Telescopic conveying device and silicon wafer conveying system

Abstract

The utility model is applicable to the technical field of conveying equipment, and provides a telescopic conveying device and a silicon wafer conveying system, the telescopic conveying device comprises at least one group of conveying mechanisms, and each conveying mechanism comprises a telescopic conveying part, a telescopic driving assembly, a conveying driving assembly and a conveying belt; the telescopic driving assembly is connected with the telescopic conveying part and used for driving the telescopic conveying part to stretch out and draw back. The telescopic conveying part is connected with the conveying driving assembly through a conveying belt; the two sides of the input end of the conveying mechanism are provided with restoration guide strips, and the restoration guide strips are used for conducting position guiding restoration on the to-be-conveyed pieces entering from the input end. According to the conveying mechanism, the restoration guide strips are arranged on the two sides of the input end of the conveying mechanism, the articles are guided by the restoration guide strips to be restored when entering the conveying mechanism from the input end of the conveying mechanism, stability and accuracy of article conveying are guaranteed, and then smooth production of products is guaranteed.

Description

Technical Field

[0001] The utility model belongs to the technical field of conveying equipment, and in particular relates to a telescopic conveying device and a silicon wafer conveying system. Background Art

[0002] A conveying device refers to a device used to transport items to a specified location. For example, a conveying device can transport silicon wafers to a processing station for subsequent processing.

[0003] The conveying device usually includes a fixed conveying mechanism and a telescopic conveying structure. The telescopic conveying mechanism can be extended and retracted on the basis of the fixed conveying mechanism to extend the conveying length. It can be applied to more usage scenarios and meet various usage needs.

[0004] However, when the objects are moved onto the conveying device, positional deviation and / or angle deviation may occur easily, so that the objects may not be accurately transported to the designated location, thus affecting product production. Utility Model Content

[0005] The embodiment of the utility model provides a telescopic conveying device, which aims to solve the problem that objects are easily deviated when being moved to the conveying device, thereby affecting product production.

[0006] The embodiment of the utility model is implemented as follows: a telescopic conveying device includes at least one set of conveying mechanisms, each of which includes a telescopic conveying portion, a telescopic driving assembly, a conveying driving assembly and a conveyor belt;

[0007] The telescopic driving assembly is connected to the telescopic conveying part and is used to drive the telescopic conveying part to extend and retract;

[0008] The telescopic conveying part is connected to the conveying driving assembly through a conveyor belt;

[0009] Alignment guide bars are arranged on both sides of the input end of the conveying mechanism, and the alignment guide bars are used to guide and align the position of the workpiece to be conveyed entering from the input end.

[0010] Furthermore, at least a portion of the straightening guide bar gradually changes from thin to thick along a first direction, and the first direction is a transport direction of the conveyor belt.

[0011] Further, the conveying mechanism includes a bottom plate, a fixing plate, a supporting plate, a first passive wheel and a driving wheel;

[0012] The fixed plate, the supporting plate, the telescopic driving assembly and the conveying driving assembly are all arranged on the bottom plate;

[0013] The support plate is provided with a first passive wheel, the fixed plate is provided with a driving wheel, and the driving wheel is connected to the conveying driving assembly;

[0014] The driving wheel, the first driven wheel and the telescopic conveying part are connected by a conveyor belt.

[0015] Further, the telescopic conveying part includes a telescopic plate and a second passive wheel;

[0016] The end of the telescopic plate away from the input end and the bottom of the telescopic plate are both provided with a second passive wheel;

[0017] The second passive wheel, the driving wheel, the first passive wheel and the telescopic conveying part are connected through a conveyor belt.

[0018] Further, the telescopic drive assembly includes a slide rail, a slide seat and a telescopic drive member;

[0019] The slide rail is arranged on the bottom plate, and the slide seat is connected with the telescopic conveying part;

[0020] The telescopic driving member is connected to the slide seat and is used for driving the slide seat to slide along the slide rail to drive the telescopic conveying part to move telescopically.

[0021] Further, the conveying drive assembly includes a rotating shaft, a conveyor belt and a conveying drive member;

[0022] The support plate is provided with a bearing hole matched with the rotating shaft, and the driving wheel is fixedly connected to the rotating shaft;

[0023] The conveying drive member is connected with the rotating shaft through a conveyor belt.

