Novel electrostatic chuck

Abstract

The utility model relates to the technical field of electrostatic chucks, and discloses a novel electrostatic chuck which comprises a square frame and an electrostatic chuck body fixedly installed on the inner side of the square frame, a protective shell is arranged on the upper side of the square frame, a protective groove is formed in the bottom wall face of the protective shell, and a cleaning mechanism is arranged in the protective groove. The cleaning mechanism comprises a cleaning transmission belt arranged in the protection groove, and cleaning dry cloth and cleaning wet cloth which are fixedly mounted at the bottom end of the cleaning transmission belt, and a driving mechanism for driving the protection shell to move left and right is arranged in the driving rectangular cavity; the driving mechanism comprises two driving rotating rods rotationally connected with the left side and the right side of the interior of the driving rectangular cavity and two driving transmission belts arranged on the front side and the rear side of the interior of the driving rectangular cavity. The cleaning mechanism and the driving mechanism are arranged, so that the cleaning dry cloth and the cleaning wet cloth are prevented from being polluted by foreign matters such as external dust, the service time of the cleaning dry cloth and the cleaning wet cloth is prolonged, the service effect of the cleaning wet cloth is improved, and the use convenience of the equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of electrostatic chucks, in particular to a novel electrostatic chuck. Background Art

[0002] After retrieval, the application number 202320607387.1 discloses a novel semiconductor electrostatic chuck, which includes an electrostatic chuck body. A square frame is arranged on the outer surface of the electrostatic chuck body. Sliding grooves are symmetrically opened at the upper end of the square frame. Threaded rods are arranged in the sliding grooves. The left end of the threaded rod is rotatably connected to the inner wall of the sliding groove. The right end of the threaded rod passes through the square frame. A sprocket is installed at the right end of the threaded rod. Chains are sleeved on the outer surfaces of the two sprockets. A threaded sleeve is sleeved on the outer surface of the threaded rod. An electric telescopic rod is installed at the upper end of the threaded sleeve. An L-shaped plate is installed at the upper end of the electric telescopic rod. A moving plate is arranged above the square frame. Two L-shaped plates are fixedly connected to the side surface of the moving plate.

[0003] During the use of the novel semiconductor electrostatic chuck in this patent application, by installing a wet cloth and a dry cloth at the lower end of the moving plate and using a motor to drive the wet cloth and the dry cloth on the moving plate to move to clean the upper end surface of the electrostatic chuck body. However, during such use, since the wet cloth and the dry cloth are exposed to the outside, they are easily contaminated by foreign matters such as dust in the outside world, which not only affects the cleaning effect of the wet cloth and the dry cloth on the electrostatic chuck body, but also increases the maintenance frequency of the wet cloth and the dry cloth, bringing inconvenience to the use of this equipment. Therefore, we propose a novel electrostatic chuck. Summary of the Utility Model

[0004] The utility model mainly solves the technical problems existing in the above-mentioned prior art and provides a novel electrostatic chuck.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme. The novel electrostatic chuck includes a square frame and an electrostatic chuck body fixedly installed inside the square frame. A protective housing is arranged above the square frame. A protective groove is opened on the bottom wall surface of the protective housing. A cleaning mechanism is arranged inside the protective groove. The cleaning mechanism includes a cleaning drive belt arranged inside the protective groove and a cleaning dry cloth and a cleaning wet cloth fixedly installed at the bottom end of the cleaning drive belt. A driving rectangular cavity is opened inside the square frame. A driving mechanism for driving the protective housing to move left and right is arranged inside the driving rectangular cavity. The driving mechanism includes two driving rotating rods rotatably connected to the left and right sides inside the driving rectangular cavity and two driving drive belts arranged on the front and rear sides inside the driving rectangular cavity.

[0006] Further, two cleaning drive rollers are rotatably connected to the left and right sides inside the cavity of the protective groove, and the cleaning drive belt is connected to the outer sides of the two cleaning drive rollers.

[0007] Furthermore, a cleaning motor is fixedly mounted on the front wall of the protective shell, and an output end of the cleaning motor extends into the protective groove and is fixedly mounted to the front end of the cleaning drive roller located at the right side.

