X-ray-based three-dimensional online detection equipment

Abstract

The utility model relates to the technical field of X-ray detection, and provides a three-dimensional online detection device based on X-rays, which comprises a body, the conveying unit is arranged on the body; the X-ray emitting unit is arranged on the body and located on one side of the conveying unit, and the X-ray emitting unit scans the to-be-tested device by emitting X-rays; the X-ray receiving unit is arranged on the body and located on the other side of the conveying unit, and the X-ray receiving unit receives the X-rays obtained after the device to be tested is scanned in real time. According to the detection equipment, the X-ray emitting unit and the X-ray receiving unit are used for carrying out synchronous arc interpolation motion, and during detection, the to-be-detected device on the transmission unit is kept still, so that the internal structure of the to-be-detected device is protected from being damaged. And moreover, the path of synchronous movement of the X-ray receiving unit along with the X-ray emitting unit is shorter, so that the detection efficiency can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of X-ray detection, in particular to a three-dimensional online detection device based on X-rays. Background Art

[0002] The existing X-ray-based three-dimensional online detection equipment mainly includes an X-ray emitting device, an X-ray receiving device and a transmission device arranged between the two. When in use, the device to be tested is placed on the transmission device, and the device to be tested and the X-ray receiving device perform synchronous circular interpolation motion to achieve detection of the device to be tested. However, the existing X-ray-based three-dimensional online detection equipment requires the device to be tested to move continuously during the detection process. For safety reasons, reducing the movement of the device to be tested is more conducive to protecting the internal structure from damage. Moreover, under the premise of maintaining the resolution and movement speed unchanged, the movement of the device to be tested makes the path of the synchronous movement of the X-ray receiving device longer, and the detection efficiency is lower. Utility Model Content

[0003] Therefore, the technical problem to be solved by the utility model is that the three-dimensional online detection equipment based on X-rays in the prior art needs to continuously move the device under test during the detection process, which is not conducive to protecting the internal structure of the device from damage. Moreover, under the premise of maintaining the resolution and movement speed unchanged, the movement of the device under test makes the path of the synchronous movement of the X-ray receiving device longer, and the detection efficiency is lower, thereby providing a three-dimensional online detection equipment based on X-rays.

[0004] In order to solve the above technical problems, the technical solution of the utility model is as follows:

[0005] The utility model provides a three-dimensional online detection device based on X-rays, comprising: a body; a transmission unit, which is arranged on the body and used to carry a device to be tested; an X-ray emitting unit, which is arranged on the body and located on one side of the transmission unit, and the X-ray emitting unit scans the device to be tested by emitting X-rays; an X-ray receiving unit, which is arranged on the body and located on the other side of the transmission unit, and the X-ray receiving unit obtains three-dimensional data of the device to be tested by receiving the X-rays scanned after the device to be tested in real time; wherein, during the detection period, the device to be tested on the transmission unit remains stationary, and the X-ray emitting unit and the X-ray receiving unit perform synchronous circular arc interpolation motion.

[0006] Furthermore, the X-ray emitting unit includes an emitter, a first moving platform and a second moving platform; the second moving platform is arranged on the body, the first moving platform can be moved along the Y direction and is arranged on the second moving platform, and the emitter can be moved along the X direction and is arranged on the first moving platform.

[0007] Furthermore, the X-ray receiving unit includes a receiver, a third motion platform and a fourth motion platform; the fourth motion platform is arranged on the body, the third motion platform can be moved along the Y direction and is arranged on the fourth motion platform, and the receiver can be moved along the X direction and is arranged on the third motion platform.

[0008] Further, the conveying unit includes a width adjustment platform and a fixed clamping part and a movable clamping part for fixing the device under test; the width adjustment platform is arranged on the main body, the fixed clamping part is fixedly arranged on the width adjustment platform, and the movable clamping part is arranged on the width adjustment platform in parallel with the fixed clamping part; and the movable clamping part can be arranged on the width adjustment platform to move in a direction close to or away from the fixed clamping part.