[0024] Furthermore, the telescopic conveying device includes at least two groups of conveying mechanisms, and the at least two groups of conveying mechanisms share a set of rotating shafts, conveyor belts and conveying driving components.

[0025] Further, the conveying mechanism includes a mounting plate and a support rod;

[0026] The bottom plate is connected to one end of the support rod, and the other end of the support rod is connected to the mounting plate, and the mounting plate is used for fixed installation at a designated position.

[0027] Furthermore, at least two groups of conveying mechanisms are connected via a connecting plate.

[0028] Furthermore, the telescopic driving member includes any one of a motor, a cylinder and a screw assembly.

[0029] In a second aspect, the present application also provides a silicon wafer conveying system, comprising the telescopic conveying device as described above.

[0030] The beneficial effect of the present application is that the telescopic conveying device of the present application includes at least one group of conveying mechanisms, each conveying mechanism includes a telescopic conveying part, a telescopic driving assembly, a conveying driving assembly and a conveyor belt, the telescopic driving assembly is connected to the telescopic conveying part, and is used to drive the telescopic conveying part to extend and retract, the telescopic conveying part and the conveying driving assembly are connected through a conveyor belt, and alignment guide bars are arranged on both sides of the input end of the conveying mechanism, and the alignment guide bars are used to guide and align the position of the objects to be conveyed entering from the input end. By arranging alignment guide bars on both sides of the input end of the conveying mechanism, the objects are aligned under the guidance of the alignment guide bars when entering from the input end of the conveying mechanism, thereby ensuring the stability and accuracy of the object conveying, and thus ensuring the smooth production of the products. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a structural schematic diagram of an embodiment of the telescopic conveying device provided by the present application;

[0032] Figure 2 is a front view schematic diagram of an embodiment of the telescopic conveying device provided by the present application;

[0033] Figure 3 is a top view schematic diagram of an embodiment of the telescopic conveying device provided by the present application;

[0034] Figure 4 is along Figure 3 Schematic cross-sectional view of the AA line;

[0035] Figure 5 is along Figure 3 Schematic cross-sectional view along line BB. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. Examples of embodiments are shown in the accompanying drawings, in which the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. In addition, it should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model.

[0037] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "left", "right", "horizontal", "top", "bottom", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present invention.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0039] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0041] The disclosure below provides many different embodiments or examples for realizing different structures of the utility model. In order to simplify the disclosure of the utility model, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the utility model. In addition, the utility model can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, and does not indicate the relationship between the various embodiments and / or settings discussed in itself. In addition, the utility model provides various specific examples of processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0042] The telescopic conveying device of the present application includes at least one group of conveying mechanisms, each of which includes a telescopic conveying part, a telescopic driving assembly, a conveying driving assembly and a conveyor belt. The telescopic driving assembly is connected to the telescopic conveying part and is used to drive the telescopic conveying part to extend and retract. The telescopic conveying part and the conveying driving assembly are connected through a conveyor belt. Correction guide bars are arranged on both sides of the input end of the conveying mechanism, and the correction guide bars are used to guide and correct the position of the objects to be conveyed entering from the input end. By arranging correction guide bars on both sides of the input end of the conveying mechanism, the objects are corrected under the guidance of the correction guide bars when entering from the input end of the conveying mechanism, thereby ensuring the stability and accuracy of the object conveying, and thus ensuring the smooth production of the products.

[0043] Embodiment 1

[0044] like Figures 1 to 5 As shown, an embodiment of the present application provides a telescopic conveying device, including at least one group of conveying mechanisms, each conveying mechanism including a telescopic conveying part 100, a telescopic driving assembly 200, a conveying driving assembly 300 and a conveyor belt 400, the telescopic driving assembly 200 is connected to the telescopic conveying part 100, and is used to drive the telescopic conveying part 100 to be telescopic, the telescopic conveying part 100 is connected to the conveying driving assembly 300 through the conveyor belt 400, and alignment guide bars 500 are arranged on both sides of the input end S1 of the conveying mechanism, and the alignment guide bars 500 are used to guide and align the position of the to-be-conveyed parts (not shown) entering from the input end S1.

