Heating equipment of chemical reagent temperature control device

Abstract

Heating equipment of a chemical reagent temperature control device comprises a support, a heat exchanger and a temperature controller, the support comprises an upper layer and a lower layer, the temperature controller is arranged on the upper layer, the heat exchanger is arranged on the lower layer, the temperature controller comprises a controller body and a plurality of temperature sensors, and the heat exchanger comprises a fixing plate, a partition plate and a plurality of clamping plates. Each clamping plate comprises an inner plate and an outer plate, a plurality of S-shaped water grooves are formed in the top end of each inner plate at intervals, the bottom end of each inner plate is arranged on the corresponding partition plate, a containing groove and a wire groove are formed in the bottom end of each outer plate, a refrigeration sheet is detachably installed in each containing groove, and a plurality of through holes and wire grooves are formed in each partition plate at equal intervals. Heating devices are arranged in the multiple through holes, and electric wires of the heating devices are electrically connected with the power interface through the wire grooves. Through the heating device arranged in the heat exchanger and the temperature sensor arranged on the chemical liquid tank, the temperature of the circulating liquid entering the chemical liquid tank is effectively controlled.

Description

Technical Field

[0001] The utility model relates to a temperature control device, in particular to heating equipment of a chemical reagent temperature control device. Background Art

[0002] Most of the chemical liquids used in industry need to be used at a set temperature to achieve the corresponding effect. Thermostat is a temperature control device widely used in the field of modern science and technology. It uses the characteristics of thermocouples, thermal resistors or semiconductor materials to control the working state of the heater or cooler by changing the current, so as to achieve precise control of the temperature of chemical liquids. Chemical liquid thermostats are widely used in semiconductor manufacturing fields such as wafers and chips. However, if the distance of the chemical liquid is too long during the transportation process after leaving the exchanger, it is likely that the temperature of the chemical liquid will change.

[0003] At present, a Chinese patent with the authorization announcement number CN218878235U discloses a heating device for a chemical reagent temperature control device, which belongs to the field of chemical liquid storage technology, including a work table and a heating belt, a liquid medicine box is arranged in the middle of the top of the work table, a stirrer is arranged on both sides of the top of the liquid medicine box, a partition is arranged between the inner walls of the liquid medicine box, and the liquid medicine box and the inner wall of the partition are provided with insulation materials and electric heating plates, a suction pump is arranged on both sides of the bottom of the work table, a discharge platform is arranged at the bottom of the suction pump, and a transfer elbow is arranged inside the discharge platform. The utility model can achieve sufficient constant temperature storage of the stored chemical liquid, constant temperature transportation of the circulating chemical liquid, and keep the temperature of the chemical liquid in use in accordance with the requirements to ensure industrial use by arranging components such as a stirrer, a discharge platform, a suction pump, a transfer elbow, a heating belt and a second temperature controller on a traditional chemical liquid constant temperature storage device.

[0004] The above-mentioned prior art solution has the following defects: in order to ensure the constant temperature of the chemical solution, the above-mentioned solution chooses to set a heating belt on the outer wall of the liquid delivery pipe, but in order to keep warm during the transportation process, a second temperature sensor is still required to be set on the heating belt to detect the temperature, and the cost and installation cost of the heating belt itself are very expensive. Utility Model Content

[0005] The utility model aims to provide a heating device for a chemical reagent temperature control device to solve the problems existing in the above-mentioned prior art.

[0006] The above technical objectives of the utility model are achieved through the following technical solutions:

[0007] A heating device for a chemical reagent temperature control device comprises a bracket, a heat exchanger and a temperature controller. The bracket comprises an upper layer and a lower layer. The upper layer is provided with a temperature controller, and the lower layer is provided with a heat exchanger. The heat exchanger and the temperature controller are electrically connected through wires.

[0008] By adopting the above technical solution, the outer shell of the heat exchanger will generate high heat when working. In order to avoid it damaging the temperature controller, they are set separately, and an insulating material is provided on the surface of the bracket to prevent the temperature from spreading along the bracket. The temperature controller itself also has a built-in heat dissipation device. The heat exchanger is not directly connected to the power supply, but is connected to the temperature controller and is indirectly controlled by the temperature controller.

