Fixing device for cleaning agent feeding pipe

By designing fixing devices for curved plates, curved grooves and adjustable installation components, the problem that traditional fixing devices cannot fix feed pipes of different specifications is solved, and the stable fixation of feed pipes and the stable feeding of cleaning agents is achieved, which improves the cleaning effect .

CN222186039UActive Publication Date: 2024-12-17RIJIHE SEMICON MATERIALS CO LTD
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Patent Information

Application Number
CN202421631212.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-11
Publication Date
2024-12-17
Estimated Expiration
2034-07-11

AI Technical Summary

Technical Problem

The traditional cleaning agent feed pipe fixing device cannot effectively fix the feed pipe of different specifications, resulting in fluctuations in the filling flow rate of the cleaning agent and affecting the cleaning effect.

Method used

A fixing device including a first curved plate, a curved groove, a second curved plate and an adjustable mounting assembly is designed, and the positioning and fixing of the feed pipe is achieved by adjusting the position of the curved plate and the rotation of the bolts, and using a clamp and connecting blocks improve installation stability and reliability.

Benefits of technology

It realizes stable fixation of feed pipes of different specifications, improves the stability and reliability of cleaning agent feeding, and is suitable for various cleaning equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of fixing devices, in particular to a cleaning agent feeding pipe fixing device which comprises two first arc-shaped plates and arc-shaped grooves, the two first arc-shaped plates are symmetrically arranged front and back, the arc-shaped grooves are formed in the two sides of each first arc-shaped plate, and two second arc-shaped plates are symmetrically arranged between the two first arc-shaped plates up and down. Through the arrangement of the first arc-shaped plate, the arc-shaped groove, the second arc-shaped plate and the first bolt, during use, the relative position between the first arc-shaped plate and the second arc-shaped plate is adjusted according to the diameter of a feeding pipe, and then the feeding pipe is inserted between the first arc-shaped plate and the second arc-shaped plate; and positioning between the first arc-shaped plate and the second arc-shaped plate can be achieved through rotation of the first bolt, fixing of the feeding pipe is completed, and the feeding pipes of different specifications can be fixedly installed conveniently. The utility model has the advantages of firm and stable installation and good versatility.
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Description

Technical Field

[0001] The utility model relates to a fixing device, in particular to a fixing device for a cleaning agent feeding pipe. Background Art

[0002] During the semiconductor manufacturing process, the semiconductor needs to be cleaned with a specified chemical solvent to remove impurities on the semiconductor and improve the quality of semiconductor manufacturing.

[0003] Currently, when adding chemical solvents to semiconductor cleaning equipment, the chemical solvents are added to the cleaning equipment through a cleaning agent feeding pipe. Traditionally, the cleaning agent feeding pipe is fixed at a single point. Once the cleaning agent filling flow rate fluctuates, the feeding pipe will continue to move, affecting the cleaning agent feeding and hindering its use. In addition, the feeding pipes used in various cleaning equipment have different diameters, and traditional fixing devices cannot achieve a good fixing operation. Therefore, the present utility model provides a fixing device for the cleaning agent feeding pipe. Utility Model Content

[0004] In view of the deficiencies of the prior art, the utility model provides a fixing device for a cleaning agent feeding pipe, which overcomes the deficiencies of the prior art.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0006] A fixing device for a cleaning agent feeding pipe includes a first curved plate, two first curved plates are symmetrically arranged front to back and each of which has an arc groove on both sides, two second curved plates are symmetrically arranged up and down between the two first curved plates, the two sides of the second curved plates are respectively inserted into the arc grooves on both sides and are movably connected with the arc grooves, the first curved plate and the second curved plate are positioned by a first bolt, a number of clamping plates are installed on the left and right side walls of the first curved plate and the second curved plate, and an adjustable mounting component is provided in the center of the outer wall of the first curved plate and the second curved plate.

[0007] As a preferred technical solution of the present invention, the adjustable mounting assembly includes a threaded rod, the centers of the outer walls of the first curved plate and the second curved plate are fixedly connected to the threaded rod, the threaded rods are threadedly connected to threaded sleeves, one end of the threaded sleeves is fixedly connected to a mounting plate, and a mounting hole is provided on the mounting plate.

[0008] As a preferred technical solution of the present invention, a tightening bolt is threadedly connected to the side wall of the threaded sleeve away from the mounting plate, and the tightening bolt is tightened against the threaded rod.

[0009] As a preferred technical solution of the present invention, the centers of the left and right side walls of the first and second curved plates are fixedly connected with connecting blocks, the side of the splint away from the first curved plate is fixedly connected with a connecting block, the side of the splint close to the first curved plate is provided with a slot, the adjacent connecting blocks are inserted into the slot, the end of the splint close to the slot is threadedly connected with a second bolt, and the second bolt is threadedly connected to the connecting block.

