Vacuum transfer device and system

Abstract

The utility model relates to the technical field of research and test, and provides a vacuum transfer device and system, the vacuum transfer device can be suitable for vacuum transfer of a sample table of an X-ray photoelectron spectroscopy analyzer, and the vacuum transfer device comprises a body provided with an inner cavity and an opening communicated with the inner cavity; the cover body detachably covers the opening, and the joint of the cover body and the body is in sealing fit; the first air hole is communicated with the inner cavity, can be opened and closed and is suitable for being connected with a vacuum pump; the second air hole is communicated with the inner cavity and is suitable for being connected with a vacuum detection component; in the sample transferring process, the vacuum degree in the inner cavity can be monitored in real time through the vacuum detection component, so that whether the air leakage problem exists or not is judged, if the vacuum degree in the inner cavity is gradually reduced, it is indicated that the air leakage problem exists, and workers can find the problem and find the air leakage reason in time so that the vacuum degree can be adjusted in time; and the sample table is ensured to be under the preset vacuum degree in the transfer process, so that the accuracy of sample surface element analysis is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of research and testing, in particular to a vacuum transfer device and system. Background Art

[0002] As we all know, the properties of lithium-ion battery interface materials are the most active and extremely sensitive to air. Even if they are briefly exposed to the atmosphere, their surfaces will quickly react with air (oxygen, water) to produce new chemicals, causing changes in the real chemical structure of the battery interface material surface, which directly leads to the complexity and uncertainty of material characterization, especially the spectrum analysis related to surface analysis will become more difficult. In this case, how to achieve convenient and effective air-free contact transfer of air-sensitive materials and seamless connection with test instruments is particularly important.

[0003] X-ray photoelectron spectroscopy (XPS) is currently the most commonly used surface analysis method. Therefore, many testing workers have developed a vacuum transfer box that can be docked with the XPS instrument to prepare samples in an inert environment and then transfer them to the XPS sample chamber. The samples can then be taken out in the high vacuum environment inside the XPS instrument. This has indeed improved the testing technology to a great extent.

[0004] However, during the sample transfer process, the vacuum transfer box may leak due to various factors, making it difficult to ensure the accuracy of elemental analysis on the sample surface. Utility Model Content

[0005] The utility model provides a vacuum transfer device and system, which are used to solve the problem of air leakage that may occur during sample transfer in the prior art, resulting in difficulty in ensuring the accuracy of element analysis on the sample surface, and to achieve real-time monitoring of the vacuum degree of the sample, so as to adjust the vacuum degree in time and ensure the accuracy of element analysis on the sample surface.

[0006] The utility model provides a vacuum transfer device, which can be applied to the vacuum transfer of a sample stage of an X-ray photoelectron spectrometer. The transfer device comprises:

[0007] A body, provided with an inner cavity and an opening communicating with the inner cavity;

[0008] A cover body, detachably covering the opening, wherein the connection between the cover body and the body is sealed;

[0009] A first air hole, which is in communication with the inner cavity and can be opened and closed, and is suitable for connecting a vacuum pump;

[0010] The second air hole is communicated with the inner cavity and is suitable for connecting a vacuum detection component.

[0011] According to a vacuum transfer device provided by the utility model, it also includes an anti-vibration sleeve embedded in the inner cavity.

[0012] According to a vacuum transfer device provided by the utility model, the first air hole and / or the second air hole is arranged on the cover body.

[0013] According to a vacuum transfer device provided by the utility model, a first joint is fixedly connected to the first air hole, and a first valve is connected to the first joint; and a second joint is fixedly connected to the second air hole.

[0014] According to a vacuum transfer device provided by the utility model, the connection between the cover body and the body is sealed by a sealing ring.

[0015] According to a vacuum transfer device provided by the utility model, a sealing groove surrounding the opening is provided on the main body, the sealing ring is embedded in the sealing groove, and the bottom of the cover body is pressed onto the sealing ring.

[0016] According to a vacuum transfer device provided by the utility model, it also includes a locking member for locking the main body and the cover body.

[0017] According to a vacuum transfer device provided by the utility model, the locking member includes a connecting portion and a locking portion;

[0018] The locking portion is connected to the body through the connecting portion, and the locking portion is arranged close to the opening;

[0019] The locking portion can move toward or away from the opening to tighten or loosen the cover.

[0020] According to a vacuum transfer device provided by the utility model, one end of the locking portion is rotatably connected to the connecting portion, so that the other end of the locking portion opposite to the connecting portion can rotate around the connecting portion.

