Demolding roller

Abstract

The utility model discloses a demoulding roller which comprises a holding rod, a roller body, a connecting piece for connecting the holding rod and the body, and an air extractor, the air extractor comprises an air inlet, an air outlet and a cavity for communicating the air inlet and the air outlet, a plurality of adsorption hole units are arranged on the roller body, and each adsorption hole unit comprises a plurality of adsorption holes. And a first ventilation pipeline communicated with the adsorption holes and the air outlet is arranged in the roller body. According to the utility model, the flexible material can be separated from the template by rolling the roller body, so that the demoulding operation is simplified, the demoulding efficiency is improved, the uniformity of the demoulding force and the demoulding angle is ensured, and the personal error caused by tearing and demoulding by hands is avoided; the portable pen container is light and handy in overall structure, convenient to take and carry and capable of being suitable for various application scenes.

Description

Technical Field

[0001] The utility model belongs to the technical field of film stripping devices, and in particular relates to a film stripping roller. Background Art

[0002] In the micro-nano imprinting industry, manual demolding is common in both R&D experiments and production. The template and target structure material are separated by manual tearing. Especially for wafer-sized experimental samples, due to their small size and small number, automated demolding equipment is not suitable. At the same time, purely manual demolding methods are prone to uneven demolding force and demolding angle, which is not only inconvenient to operate, but also prone to human errors.

[0003] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0004] The utility model aims to provide a film stripping roller, which can simply and conveniently complete the film stripping operation, improve the uniformity of film stripping, reduce human errors, and is suitable for a variety of application scenarios.

[0005] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0006] A film stripping roller, comprising a gripping rod, a roller body, a connecting piece connecting the gripping rod and the body, and an exhaust device, wherein the exhaust device comprises an air inlet, an air outlet and a chamber communicating with the air inlet and the air outlet, the roller body is provided with a plurality of adsorption hole units, the adsorption hole units comprise a plurality of adsorption holes, and a first ventilation pipeline communicating with the adsorption holes and the air outlet is provided inside the roller body.

[0007] In one or more embodiments of the present invention, the adsorption hole unit includes a plurality of adsorption holes, and the adsorption holes are distributed on the roller body at intervals along the axial direction of the roller body.

[0008] In one or more embodiments of the present invention, a plurality of adsorption hole units are provided on the roller body, and the adsorption hole units are distributed on the roller body at intervals along the circumferential direction.

[0009] In one or more embodiments of the present invention, the opening angle corresponding to the adsorption hole unit distribution area is less than or equal to 360°.

[0010] In one or more embodiments of the present invention, the adsorption holes are distributed in an array or a honeycomb shape.

[0011] In one or more embodiments of the present invention, the film stripping roller also includes a power supply mechanism disposed in the gripping rod, the air suction device is disposed in the gripping rod and electrically connected to the power supply mechanism, and the air outlet of the air suction device is connected to the outside.

[0012] In one or more embodiments of the present invention, a second ventilation pipeline connected to the air inlet is provided in the handle, and a third ventilation pipeline connected to the first ventilation pipeline and the second ventilation pipeline is provided in the connector.

[0013] In one or more embodiments of the present invention, the third ventilation pipeline includes a first air pipe connecting the first end of the first ventilation pipeline and the second ventilation pipeline; and / or,

[0014] The third ventilation pipeline includes a second air pipe connected to the second end of the first ventilation pipeline and the second ventilation pipeline; and / or,

[0015] The grip is provided with a control button.

[0016] In one or more embodiments of the present invention, a first rotating shaft and a second rotating shaft are respectively provided at both ends of the roller body, and the connecting member includes a first connecting part connected to the grip rod, a second connecting part connecting the first rotating shaft and the first connecting part, and a third connecting part connecting the second rotating shaft and the first connecting part.

[0017] In one or more embodiments of the present invention, a first bending portion is provided between the first connecting portion and the second connecting portion, and a second bending portion is provided between the first connecting portion and the third connecting portion.