[0010] As a preferred technical solution of the present invention, a movable groove is provided on the inner side wall of the arc-shaped groove, and movable blocks are fixedly connected to both sides of the second arc-shaped plate, and the movable blocks are movably connected to the movable groove.

[0011] As a preferred technical solution of the present invention, the clamping plate is arranged with an arc-shaped cross section, and the clamping plate is arranged on the same surface as the inner wall of the first arc-shaped plate or the second arc-shaped plate.

[0012] As a preferred technical solution of the present invention, the first bolt is arranged in a conical shape at one end close to the second arc-shaped plate.

[0013] The present invention provides a fixing device for a cleaning agent feeding pipe, which has the following beneficial effects:

[0014] 1. The utility model is provided with a first curved plate, an arc-shaped groove, a second curved plate and a first bolt. When in use, the relative position between the first curved plate and the second curved plate is first adjusted according to the diameter of the feeding pipe, and then the feeding pipe is inserted between the first curved plate and the second curved plate. The first curved plate and the second curved plate can be positioned by rotating the first bolt to complete the fixing of the feeding pipe, which is convenient for fixing and installing feeding pipes of different specifications.

[0015] 2. The utility model is provided with a splint and an adjustable mounting assembly. The adjustable mounting assembly can realize convenient installation operation of the device at a specified position, and the splint can be installed on both sides of the first arc plate and the second arc plate according to the length of the feeding pipe. The splint can be used to provide stable support for the feeding pipe, thereby improving the stability and reliability of the fixed installation of the feeding pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0017] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the utility model;

[0018] Figure 2This is a schematic diagram of the cross-sectional three-dimensional structure of the utility model;

[0019] Figure 3 This is a schematic diagram of the three-dimensional structure of the adjustable mounting assembly of the utility model;

[0020] Figure 4 It is a schematic diagram of the three-dimensional structure of the second curved plate of the utility model.

[0021] In the figure: 1. First curved plate; 2. Arc groove; 3. Second curved plate; 4. First bolt; 5. Clamp; 6. Adjustable mounting assembly; 7. Threaded rod; 8. Threaded sleeve; 9. Mounting plate; 10. Mounting hole; 11. Tightening bolt; 12. Connecting block; 13. Slot; 14. Second bolt; 15. Movable groove; 16. Movable block. DETAILED DESCRIPTION

[0022] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention and are not used to limit the present invention.

[0023] Example: Figure 1-4 As shown, a fixing device for a cleaning agent feeding pipe includes a first curved plate 1, two first curved plates 1 are symmetrically arranged front and back and have curved grooves 2 on both sides, two second curved plates 3 are symmetrically arranged up and down between the two first curved plates 1, both sides of the second curved plates 3 are respectively inserted into the curved grooves 2 on both sides and are movably connected between the curved grooves 2, and the first curved plate 1 and the second curved plate 3 are positioned by a first bolt 4, which can realize the position adjustment and fixation between the first curved plate 1 and the second curved plate 3, so as to facilitate the fixed installation operation of feeding pipes of different specifications;

[0024] Among them, a movable groove 15 is opened on the inner side wall of the arc groove 2, and the second arc plate 3 is fixedly connected with movable blocks 16 near both sides. The movable blocks 16 are movably connected to the movable groove 15, so that the first arc plate 1 and the second arc plate 3 can move stably.

[0025] Among them, the first bolt 4 is arranged in a conical shape at one end close to the second curved plate 3, thereby improving the stability of the installation between the first curved plate 1 and the second curved plate 3;

[0026] A plurality of clamping plates 5 are installed on the left and right side walls of the first curved plate 1 and the second curved plate 3. The centers of the left and right side walls of the first curved plate 1 and the second curved plate 3 are fixedly connected with connecting blocks 12. The side of the clamping plates 5 away from the first curved plate 1 is fixedly connected with the connecting blocks 12. The side of the clamping plates 5 close to the first curved plate 1 is provided with slots 13. The adjacent connecting blocks 12 are inserted into the slots 13. One end of the clamping plate 5 close to the slot 13 is threadedly connected with a second bolt 14. The second bolt 14 is threadedly connected to the connecting block 12. The clamping plate 5 can be used to support and clamp the feeding pipe, thereby improving the stability and reliability of the installation of the feeding pipe.

[0027] Among them, the clamping plate 5 is arranged in an arc-shaped cross section, and the clamping plate 5 is arranged on the same surface as the inner wall of the first arc-shaped plate 1 or the second arc-shaped plate 3, thereby improving the stability of the feeding pipe installation;

[0028] An adjustable mounting assembly 6 is provided at the center of the outer wall of each of the first curved plate 1 and the second curved plate 3. The adjustable mounting assembly 6 includes a threaded rod 7. The center of the outer wall of each of the first curved plate 1 and the second curved plate 3 is fixedly connected to the threaded rod 7. A threaded sleeve 8 is threadedly connected to the threaded rod 7. One end of the threaded sleeve 8 is fixedly connected to a mounting plate 9. A mounting hole 10 is provided on the mounting plate 9, which can realize the fixed installation operation between the device and the external equipment;

[0029] Among them, a tightening bolt 11 is threadedly connected to the side wall of the threaded sleeve 8 away from the mounting plate 9. The tightening bolt 11 is tightened against the threaded rod 7 to improve the installation reliability between the threaded rod 7 and the threaded sleeve 8.