[0009] Furthermore, the conveying unit also includes a lifting platform, a connecting portion of the lifting platform is connected to the main body, and the width adjustment platform is arranged on an action portion of the lifting platform, and the width adjustment platform is driven to rise and fall by the action portion of the lifting platform.

[0010] Furthermore, a conveyor belt is provided on both the fixed clamping part and the movable clamping part; the edge of the device under test is overlapped on the conveyor belt and is conveyed along the length direction of the fixed clamping part under the drive of the conveyor belt.

[0011] On the other hand, the utility model also provides an X-ray-based three-dimensional online detection method, including any of the above-mentioned X-ray-based three-dimensional online detection equipment, including the following steps: keeping the device to be tested on the conveying unit stationary; making the X-ray emitting unit and the X-ray receiving unit perform synchronous circular interpolation motion; emitting X-rays through the X-ray emitting unit to scan the device to be tested; and receiving the X-rays after scanning the device to be tested in real time through the X-ray receiving unit to obtain three-dimensional stereo data of the material to be tested.

[0012] Furthermore, before keeping the device under test on the conveying unit stationary; move the device under test to a specified position on the conveying unit; move the transmitter to a position of 0 degrees or 180 degrees below the device under test so that the X-rays and the center of the detection area of ​​the device under test form a fixed angle; move the receiver above the device under test and on the same straight line as the X-rays and the center of the detection area of ​​the device under test.

[0013] Furthermore, the X-ray-based three-dimensional online detection method also includes comparing the acquired three-dimensional data of the device to be tested with pre-set standard information. If there is a difference in the information, it is determined that the quality of the device to be tested is unqualified.

[0014] Furthermore, the X-ray-based three-dimensional online detection method also includes adjusting the resolution by adjusting the distance between the device under test and the transmitter through a lifting platform.

[0015] The technical solution of the utility model has the following advantages:

[0016] The three-dimensional online detection device based on X-rays provided by the utility model utilizes the X-ray emitting unit and the X-ray receiving unit to perform synchronous arc interpolation motion, and during the detection, the device to be tested on the transmission unit remains stationary. Such a setting is more conducive to protecting the internal structure of the device to be tested from damage. Moreover, under the premise of maintaining the resolution and movement speed unchanged, the path of the X-ray receiving unit following the synchronous movement of the X-ray emitting unit is made shorter, which is conducive to improving the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is an overall schematic diagram of an X-ray-based three-dimensional online detection device in an embodiment of the utility model;

[0019] Figure 2 It is a schematic diagram of an X-ray emitting unit in an X-ray-based three-dimensional online detection device in an embodiment of the utility model;

[0020] Figure 3 It is a schematic diagram of an X-ray receiving unit in an X-ray-based three-dimensional online detection device in an embodiment of the utility model;

[0021] Figure 4 It is a schematic diagram of a transmission unit in an X-ray-based three-dimensional online detection device in an embodiment of the utility model;

[0022] Figure 5 It is a schematic diagram of the imaging principle of a transmitter, a device to be tested and a receiver in an X-ray-based three-dimensional online detection device in an embodiment of the utility model;

[0023] Figure 6 The present invention is a schematic diagram of the imaging principle of a transmitter, a device to be tested and a receiver in an X-ray-based three-dimensional online detection device in the prior art.

[0024] 1. Main body; 2. Transmission unit; 3. X-ray emitting unit; 4. X-ray receiving unit; 5. Device under test; 6. Transmitter; 7. First moving platform; 8. Second moving platform; 9. Third moving platform; 10. Fourth moving platform; 11. Width adjustment platform; 12. Fixed clamping part; 13. Mobile clamping part; 14. Lifting platform; 15. Conveyor belt; 16. Receiver. DETAILED DESCRIPTION