[0018] Compared with the prior art, the utility model has the following beneficial effects:

[0019] The utility model can separate the flexible material from the template by rolling the roller body, simplifying the demolding operation, improving the demolding efficiency, ensuring the uniformity of the demolding force and the demolding angle, and avoiding the human error caused by manual demolding; at the same time, the overall structure of the demolding roller is light, easy to take and carry, and can adapt to a variety of application scenarios;

[0020] The film stripping roller in this embodiment has a simple structure, is easy to produce, and is conducive to promotion and development. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 This is a schematic diagram of the three-dimensional structure of a film stripping roller in one embodiment of the utility model;

[0023] Figure 2 This is a schematic diagram of film stripping of a small-sized wafer in one embodiment of the utility model;

[0024] Figure 3 It is a schematic diagram of the top view of the film stripping roller in one embodiment of the utility model;

[0025] Figure 4 for Figure 3 Schematic diagram of the cross-sectional structure at AA in the middle;

[0026] Figure 5 for Figure 3 Schematic diagram of the cross-sectional structure at the middle BB;

[0027] Figure 6 It is a bottom view structural schematic diagram of a roller body in one embodiment of the utility model. DETAILED DESCRIPTION

[0028] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0029] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0030] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0031] The technical solution of the present utility model will be described below in conjunction with the accompanying drawings.

[0032] Reference Figure 1 to Figure 4 As shown, the film stripping roller in this embodiment includes a gripping rod 1, a roller body 2, a connecting piece 3 connecting the gripping rod 1 and the body, and an air extraction device 4, the air extraction device 4 includes an air inlet 41, an air outlet 42 and a chamber (not shown) connecting the air inlet 41 and the air outlet 42, the roller body 2 is provided with a plurality of adsorption hole units, the adsorption hole units include a plurality of adsorption holes 21, and the roller body 2 is provided with a first ventilation pipeline 22 connected to the adsorption holes 21 and the air outlet 42. For example, refer to Figure 2 As shown, in the specific application scenario of stripping small-sized wafers, by aligning the adsorption hole 21 of the stripping roller in this embodiment with the edge of the flexible material 9 and closely attaching to the flexible material 9, a negative pressure is formed at the adsorption hole 21 through the air extraction device 4, and the gripper 1 is dragged by one hand or two hands or other mechanical structures to drive the roller body 2 to roll on the flexible material 9, so that the flexible material 9 can be separated from the template 8 and the stripping operation is completed. Not only does it simplify the stripping operation and improve the stripping efficiency, but it also ensures the uniformity of the stripping force and the stripping angle, avoiding the human error caused by hand-tearing stripping; and it can adapt to a variety of application scenarios, and is not affected by the size and number of the structure to be stripped.

[0033] The air extraction device 4 may be a device that can form negative pressure, such as an air pump or a vacuum pump.

[0034] Specifically, in order to ensure uniformity of demolding force and demolding angle during the process of adsorbing sufficiently long flexible materials, refer to Figure 4 As shown, the adsorption hole unit in this embodiment includes a plurality of adsorption holes 21, and the adsorption holes 21 are distributed on the roller body 2 at intervals along the axial direction of the roller body 2. Among them, the adsorption holes 21 can be evenly distributed along the axial direction or unevenly distributed along the axial direction. Compared with the solution of unevenly distributed along the axial direction, if the adsorption holes 21 are evenly distributed along the axial direction, the uniformity of the demolding force and the demolding angle can be more effectively ensured.

[0035] It should be noted that, before demolding, the angle of the roller body 2 needs to be adjusted so that the surface of the roller body 2 provided with the adsorption hole units is aligned with the flexible material, so as to better complete the demolding operation.

[0036] Further, refer to Figure 5 As shown, the roller body 2 in this embodiment is provided with a plurality of adsorption hole units, which are distributed at intervals along the circumferential direction on the roller body 2. According to this design, the distribution area of ​​the adsorption hole units can be expanded, so that a larger area on the roller body 2 can be formed with negative pressure by the air suction device 4, thereby adsorbing the flexible material on the roller body 2 more firmly and stably. It can be understood that when the adsorption hole unit has only one adsorption hole 21, there is a circle of adsorption holes 21 distributed along the axial direction on the roller body 2; when the adsorption hole unit has multiple adsorption holes 21, there are multiple circles of adsorption holes 21 distributed along the axial direction on the roller body 2.

[0037] Specifically, the adsorption hole units can be evenly distributed along the circumference or unevenly distributed along the circumference. Compared with the solution of uneven distribution along the circumference, if the adsorption hole units are evenly distributed along the circumference, the uniformity of the demolding force and the demolding angle can be more effectively ensured.