[0009] In a further embodiment, the heat exchanger includes a fixed plate, a partition plate and a plurality of clamping plates, a power cord interface, a temperature sensor interface, a PCW inlet and outlet and a chemical solution inlet and outlet are provided on one side of the fixed plate, a partition plate is fixedly connected to the middle position of the other side of the fixed plate, and the partition plate is connected to the upper and lower clamping plate bolts.

[0010] By adopting the above technical solution, the heat exchanger is also connected to the chemical liquid tank, chemical pump and plant PCW system. The chemical pump pumps the chemical liquid tank into the heat exchanger, which contacts the cold end of the refrigeration plate, and the cooling water contacts the hot end to take away excess heat. The partition plate can serve as a support for the splint.

[0011] In a further embodiment, the splint includes an inner plate and an outer plate, a plurality of S-shaped water grooves are arranged at intervals on the top end of the inner plate, the bottom end of the inner plate is arranged on the partition plate, a receiving groove and a wire groove are arranged on the bottom end of the outer plate, a cooling plate is detachably installed in the receiving groove, the wires of the cooling plate are electrically connected to the power cord interface through the wire groove, and the plurality of splints are symmetrically arranged at the top and bottom ends of the partition plate.

[0012] By adopting the above technical solution and the design of the inner plate and the outer plate, the PFA infusion tube and the cooling tube can be fixed in their respective S-shaped water tanks. The PFA infusion tube and the cooling tube do not contact each other, and the cooling tube is mainly attached to the outer plate. Since the outer plate is in contact with the hot end of the refrigeration plate, the temperature is very high. The cooling tube mainly takes away this part of the heat. If the power of the refrigeration plate is not enough, more plywood can be stacked to increase the power. The cold end of the refrigeration plate is provided with protective cotton to prevent the accumulation of condensed water from affecting the operation of the equipment.

[0013] In a further embodiment, a plurality of through holes and wire grooves are arranged at equal intervals on the partition plate, a heating device is arranged in the plurality of through holes, and the wires of the heating device are electrically connected to the power interface through the wire groove.

[0014] By adopting the above technical solution, the temperature of the chemical liquid can be further regulated. When the temperature is too low, the temperature of the chemical liquid can be quickly adjusted by reducing the power of the refrigeration plate and turning on the heating device. The through holes on the dividing plate can ensure that the PFA infusion tubes in the upper and lower clamps can be affected. When a clamp is set on the clamp, a through hole for heating can be set on the clamp to avoid the S-shaped water tank.

[0015] In a further embodiment, the heating device comprises a resistance wire and a ceramic tube, the resistance wire is arranged in the ceramic tube, and the ceramic tube is detachably installed in the through hole.

[0016] By adopting the above technical solution, resistance heating is a very old and stable heating method. It has high heating efficiency, low cost, stable speed increase, and can be used with ceramic tube insulation. Correspondingly, the resistance wire can be wrapped with mica sheets and then set in a special metal casing to achieve the same effect.

[0017] In a further embodiment, the temperature controller includes a temperature controller body and a plurality of temperature sensors, and the temperature sensors are detachably connected to the temperature sensor interface on the fixing plate.

[0018] By adopting the above technical solution, PT100 is selected as the temperature sensor. Although the platinum resistor and the lead wire are not corrosion-resistant, they can be equipped with a sheath and a shielding wire. Glass glue can also be applied between the sheath and the shielding wire to further enhance the sealing. The accuracy of PT100 itself is very good, and the temperature measurement range also meets the needs of the semiconductor industry. Among the multiple temperature sensors, one is installed on the heat exchanger, and the other temperature sensor is set near the chemical tank. In this way, real-time adjustments can be made based on the data of the two temperature sensors. If the distance between the two ends is too long, more temperature sensors can be set on the PFA infusion pipe connected to the chemical tank.