[0045] During implementation, the conveying mechanism includes an input end S1 and an output end S2, wherein the input end S1 refers to the side where the object to be conveyed is from the previous station to the conveying mechanism, and the output end S2 refers to the side where the object to be conveyed is from the conveying mechanism to the next station.

[0046] Optionally, the telescopic conveying part 100 can be extended and retracted under the drive of the telescopic driving assembly 200, thereby extending or shortening the conveying distance of the conveying mechanism. The telescopic conveying part 100 is connected to the conveying driving assembly 300 through the conveyor belt 400, and the conveying driving assembly 300 drives the conveyor belt 400 to move, thereby driving the conveyed object to move. Exemplarily, the end of the telescopic conveying part 100 can be regarded as the output end S2 of the conveying mechanism. When the telescopic conveying part 100 is retracted, the distance between the input end S1 of the conveying mechanism and the output end S2 of the conveying mechanism is shortened. At this time, the output end S2 of the conveying mechanism corresponds to the first station (not shown in the figure), that is, the conveyed object can be moved to the first station under the drive of the conveyor belt 400. When the telescopic conveying part 100 is extended, the distance between the input end S1 of the conveying mechanism and the output end S2 of the conveying mechanism increases. At this time, the output end S2 of the conveying mechanism corresponds to the second station (not shown in the figure), that is, the conveyed object can be moved to the second station under the drive of the conveyor belt 400.

[0047] It should be noted that the above-mentioned first workstation and second workstation are examples of an embodiment of the present application, rather than specific limitations of the present application. In other embodiments, other workstations or devices for receiving the workpieces to be transported may also be included without limitation.

[0048] Optionally, the object to be conveyed refers to an item that needs to be transported. For example, taking the conveying mechanism provided in the present application applied to a solar cell production system as an example, the object to be conveyed may be a silicon wafer or other solar cell component, without limitation.

[0049] In some embodiments, each conveying mechanism is provided with two parallel conveying belts 400 , which can effectively improve the conveying stability.

[0050] Optionally, both sides of the input end S1 of the conveying mechanism are provided with alignment guide bars 500, which are used to guide and align the position of the conveyed object. Exemplarily, at least a portion of the alignment guide bars 500 gradually changes from thin to thick along a first direction, and the first direction is the transport direction of the conveyor belt, that is, the first direction is from the input end S1 of the conveying mechanism to the output end S2.

[0051] Optionally, one end of the alignment guide bar 500 gradually becomes thicker toward the other end, or part of the alignment guide bar 500 becomes thicker from thin, and the direction of the alignment guide bar 500 from thin to thick is the same as the transportation direction of the conveyor belt 400. In other words, the space between the two alignment guide bars 500 gradually becomes smaller along the transportation direction of the conveyor belt 400, and the narrowest part between the two alignment guide bars 500 is slightly larger than the width of the object to be conveyed, so that the object to be conveyed can be aligned under the guidance of the two alignment guide bars 500.

[0052] The telescopic conveying device of the present application includes at least one group of conveying mechanisms, each of which includes a telescopic conveying part 100, a telescopic driving assembly 200, a conveying driving assembly 300 and a conveyor belt 400. The telescopic driving assembly 200 is connected to the telescopic conveying part 100 and is used to drive the telescopic conveying part 100 to extend and retract. The telescopic conveying part 100 is connected to the conveying driving assembly 300 through the conveyor belt 400. The input end S1 of the conveying mechanism is provided with a correction guide bar 500 on both sides. The correction guide bar 500 is used to guide and correct the position of the object to be conveyed entering from the input end S1. By providing the correction guide bar 500 on both sides of the input end S1 of the conveying mechanism, the object is corrected under the guidance of the correction guide bar 500 when entering from the input end S1 of the conveying mechanism, thereby ensuring the stability and accuracy of the object conveying, and thus ensuring the smooth production of the product.