[0038] The opening angle corresponding to the adsorption hole unit distribution area in this embodiment is less than or equal to 360°. Figure 5 As shown, the adsorption hole unit distribution area in this embodiment (i.e., the adsorption hole unit distribution area Figure 5 The opening angle α corresponding to the area (the area framed by the dotted line) is approximately 80°. Preferably, in another embodiment, the opening angle corresponding to the adsorption hole unit distribution area is 360°. Compared with the scheme in which the opening angle corresponding to the adsorption hole unit distribution area is 80°, when the opening angle corresponding to the adsorption hole unit distribution area is 360°, there is no need to adjust the angle of the roller body 2 before demolding, and the roller body 2 can be directly placed on the flexible material, and the demolding operation can be completed by rolling the roller body 2, which further simplifies the demolding operation and improves the demolding efficiency. It can be understood that when the opening angle corresponding to the adsorption hole unit distribution area is 360°, when the adsorption hole unit has only one adsorption hole 21, a circle of adsorption holes 21 is distributed axially on the roller body 2; when the adsorption hole unit has multiple adsorption holes 21, multiple circles of adsorption holes 21 are distributed axially on the roller body 2.

[0039] Preferably, in order to ensure the uniformity of the stripping force and the stripping angle, refer to Figure 6 As shown, the adsorption holes 21 in this embodiment are distributed in an array. Of course, the present application is not limited thereto, and the adsorption holes 21 in other embodiments may be distributed in a honeycomb shape.

[0040] Reference Figure 4 , Figure 5 As shown, the film stripping roller in this embodiment also includes a power supply mechanism 5 arranged in the grip 1, the air suction device 4 is arranged in the grip 1 and electrically connected to the power supply mechanism 5, and the air outlet 42 of the air suction device 4 is connected to the outside. According to this design, the air suction device 4 is powered by the power supply mechanism 5. After the air suction device 4 is started, air can enter from the adsorption hole 21, flow through the first ventilation pipe 22, then flow through the air inlet 41, and finally flow out from the air outlet 42 to form a negative pressure at the adsorption hole 21. The power supply mechanism 5 has three modes of charging or discharging or charging and discharging. When the air suction device 4 and the power supply mechanism 5 are both arranged in the grip 1, the overall structure of the film stripping roller is light, easy to pick up, easy to carry, and can adapt to a variety of application scenarios.

[0041] Of course, the present application is not limited to this. The vacuum device 4 can also be arranged on the outer wall of the handle 1, or on the connecting rod, or inside the roller body 2, or outside the handle 1, the connecting rod and the roller body 2. As long as a negative pressure is formed at the adsorption hole 21 through the vacuum device 4, the purpose of the present invention can be achieved without departing from the design concept and purpose of the present invention. Therefore, technicians in this field should understand that these technical solutions should all be within the protection scope of the present invention.

[0042] To activate or deactivate the suction device 4, refer to Figure 1 As shown, a control button 11 is provided on the handle 1 in this embodiment.

[0043] In order to connect the air inlet 41 of the air extraction device 4 to the first ventilation pipeline 22, refer to Figure 4 , Figure 5 As shown, in this embodiment, the handle 1 is provided with a second ventilation pipeline 6 connected to the air inlet 41, and the connecting member 3 is provided with a third ventilation pipeline 7 connected to the first ventilation pipeline 22 and the second ventilation pipeline 6.

[0044] Specifically, refer to Figure 4 As shown, the third ventilation pipeline 7 in this embodiment includes a first air pipe 71 connecting the first end of the first ventilation pipeline 22 and the second ventilation pipeline 6, and the third ventilation pipeline 7 includes a second air pipe 72 connecting the second end of the first ventilation pipeline 22 and the second ventilation pipeline 6. Of course, the present application is not limited to this. In other embodiments, the third ventilation pipeline 7 includes the first air pipe 71 connecting the first end of the first ventilation pipeline 22 and the second ventilation pipeline 6; or, the third ventilation pipeline 7 includes the second air pipe 72 connecting the second end of the first ventilation pipeline 22 and the second ventilation pipeline 6, both of which can achieve the effect of forming a negative pressure at the adsorption hole 21 after the air extraction device 4 passes through. Therefore, those skilled in the art should understand that these technical solutions should all be within the protection scope of the present utility model.