[0008] Furthermore, the dry cleaning cloth is arranged at the left side of the wet cleaning cloth.

[0009] Furthermore, Velcro components are fixedly mounted on the top of both the dry cleaning cloth and the wet cleaning cloth and the bottom wall of the cleaning transmission belt.

[0010] Furthermore, four driving transmission wheels are fixedly installed at the front and rear ends of the two driving rotating rods, and the left and right ends of the two driving transmission belts are respectively connected to the outer wall surfaces of the driving transmission wheels at corresponding positions.

[0011] Furthermore, two linear through grooves are symmetrically provided on the front and rear sides of the top wall of the driving rectangular cavity, and two connecting plates fixedly installed on the top ends of the two driving transmission belts are provided inside the two linear through grooves. The top ends of the two connecting plates are fixedly installed at positions corresponding to the bottom wall of the protective shell.

[0012] Furthermore, a driving motor is fixedly installed on the left side of the front wall of the square frame, and the front end of the driving rotating rod located on the left side penetrates the front inner wall of the driving rectangular cavity and is fixedly installed with the output end of the driving motor.

[0013] Furthermore, the top side walls of the two driving transmission belts are in close contact with the top inner wall of the driving rectangular cavity and correspond to the positions of the two linear through grooves.

[0014] Beneficial Effects

[0015] The utility model provides a novel electrostatic chuck, which has the following beneficial effects:

[0016] 1. The novel electrostatic suction cup is provided with a cleaning mechanism and a driving mechanism. When it is necessary to clean the upper surface of the electrostatic suction cup body, the output end of the driving motor is controlled to drive the driving rotating rod to rotate. The driving rotating rod drives the top ends of the two driving transmission belts to move to the right synchronously through the driving transmission wheel. The top ends of the two driving transmission belts drive the protective shell to move to the right through the two connecting plates. The protective shell drives the cleaning dry cloth and the cleaning wet cloth to move to the right along the upper surface of the electrostatic suction cup body, and then the upper surface of the electrostatic suction cup body is cleaned. When the cleaning dry cloth and the cleaning wet cloth are in an idle state, the cleaning motor is controlled to drive the cleaning transmission roller to rotate, forcing the cleaning transmission belt connected to the cleaning transmission roller to drive the cleaning dry cloth and the cleaning wet cloth to move to the inside of the protective groove to form protection, so as to prevent foreign objects such as dust from outside from contaminating the cleaning dry cloth and the cleaning wet cloth, prolong the use time and effect of the cleaning dry cloth and the cleaning wet cloth, and improve the convenience of using the equipment. The cleaning dry cloth and the cleaning wet cloth are fixedly installed with the cleaning transmission belt through a Velcro assembly, which is convenient for removing and replacing the cleaning dry cloth and the cleaning wet cloth, and convenient for the staff to perform maintenance operations on the cleaning dry cloth and the cleaning wet cloth.

[0017] 2. The new electrostatic suction cup is provided with a driving transmission belt. Since the two driving transmission belts are in contact with the top inner wall of the driving rectangular cavity, the two linear grooves are blocked to prevent foreign matter such as external dust from entering the driving rectangular cavity through the two linear grooves and affecting the use of the device, thereby extending the convenience of using the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The structures, proportions, sizes, etc. illustrated in this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the conditions under which the utility model can be implemented, so they have no substantial technical significance.

[0019] Figure 1 This is a schematic diagram of the structure of the novel electrostatic chuck of the utility model;

[0020] Figure 2 It is a cross-sectional view of the cleaning mechanism of the utility model;

[0021] Figure 3 It is a cross-sectional view of the driving mechanism of the utility model.