[0025] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0027] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0029] like Figure 1As shown, this embodiment provides a three-dimensional online detection device based on X-rays, including: a body 1, for example, the body 1 can be a frame structure, and the internal hollow structure is surrounded by horizontal and vertical frames. A transmission unit 2 is arranged near the middle of the body 1, and is used to carry the device under test 5; an X-ray emitting unit 3 is arranged on the body 1 and located on one side of the transmission unit 2, for example, the X-ray emitting unit 3 can be arranged near the bottom of the body 1, and the X-ray emitting unit 3 scans the device under test 5 above by emitting X-rays; an X-ray receiving unit 4 is arranged on the body 1 and located on the other side of the transmission unit 2, for example, the X-ray receiving unit 4 can be arranged near the top of the body 1, and the X-ray receiving unit 4 receives the X-rays after scanning the device under test 5 in real time to obtain three-dimensional data of the device under test 5; wherein, during the detection, the device under test 5 on the transmission unit 2 remains stationary, and the X-ray emitting unit 3 and the X-ray receiving unit 4 perform synchronous arc interpolation motion. For example, when the X-ray emitting unit 3 performs circular motion in the clockwise (counterclockwise) direction, the X-ray receiving unit 4 can also perform circular motion in the clockwise (counterclockwise) direction. During the motion, at any time, the X-ray receiving unit 4, the center of the detection area of ​​the device to be tested 5 and the X-ray emitting unit 3 are located on the same straight line.

[0030] The X-ray-based three-dimensional online detection device provided in this embodiment uses the X-ray emitting unit 3 and the X-ray receiving unit 4 to perform synchronous arc interpolation motion, and during the detection, the device under test 5 on the transmission unit 2 remains stationary. Such a setting is more conducive to protecting the internal structure of the device under test 5 from damage. Moreover, under the premise of maintaining the resolution and movement speed unchanged, the path of the X-ray receiving unit 4 following the X-ray emitting unit 3 synchronous movement is shortened, which is conducive to improving the detection efficiency.

[0031] The specific principle is as follows Figure 5 , Figure 6 As shown, it can be seen that the path of the X-ray receiving unit 4 in the present application following the synchronous movement of the X-ray emitting unit 3 is shorter than that in the prior art.

[0032] like Figure 2As shown, the X-ray emitting unit 3 includes an emitter 6, a first motion platform 7 and a second motion platform 8; the second motion platform 8 is arranged on the body 1, the first motion platform 7 can be arranged on the second motion platform 8 to move along the Y direction, and the emitter 6 can be arranged on the first motion platform 7 to move along the X direction. The emitter 6 can be a conventional X-ray emitter 6, which is fixed on the first motion platform 7 by screwing or welding. Taking the horizontal plane as an example, the X direction and the Y direction are two directions perpendicular to each other in the horizontal plane. The first motion platform 7 and the second motion platform 8 can both adopt the existing linear drive structure, for example, the structure of the lead screw and the nut driven by the motor, or a linear motor, etc., and can also be used in conjunction with the slider and the guide rail, so as to enable the emitter 6 to perform linear motion in the X direction and the Y direction in the horizontal plane where it is located. When in use, the arc motion of the emitter 6 is realized under the synergistic action of the first motion platform 7 and the second motion platform 8.

[0033] like Figure 3 As shown, the X-ray receiving unit 4 includes a receiver 16, a third motion platform 9 and a fourth motion platform 10; the fourth motion platform 10 is arranged on the body 1, the third motion platform 9 can be arranged on the fourth motion platform 10 to move along the Y direction, and the receiver 16 can be arranged on the third motion platform 9 to move along the X direction. The receiver 16 can be a conventional X-ray receiver, for example, the receiver 16 is a flat detector, which is fixed on the third motion platform 9 by screw connection or welding. Taking the horizontal plane as an example, the X direction and the Y direction are two directions perpendicular to each other in the horizontal plane. The third motion platform 9 and the fourth motion platform 10 can both adopt the existing linear drive structure, for example, the structure of the lead screw and the nut driven by the motor, or a linear motor, etc., or can be used in conjunction with the slider and the guide rail, the purpose is to enable the receiver to perform linear motion in the X direction and the Y direction in the horizontal plane where it is located. When in use, the circular motion of the receiver 16 is realized under the synergistic effect of the third motion platform 9 and the fourth motion platform 10.