[0045] In order to connect the roller body 2 and the handle 1 through the connecting piece 3, refer to Figure 4 As shown, the roller body 2 in this embodiment is provided with a first rotating shaft 23 and a second rotating shaft 24 at both ends, and the connecting member 3 includes a first connecting portion 31 connected to the handle 1, a second connecting portion 32 connecting the first rotating shaft 23 and the first connecting portion 31, and a third connecting portion 33 connecting the second rotating shaft 24 and the first connecting portion 31. At the same time, a first bending portion 34 is provided between the first connecting portion 31 and the second connecting portion 32, and a second bending portion 35 is provided between the first connecting portion 31 and the third connecting portion 33. The first bending portion 34 and the second bending portion 35 are both arranged parallel to the axial direction of the roller body 2, and the length directions of the first bending portion 34 and the second bending portion 35 coincide.

[0046] Of course, the present application is not limited to this. In other embodiments, the connecting member 3 only includes a first connecting portion 31, a second connecting portion 32, and a third connecting portion 33. The second connecting portion 32 directly connects the first rotating shaft 23 and the first connecting portion 31, and the third connecting portion 33 directly connects the second rotating shaft 24 and the first connecting portion 31.

[0047] It can be seen from the above technical solutions that the utility model has the following beneficial effects:

[0048] The utility model can separate the flexible material from the template by rolling the roller body, simplifying the demolding operation, improving the demolding efficiency, ensuring the uniformity of the demolding force and the demolding angle, and avoiding the human error caused by manual demolding; at the same time, the overall structure of the demolding roller is light, easy to take and carry, and can adapt to a variety of application scenarios;

[0049] The film stripping roller in this embodiment has a simple structure, is easy to produce, and is conducive to promotion and development.

[0050] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0051] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A film stripping roller, It is characterized in that The demolding roller comprises a gripping rod (1), a roller body (2), a connecting piece (3) connecting the gripping rod (1) and the body, and an exhaust device (4); the exhaust device (4) comprises an air inlet (41), an air outlet (42), and a chamber communicating with the air inlet (41) and the air outlet (42); a plurality of adsorption hole units are provided on the roller body (2); the adsorption hole units comprise a plurality of adsorption holes (21); and a first ventilation pipeline (22) communicating with the adsorption holes (21) and the air outlet (42) is provided inside the roller body (2).

2. The stripping roller according to claim 1, It is characterized in that The adsorption hole unit comprises a plurality of adsorption holes (21), and the adsorption holes (21) are distributed on the roller body (2) at intervals along the axial direction of the roller body (2).

3. The stripping roller according to claim 1, It is characterized in that The roller body (2) is provided with a plurality of adsorption hole units, and the adsorption hole units are distributed on the roller body (2) at intervals along the circumferential direction.

4. The stripping roller according to claim 3, It is characterized in that The opening angle corresponding to the adsorption hole unit distribution area is less than or equal to 360°.

5. The stripping roller according to claim 1, It is characterized in that The adsorption holes (21) are distributed in an array or in a honeycomb shape.

6. The stripping roller according to claim 1, It is characterized in that The film stripping roller also includes a power supply mechanism (5) arranged in the gripping rod (1), the air extraction device (4) is arranged in the gripping rod (1) and is electrically connected to the power supply mechanism (5), and the air outlet (42) of the air extraction device (4) is connected to the outside.

7. The stripping roller according to claim 6, It is characterized in that The grip (1) is provided with a second ventilation pipeline (6) connected to the air inlet (41), and the connector (3) is provided with a third ventilation pipeline (7) connected to the first ventilation pipeline (22) and the second ventilation pipeline (6).

8. The stripping roller according to claim 7, It is characterized in that The third ventilation pipeline (7) comprises a first air pipe (71) connected to the first end of the first ventilation pipeline (22) and the second ventilation pipeline (6); and / or, The third ventilation pipeline (7) comprises a second air pipe (72) connected to the second end of the first ventilation pipeline (22) and the second ventilation pipeline (6); and / or, The handle (1) is provided with a control button (11).

9. The stripping roller according to claim 1, It is characterized in that A first rotating shaft (23) and a second rotating shaft (24) are respectively provided at both ends of the roller body (2); the connecting member (3) comprises a first connecting portion (31) connected to the gripping rod (1), a second connecting portion (32) connecting the first rotating shaft (23) and the first connecting portion (31), and a third connecting portion (33) connecting the second rotating shaft (24) and the first connecting portion (31).

10. The stripping roller according to claim 9, It is characterized in that A first bending portion (34) is provided between the first connecting portion (31) and the second connecting portion (32), and a second bending portion (35) is provided between the first connecting portion (31) and the third connecting portion (33).

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