[0022] Legend:

[0023] 10. Square frame; 11. Electrostatic suction cup body; 12. Protective shell; 13. Protective groove; 14. Cleaning drive belt; 15. Cleaning drive roller; 16. Cleaning dry cloth; 17. Cleaning wet cloth; 18. Velcro assembly; 19. Driving rectangular cavity; 20. Driving rotating rod; 21. Driving drive wheel; 22. Driving drive belt; 23. Linear through groove; 24. Connecting plate; 25. Driving motor; 26. Cleaning motor. DETAILED DESCRIPTION

[0024] New electrostatic chucks, such as Figure 1-3 As shown, it includes a square frame 10 and an electrostatic chuck body 11 fixedly installed inside the square frame 10. The electrostatic chuck body 11 is a prior art and is not described in detail. A protective shell 12 is arranged on the upper side of the square frame 10. A protective groove 13 is provided on the bottom wall of the protective shell 12. A cleaning mechanism is arranged inside the protective groove 13. The cleaning mechanism includes a cleaning transmission belt 14 arranged inside the protective groove 13 and a cleaning dry cloth 16 and a cleaning wet cloth 17 fixedly installed at the bottom end of the cleaning transmission belt 14. Two cleaning transmission rollers 15 are rotatably connected to the left and right sides of the inner cavity of the protective groove 13. The cleaning drive belt 14 is connected to the outside of the two cleaning drive rollers 15. A cleaning motor 26 is fixedly installed on the front wall of the protective shell 12. The output end of the cleaning motor 26 extends into the protective groove 13 and is fixedly installed with the front end of the cleaning drive roller 15 located on the right side. The cleaning dry cloth 16 is arranged on the left side of the cleaning wet cloth 17. The top of the cleaning dry cloth 16 and the cleaning wet cloth 17 and the bottom wall of the cleaning drive belt 14 are fixedly installed with a Velcro assembly 18. A driving rectangular cavity 19 is opened inside the square frame 10. The driving rectangular cavity 19 is arranged inside There is a driving mechanism for driving the protective shell 12 to move left and right, and the driving mechanism includes two driving rotating rods 20 rotatably connected to the left and right sides of the driving rectangular cavity 19 and two driving transmission belts 22 arranged on the front and rear sides of the driving rectangular cavity 19. Four driving transmission wheels 21 are fixedly installed at the front and rear ends of the two driving rotating rods 20. The left and right ends of the two driving transmission belts 22 are respectively connected to the outer wall surfaces of the driving transmission wheels 21 at corresponding positions. Two linear through grooves 23 are symmetrically formed on the front and rear sides of the top wall of the driving rectangular cavity 19. The two linear through grooves 23 are symmetrically formed on the front and rear sides of the top wall of the driving rectangular cavity 19. Two connecting plates 24 fixedly installed with the top ends of the two driving belts 22 are arranged inside the linear through grooves 23. The top ends of the two connecting plates 24 are fixedly installed at positions corresponding to the bottom wall of the protective shell 12. A driving motor 25 is fixedly installed at the left side of the front wall of the square frame 10. The front end of the driving rotating rod 20 located on the left side passes through the front inner wall of the driving rectangular cavity 19 and is fixedly installed at the output end of the driving motor 25. The top side walls of the two driving belts 22 are in contact with the top inner wall of the driving rectangular cavity 19 and correspond to the positions of the two linear through grooves 23.

[0025] The working principle of the utility model is as follows: when it is necessary to clean the upper surface of the electrostatic suction cup body 11, the output end of the control driving motor 25 drives the driving rotating rod 20 to rotate, and the driving rotating rod 20 drives the top ends of the two driving transmission belts 22 to move to the right synchronously through the driving transmission wheel 21, and the top ends of the two driving transmission belts 22 drive the protective shell 12 to move to the right through the two connecting plates 24, and the protective shell 12 drives the cleaning dry cloth 16 and the cleaning wet cloth 17 to move to the right along the upper surface of the electrostatic suction cup body 11, thereby cleaning the upper surface of the electrostatic suction cup body 11; when the cleaning dry cloth 16 and the cleaning wet cloth 17 are in an idle state, the cleaning motor 26 is controlled to drive the cleaning transmission roller 15 to rotate, forcing the cleaning transmission belt 14 connected to the cleaning transmission roller 15 to drive the cleaning dry cloth 16 and the cleaning wet cloth 17 to move to the right. The cloth 17 moves to the inside of the protective groove 13 to form a protection to prevent foreign matter such as external dust from contaminating the cleaning dry cloth 16 and the cleaning wet cloth 17, thereby extending the service time and effect of the cleaning dry cloth 16 and the cleaning wet cloth 17 and improving the convenience of using the device. The cleaning dry cloth 16 and the cleaning wet cloth 17 are fixedly installed with the cleaning drive belt 14 through the Velcro assembly 18, which is convenient for removing and replacing the cleaning dry cloth 16 and the cleaning wet cloth 17, and convenient for the staff to perform maintenance operations on the cleaning dry cloth 16 and the cleaning wet cloth 17; because the two driving drive belts 22 are in contact with the top inner wall surface of the driving rectangular cavity 19, the two linear through grooves 23 are blocked to prevent foreign matter such as external dust from entering the driving rectangular cavity 19 through the two linear through grooves 23 to affect the use of the device and extend the convenience of using the device.