[0021] According to a vacuum transfer device provided by the utility model, the connecting part includes a bolt.

[0022] The utility model also provides a vacuum transfer system, comprising any one of the vacuum transfer devices described above.

[0023] A vacuum transfer system provided by the utility model also includes a vacuum pump and a vacuum detection component;

[0024] The vacuum pump is connected to the first air hole of the vacuum transfer device;

[0025] The vacuum detection component is connected to the second air hole of the vacuum transfer device.

[0026] According to a vacuum transfer system provided by the utility model, the vacuum pump is communicated with the first air hole through a first hose, and the first hose is connected to a second valve.

[0027] According to a vacuum transfer system provided by the utility model, the vacuum detection component and the second air hole are communicated with each other through a second hose.

[0028] According to a vacuum transfer system provided by the utility model, the vacuum detection component includes a vacuum gauge and a digital vacuum gauge.

[0029] The utility model provides a vacuum transfer device and system. During the sample transfer process, the vacuum degree in the inner cavity can be monitored in real time through a vacuum detection component, so as to determine whether there is a leakage problem. If the vacuum degree in the inner cavity gradually decreases, it indicates that there is a leakage problem. The staff can promptly discover the problem and find the cause of the leakage, so as to adjust the vacuum degree in time, ensuring that the sample stage is always at a preset vacuum degree during the transfer process, thereby ensuring the accuracy of the element analysis on the sample surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0031] Figure 1 It is a top view of the main body provided by the embodiment of the utility model;

[0032] Figure 2 It is a structural schematic diagram of a cover body provided by an embodiment of the utility model;

[0033] Figure 3 It is a schematic diagram showing the connection relationship between the cover body, the vacuum pump and the vacuum detection component provided by the embodiment of the utility model;

[0034] Figure 4 It is a schematic diagram of the structure of the anti-vibration sleeve provided in the embodiment of the utility model;

[0035] Figure 5 It is one of the structural schematic diagrams of the main body provided by the embodiment of the utility model;

[0036] Figure 6 This is the second structural schematic diagram of the main body provided by the embodiment of the utility model.

[0037] Reference numerals:

[0038] 10. Main body; 100. Sealing groove; 11. Cover body; 12. First air hole; 120. First joint; 121. First valve; 13. Second air hole; 130. Second joint; 14. Vibration-proof sleeve; 15. Sealing ring; 16. Locking piece; 160. Connecting part; 161. Locking part; 20. Vacuum pump; 30. Vacuum detection component; 40. First hose; 400. Second valve; 50. Second hose. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0040] In order to facilitate understanding of the vacuum transfer device and system provided by the utility model, its application background is first explained. When performing surface analysis on air-sensitive samples such as lithium-ion battery interface materials, for example, using X-ray photoelectron spectroscopy (XPS) to analyze and test the sample surface, the sample surface is easily reacted with air (oxygen, water) during the sample transfer process, which will change the actual chemical structure of the battery interface material surface, directly leading to the complexity and uncertainty of material characterization. Therefore, it is particularly important to achieve convenient and effective air-free contact transfer of air-sensitive materials and seamless connection with testing instruments.

[0041] Based on this, many testing workers have developed a vacuum transfer box that can be docked with the XPS instrument, which enables samples to be prepared in an inert environment and then transferred to the XPS sample chamber, and samples can be taken out in the high vacuum environment inside the XPS instrument to ensure the accuracy of the analysis and testing.

[0042] However, during the sample transfer process, the vacuum transfer box may leak due to various factors, making it difficult to ensure the accuracy of element analysis on the sample surface. How to determine whether there is leakage during the sample transfer process and how to ensure that the sample is at a preset vacuum degree are important issues that need to be solved urgently.

[0043] Based on the above, the utility model provides a vacuum transfer device and system, which can monitor and adjust the vacuum degree of a sample to ensure the accuracy of element analysis on the sample surface.

[0044] Combine the following Figure 1-Figure 6 The utility model is described in detail.

[0045] Reference Figure 1-Figure 3A vacuum transfer device is applicable to the vacuum transfer of a sample stage of an X-ray photoelectron spectrometer (XPS), the transfer device comprising a main body 10, a cover body 11, a first air hole 12 and a second air hole 13; wherein the main body 10 is provided with an inner cavity and an opening connected to the inner cavity, and the sample stage can be placed in the main body 10 through the opening; the cover body 11 is detachably covered on the opening, and the connection between the cover body 11 and the main body 10 is a sealed match; the first air hole 12 is communicated with the inner cavity of the main body 10, and is applicable to connecting a vacuum pump 20; the second air hole 13 is communicated with the inner cavity of the main body 10, and is applicable to connecting a vacuum detection component 30.

