Scanning electron microscope sample stage for nonmetallic inclusion sample detection

Abstract

The utility model discloses a scanning electron microscope sample stage for non-metallic inclusion sample detection, and belongs to the technical field of scanning electron microscope detection. Comprising a supporting unit and a sample clamping unit, the supporting unit comprises a supporting column and a cylindrical platform fixedly connected to the upper portion of the supporting column. During detection, the supporting column is connected with a scanning electron microscope sample chamber in a matching manner; the sample clamping unit comprises a rectangular clamp base fixedly connected to the cylindrical platform, the two opposite sides of the rectangular clamp base are fixedly connected with a plurality of springs and one ends of connecting rods respectively, and the other ends of the springs and the other ends of the connecting rods are fixedly connected with clamping plates; and the spring and the connecting rod are connected with a force loading button for adjusting the force of the spring. According to the utility model, the non-metallic inclusion sample can be directly detected, the mounting process is canceled, and the pollutant source in the sample polishing process is reduced. The detection surface of the sample is always kept horizontal and is kept vertical to the lens of the scanning electron microscope, so that the observation is more accurate.

Description

Technical Field

[0001] The utility model belongs to the technical field of scanning electron microscope detection, and relates to a scanning electron microscope sample stage used for detecting non-metallic inclusion samples. Background Art

[0002] Non-metallic inclusions exist in steel as independent phases, which destroy the continuity of the steel matrix, increase the inhomogeneity of the organization, and seriously affect the various properties of the steel, thereby affecting the service life of the parts. Therefore, the detection of non-metallic inclusions is particularly important. The energy spectrometer of the scanning electron microscope can quickly detect the elemental composition of the inclusions, and then use the Aztec Feature particle analysis software for statistics, which can realize the rapid detection and grade assessment of non-metallic inclusions. Compared with the traditional metallographic method, which requires comparison with standard spectra and identification of non-metallic inclusions by shape, size and other characteristics, the use of scanning electron microscopes and Aztec Feature particle analysis is faster and more convenient. At the same time, the use of energy spectrometers to detect chemical composition can directly identify the type of inclusions, avoiding misjudgment of non-metallic inclusions.

[0003] However, the use of scanning electron microscope and Aztec Feature particle analysis and detection has high requirements for non-metallic inclusion detection samples. First, the sample needs to be mounted to ensure that the sample is horizontal when placed, and then polished and sampled. Since mounting cannot make the sample observation surface and the mounting material completely in the same plane, it is difficult to keep the sample observation surface clean during the subsequent polishing process. If the mounting method is not adopted, the inclusion sample observation surface cannot be kept horizontally aligned with the scanning electron microscope lens. The Chinese utility model patent with application number 202220421445.7 discloses a "steel plate scanning electron microscope sample clamping device", including two relatively arranged clamping blocks, bolts and nuts; the upper part of the clamping block is a sample clamping part, and the lower part is a connecting part; the sample is placed between the sample clamping parts of the two clamping blocks, and a through hole is opened in the connecting part. One end of the bolt passes through the through hole on the two clamping blocks and is locked with a nut; the material of the clamping block is copper. The clamping force between the clamping blocks cannot be flexibly adjusted, and the structure cannot ensure that the observation surface of the inclusion sample remains horizontally aligned with the lens of the scanning electron microscope. Utility Model Content

[0004] The utility model aims to solve the technical problem in the prior art that when non-metallic inclusions are detected by a scanning electron microscope, mounting is not adopted, that is, it is impossible to ensure that the observation surface remains horizontally aligned with the lens of the scanning electron microscope, and to provide a scanning electron microscope sample stage for non-metallic inclusion sample detection.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] In the first aspect, the utility model provides a scanning electron microscope sample stage for non-metallic inclusion sample detection, including a support unit and a sample clamping unit; the support unit includes a support column and a cylindrical platform fixedly connected to the upper part thereof; during detection, the support column is cooperatively connected in the scanning electron microscope sample chamber; the sample clamping unit includes a rectangular clamp base fixedly connected to the cylindrical platform, and the clamp base has a plurality of springs and one end of a connecting rod fixedly connected on opposite sides thereof, and the other end of the spring and the connecting rod is fixedly connected to a clamping plate; the spring and the connecting rod are connected to a force loading button for adjusting the spring force.