[0053] In some optional embodiments, the conveying mechanism includes a base plate 611, a fixed plate 612, a support plate 613, a first passive wheel 614 and a driving wheel 615. The fixed plate 612, the support plate 613, the telescopic drive assembly 200 and the conveying drive assembly 300 are all arranged on the base plate 611. The support plate 613 is provided with a first passive wheel 614, and the fixed plate 612 is provided with a driving wheel 615. The driving wheel 615 is connected to the conveying drive assembly 300, and the driving wheel 615, the first passive wheel 614 and the telescopic conveying part 100 are connected via a conveyor belt 400.

[0054] During implementation, a fixing plate 612 and a supporting plate 613 are installed on the bottom plate 611, wherein the supporting plate 613 is used to install and fix the driving wheel 615, and the fixing plate 612 is used to install and fix the first passive wheel 614. The driving wheel 615, the first passive wheel 614 and the telescopic conveying part 100 are connected through the conveyor belt 400. The driving wheel 615, the first passive wheel 614 and the telescopic conveying part 100 cooperate to tension the conveyor belt 400, and the tension state of the conveyor belt 400 is always maintained during the telescopic process of the telescopic conveying part 100, so that the driving wheel 615 can rotate to drive the conveyor belt 400 to rotate synchronously, thereby realizing the function of transporting the objects to be transported, and the structure is simple and reliable.

[0055] In some possible embodiments, several other passive wheels may be installed on the support rod 900, for example, Figure 5 As shown, other passive wheels include passive wheel 616, passive wheel 617, passive wheel 618 and passive wheel 619, and the conveyor belt 400 is wound around passive wheels 616, passive wheel 617, passive wheel 618 and passive wheel 619 so that the conveyor belt 400 and the driving wheel 615 fit tightly, thereby ensuring the stability and reliability of the operation of the conveyor belt 400.

[0056] In some embodiments, the telescopic conveying section 100 includes a telescopic plate 110 and a second passive wheel 120. The second passive wheel 120 is provided at the end of the telescopic plate 110 away from the input end S1 and the bottom of the telescopic plate 110. The second passive wheel 120, the driving wheel 615, the first passive wheel 614 and the telescopic conveying section 100 are connected by a conveyor belt 400.

[0057] During implementation, the end of the telescopic plate 110 away from the input end S1 is the output end S2 of the conveying mechanism, that is, the position of the end of the telescopic plate 110 provided with the second passive wheel 120 can be adjusted through the telescopic movement of the telescopic plate 110, that is, the position of the output end S2 of the output mechanism can be adjusted. The fixed plate 612 and the first passive wheel 614 are located near the output end S2 of the output mechanism, the support plate 613 and the driving wheel 615 are located near the input end S1 of the output mechanism, and the winding method of the conveyor belt 400 is: the conveyor belt 400 passes through the second passive wheel 120 at the end of the telescopic plate 110 from the upper surface of the telescopic plate 110, and then passes through the lower surface of the telescopic plate 110 to pass through the second passive wheel 120 at the bottom of the telescopic plate 110, and the conveyor belt 400 further passes through the first passive wheel 614 and then passes through the driving wheel 615 to extend to the upper surface of the telescopic plate 110 to complete the closed loop connection, and the structure is simple and reliable.

[0058] In some optional embodiments, the telescopic drive assembly 200 includes a slide rail 210, a slide seat 220 and a telescopic drive member, the slide rail 210 is set on the base plate 611, the slide seat 220 is connected to the telescopic conveying part 100, and the telescopic drive member is connected to the slide seat 220 for driving the slide seat 220 to slide along the slide rail 210 to drive the telescopic conveying part 100 to move telescopically.

[0059] During implementation, the slide 220 and the slide rail 210 cooperate to enable the slide 220 to slide along the slide rail 210 under the drive of the telescopic driving member. Since the slide 220 is connected to the telescopic plate 110 of the telescopic conveying part 100, when the slide 220 slides along the slide rail 210, the telescopic plate 110 slides along the slide rail 210 synchronously. The telescopic movement of the telescopic plate 110 is stable and reliable, which effectively improves the transportation stability and ensures product safety.