[0034] like Figure 4As shown, the conveying unit 2 includes a width adjustment platform 11, a fixed clamping part 12 and a mobile clamping part 13 for fixing the device under test 5; the width adjustment platform 11 is arranged on the body 1, the fixed clamping part 12 is fixedly arranged on the width adjustment platform 11, and the mobile clamping part 13 is arranged on the width adjustment platform 11 in parallel with the fixed clamping part 12 and spaced apart; and the mobile clamping part 13 is arranged on the width adjustment platform 11 so as to be movable in the direction of approaching or moving away from the fixed clamping part 12. For example, the fixed clamping part 12 can be screwed or welded on the body of the width adjustment platform 11. For example, a slide rail can be arranged on the body of the width adjustment platform 11, and a slider can be arranged at the bottom of the mobile clamping part 13. Under the cooperation of the slide rail and the slider, the two mobile clamping parts 13 can be moved close to or away from the fixed clamping part 12. For example, the body of the width adjustment platform 11 also has a power structure to drive the mobile clamping part 13 to move, and the power structure can be a linear motor, a cylinder or a hydraulic cylinder, etc. With such arrangement, the distance between the fixed clamping part 12 and the movable clamping part 13 can be adjusted according to the different sizes of the DUT 5, thereby improving the applicability of the entire detection device.

[0035] Among them, the transmission unit 2 also includes a lifting platform 14, the connection part of the lifting platform 14 is connected to the main body 1, the width adjustment platform 11 is arranged on the action part of the lifting platform 14, and the width adjustment platform 11 is driven to rise and fall by the action part of the lifting platform 14. For example, the lifting platform 14 can be a cylinder, the base of the cylinder is the connection part, and the telescopic head of the cylinder is the action part. For example, the lifting platform can also be a lifting platform designed by a ball screw drive. When in use, the entire width adjustment platform 11 and the fixed clamping part 12, the movable clamping part 13 and the device under test 5 thereon can be driven to rise or fall by the lifting platform 14, so as to adjust the distance between the device under test 5 and the transmitter 6 below, and finally adjust the resolution of the detection equipment.

[0036] Specifically, if Figure 5 As shown, the geometric magnification ratio (resolution) of the detection equipment can be recorded as M, the distance between the transmitter 6 and the receiver 16 can be recorded as SDD, and the distance between the transmitter 6 and the device under test 5 can be recorded as SOD, then M=SDD / SOD. When SDD remains unchanged, the device under test 5 is lowered, SOD decreases, and M increases; the device under test 5 is raised, SOD increases, and M decreases.

[0037] Among them, a conveyor belt 15 is provided on both the fixed clamping part 12 and the movable clamping part 13; for example, the conveyor belt 15 can be set on the side surfaces of the fixed clamping part 12 and the movable clamping part 13 facing each other, and the edge of the device under test 5 is overlapped on the conveyor belt 15 and conveyed along the length direction of the fixed clamping part 12 under the drive of the conveyor belt 15.

[0038] With such arrangement, when the device under test needs to be tested, the device under test can be conveyed to the target position by the conveyor belt, and when the device under test 5 has completed the test, the device under test can be conveyed downstream, thereby improving the degree of automation and the test efficiency.

[0039] Another embodiment also provides an X-ray-based three-dimensional online detection method, including any of the above-mentioned X-ray-based three-dimensional online detection equipment, including the following steps: keeping the device to be tested 5 on the conveying unit 2 stationary; making the X-ray emitting unit 3 and the X-ray receiving unit 4 perform synchronous circular interpolation motion; emitting X-rays through the X-ray emitting unit 3 to scan the device to be tested 5; and receiving the X-rays after scanning the device to be tested 5 in real time through the X-ray receiving unit 4 to obtain three-dimensional stereo data of the material to be tested.

[0040] Before the device under test 5 on the transmission unit 2 is kept stationary, the device under test 5 is moved to a designated position on the transmission unit 2; the transmitter 6 is moved to a position of 0 degrees or 180 degrees below the device under test 5, so that the X-rays and the center of the detection area of ​​the device under test 5 form a fixed angle; wherein the fixed angle depends on the distance between the transmitter 6 and the device under test 5, and the fixed angle is unique after the distance is determined. The receiver is moved above the device under test 5, and is located on the same straight line as the X-rays and the center of the detection area of ​​the device under test 5.