[0007] The utility model is further improved in that:

[0008] Guide rails are arranged on the upper surfaces of the other two sides of the clamp base adjacent to the two sides of the connecting spring and the connecting rod, and the guide rails are slidably connected with the clamping plate.

[0009] The guide rail is a double-layer guide rail.

[0010] The surface of the clamping plate in contact with the sample is serrated.

[0011] The spring and the connecting rod are a spring nesting structure.

[0012] A spring and a connecting rod are respectively fixedly connected in the middle of two opposite sides of the clamp base, and the springs and the connecting rods on both sides are coaxial.

[0013] The fixture base is fixedly connected to the cylindrical platform by bolts.

[0014] The four corners of the clamp base are all provided with bolts to be fixedly connected with the cylindrical platform.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] The utility model discloses a scanning electron microscope sample stage for non-metallic inclusion sample detection. The detection sample is fixed by a clamping plate connected with a spring and a connecting rod, and the spring and the connecting rod are connected with a force loading button, so that the utility model can clamp various irregular types of samples. The elastic force of the spring greatly improves the force applied when clamping the sample, and can realize direct detection of non-metallic inclusion samples, eliminate the sample mounting process, and reduce the source of pollutants in the sample polishing process. The support part of the device and the sample clamping part are closely matched to ensure that the detection surface of the sample is always kept horizontal and vertical to the lens of the scanning electron microscope, so that the observation is more accurate.

[0017] Furthermore, the serrated shape of the clamping plate can increase the friction force so that the sample is not easy to fall off.

[0018] Furthermore, a double-layer guide rail slidably connected to the clamping plate is provided on the clamp base, which can prevent the clamping plate from deviating left and right and causing failure of sample clamping. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a front view of a scanning electron microscope sample stage used for non-metallic inclusion sample detection in the utility model;

[0021] Figure 2 The utility model is a top view of a scanning electron microscope sample stage used for non-metallic inclusion sample detection.

[0022] Among them: 1-support column; 2-cylindrical platform; 3-fastening bolts; 4-spring and connecting rod; 5-clamping plate; 6-force loading knob; 7-guide rail; 8-clamp base. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0026] In the description of the embodiments of the present utility model, it should be noted that if the terms "upper", "lower", "horizontal", "inner", etc. indicate an orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, it is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0027] In addition, if the term "horizontal" appears, it does not mean that the component must be absolutely horizontal, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", which does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of the embodiments of the present utility model, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0029] The utility model is further described in detail below with reference to the accompanying drawings:

[0030] See also Figure 1 The embodiment of the utility model discloses a scanning electron microscope sample stage for non-metallic inclusion sample detection, including a support unit and a sample clamping unit; the support unit includes a support column 1 and a cylindrical platform 2 fixedly connected to the upper part thereof; during detection, the support column 1 is connected in cooperation with the scanning electron microscope sample chamber; the sample clamping unit includes a rectangular clamp base 8 fixedly connected to the cylindrical platform 2 by bolts, and the four corners of the clamp base 8 are provided with bolts fixedly connected to the cylindrical platform 2. The detection sample is fixed by a clamping plate connected with a spring and a connecting rod, and the spring and the connecting rod are connected with a force loading button, so that the utility model can clamp various irregular types of samples, and the elastic force of the spring greatly increases the force applied when clamping the sample, so that the direct detection of the non-metallic inclusion sample can be realized, the sample mounting process is eliminated, and the source of pollutants in the sample polishing process is reduced. The support part and the sample clamping part of the device are closely matched to ensure that the detection surface of the sample is always kept horizontal and vertical to the lens of the scanning electron microscope, so that the observation is more accurate.