[0019] In summary, the utility model has the following beneficial effects:

[0020] 1. By setting up multiple temperature sensors, the temperature change of the chemical liquid in the PFA infusion tube can be prevented from affecting the final use, thereby increasing the constant temperature of the device;

[0021] 2. Through the setting of cooling plate and S-shaped water tank, it can fully contact with PFA infusion tube, effectively reducing the temperature of chemical liquid, with fast speed and low energy consumption;

[0022] 3. Through the setting of resistance wire and ceramic tube, it can achieve the effect of quickly heating chemical liquid while achieving insulation. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1It is a schematic diagram of the overall structure of the utility model;

[0024] Figure 2 It is a schematic diagram of the structure of the heat exchanger in the utility model;

[0025] Figure 3 It is a schematic diagram used to reflect the positional relationship of the interfaces on the fixed plate in the utility model.

[0026] Figure 4 It is a schematic diagram of the structure inside the heating device in the utility model.

[0027] In the figure, 1, bracket; 11, upper layer; 12, lower layer; 2, heat exchanger; 21, fixing plate; 211, power cord interface; 212, sensor interface; 213, PCW inlet and outlet; 214, chemical solution inlet and outlet; 22, partition plate; 23, splint; 231, inner plate; 2311, cooling plate; 232, outer plate; 233, heating device; 2331, resistance wire; 2332, ceramic tube; 3, temperature controller; 31, controller body; 32, temperature sensor. DETAILED DESCRIPTION

[0028] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0029] The same parts are denoted by the same reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the attached Figure 1 In the description of this specification, the words "bottom" and "top", "inside" and "outside" refer to directions toward or away from a particular component geometry, respectively. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this specification, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0030] Example:

[0031] like Figure 1-4As shown, a heating device of a chemical reagent temperature control device includes a bracket 1, a heat exchanger 2 and a temperature controller 3, the bracket 1 includes an upper layer 11 and a lower layer 12, the upper layer 11 is provided with a temperature controller 3, the lower layer 12 is provided with a heat exchanger 2, the heat exchanger 2 and the temperature controller 3 are electrically connected through wires, the heat exchanger 2 includes a fixing plate 21, a partition plate 22 and a plurality of clamping plates 23, the partition plate 22 is provided with a plurality of through holes and wire grooves at equal intervals, a heating device 233 is provided in the plurality of through holes, the wires of the heating device 233 are electrically connected to a power interface through the wire groove, the heating device 233 includes a resistance wire 2331 and a ceramic tube 2332, the resistance wire 2331 is provided in the ceramic tube 2332, the The ceramic tube 2332 is detachably installed in the through hole. The temperature controller 3 includes a controller body 31 and multiple temperature sensors 32. The temperature sensor 32 is detachably connected to the sensor interface 212 on the fixed plate 21. In addition to the cooling device, a heating device 233 is also provided inside the heat exchanger 2. When the temperature sensor 32 arranged at the chemical liquid tank reads the temperature abnormality, the resistance wire 2331 in the ceramic tube 2332 can start heating immediately. This temperature adjustment method has a certain delay. The liquid in the chemical liquid tank needs to circulate for a longer period of time before use. However, compared with laying heating plates on the entire infusion tube, this cost is undoubtedly lower. If it is necessary to reduce the delay in temperature adjustment, more temperature sensors 32 can be added to the infusion tube.

[0032] like Figure 1-4 As shown, a power line interface 211, a sensor interface 212, a PCW inlet and outlet 213 and a chemical solution inlet and outlet 214 are provided on one side of the fixed plate 21, and a partition plate 22 is fixedly connected to the middle position of the other side of the fixed plate 21, and the partition plate 22 is bolted to a plurality of upper and lower clamping plates 23, and the clamping plate 23 includes an inner plate 231 and an outer plate 232, and a plurality of S-shaped water grooves are arranged at intervals at the top of the inner plate 231, and the bottom end of the inner plate 231 is arranged on the partition plate 22, and the bottom end of the outer plate 232 is provided with a receiving groove and a wire groove, and a cooling plate 23 can be detachably installed in the receiving groove. 11. The wires of the cooling plate 2311 are electrically connected to the power line interface 211 through the wire trough. The multiple clamps 23 are symmetrically arranged at the top and bottom of the dividing plate 22. The clamps 23 of the heat exchanger 2 are provided with multiple S-shaped water grooves. The PFA infusion pipe and the cooling water pipe are respectively arranged in the S-shaped water grooves. The PFA infusion pipe cools down by contacting with the cold end of the cooling plate 2311, and the cooling water pipe is responsible for taking away the heat output by the hot end of the cooling plate 2311 to the outer plate 232. The number of clamps 23 is not fixed, and more cooling plates 2311 can be installed according to the heat dissipation requirements, thereby improving the cooling power.