[0030] Working principle: When the device of the utility model is used, the position of the first curved plate 1 is first adjusted, so that the two sides of the second curved plate 3 move in the curved groove 2, and the relative position between the first curved plate 1 and the second curved plate 3 is changed. Then, the feeding pipe to be fixed is passed through between the first curved plate 1 and the second curved plate 3, so that the first curved plate 1 and the second curved plate 3 are moved to the appropriate position on the feeding pipe, and the first bolt 4 is rotated to realize the positioning and fixation between the first curved plate 1 and the second curved plate 3 through the first bolt 4, and realize the fixation between the first curved plate 1 and the second curved plate 3 and the feeding pipe, and then the first curved plate 1 is rotated. And install the clamping plates 5 on both sides of the second curved plate 3, so that the connecting block 12 is inserted into the slot 13, and by rotating the second bolt 14, the connection block 12 and the slot 13 are fixed, and the clamping plates 5 can be fixed to the first curved plate 1, the second curved plate 3 and the clamping plates 5 respectively. At this time, the clamping plates 5 can be used to support and fix the feeding pipe, thereby improving the stability of the feeding pipe. The threaded sleeve 8 is then rotated so that the length between the threaded rod 7 and the threaded sleeve 8 matches the internal space of the equipment, and the external fastener is passed through the mounting hole 10 to realize the fixed installation between the mounting plate 9 and the equipment, thereby completing the fixed installation of the device.

[0031] Finally, it should be noted that in the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as a limitation on the present invention.

[0032] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0033] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A fixing device for a cleaning agent feeding pipe, comprising a first arc-shaped plate (1), characterized in that: Two first arc plates (1) are symmetrically arranged front to back and both sides are provided with arc grooves (2); two second arc plates (3) are symmetrically arranged up and down between the two first arc plates (1); both sides of the second arc plates (3) are respectively inserted into the arc grooves (2) on both sides and are movably connected with the arc grooves (2); the first arc plate (1) and the second arc plate (3) are positioned by a first bolt (4); a plurality of clamping plates (5) are installed on the left and right side walls of the first arc plate (1) and the second arc plate (3); and an adjustable mounting component (6) is provided at the center of the outer side wall of the first arc plate (1) and the second arc plate (3).

2. A fixing device for a cleaning agent feeding pipe according to claim 1, characterized in that: The adjustable mounting assembly (6) comprises a threaded rod (7), the outer side walls of the first arc-shaped plate (1) and the second arc-shaped plate (3) are both fixedly connected to the threaded rod (7), the threaded sleeve (8) is threadedly connected to the threaded rod (7), one end of the threaded sleeve (8) is fixedly connected to a mounting plate (9), and the mounting plate (9) is provided with a mounting hole (10).

3. A fixing device for a cleaning agent feeding pipe according to claim 2, characterized in that: A tightening bolt (11) is threadedly connected to the side wall of the threaded sleeve (8) at one end away from the mounting plate (9), and the tightening bolt (11) is tightly arranged with the threaded rod (7).

4. A fixing device for a cleaning agent feeding pipe according to claim 1, characterized in that: The left and right side walls of the first curved plate (1) and the second curved plate (3) are fixedly connected with a connecting block (12) at their centers; the side of the clamping plate (5) away from the first curved plate (1) is fixedly connected with a connecting block (12); the side of the clamping plate (5) close to the first curved plate (1) is provided with a slot (13); adjacent connecting blocks (12) are inserted into the slot (13); one end of the clamping plate (5) close to the slot (13) is threadedly connected with a second bolt (14); the second bolt (14) is threadedly connected to the connecting block (12).

5. The fixing device for a cleaning agent feeding pipe according to claim 1, characterized in that: A movable groove (15) is provided on the inner side wall of the arc-shaped groove (2), and movable blocks (16) are fixedly connected near both sides of the second arc-shaped plate (3), and the movable blocks (16) are movably connected to the movable groove (15).

6. A fixing device for a cleaning agent feeding pipe according to claim 1, characterized in that: The clamping plate (5) is arranged in an arc-shaped cross section, and the clamping plate (5) is arranged on the same surface as the inner wall of the first arc-shaped plate (1) or the second arc-shaped plate (3).

7. A fixing device for a cleaning agent feeding pipe according to claim 1, characterized in that: The first bolt (4) is arranged in a conical shape at one end close to the second arc-shaped plate (3).