[0046] In actual application, the sample stage is placed into the inner cavity of the main body 10 through the opening, and then the cover body 11 is covered on the opening. Since the connection between the cover body 11 and the main body 10 is sealed, the sample stage can be placed in a closed space. The first air hole 12 is connected to the vacuum pump 20, and the second air hole 13 is connected to the vacuum detection component 30. The vacuum pump 20 is turned on to evacuate until the inner cavity reaches a preset vacuum degree, and then the first air hole 12 is closed, and the sample is transferred to the XPS sample chamber to complete the transfer of the sample stage. During the transfer process, the transfer device can put the sample in a vacuum environment, effectively avoiding the sample from being affected by the outside air, and during the transfer process, the vacuum degree in the inner cavity can be monitored in real time through the vacuum detection component 30, so as to determine whether there is a leakage problem. If the vacuum degree in the inner cavity gradually decreases, it indicates that there is a leakage problem. The staff can promptly discover the problem and find the cause of the leakage, so as to adjust the vacuum degree in time, and ensure that the sample stage is always at a preset vacuum degree during the transfer process, thereby ensuring the accuracy of the element analysis on the sample surface.

[0047] In some embodiments, the shape and material of the main body 10 have multiple options; as for the choice of shape, the main body 10 can be configured as a relatively regular three-dimensional structure such as a cylinder or a cube. Of course, in some special application scenarios, the main body 10 can also be configured as an irregular three-dimensional structure according to actual needs.

[0048] Regarding the selection of materials, the main body 10 can be made of metal materials, such as steel, copper, etc., so as to ensure its own compressive strength, and in order to achieve lightweight, it can preferably use metals with relatively low density, such as aluminum alloy; of course, based on actual needs, some high-strength non-metallic materials can also be selected, and specific configuration needs to be flexibly performed according to the actual application scenario.

[0049] In this embodiment, the main body 10 is cylindrical and made of metal material. In accordance with its shape, the inner cavity of the main body 10 is cylindrical and has a circular opening. The cover body 11 is circular and made of metal material, and is used to cover the circular opening on the main body 10. The first air hole 12 and the second air hole 13 are arranged side by side on the top of the cover body 11.

[0050] Of course, the first air hole 12 and the second air hole 13 are not limited to the above-mentioned opening positions and layout methods. In other feasible embodiments, the first air hole 12 and the second air hole 13 can also be opened at other positions of the cover body 11, or opened on the main body 10, as long as the requirements of vacuum extraction and vacuum degree detection are met.

[0051] Specifically, refer to Figure 2 and Figure 3 A first joint 120 is fixedly connected to the first air hole 12 , and a first valve 121 is connected to the first joint 120 . The first valve 121 is used to control the opening and closing of the first air hole 12 .

[0052] The first joint 120 can facilitate the connection between the first air hole 12 and the vacuum pump 20, and the first valve 121 can control the opening and closing of the first air hole 12. When evacuating, the first valve 121 is opened, the first air hole 12 is opened, and the vacuum pump 20 evacuates the inner cavity to a preset vacuum degree through the first air hole 12, and then closes the first valve 121, and the first air hole 12 is closed to ensure that the inner cavity is in a closed state; in addition, the first air hole 12 can also be used as a vacuum relief valve. When the cover body 11 needs to be disassembled, the first valve 121 is opened, and the first air hole 12 is opened to balance the air pressure inside and outside the main body 10, thereby realizing the separation of the cover body 11 from the main body 10.

[0053] Specifically, the second air hole 13 is fixedly connected with a second joint 130 , and the second air hole 13 can be conveniently connected with the vacuum detection component 30 through the second joint 130 .

[0054] Reference Figure 1 and Figure 4 The main body 10 is embedded with an anti-vibration cover 14, which is used to hold the XPS sample stage and plays a role in buffering and vibration reduction. In order to adapt to the shape of the inner cavity of the main body 10, the anti-vibration cover 14 is cylindrical as a whole. It is made of a flexible material with a certain elastic modulus, such as rubber, resin, silicone, etc., and can be selected according to actual needs as long as the required vibration reduction effect can be achieved; the outer wall of the anti-vibration cover 14 fits the wall of the inner cavity, and the top height does not exceed the height of the opening to avoid affecting the installation of the cover 11; the internal chamber of the anti-vibration cover 14 is slightly larger than the sample stage of the XPS, so as to facilitate the placement of the sample stage and play a role in fixing the position of the sample stage.