[0060] In some optional embodiments, the conveying drive assembly 300 includes a rotating shaft 310, a conveyor belt 320 and a conveying drive member 330, the support plate 613 is provided with a bearing hole that cooperates with the rotating shaft 310, the driving wheel 615 is fixedly connected to the rotating shaft 310, and the conveying drive member 330 is connected to the rotating shaft 310 through the conveyor belt 320.

[0061] During implementation, a circular bearing hole is provided on the support plate 613, and the bearing hole can be regarded as the bearing of the rotating shaft 310, or a bearing is installed in the bearing hole. The rotating shaft 310 and the bearing can be rotatably matched, that is, the two ends of the rotating shaft 310 are respectively located on both sides of the support plate 613, wherein the rotating shaft 310 located on one side of the support plate 613 is used for installation and matching with the driving wheel 615, and the rotating shaft 310 located on the other side of the support plate 613 is used for matching and connecting with the conveyor belt 320, and the conveyor belt 320 is connected with the conveying driving member 330. When the conveying driving member 330 drives the conveyor belt 320 to rotate, it drives the rotating shaft 310 to rotate synchronously, and then drives the driving wheel 615 to rotate, and further drives the conveyor belt 400 to rotate, so as to transport the to-be-conveyed parts placed on the conveyor belt 400 to the designated position, and the power transmission structure is simple and reliable, and the operation stability is high.

[0062] In some possible embodiments, the same conveying mechanism includes at least two parallel conveying belts 400, for example, the two conveying belts 400 are respectively located on both sides of the support plate 613, that is, the rotating shafts 310 located on both sides of the support plate 613 are connected to a driving wheel 615, so as to drive the two conveying belts 400 to rotate synchronously. Through the above arrangement, at least two conveying belts 400 of the same conveying mechanism only need one conveying driving member 330, which has a simple structure and can effectively control costs.

[0063] Optionally, the telescopic drive member and the conveying drive member 330 may both adopt any one of a motor, a cylinder and a screw assembly without limitation.

[0064] In some optional embodiments, the telescopic conveying device provided in the present application includes at least two groups of conveying mechanisms, and the at least two groups of conveying mechanisms share a set of rotating shafts 310, conveyor belts 320 and conveying driving components 330.

[0065] During implementation, a bearing hole is provided on the support plate 613 of each set of conveying mechanisms, and is matched with the bearing holes of at least two sets of conveying mechanisms through a rotating shaft 310, and a plurality of driving wheels 615 are correspondingly provided on the rotating shaft 310. Exemplarily, taking two sets of conveying mechanisms as an example, each set of conveying mechanisms includes two conveyor belts 400, and there are four conveyor belts 400 in total, then four driving wheels 615 are correspondingly provided on the rotating shaft 310, and the four driving wheels 615 are correspondingly connected to the four conveyor belts 400, so that the conveyor belts 400 can be synchronously driven to rotate, reducing the hardware cost investment.

[0066] In some embodiments, two adjacent groups of conveying mechanisms may share a common alignment guide bar 500 to reduce hardware investment.

[0067] In some possible embodiments, at least two groups of conveying mechanisms are connected by a connecting plate 700, which can ensure the structural strength between the at least two groups of conveying mechanisms and improve the operating stability of the telescopic conveying device.

[0068] In some embodiments, the conveying mechanism provided in the present application includes a mounting plate 800 and a support rod 900, the base plate 611 is connected to one end of the support rod 900, and the other end of the support rod 900 is connected to the mounting plate 800, and the mounting plate 800 is used to be fixedly installed at a designated position.

[0069] During implementation, the base plate 611 is fixedly installed at a designated position, such as on the bottom surface, through the support rod 900 and the mounting plate 800. It can also be adapted and installed and connected with other devices or components through the support rod 900 and the mounting plate 800 to be associated with other devices or components in production, so as to make production smoother and ensure production efficiency.

[0070] Embodiment 2

[0071] In some optional embodiments, the present application also provides a silicon wafer conveying system, including the telescopic conveying device as described above.

[0072] Those skilled in the art can clearly understand that, for the convenience and simplicity of description, the structure and implementation principle of the silicon wafer conveying system described above can refer to the corresponding structure and implementation principle in the aforementioned embodiment 1, and will not be repeated here.

