121 is greater than the diameter of the second opening 122 , so that a step is formed between the first opening 121 and the second opening 122 .
[0054] like Figure 4 and Figure 2 As shown, an annular groove 111 with an opening facing downward is provided at the end of the guide tube annular felt 110. An isolating ring 130 is provided in the annular groove 111.
[0055] like Figure 2-2 As shown, the annular groove 111 has a groove inner side wall 1111, a groove outer side wall 1112 and a groove top wall. The distance between the bottom end of the groove inner side wall 1111 and the groove top wall is greater than the distance between the bottom end of the groove outer side wall 1112 and the groove top wall. An outer portion is formed between the groove outer side wall 1112 and the outer end surface of the guide tube ring felt 110 adjacent to it. The bottom surface of the outer portion is closely arranged with the top surface of the step, and the two are matched. The guide tube ring felt 110 is basically located in the first opening 121 and the second opening 122.
[0056] The guide tube annular felt 110 has a third opening 112 and a fourth opening 113 which are arranged in an overlapping manner, both of which are circular. The diameter of the third opening 112 is smaller than the diameter of the fourth opening 113 ; the height of the third opening 112 is greater than the height of the fourth opening 113 .
[0057] The gap between the isolating ring 130 and the inner wall 1111 of the card slot or the outer wall 1112 of the card slot is 1 to 2 mm. The gap between the isolating ring 130 and the top fixed felt 120 is 1 to 2 mm.
[0058] The maximum thickness of the guide tube ring felt 110 is greater than the maximum thickness of the top solid felt 120. The thicknesses of the guide tube ring felt 110 and the top solid felt 120 are 80-100 mm respectively. For example, the maximum thickness of the guide tube ring felt 110 is 100 mm, and the maximum thickness of the top solid felt is 90 mm.
[0059] The guide tube flange 140 is connected to the top of the guide tube ring felt 110 .
[0060] Example 2
[0061] like Figure 1 As shown, the single crystal thermal field device of this embodiment includes the top insulation structure 100 described in Example 1, the upper insulation tube 200, the lower insulation tube 300, the crucible 400, the main heater 500, the bottom heater 600, the inner guide tube 700, the outer guide tube 800, the water cooling screen (not shown), and the outer guide support ring 810.
[0062] The upper heat-insulating cylinder 200 is located above the lower heat-insulating cylinder 300 and below the top fixing felt 120. An upper heat-insulating cylinder felt 210 is disposed outside the upper heat-insulating cylinder 200.
[0063] The crucible 400 is located in the lower heat-insulating cylinder 300. The main heater 500 is disposed near the upper portion of the crucible 400. The bottom heater 600 is disposed near the bottom of the crucible 400.
[0064] The inner guide tube 700 and the outer guide tube 800 are both located above the crucible 400. The inner guide tube 700 is located inside the outer guide tube 800. The top of the inner guide tube 700 is located inside the third opening 112 and the fourth opening 113 of the guide tube ring felt 110.
[0065] The outer guide tube 800 is formed by a connected outer guide tube body and an extension portion. The extension portion is formed by the top of the outer guide tube body extending outward in the horizontal direction. The outer end surface of the extension portion is closely disposed against the inner side wall of the fourth opening 113 of the guide tube fixing felt 110.
[0066] The outer guide support ring 810 is located below the guide tube ring felt 110 and is used to support the extension of the outer guide tube 800 .
[0067] The present invention is not limited to the above-mentioned embodiments. Without departing from the essential content of the present invention, any deformation, improvement, and substitution that can be thought of by those skilled in the art shall fall within the scope of the present invention.
Claims
1. A top insulation structure for a single crystal thermal field device, characterized in that: It includes guide tube ring felt, top fixed felt and isolation ring; The isolation ring is configured as a circular ring structure; The top fixed felt is configured as a cylindrical structure, which has a first opening and a second opening which are arranged overlapping each other, both of which are circular; the diameter of the first opening is larger than the diameter of the second opening, so that a step is formed between the first opening and the second opening; The end of the guide tube ring felt is provided with an annular groove with an opening facing downward; the isolation ring is arranged in the annular groove; The annular slot has an inner slot wall, an outer slot wall and a slot top wall; the distance between the bottom end of the inner slot wall and the slot top wall is greater than the distance between the bottom end of the outer slot wall and the slot top wall; An outer portion is formed between the outer side wall of the slot and the outer end surface of the guide tube ring felt adjacent to the slot; the bottom surface of the outer portion is closely arranged with the top surface of the step, and the two are matched.
2. The top insulation structure according to claim 1, characterized in that: The guide tube annular felt has a third opening and a fourth opening which are arranged overlapping each other, both of which are circular; the diameter of the third opening is smaller than the diameter of the fourth opening; and the height of the third opening is greater than the height of the fourth opening.
3. The top insulation structure according to claim 2, characterized in that: The gap between the isolation ring and the inner wall of the slot or the outer wall of the slot is 1 to 2 mm.
4. The top insulation structure according to claim 2, characterized in that: The gap between the isolation ring and the top solid felt is 1 to 2 mm.
5. The top insulation structure according to claim 2, characterized in that: The maximum thickness of the guide tube annular felt is greater than the maximum thickness of the top solid felt.
6. The top insulation structure according to claim 2, characterized in that: The thickness of the guide tube ring felt and the top solid felt is 80 to 100 mm respectively.
7. The top insulation structure according to claim 2, characterized in that: It also includes a guide tube flange; the guide tube flange is connected to the top of the guide tube ring felt.
8. A single crystal thermal field device, characterized in that: It comprises the top insulation structure as claimed in any one of claims 2 to 7, an upper insulation tube, a lower insulation tube, a crucible, a main heater and a bottom heater; The upper heat-insulating cylinder is located above the lower heat-insulating cylinder and below the top fixed felt; The crucible is located in the lower heat-insulating cylinder; the main heater is arranged near the upper part of the crucible; and the bottom heater is arranged near the bottom of the crucible.
9. The single crystal thermal field device according to claim 8, characterized in that: Also includes an inner guide tube and an outer guide tube; The inner guide tube and the outer guide tube are both located above the crucible; The inner guide tube is located on the inner side of the outer guide tube; the top of the inner guide tube is located in the third opening and the fourth opening of the guide tube ring felt; The outer guide tube is formed by a connected outer guide tube body and an extension; the extension is obtained by extending the top of the outer guide tube body outward in a horizontal direction; the outer end surface of the extension is tightly arranged with the inner side wall of the fourth opening of the guide tube fixed felt.
10. The single crystal thermal field device according to claim 9, characterized in that: It also includes an outer guide support ring, which is located below the guide tube ring felt and is used to support the extension of the outer guide tube.