[0041] The X-ray-based three-dimensional online detection method further includes comparing the acquired three-dimensional data of the device under test 5 with pre-set standard information. If there is a difference in the information, it is determined that the quality of the device under test 5 is unqualified.

[0042] The X-ray-based three-dimensional online detection method further includes adjusting the resolution by adjusting the distance between the device under test 5 and the emitter 6 through the lifting platform 14 .

[0043] When in use, the X-ray emitting unit 3, the transmission unit 2 and the X-ray receiving unit 4 coordinate their actions to perform a three-dimensional scan of the area to be inspected of each device to be inspected 5, and receive the captured image through the X-ray receiving unit 4. After the image is captured, it is processed by the reconstruction software to generate three-dimensional data of the sample. The reconstructed three-dimensional data is compared with the pre-set standard information in turn. If there is a difference in the information, the result is determined to be an unqualified sample.

[0044] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.

Claims

1. A three-dimensional online detection device based on X-rays, It is characterized in that include: ontology(1); A transmission unit (2), arranged on the body (1) and used for carrying the device under test (5); An X-ray emitting unit (3) is arranged on the body (1) and is located on one side of the transmission unit (2), and the X-ray emitting unit (3) scans the device to be tested (5) by emitting X-rays; An X-ray receiving unit (4) is arranged on the body (1) and is located on the other side of the transmission unit (2), and the X-ray receiving unit (4) obtains three-dimensional data of the device under test (5) by receiving X-rays scanned on the device under test (5) in real time; During the detection period, the device to be tested (5) on the transmission unit (2) remains stationary, and the X-ray emitting unit (3) and the X-ray receiving unit (4) perform synchronous circular arc interpolation motion.

2. The X-ray based three-dimensional online detection device according to claim 1, It is characterized in that The X-ray emitting unit (3) comprises an emitter (6), a first moving platform (7) and a second moving platform (8); The second motion platform (8) is arranged on the body (1), the first motion platform (7) is arranged on the second motion platform (8) so as to be movable along the Y direction, and the transmitter (6) is arranged on the first motion platform (7) so as to be movable along the X direction.

3. The X-ray based three-dimensional online detection device according to claim 1, It is characterized in that The X-ray receiving unit (4) comprises a receiver, a third moving platform (9) and a fourth moving platform (10); The fourth motion platform (10) is arranged on the body (1), the third motion platform (9) is arranged on the fourth motion platform (10) so as to be movable along the Y direction, and the receiver is arranged on the third motion platform (9) so as to be movable along the X direction.

4. The X-ray based three-dimensional online detection device according to claim 1, It is characterized in that The conveying unit (2) comprises a width adjustment platform (11), a fixed clamping part (12) and a movable clamping part (13) for fixing the device under test (5); The width adjustment platform (11) is arranged on the body (1), the fixed clamping portion (12) is fixedly arranged on the width adjustment platform, and the movable clamping portion (13) is arranged on the width adjustment platform (11) in parallel and spaced relation to the fixed clamping portion (12); the movable clamping portion (13) is arranged on the width adjustment platform (11) so as to be movable in a direction approaching or moving away from the fixed clamping portion (12).

5. The X-ray based three-dimensional online detection device according to claim 4, It is characterized in that The conveying unit (2) further comprises a lifting platform (14), the connection portion of the lifting platform (14) being connected to the main body (1), the width adjustment platform (11) being arranged on the action portion of the lifting platform (14), and the width adjustment platform (11) being driven to rise and fall by the action portion of the lifting platform (14).

6. The X-ray based three-dimensional online detection device according to claim 4, It is characterized in that The fixed clamping part (12) and the movable clamping part (13) are both provided with a conveyor belt (15); The edge of the device under test (5) is overlapped on the conveyor belt (15), and is conveyed along the length direction of the fixed clamping portion (12) under the drive of the conveyor belt (15).

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