[0055] It is understandable that the above-mentioned cylindrical anti-vibration sleeve 14 is only provided to adapt to the cylindrical inner cavity of the main body 10. Based on the different shapes of the inner cavity of the main body 10, the anti-vibration sleeve 14 is not limited to the shapes or structures listed above, and can be adaptively adjusted according to the shape of the inner cavity.

[0056] In order to ensure the sealing performance of the connection between the main body 10 and the cover body 11 , the connection between the main body 10 and the cover body 11 is sealed by a sealing ring 15 .

[0057] Specifically, a sealing groove 100 surrounding an opening is provided on the body 10 , the sealing ring 15 is adapted to and embedded in the sealing groove 100 , and the bottom of the cover 11 is pressed onto the sealing ring 15 .

[0058] The specific material and type of the sealing ring 15 can be selected according to actual needs, as long as it can achieve the required sealing effect, and there is no specific limitation in the embodiments of the present invention.

[0059] In actual application, after the cover 11 covers the opening of the main body 10, its bottom is pressed against the sealing ring 15, and the sealing ring 15 undergoes elastic deformation so that its two sides are elastically pressed against the main body 10 and the cover 11 respectively, thereby achieving a sealing effect.

[0060] In order to lock the cover 11 and the body 10, refer to Figure 5 and Figure 6 The vacuum transfer device further includes a locking member 16 for locking the main body 10 and the cover body 11 .

[0061] Specifically, the locking member 16 includes a connecting portion 160 and a locking portion 161; wherein the locking portion 161 is connected to the main body 10 through the connecting portion 160, and the locking portion 161 is arranged close to the opening of the main body 10; the locking portion 161 can move toward or away from the opening to tighten or loosen the cover body 11.

[0062] When installing the cover body 11, the cover body 11 is covered on the opening of the main body 10, the bottom of the cover body 11 is pressed onto the sealing ring 15, and then the locking portion 161 is moved toward the opening and pressed against the top of the cover body 11 to lock the cover body 11 and the main body 10; when removing the cover body 11, the locking portion 161 is moved away from the opening and misaligned with the cover body 11 to separate the cover body 11 from the main body 10.

[0063] Specifically, one end of the locking portion 161 is rotatably connected to the connecting portion 160, and the other end opposite thereto can rotate around the connecting portion 160; when installing the cover body 11, the cover body 11 is crimped onto the sealing ring 15, and the other end of the locking portion 161 is rotated relative to the connecting portion 160 to the top of the cover body 11 to press the cover body 11, thereby locking the cover body 11 on the main body 10; when disassembling the cover body 11, the other end of the locking portion 161 is rotated relative to the connecting portion 160 until it is misaligned with the cover body 11, thereby separating the cover body 11 from the main body 10.

[0064] Specifically, the locking portion 161 is configured as a plate-like structure of metal material; the connecting portion 160 can be a bolt, the locking portion 161 is sleeved on the rod of the bolt, and the large end of the bolt is pressed against the side of the locking portion 161 away from the body 10. In this way, when installing the cover 11, the other end of the locking portion 161 relative to the connecting portion 160 is rotated to the top of the cover 11, and then the bolt is screwed so that the large end of the bolt presses the locking portion 161, and the locking portion 161 presses the cover 11; when disassembling the cover 11, the bolt is screwed so that the large end of the bolt loosens the locking portion 161, and then the locking portion 161 is rotated to make it misaligned with the cover 11, so as to separate the cover 11 from the body 10.

[0065] Specifically, the large end of the bolt can be configured as a handle to facilitate the screwing of the bolt.

[0066] The locking member 16 of the above-mentioned structure can realize convenient and quick disassembly and assembly of the cover body 11 and the main body 10, but it can be understood that the locking member 16 includes but is not limited to the structures or forms listed above, and other structures or forms of locking members 16 can be applied as long as they can realize locking of the cover body 11 and the main body 10.

[0067] The vacuum transfer system provided by the present invention is described below. The vacuum transfer system described below and the vacuum transfer device described above can be referred to each other.

[0068] Reference Figure 1-Figure 3 , a vacuum transfer system comprises the above-mentioned vacuum transfer device.

[0069] The vacuum transfer system further includes a vacuum pump 20 and a vacuum detection component 30, wherein the vacuum pump 20 is connected to the first air hole 12, and the vacuum detection component 30 is connected to the second air hole 13. The inner cavity of the body 10 can be evacuated by the vacuum pump 20, and the vacuum degree in the inner cavity can be monitored in real time by the vacuum detection component 30.