[0033] Specific implementation process:

[0034] Turn on the switch of the temperature controller 3, the temperature control device starts to operate, the chemical pump pumps out the chemical liquid from the chemical liquid tank, and transports it to the inside of the heat exchanger through the PFA infusion pipe. The cooling plate 2311 in the clamping plate 23 of the heat exchanger starts to work, and the temperature sensor 32 set in the heat exchanger detects the temperature and uploads it to the temperature controller 3. This is to ensure that the temperature of the chemical liquid remains at a constant value after leaving the heat exchanger. The PCW system transports cooling water to the inside of the heat exchanger through the cooling pipe, taking away the heat transferred to the hot end of the cooling plate 2311, until the chemical liquid is transported along the PFA infusion pipe. When the tube is recirculated to the chemical liquid tank, the temperature changes depending on the length of the PFA infusion tube. The temperature sensor 32 installed on the chemical liquid tank also uploads data to the temperature controller 3. If the temperature is lower than the critical point, the heating device 233 starts to operate, the resistance wire 2331 is heated, and the heat is transferred to the PFA infusion tube through the ceramic tube 2332. After circulating for a period of time, the temperature control device keeps the temperature of the chemical liquid constant within the rated temperature. When it needs to be shut down, turn off the temperature debugging function first. After the chemical liquid and PCW factory service circulate for half an hour, the temperature control device can be shut down normally.

[0035] In the embodiments disclosed in the present invention, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; "connect" can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meanings of the above terms in the embodiments disclosed in the present invention can be understood according to specific circumstances.

[0036] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A heating device for a chemical reagent temperature control device, comprising a bracket (1), a heat exchanger (2) and a temperature controller (3), characterized in that: The support (1) comprises an upper layer (11) and a lower layer (12); the upper layer (11) is provided with a temperature controller (3); the lower layer (12) is provided with a heat exchanger (2); the heat exchanger (2) and the temperature controller (3) are electrically connected via electric wires.

2. The heating device of a chemical reagent temperature control device according to claim 1, characterized in that: The heat exchanger (2) comprises a fixed plate (21), a partition plate (22) and a plurality of clamping plates (23); a power line interface (211), a sensor interface (212), a PCW inlet and outlet (213) and a chemical solution inlet and outlet (214) are provided on one side of the fixed plate (21); a partition plate (22) is fixedly connected to the middle position of the other side of the fixed plate (21); and the partition plate (22) is bolted to the upper and lower plurality of clamping plates (23).

3. The heating device of a chemical reagent temperature control device according to claim 2, characterized in that: The clamping plate (23) comprises an inner plate (231) and an outer plate (232); a plurality of S-shaped water grooves are arranged at intervals at the top end of the inner plate (231); the bottom end of the inner plate (231) is arranged on the partition plate (22); a receiving groove and a wire groove are arranged at the bottom end of the outer plate (232); a cooling plate (2311) is detachably installed in the receiving groove; the wires of the cooling plate (2311) are electrically connected to the power line interface (211) through the wire groove; and the plurality of clamping plates (23) are symmetrically arranged at the top end and the bottom end of the partition plate (22).

4. The heating device of a chemical reagent temperature control device according to claim 3, characterized in that: The partition plate (22) is provided with a plurality of through holes and wire grooves at equal intervals, a heating device (233) is provided in the plurality of through holes, and the wires of the heating device (233) are electrically connected to the power interface through the wire groove.

5. The heating device of a chemical reagent temperature control device according to claim 4, characterized in that: The heating device (233) comprises a resistance wire (2331) and a ceramic tube (2332); the resistance wire (2331) is arranged in the ceramic tube (2332); and the ceramic tube (2332) is detachably installed in the through hole.

6. The heating device of a chemical reagent temperature control device according to claim 1, characterized in that: The temperature controller (3) comprises a controller body (31) and a plurality of temperature sensors (32). The temperature sensor (32) is detachably connected to a sensor interface (212) on the fixing plate (21).

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