[0073] The telescopic conveying device of the present application includes at least one group of conveying mechanisms, each of which includes a telescopic conveying part 100, a telescopic driving assembly 200, a conveying driving assembly 300 and a conveyor belt 400. The telescopic driving assembly 200 is connected to the telescopic conveying part 100 and is used to drive the telescopic conveying part 100 to extend and retract. The telescopic conveying part 100 is connected to the conveying driving assembly 300 through the conveyor belt 400. The input end S1 of the conveying mechanism is provided with a correction guide bar 500 on both sides. The correction guide bar 500 is used to guide and correct the position of the object to be conveyed entering from the input end S1. By providing the correction guide bar 500 on both sides of the input end S1 of the conveying mechanism, the object is corrected under the guidance of the correction guide bar 500 when entering from the input end S1 of the conveying mechanism, thereby ensuring the stability and accuracy of the object conveying, and thus ensuring the smooth production of the product.

[0074] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A telescopic conveying device, characterized in that: It comprises at least one set of conveying mechanisms, each of which comprises a telescopic conveying portion, a telescopic driving assembly, a conveying driving assembly and a conveying belt; The telescopic driving assembly is connected to the telescopic conveying part, and is used to drive the telescopic conveying part to extend and retract; The telescopic conveying part is connected to the conveying drive assembly through the conveying belt; Alignment guide bars are arranged on both sides of the input end of the conveying mechanism, and the alignment guide bars are used to guide and align the position of the workpiece to be conveyed entering from the input end.

2. The telescopic conveying device according to claim 1, characterized in that: At least a portion of the return guide bar gradually changes from thin to thick along a first direction, and the first direction is a transport direction of the conveyor belt.

3. The telescopic conveying device according to claim 1, characterized in that: The conveying mechanism includes a bottom plate, a fixing plate, a supporting plate, a first passive wheel and a driving wheel; The fixing plate, the supporting plate, the telescopic driving assembly and the conveying driving assembly are all arranged on the bottom plate; The support plate is provided with the first passive wheel, the fixed plate is provided with the driving wheel, and the driving wheel is connected to the conveying driving assembly; The driving wheel, the first passive wheel and the telescopic conveying part are connected through the conveying belt.

4. The telescopic conveying device according to claim 3, characterized in that: The telescopic conveying part comprises a telescopic plate and a second passive wheel; The second passive wheel is disposed at the end of the telescopic plate away from the input end and at the bottom of the telescopic plate; The second passive wheel, the driving wheel, the first passive wheel and the telescopic conveying part are connected by the conveying belt.

5. The telescopic conveying device according to claim 3, characterized in that: The telescopic drive assembly comprises a slide rail, a slide seat and a telescopic drive member; The slide rail is arranged on the bottom plate, and the slide seat is connected to the telescopic conveying part; The telescopic driving member is connected to the slide seat and is used to drive the slide seat to slide along the slide rail to drive the telescopic conveying part to move telescopically.

6. The telescopic conveying device according to claim 3, characterized in that: The conveying drive assembly includes a rotating shaft, a conveyor belt and a conveying drive member; The support plate is provided with a bearing hole matched with the rotating shaft, and the driving wheel is fixedly connected to the rotating shaft; The conveying driving member is connected to the rotating shaft through the conveyor belt.

7. The telescopic conveying device according to claim 6, characterized in that: The telescopic conveying device comprises at least two groups of conveying mechanisms, and at least two groups of conveying mechanisms share a set of rotating shafts, conveyor belts and conveying driving components.

8. The telescopic conveying device according to claim 6, characterized in that: The conveying mechanism includes a mounting plate and a support rod; The bottom plate is connected to one end of the support rod, and the other end of the support rod is connected to the mounting plate, and the mounting plate is used for fixed installation at a designated position.

9. The telescopic conveying device according to claim 7, characterized in that: At least two groups of the conveying mechanisms are connected via a connecting plate.

10. The telescopic conveying device according to claim 5, characterized in that: The telescopic driving component includes any one of a motor, a cylinder and a screw assembly.

11. A silicon wafer conveying system, characterized in that: It comprises the telescopic conveying device as claimed in any one of claims 1 to 10.

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