[0031] See also Figure 2 , one end of a spring and a connecting rod 4 are fixedly connected to the two opposite sides of the clamp base 8, and the other end of the spring and the connecting rod 4 is fixedly connected to a clamping plate 5, and the springs and the connecting rod 4 on both sides are coaxial; the surface of the clamping plate 5 in contact with the sample is serrated, and the serrated shape of the clamping plate can increase the friction so that the sample is not easy to fall off; the upper surface of the other two sides of the clamp base 8 adjacent to the two sides of the connecting spring and the connecting rod 4 is provided with a guide rail 7, and the guide rail 7 is slidably connected to the clamping plate 5. The guide rail 7 is a double-layer guide rail, which can prevent the clamping plate from deviating left and right and causing the sample clamping failure. The spring and the connecting rod 4 are connected to a force loading button 6 for adjusting the spring force. The spring and the connecting rod 4 are a spring nesting structure.

[0032] The working process of the utility model is as follows:

[0033] Step 1, opening the sample chamber of the scanning electron microscope and installing the scanning electron microscope sample stage disclosed in the utility model;

[0034] Step 2: Loosen the clamping plate 5 by rotating the force loading knobs 6 on both sides of the clamp base 8, put the non-metallic inclusion test sample in the middle of the clamping plate 5, and continuously apply force to the spring and the connecting rod 4 by rotating the force loading knobs 6 on both sides, so that the sample is clamped;

[0035] Step 3: Continuously adjust the sample to keep its testing surface level;

[0036] Step 4: Close the sample chamber and evacuate it, adjust the lens position of the scanning electron microscope so that the lens is aligned with the sample detection surface, and start detection.

[0037] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A scanning electron microscope sample stage for non-metallic inclusion sample detection, characterized in that: The invention comprises a support unit and a sample clamping unit; the support unit comprises a support column (1) and a cylindrical platform (2) fixedly connected to the upper part thereof; during detection, the support column (1) is connected in cooperation with the sample chamber of a scanning electron microscope; the sample clamping unit comprises a rectangular clamp base (8) fixedly connected to the cylindrical platform (2), and the clamp base (8) is fixedly connected to one end of a plurality of springs and a connecting rod (4) on opposite sides thereof, and the other end of the spring and the connecting rod (4) is fixedly connected to a clamping plate (5); the spring and the connecting rod (4) are connected to a force loading button (6) for adjusting the spring force.

2. The scanning electron microscope sample stage for non-metallic inclusion sample detection according to claim 1, characterized in that: Guide rails (7) are provided on the upper surfaces of the other two sides of the clamp base (8) adjacent to the two sides of the connecting spring and the connecting rod (4), and the guide rails (7) are slidably connected to the clamping plate (5).

3. The scanning electron microscope sample stage for non-metallic inclusion sample detection according to claim 2, characterized in that: The guide rail (7) is a double-layer guide rail.

4. The scanning electron microscope sample stage for non-metallic inclusion sample detection according to claim 1, characterized in that: The surface of the clamping plate (5) in contact with the sample is serrated.

5. The scanning electron microscope sample stage for non-metallic inclusion sample detection according to claim 1, characterized in that: The spring and the connecting rod (4) are a spring nesting structure.

6. The scanning electron microscope sample stage for non-metallic inclusion sample detection according to claim 1, characterized in that: A spring and a connecting rod (4) are respectively fixedly connected in the middle of two opposite sides of the clamp base (8), and the springs and connecting rod (4) on both sides are coaxial.

7. The scanning electron microscope sample stage for non-metallic inclusion sample detection according to claim 1, characterized in that: The clamp base (8) is fixedly connected to the cylindrical platform (2) via bolts.

8. The scanning electron microscope sample stage for non-metallic inclusion sample detection according to claim 7, characterized in that: The four corners of the clamp base (8) are provided with bolts for fixed connection with the cylindrical platform (2).

Images