[0026] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. The technicians in this industry should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model will have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A novel electrostatic chuck, comprising a square frame (10) and an electrostatic chuck body (11) fixedly mounted inside the square frame (10), characterized in that: A protective shell (12) is arranged on the upper side of the square frame (10), a protective groove (13) is provided on the bottom wall of the protective shell (12), a cleaning mechanism is arranged inside the protective groove (13), the cleaning mechanism comprises a cleaning transmission belt (14) arranged inside the protective groove (13) and a cleaning dry cloth (16) and a cleaning wet cloth (17) fixedly installed at the bottom end of the cleaning transmission belt (14), a driving rectangular cavity (19) is arranged inside the square frame (10), a driving mechanism for driving the protective shell (12) to move left and right is arranged inside the driving rectangular cavity (19), the driving mechanism comprises two driving rotating rods (20) rotatably connected to the left and right sides of the driving rectangular cavity (19) and two driving transmission belts (22) arranged on the front and rear sides of the driving rectangular cavity (19).

2. The novel electrostatic chuck according to claim 1, characterized in that: Two cleaning drive rollers (15) are rotatably connected to the left and right sides of the inner cavity of the protection groove (13); a cleaning drive belt (14) is connected to the outer sides of the two cleaning drive rollers (15); a cleaning motor (26) is fixedly installed on the front wall surface of the protection shell (12); an output end of the cleaning motor (26) extends into the interior of the protection groove (13) and is fixedly installed to the front end of the cleaning drive roller (15) located at the right side.

3. The novel electrostatic chuck according to claim 1, characterized in that: The dry cleaning cloth (16) is arranged at the left side of the wet cleaning cloth (17), and the top ends of both the dry cleaning cloth (16) and the wet cleaning cloth (17) and the bottom wall of the cleaning transmission belt (14) are fixedly mounted with Velcro components (18).

4. The novel electrostatic chuck according to claim 1, characterized in that: Four driving transmission wheels (21) are fixedly mounted at the front and rear ends of the two driving rotating rods (20), and the left and right ends of the two driving transmission belts (22) are respectively connected to the outer wall surfaces of the driving transmission wheels (21) at corresponding positions.

5. The novel electrostatic chuck according to claim 1, characterized in that: Two linear through grooves (23) are symmetrically formed on the front and rear sides of the top wall of the driving rectangular cavity (19), and two connecting plates (24) are provided inside the two linear through grooves (23) and fixedly mounted on the top ends of the two driving transmission belts (22). The top ends of the two connecting plates (24) are fixedly mounted at positions corresponding to the bottom wall of the protective housing (12).

6. The novel electrostatic chuck according to claim 1, characterized in that: A driving motor (25) is fixedly mounted on the left side of the front wall of the square frame (10), and the front end of the driving rotating rod (20) located on the left side penetrates the front inner wall of the driving rectangular cavity (19) and is fixedly mounted on the output end of the driving motor (25).

7. The novel electrostatic chuck according to claim 1, characterized in that: The top side wall surfaces of the two driving transmission belts (22) are in close contact with the top inner wall surface of the driving rectangular cavity (19) and correspond to the positions of the two linear through grooves (23).

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