[0070] In a specific embodiment of the present invention, the vacuum pump 20 is connected to the first connector 120 via a first hose 40 , and a second valve 400 is connected to the first hose 40 , so that the on / off of the first hose 40 can be controlled by the second valve 400 .

[0071] In a specific embodiment of the utility model, one end of the first hose 40 is connected to the first joint 120 through an elastic plug-in joint, and the other end is connected to a tee. The pipeline of the vacuum pump 20 itself is connected to one interface of the tee through the elastic plug-in joint, so that the vacuum pump 20 is connected to the first air hole 12, and the second valve 400 is connected to the other interface of the tee. Through the quick plug-in joint, the first hose 40 and the first joint 120, the first hose 40 and the vacuum pump 20 can be conveniently and quickly disassembled.

[0072] In a specific embodiment of the present invention, the vacuum detection component 30 is connected to the second joint 130 via the second hose 50 .

[0073] In a specific embodiment of the present invention, the second hose 50 is connected to the second connector 130 via an elastic plug-in connector, so that the second hose 50 and the second connector 130 can be conveniently and quickly assembled and disassembled.

[0074] In a specific embodiment of the present invention, the vacuum detection component 30 includes any device capable of detecting the vacuum degree, such as a vacuum gauge and a digital vacuum gauge.

[0075] It should be pointed out that the vacuum transfer device and vacuum transfer system provided in the embodiments of the utility model can be applied to the vacuum transfer of the sample stage of the X-ray photoelectron spectrometer (XPS), but are not limited to the vacuum transfer of the XPS sample stage. The utility model does not exclude the application of the above-mentioned vacuum transfer device and vacuum transfer system in other detection equipment.

[0076] The novelty of the utility model is that during the sample transfer process, the vacuum degree in the inner cavity can be monitored in real time through the vacuum detection component 30, so as to determine whether there is a leakage problem. If the vacuum degree in the inner cavity gradually decreases, it indicates that there is a leakage problem. The staff can promptly discover the problem and find the cause of the leakage, so as to adjust the vacuum degree in time, ensuring that the sample stage is always at a preset vacuum degree during the transfer process, thereby ensuring the accuracy of the element analysis on the sample surface.

[0077] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A vacuum transfer device, It is characterized in that It can be applied to the vacuum transfer of the sample stage of the X-ray photoelectron spectrometer. The transfer device includes: A body (10) is provided with an inner cavity and an opening communicating with the inner cavity; A cover body (11) is detachably covered on the opening, and the connection between the cover body (11) and the body (10) is sealed; A first air hole (12), which is in communication with the inner cavity and can be opened and closed, and is suitable for connecting to a vacuum pump (20); The second air hole (13) is communicated with the inner cavity and is suitable for connecting a vacuum detection component (30).

2. The vacuum transfer device according to claim 1, It is characterized in that It also includes an anti-vibration sleeve (14) embedded in the inner cavity.

3. The vacuum transfer device according to claim 1, It is characterized in that The first air hole (12) and / or the second air hole (13) are arranged on the cover body (11).

4. The vacuum transfer device according to claim 3, It is characterized in that The first air hole (12) is fixedly connected to a first joint (120), and the first joint (120) is connected to a first valve (121); and the second air hole (13) is fixedly connected to a second joint (130).

5. The vacuum transfer device according to claim 1, It is characterized in that The connection between the cover body (11) and the main body (10) is sealed by a sealing ring (15).

6. The vacuum transfer device according to claim 5, It is characterized in that The main body (10) is provided with a sealing groove (100) surrounding the opening, the sealing ring (15) is embedded in the sealing groove (100), and the bottom of the cover body (11) is pressed onto the sealing ring (15).

7. The vacuum transfer device according to any one of claims 1 to 6, It is characterized in that It also includes a locking member (16) for locking the main body (10) and the cover body (11).

8. The vacuum transfer device according to claim 7, It is characterized in that The locking member (16) comprises a connecting portion (160) and a locking portion (161); The locking portion (161) is connected to the body (10) via the connecting portion (160), and the locking portion (161) is arranged close to the opening; The locking portion (161) can move toward or away from the opening to tighten or loosen the cover body (11).

9. A vacuum transfer system, It is characterized in that Comprising the vacuum transfer device as described in any one of claims 1-8.

10. The vacuum transfer system according to claim 9, It is characterized in that Also includes a vacuum pump (20) and a vacuum detection component (30); The vacuum pump (20) is connected to the first air hole (12) of the vacuum transfer device; The vacuum detection component (30) is connected to the second air hole (13) of the vacuum transfer device.

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